A wafer scriber workbench leveling mechanism

Abstract

The utility model relates to the technical field of scriber, disclose a scriber workstation leveling mechanism, including leveling bottom plate and motor support seat, between motor support seat is installed above leveling bottom plate through three point support, one point passes through fixed assembly and can be detached connection, and the other two points pass through adjusting assembly cooperation locking bolt and can be detached connection, and adjusting assembly includes adjusting screw bush, adjusting screw bush is connected in the inner chamber of motor support seat, and adjusting screw bush one end is arranged with the matching arc convex of arc recess on bottom plate gasket top. The utility model, adopt three point support, adjust the other two points through fixing a point, reach the work surface level of adjustment, the contact surface of bottom plate gasket and spherical washer and adjusting screw bush and bottom plate gasket all adopt arc design to when motor support seat is inclined, the stress of this point is still perpendicular to arc surface, can prevent motor support seat from deforming because of uneven stress.

Description

Technical Field

[0001] This utility model relates to the field of dicing machine technology, specifically to a dicing machine worktable leveling mechanism. Background Technology

[0002] Dicing machines, as key precision equipment in semiconductor manufacturing and electronic component processing, are widely used for cutting and processing materials such as silicon integrated circuits, sapphire, and solar cells. Their core function is to divide substrates such as wafers into independent devices. Dicing accuracy directly determines the yield rate. Ensuring accuracy requires attention to the worktable, the theta axis, and the spindle. Traditional worktable leveling methods include grinding and bolt adjustment. Grinding adjustment involves adjusting the height by grinding support pads, ring-shaped fixing seats, and other components, requiring repeated disassembly, measurement, and grinding, often taking several hours for a single leveling operation. Bolt adjustment involves adjusting the level of the motor support, thereby changing the worktable's level. However, during operation, the worktable's level can change due to operating conditions. When the worktable tilts, the three-point fixing bolts are locked to the motor support, causing deformation of the motor support. This deformation puts stress on the components, affecting the accuracy of other parts. Similarly, long-term deformation due to stress can lead to further deformation on top of the existing worktable deformation, further impacting the overall processing accuracy of the equipment. Utility Model Content

[0003] To address the shortcomings of existing technologies, this utility model provides a leveling mechanism for a dicing machine worktable, which solves the problems of low leveling efficiency and easy deformation of the worktable due to rigid connection when it tilts after leveling.

[0004] To achieve the above objectives, this utility model provides the following technical solution:

[0005] A leveling mechanism for a dicing machine's worktable includes a leveling base plate and motor support seats. The motor support seats are mounted on the leveling base plate via three-point support, one of which is detachably connected via a fixing assembly. The fixing assembly includes a locking bolt, a base plate gasket, a spherical gasket, and a support seat gasket. The base plate gasket has an arc-shaped groove that matches the spherical gasket. The support seat gasket is fitted onto the spherical gasket, and it abuts against the motor support seats. The locking bolt passes sequentially through the motor support seat, the support seat gasket, and the spherical gasket. The shaped gasket and the base plate gasket are used to lock and fix the motor support base and the leveling base plate; the other two points are detachably connected by an adjustment assembly and a locking bolt. The adjustment assembly includes an adjustment sleeve, which is threaded into the inner cavity of the motor support base. One end of the adjustment sleeve is provided with an arc-shaped protrusion that matches the arc-shaped groove on the base plate gasket. The locking bolt passes through the motor support base, the adjustment sleeve and the base plate gasket in sequence to lock and fix the motor support base and the leveling base plate. Rotating the adjustment sleeve can drive one side of the motor support base to move in the vertical direction.

[0006] Preferably, the adjustment component further includes a hexagonal sleeve, which is inserted into the upper part of the adjusting screw sleeve. Rotating the hexagonal sleeve can synchronously drive the adjusting screw sleeve to rotate.

[0007] Preferably, both the hexagonal sleeve and the adjusting screw sleeve have an opening at one end, and the two openings are staggered and inserted into each other.

[0008] Preferably, a pair of horizontal washers and a pair of disc washers are sequentially fitted onto the upper part of the locking bolt located near the mounting point of the fixed component. The pair of disc washers are arranged between the two horizontal washers, and the lower horizontal washer abuts against the end face of the motor support.

[0009] Preferably, the locking bolt is movably sleeved with the support seat gasket, the base plate gasket, the spherical gasket, the hexagonal sleeve, and the adjusting screw sleeve.

