Injector bevel seal groove machining structure

Abstract

The utility model belongs to the technical field of semiconductor processing fixture, concretely, the utility model relates to a injector bevel sealing groove processing structure. A kind of injector bevel sealing groove processing structure, including quartz fixture and quartz nozzle, fixed mechanism is provided on the quartz fixture, the quartz nozzle is arranged in fixed mechanism;After being fixed in the avoidance hole at one end of quartz nozzle, the negative pressure generated by vacuum machine is transmitted to annular air passage through connecting hole, negative pressure is evenly distributed in the bottom periphery of quartz nozzle on installation plane, quartz nozzle is tightly adsorbed on installation plane, so that the fixation of quartz nozzle is more firm;Meanwhile, the installation plane is designed into four-degree bevel, quartz nozzle is placed on installation plane, so that the bevel on quartz nozzle can be guaranteed to be horizontal with the bottom surface of tool during processing, without four-axis machine tool processing sealing groove, reduce processing cost.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor processing fixture technology. Specifically, this utility model relates to an injector inclined sealing groove processing structure. Background Technology

[0002] The quartz nozzle of an etching machine is a key component in semiconductor etching processes. It is primarily used to jet etching gases to selectively remove material from the wafer surface. In its design, the side of the quartz nozzle closest to the wafer is typically flat, while the side furthest from the wafer is generally designed as a 4° bevel, with an annular sealing groove perpendicular to the bevel. This sealing groove generally requires a four-axis machine tool for machining, resulting in high manufacturing costs. While three-axis machine tools with custom-made fixtures are also available, reducing equipment requirements, the use of clamps for fixation can easily scratch the outer diameter of the product, and fixing only one product at a time is cumbersome.

[0003] Chinese Patent (Publication No.: 117089924A) discloses a quartz nozzle for semiconductor vapor phase epitaxy and its preparation and use methods, belonging to the field of semiconductor vapor phase epitaxy technology. The nozzle is a concentric three-ring channel nozzle, consisting of an inner channel, a middle channel, and an outer channel from the inside out. The bottom ends of the middle and outer channels are fused with a distribution plate, and the bottom end of the inner channel is fused with a bottom distribution plate. The bottom end of the inner channel protrudes beyond the bottom ends of the middle and outer channels. Different gases can be injected simultaneously through a single nozzle; a single nozzle mounting port improves the airtightness of the epitaxial reactor; the jet hole is designed with an angle to change the gas injection path; heat insulation liquid is injected between the channel partitions to improve the nozzle's service life; it is suitable for injecting gases at various temperatures and prevents the silicon source gas inside the nozzle from undergoing vapor phase decomposition to generate powdered silicon. The inner channel is designed to protrude and be close to the wafer for lateral angle injection of cold hydrogen gas. However, during semiconductor etching, fixing the quartz nozzle can easily cause scratches on the outer diameter of the quartz nozzle, and fixing only one product at a time is cumbersome. Utility Model Content

[0004] This utility model is designed to solve the above-mentioned problems. Its purpose is to provide an injector bevel sealing groove processing structure that can reduce scratches during the processing of quartz nozzles and improve production efficiency. To achieve the above purpose, the technical solution adopted by this utility model is as follows: an injector bevel sealing groove processing structure, including a quartz jig and a quartz nozzle, wherein a fixing mechanism is provided on the quartz jig and the quartz nozzle is disposed in the fixing mechanism.

[0005] The fixing mechanism includes a mounting plane and a clearance hole. The mounting plane is disposed on the quartz fixture, and the clearance hole is disposed on the mounting plane. One end of the quartz nozzle is inserted into the clearance hole, and a fastening structure is provided on the mounting plane.

[0006] The fastening structure includes an annular air passage and a connecting hole. The annular air passage is disposed on the mounting plane, and the connecting hole is disposed inside the quartz fixture and communicates with the annular air passage. The quartz fixture is provided with a connector mounting hole, which communicates with the connecting hole and is connected to a vacuum machine.

[0007] The quartz fixture is provided with a drain hole, which is connected to the clearance hole.

[0008] The quartz nozzle is provided with an abutment plate, which abuts against the mounting surface.

