A molecular pump disassembly tool

Abstract

The utility model discloses a kind of molecular pump assembly and disassembly tools, it is related to molecular pump assembly and disassembly technical field, including support main body, the top of support main body is fixedly installed with mounting plate, the top of mounting plate is fixedly installed with crosspiece, the bottom of crosspiece is rotatably installed with lead screw, the outside of lead screw is threaded and is sleeved with nut, one side of nut is fixedly connected with moving plate, one side of moving plate is fixedly connected with lifting plate, the top of lifting plate is fixedly connected with guide arm, one end of guide arm is movably connected with fixing ring;The utility model is by adjustable lifting device to the required height of lifting molecular pump, the suspension and attitude adjustment of pump body are realized using guide arm and fixing ring, so that pump body flange and cavity flange are accurately aligned.In installation process, caster auxiliary tool is accurately positioned, counterweight balances load, and overturning risk is avoided.

Description

Technical Field

[0001] This specification relates to the field of molecular pump assembly and disassembly technology, and more particularly to a molecular pump assembly and disassembly tool. Background Technology

[0002] A molecular pump is a type of vacuum pump that uses a high-speed rotating rotor to transfer momentum to gas molecules, thereby directionally driving the gas molecules from the pump inlet to the outlet to achieve vacuum. It is one of the most widely used core devices in high vacuum and ultra-high vacuum applications. In ion implanters used in chip manufacturing, molecular pumps are also a crucial component in establishing a high vacuum, essential for ensuring precise ion beam transmission and preventing contamination. Therefore, extremely high requirements are placed on the quality, quantity, and installation process of molecular pumps. During equipment commissioning, manual installation of molecular pumps is difficult and has encountered numerous problems.

[0003] In traditional commissioning processes, due to the large weight of molecular pumps, especially when using heavy models, assembly is very difficult by manually lifting them. When the assembly time is long, it is easy for the pump to lose its grip, which can lead to accidents. Over long periods of operation, assembly personnel are prone to fatigue, which reduces installation accuracy and safety.

[0004] To address this issue, we designed a molecular pump assembly / disassembly tool. Utility Model Content

[0005] In view of this, the purpose of this utility model is to provide a molecular pump assembly and disassembly tool to solve the problem.

[0006] To achieve the above objectives, this utility model provides a molecular pump assembly and disassembly tool, comprising a support body, an mounting plate fixedly mounted on the top of the support body, a horizontal plate fixedly mounted on the top of the mounting plate, a lead screw rotatably mounted on the bottom of the horizontal plate, a nut threaded onto the outer side of the lead screw, a movable plate fixedly connected to one side of the nut, a lifting plate fixedly connected to one side of the movable plate, a guide arm fixedly connected to the top of the lifting plate, and a fixing ring movably connected to one end of the guide arm.

[0007] Furthermore, a cylinder is fixedly connected to one side of the fixing ring, a limiting post is fixedly connected to one end of the cylinder, and a circular hole is opened on one side of the guide arm, with the limiting post rotatably inserted into the inside of the circular hole.

[0008] Furthermore, a slide rail is fixedly installed on one side of the mounting plate, and a slider is slidably connected to the outside of the slide rail, with the slider being fixedly connected to the movable plate.

[0009] Furthermore, a mounting block is fixedly installed on the top of the horizontal plate, and a handwheel is rotatably installed on the top of the mounting block. The handwheel is fixedly connected to the lead screw via a rotating shaft.

[0010] Furthermore, casters are movably installed at the bottom of the support body, and a counterweight is fixedly installed on one side of the top of the support body.

[0011] Furthermore, a fixing seat is fixedly installed on one side of the bottom of the mounting plate, and the lead screw is rotatably installed on the top of the fixing seat.

[0012] As can be seen from the above, the beneficial effects provided by this utility model are:

[0013] 1. By turning the handwheel, the lead screw is driven to rotate, thereby adjusting the vertical height of the lifting plate until the molecular pump is raised to the required height. The guide arm and fixing ring are used to suspend and adjust the attitude of the pump body, so that the pump body flange and the cavity flange are precisely aligned. During the installation process, the caster auxiliary tool is precisely positioned, and the counterweight balances the load to avoid the risk of tipping over. Attached Figure Description

[0014] To more clearly illustrate the technical solutions in one or more embodiments of this specification or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only one or more embodiments of this specification. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0015] Figure 1 This is a three-dimensional structural diagram of the overall external structure of this utility model;

[0016] Figure 2 This is a three-dimensional structural diagram of the connection between the slide rail and the slider of this utility model;

[0017] Figure 3 This is a side view of the three-dimensional structure of the present invention;

[0018] Figure 4 This is a partial side view of the present invention.