[0010] This utility model has the following beneficial effects:

[0011] The leveling mechanism of this dicing machine's worktable, through its fixed and adjustable components, allows for leveling of the worktable mounted on the DD motor. This is achieved by adjusting the motor support base. Rotating the adjusting sleeve moves it downwards or upwards along the threads inside the motor support base, thus pushing the motor support base downwards or upwards synchronously. When the adjusting sleeve moves downwards, the arc-shaped protrusion at its bottom contacts the arc-shaped groove of the base plate shim. At this point, the force is still perpendicular to the arc surface, preventing deformation of the motor support base due to uneven force if it tilts. Rotating the adjusting sleeves at the two support points brings the motor support base to the desired horizontal position, completing the adjustment. Finally, tightening the locking bolts at the two support points completes the leveling operation. Attached Figure Description

[0012] Figure 1 This is a schematic diagram of the application state structure of this utility model;

[0013] Figure 2 This is a schematic diagram of the layout structure of the fixing component and the leveling component of this utility model;

[0014] Figure 3 This is a schematic diagram of the adjusting screw sleeve structure of this utility model;

[0015] Figure 4 This is a schematic diagram of the layout structure of the adjusting screw sleeve and hexagonal sleeve of this utility model;

[0016] Figure 5 This is a schematic diagram of the layout structure of the base plate gasket and the support seat gasket of this utility model;

[0017] Figure 6 This is a schematic diagram of the layout structure of the spherical gasket and the base plate gasket of this utility model;

[0018] Figure 7 This is a schematic diagram of the layout structure of the horizontal gasket and the disc-shaped gasket of this utility model.

[0019] In the diagram: 1. Leveling base plate; 2. Motor support seat; 3. DD motor; 4. Adjustment assembly; 41. Adjusting screw sleeve; 42. Hexagonal sleeve; 5. Fixing assembly; 51. Base plate shim; 52. Support seat shim; 53. Horizontal shim; 54. Disc shim; 55. Locking bolt; 56. Spherical shim. Detailed Implementation

[0020] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0021] Example 1

[0022] A leveling mechanism for a dicing machine worktable includes a leveling base plate 1 and a motor support base 2. The motor support base 2 is mounted on the leveling base plate 1 via three-point support, one of which is detachably connected via a fixing component 5. The fixing component 5 includes a locking bolt 55, a base plate gasket 51, a spherical gasket 56, and a support seat gasket 52. The base plate gasket 51 has an arc-shaped groove that matches the spherical gasket 56. The support seat gasket 52 is fitted onto the spherical gasket 56 and abuts against the motor support base 2. The locking bolt 55 passes sequentially through the motor support base 2, the support seat gasket 52, and the spherical gasket 56. The shaped gasket 56 and the base plate gasket 51 are used to lock and fix the motor support 2 and the leveling base plate 1. The other two points are detachably connected by the adjusting assembly 4 and the locking bolt 55. The adjusting assembly 4 includes an adjusting sleeve 41, which is threaded into the inner cavity of the motor support 2. One end of the adjusting sleeve 41 is provided with an arc-shaped protrusion that matches the arc-shaped groove on the base plate gasket 51. The locking bolt 55 passes through the motor support 2, the adjusting sleeve 41 and the base plate gasket 51 in sequence to lock and fix the motor support 2 and the leveling base plate 1. Rotating the adjusting sleeve can drive one side of the motor support 2 to move in the vertical direction.

[0023] like Figure 1 and Figure 2 As shown, in the above technical solution, by adjusting the fixing component 5 and adjusting the component 4, when it is necessary to level the worktable installed on the DD motor 3, that is, to level the worktable by adjusting the motor support 2, the adjusting sleeve 41 is rotated, and the adjusting sleeve moves downward or upward along the thread of the inner cavity of the motor support 2, thereby pushing the motor support 2 downward or upward synchronously. When the adjusting sleeve 41 moves downward, the arc-shaped protrusion at the bottom of the adjusting sleeve 41 will contact the arc-shaped groove of the base plate shim 51. At this time, the force at this point is still perpendicular to the arc surface, which can prevent the motor support 2 from deforming due to uneven force when the motor support 2 tilts. By rotating the adjusting sleeve 41 at the two fulcrums, the motor support 2 is brought to the required horizontal position, and the adjustment is completed. At this time, simply tighten the locking bolts 55 corresponding to the two fulcrums to lock it, and the worktable leveling operation is completed.