[0009] The mounting plane is provided with an X-axis reference limiting plate and a Y-axis reference limiting plate, and the abutting plate abuts against the X-axis reference limiting plate and the Y-axis reference limiting plate.

[0010] The fixing mechanism is arranged symmetrically around the quartz fixture.

[0011] The mounting plane is set as an inclined plane with a four-degree angle to the horizontal plane.

[0012] The technical effect of this utility model is as follows: after one end of the quartz nozzle is fixed in the clearance hole, the negative pressure generated by the vacuum machine is transmitted to the annular air passage through the connecting hole. The negative pressure is evenly distributed on the mounting plane around the bottom of the quartz nozzle, and the quartz nozzle is tightly adsorbed on the mounting plane, making the quartz nozzle more firmly fixed.

[0013] By designing the mounting plane as a four-degree bevel, the quartz nozzle can be placed on the mounting plane, ensuring that the bevel on the quartz nozzle is level with the bottom surface of the tool during processing. This eliminates the need for a four-axis machine tool to machine the sealing groove, reducing processing costs. Attached Figure Description

[0014] This manual includes the following figures, which illustrate the following: Figure 1 This is an overall structural diagram of the injection inclined sealing groove processing structure of this utility model; Figure 2 This is a cross-sectional view of the machining structure of the inclined sealing groove of an injector according to this utility model; Figure 3 This is a schematic diagram of the quartz nozzle structure of the inclined sealing groove machining structure of the injector according to this utility model.

[0015] The markings in the diagram are as follows: 1. Quartz fixture; 2. Quartz nozzle; 3. Fixing mechanism; 301. Mounting plane; 302. Clearance hole; 31. Fastening structure; 311. Annular air passage; 312. Connecting hole; 313. Connector mounting hole; 4. Drain hole; 5. Abutment plate; 6. X-axis reference limit plate; 7. Y-axis reference limit plate. Detailed Implementation

[0016] The specific embodiments of the present invention will be further described in detail below with reference to the accompanying drawings, in order to help those skilled in the art to have a more complete, accurate and in-depth understanding of the inventive concept and technical solution of the present invention, and to facilitate its implementation.

[0017] like Figures 1-3 As shown, an injector bevel sealing groove machining structure includes a quartz jig 1 and a quartz nozzle 2. A fixing mechanism 3 is provided on the quartz jig 1, and the quartz nozzle 2 is disposed within the fixing mechanism 3. The quartz jig 1 is fixed on a machine tool, and the quartz nozzle 2 is fixed to the quartz jig 1 by the fixing mechanism 3. The quartz nozzle 2 is used to spray etching gas to selectively remove material from the wafer surface. The bevel on the quartz nozzle 2 is horizontal to the bottom surface of the tool during machining. The fixing mechanism 3 allows the quartz nozzle 2 and the quartz jig 1 to be fixed together, achieving rapid fixation of the quartz nozzle 2 without scratching it.

[0018] The fixing mechanism 3 includes a mounting plane 301 and a clearance hole 302. The mounting plane 301 is set on the quartz fixture 1, and the clearance hole 302 is set on the mounting plane 301. One end of the quartz nozzle 2 is inserted into the clearance hole 302. A fastening structure 31 is provided on the mounting plane 301. The mounting plane 301 serves as the direct bearing surface of the quartz nozzle 2. After one end of the quartz nozzle 2 is inserted into the clearance hole 302, one end of the quartz nozzle 2 is fixed in the clearance hole 302. Then, the fastening structure 31 makes the quartz nozzle 2 fit against the mounting plane 301, so that the inclined surface to be processed by the quartz nozzle 2 remains horizontal with the bottom surface of the processing tool.