[0019] In the diagram: 1. Support body; 2. Mounting plate; 3. Counterweight; 4. Casters; 5. Horizontal plate; 6. Lead screw; 7. Fixed base; 8. Nut; 9. Moving plate; 10. Slide rail; 11. Slider; 12. Lifting plate; 13. Guide arm; 14. Round hole; 15. Fixing ring; 16. Cylinder; 17. Mounting block; 18. Handwheel. Detailed Implementation

[0020] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to specific embodiments and accompanying drawings.

[0021] It should be noted that, unless otherwise defined, the technical or scientific terms used in the embodiments of this utility model should have the ordinary meaning understood by one of ordinary skill in the art to which this disclosure pertains. The terms "first," "second," and similar terms used in this disclosure do not indicate any order, quantity, or importance, but are merely used to distinguish different components. Terms such as "comprising" or "including" mean that the element or object preceding the word encompasses the elements or objects listed following the word and their equivalents, without excluding other elements or objects. Terms such as "connected" or "linked" are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. Terms such as "upper," "lower," "left," and "right" are used only to indicate relative positional relationships; when the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0022] Please see Figure 1-4 This utility model provides a technical solution: a molecular pump assembly and disassembly tool, including a support body 1, an mounting plate 2 fixedly mounted on the top of the support body 1, a horizontal plate 5 fixedly mounted on the top of the mounting plate 2, a lead screw 6 rotatably mounted on the bottom of the horizontal plate 5, a nut 8 threaded onto the outer side of the lead screw 6, a movable plate 9 fixedly connected to one side of the nut 8, a lifting plate 12 fixedly connected to one side of the movable plate 9, a guide arm 13 fixedly connected to the top of the lifting plate 12, a fixing ring 15 movably connected to one end of the guide arm 13, a cylinder 16 fixedly connected to one side of the fixing ring 15, a limit post fixedly connected to one end of the cylinder 16, a circular hole 14 opened on one side of the guide arm 13, the limit post rotatably inserted into the inside of the circular hole 14, an mounting block 17 fixedly mounted on the top of the horizontal plate 5, a handwheel 18 rotatably mounted on the top of the mounting block 17, and the handwheel 18 fixedly connected to the lead screw 6 via a rotating shaft.

[0023] It should be noted that the main body 1 of the bracket is used to support all other structural components and maintain stability. It is welded from high-strength aluminum alloy and has sufficient rigidity and resistance to deformation. The adjustable lifting device includes a lead screw 6, a nut 8, a lifting plate 12, and a guide arm 13, which is used to adjust the installation height. The height adjustment is achieved through the transmission of the lead screw 6, allowing for fine-tuning and precise positioning of the installation position during installation. The lifting height can be adjusted to any height within the range of 0 to 1.5 meters to meet the needs of different installation conditions. It is also equipped with a self-locking function to ensure that it will not slide down due to gravity when stopped at any position, ensuring operational safety.

[0024] In practice, first move the main body 1 of the support frame to the vicinity of the molecular pump installation position, adjust the moving plate 9 to its minimum height, and insert the upper annular groove of the molecular pump into the fixing ring 15 and tighten it to ensure a stable connection. Then, fine-tune the positioning using the casters 4 and lock the casters 4 to fix the tool position. The operator rotates the drive handwheel 18, causing the lead screw 6 to rotate, thereby adjusting the height of the lifting plate 12 and the guide arm 13, allowing the molecular pump to slowly rise to the vicinity of the installation surface. Then, rotate the fixing ring 15 to align with the installation angle and flange. After alignment, minor adjustments can be made to ensure that the angle, height, and plane distance are completely accurate. At this point, lock all connections to ensure that the molecular pump's posture is stable and without deviation. Subsequently, the operator assembles and tightens the screws between the molecular pump flange and the cavity flange. After confirming that the operation is correct, the fixing ring 15 is gradually removed, the guide arm 13 and the lifting plate 12 are lowered, the assembly and disassembly tools are removed, and the overall installation is completed. The fixing ring 15 is used to engage with the annular groove on the upper part of the molecular pump body to achieve radial positioning and suspension support. After its installation, the molecular pump can swing at any angle to find the installation angle. Its inner side is inlaid with a flexible anti-slip layer to avoid scratching the surface of the pump body. The guide arm 13 is mounted on the lifting plate 12 and is used to connect the lifting device and the fixing ring 15.

[0025] See Figure 1-4 The bottom of the support body 1 is movably equipped with casters 4, and the top side of the support body 1 is fixedly equipped with a counterweight 3. By setting the counterweight 3, which is installed at the rear end of the support body 1, it is used to balance and support the load, prevent the tool from tilting forward, and ensure the overall center of gravity is stable. The casters 4 are located at the bottom of the support body 1 to adjust the plane position and have a locking function, which facilitates the flexible movement and precise positioning of the tool.

[0026] See Figure 1-4 A slide rail 10 is fixedly installed on one side of the mounting plate 2, and a slider 11 is slidably connected to the outside of the slide rail 10. The slider 11 is fixedly connected to the moving plate 9.