[0024] Adjustment component 4 also includes a hexagonal sleeve 42, which is inserted into the upper part of the adjusting screw sleeve 41. Rotating the hexagonal sleeve 42 synchronously drives the adjusting screw sleeve 41 to rotate. Figure 3 and Figure 4 As shown, in this technical solution, the hexagonal sleeve 42 facilitates the rotation of the adjusting screw sleeve 41, thereby improving the efficiency of the leveling worktable.

[0025] Furthermore, both the hexagonal sleeve 42 and the adjusting screw sleeve 41 have openings at one end, and the openings are staggered and interlocked, so that the adjusting screw sleeve 41 and the hexagonal sleeve 42 adopt a split design and can be separated axially by a certain distance, but can still complete the tightening function.

[0026] Example 2

[0027] A pair of horizontal washers 53 and a pair of disc washers 54 are sequentially fitted onto the upper part of the locking bolt 55 located near the mounting point of the fixed component 5. The pair of disc washers 54 are arranged between the two horizontal washers 53, and the lower horizontal washer 53 abuts against the end face of the motor support 2. Figure 2 , 5 As shown in Figure 7, in this technical solution, by using the disc-shaped shim 54 and the horizontal shim 53, when the heights of the three support points are inconsistent during the adjustment process, since one end of the fixing component 5 is locked, the plane of the motor support 2 will tilt. However, the contact surface between the locking bolt 55 and the horizontal shim 53 is still parallel to the leveling base plate 1. Thus, the disc-shaped shim 54 will be compressed to adapt to the tilt and will not exert excessive pressure on the side of the motor support 2 located at the fixed support point, causing it to deform and affecting the accuracy.

[0028] The locking bolt 55 is movably connected to the support seat gasket 52, the base plate gasket 51, the spherical gasket 56, the hexagonal sleeve 42, and the adjusting screw sleeve 41. In this technical solution, the locking bolt 55 in the adjusting assembly 4 and the fixing assembly 5 is movably connected to the other components (except for the bottom thread which is threaded to the leveling base plate 1). A certain gap can be left between these movable connections, allowing the locking bolt 55 to wobble internally. Through this design, when the concentricity and straightness of the threaded hole of the locking bolt 55 on the leveling base plate 1 and the through hole of the locking bolt 55 on the motor support seat 2 change, shearing force and bending stress are not applied to the locking bolt 55, reducing the risk of deformation of the motor support seat 2. Specifically, as follows... Figure 2 As shown.

[0029] It should be noted that, in this document, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, the phrase "comprising an element defined as..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0030] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A leveling mechanism for a dicing machine worktable, comprising a leveling base plate and a motor support base, characterized in that: The motor support base is mounted on the leveling base plate via three-point support. One point is detachably connected via a fixing assembly, which includes a locking bolt, a base plate gasket, a spherical gasket, and a support seat gasket. The base plate gasket has an arc-shaped groove that matches the spherical gasket. The support seat gasket is fitted onto the spherical gasket and abuts against the motor support base. The locking bolt passes through the motor support base, support seat gasket, spherical gasket, and base plate gasket in sequence to lock and fix the motor support base to the leveling base plate. The other two points are detachably connected via an adjustment assembly that works with the locking bolt. The adjustment assembly includes an adjusting sleeve, which is threaded into the inner cavity of the motor support base. One end of the adjusting sleeve has an arc-shaped protrusion that matches the arc-shaped groove on the base plate gasket. The locking bolt passes through the motor support base, adjusting sleeve, and base plate gasket in sequence to lock and fix the motor support base to the leveling base plate. Rotating the adjusting sleeve can move one side of the motor support base vertically.

2. The dicing machine table leveling mechanism according to claim 1, characterized in that: The adjustment assembly also includes a hexagonal sleeve, which is inserted into the upper part of the adjusting screw sleeve. Rotating the hexagonal sleeve can synchronously drive the adjusting screw sleeve to rotate.

3. The dicing machine table leveling mechanism according to claim 2, characterized in that: Both the hexagonal sleeve and the adjusting screw sleeve have an opening at one end, and the two openings are staggered and inserted into each other.

4. The dicing machine table leveling mechanism according to claim 3, characterized in that: A pair of horizontal washers and a pair of disc washers are sequentially fitted onto the upper part of the locking bolt located near the mounting point of the fixed component. The pair of disc washers are arranged between the two horizontal washers, and the lower horizontal washer abuts against the end face of the motor support.

5. The dicing machine table leveling mechanism according to claim 4, characterized in that: The locking bolts are movably connected to the support seat gasket, base plate gasket, spherical gasket, hexagonal sleeve, and adjusting screw sleeve.

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