[0027] In specific implementation, based on the above implementation, the cross-sectional shape of the slide rail 10 is set to "I" shape, and the inner diameter of the slider 11 matches the outer diameter of the slide rail 10, which facilitates the improvement of the sliding stability of the moving plate 9 and the nut 8, and guides the nut 8.

[0028] See Figure 1-4 A mounting base 7 is fixedly installed on one side of the bottom of the mounting plate 2. The lead screw 6 is rotatably installed on the top of the mounting base 7. By setting the mounting base 7, the lead screw 6 is rotatably inserted into the top of the mounting base 7, which facilitates the improvement of the stability of the lead screw 6 rotation.

[0029] Working Principle: In use, first move the main body 1 of the support frame to the vicinity of the molecular pump installation position. Adjust the moving plate 9 to its minimum height, insert the upper annular groove of the molecular pump into the fixing ring 15 and tighten it to ensure a stable connection. Then, fine-tune the positioning using the casters 4 and lock them to fix the tool position. The operator rotates the drive handwheel 18, causing the lead screw 6 to rotate, thereby adjusting the height of the lifting plate 12 and the guide arm 13, allowing the molecular pump to slowly rise to the vicinity of the installation surface. Then, rotate the fixing ring 15 to align the installation angle with the flange. After alignment, minor adjustments can be made to ensure the angle, height, and plane distance are completely accurate. At this point, tighten all connections to ensure the molecular pump's posture is stable and without deviation. Subsequently, the operator assembles and tightens the screws between the molecular pump flange and the cavity flange. After confirming the operation is correct, gradually remove the fixing ring 15, lower the guide arm 13 and the lifting plate 12, remove the assembly and disassembly tools, and complete the overall installation.

[0030] If disassembly is required, raise the lifting plate 12 to an appropriate height, align the retaining ring 15 with the upper annular groove of the molecular pump and tighten it, then remove the connecting bolts between the molecular pump flange and the cavity flange, slowly lower the lifting plate 12, so that the pump body can be smoothly removed from the mounting surface and moved to a safe position, and the molecular pump can be removed from the retaining ring 15. At this time, the entire disassembly process is safe and orderly, avoiding the risk of damage caused by the pump body shaking or tilting.

[0031] Those skilled in the art should understand that the discussion of any of the above embodiments is merely exemplary and is not intended to imply that the scope of this disclosure (including the claims) is limited to these examples; within the scope of this invention, the technical features of the above embodiments or different embodiments can also be combined, the steps can be implemented in any order, and there are many other variations of different aspects of this invention as described above, which are not provided in the details for the sake of brevity.

[0032] The embodiments of this utility model are intended to cover all such substitutions, modifications, and variations that fall within the broad scope of the appended claims. Therefore, any omissions, modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A molecular pump assembly / disassembly tool, comprising a support body (1), characterized in that, A mounting plate (2) is fixedly installed on the top of the main body (1) of the bracket. A horizontal plate (5) is fixedly installed on the top of the mounting plate (2). A lead screw (6) is rotatably installed on the bottom of the horizontal plate (5). A nut (8) is threaded onto the outer side of the lead screw (6). A moving plate (9) is fixedly connected to one side of the nut (8). A lifting plate (12) is fixedly connected to one side of the moving plate (9). A guide arm (13) is fixedly connected to the top of the lifting plate (12). A fixing ring (15) is movably connected to one end of the guide arm (13).

2. The molecular pump assembly / disassembly tool as described in claim 1, characterized in that: A cylinder (16) is fixedly connected to one side of the fixed ring (15), and a limiting post is fixedly connected to one end of the cylinder (16). A circular hole (14) is opened on one side of the guide arm (13), and the limiting post is rotatably inserted into the inside of the circular hole (14).

3. The molecular pump assembly / disassembly tool as described in claim 2, characterized in that: A slide rail (10) is fixedly installed on one side of the mounting plate (2), and a slider (11) is slidably connected to the outside of the slide rail (10). The slider (11) is fixedly connected to the moving plate (9).

4. The molecular pump assembly / disassembly tool as described in claim 3, characterized in that: A mounting block (17) is fixedly installed on the top of the horizontal plate (5), and a handwheel (18) is rotatably installed on the top of the mounting block (17). The handwheel (18) is fixedly connected to the lead screw (6) through a rotating shaft.

5. A molecular pump assembly / disassembly tool as described in claim 4, characterized in that: Casters (4) are movably installed at the bottom of the support body (1), and a counterweight (3) is fixedly installed on one side of the top of the support body (1).

6. The molecular pump assembly / disassembly tool as described in claim 5, characterized in that: A mounting base (7) is fixedly installed on one side of the bottom of the mounting plate (2), and the lead screw (6) is rotatably installed on the top of the mounting base (7).

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