[0019] The fastening structure 31 includes an annular air passage 311 and a connecting hole 312. The annular air passage 311 is disposed on the mounting plane 301, and the connecting hole 312 is disposed inside the quartz fixture 1 and communicates with the annular air passage 311. The quartz fixture 1 is provided with a connector mounting hole 313, which communicates with the connecting hole 312 and is connected to a vacuum unit. The annular air passage 311 is disposed on the mounting plane 301 and distributed around the clearance hole 302; the connector mounting hole 313 is disposed on the quartz fixture 1 and has an M6 thread. The connector mounting hole 313 serves as the connection interface between the vacuum unit and the connecting hole 312. By installing an air pipe connector, a sealed connection between the vacuum unit and the connecting hole 312 is achieved to prevent negative pressure leakage and ensure that the vacuum unit can stably provide negative pressure to the annular air passage 311. The quartz fixture 1 is in contact with the annular air passage 311 and is attracted. The connection hole 312 efficiently transmits the negative pressure input by the vacuum machine through the connector mounting hole 313 to the annular air passage 311, ensuring that the negative pressure loss is minimized and that a stable negative pressure is formed in the annular air passage 311.

[0020] After one end of the quartz nozzle 2 is fixed in the clearance hole 302, the negative pressure generated by the vacuum machine is transmitted to the annular air passage 311 through the connection hole 312. The negative pressure is evenly distributed on the mounting plane 301 around the bottom of the quartz nozzle 2, and the quartz nozzle 2 is tightly adsorbed on the mounting plane 301, making the quartz nozzle 2 more firmly fixed.

[0021] The quartz fixture 1 is provided with a drain hole 4, which is connected to the clearance hole 302. The drain hole 4 is connected to the bottom of the clearance hole 302. During machining, the cutting fluid flows into the clearance hole 302 through the central through-hole of the quartz nozzle 2. Because the drain hole 4 is connected to the clearance hole 302, the cutting fluid can be quickly discharged through the drain hole 4, preventing accumulation in the clearance hole 302. This prevents uneven stress on the mounting surface 301 caused by cutting fluid accumulation, ensuring stable adsorption of the quartz nozzle 2; reduces the contamination of the fixture and product by residual cutting fluid, lowers subsequent cleaning costs, and ensures a clean machining environment. It also prevents the cutting fluid from being sucked into the vacuum machine through the clearance hole 302 during machining due to uneven mounting surface 301, thus reducing the negative pressure of the vacuum machine and causing the quartz nozzle 2 to be unstable.

[0022] A contact plate 5 is provided on the quartz nozzle 2, and the contact plate 5 abuts against the mounting surface 301. The contact plate 5 is fitted on the quartz nozzle 2, which can increase the contact area between the quartz nozzle 2 and the mounting surface 301. The negative pressure generated by the vacuum machine is transmitted to the annular air passage 311 through the connecting hole 312. The negative pressure is evenly distributed on the mounting surface 301 around the bottom of the quartz nozzle 2, and the quartz nozzle 2 is adsorbed on the mounting surface 301. By increasing the contact area between the quartz nozzle 2 and the mounting surface 301, the quartz nozzle 2 can be tightly adsorbed on the mounting surface 301, and the adsorption effect of the quartz nozzle 2 is better.

[0023] An X-axis reference limiting plate 6 and a Y-axis reference limiting plate 7 are provided on the mounting plane 301, and the abutment plate 5 abuts against the X-axis reference limiting plate 6 and the Y-axis reference limiting plate 7. One end of the quartz nozzle 2 is aligned with the clearance hole 302 on the mounting plane 301 and inserted, so that the abutment plate 5 is completely fitted against the mounting plane 301. The position of the quartz nozzle 2 is then finely adjusted until the abutment plate 5 is tightly abutted against the X-axis reference limiting plate 6 and the Y-axis reference limiting plate 7, completing the installation and positioning of the quartz nozzle 2.

[0024] The fixing mechanism 3 is arranged symmetrically in a circle on the quartz fixture 1. There are 8 fixing mechanisms 3 arranged symmetrically in a circle, which are 8 identical working platforms that simultaneously fix 8 quartz nozzles 2. Eight products can be processed with only one tool setting, which greatly improves work efficiency.

[0025] The mounting plane 301 is set as a 4-degree slope with respect to the horizontal plane. By designing the mounting plane 301 as a 4-degree slope, the quartz nozzle 2 is placed on the mounting plane 301, which ensures that the slope on the quartz nozzle 2 is horizontal with the bottom surface of the tool during processing. This eliminates the need to machine the sealing groove on a four-axis machine tool, thus reducing processing costs.

[0026] After one end of the quartz nozzle 2 is fixed in the clearance hole 302, the negative pressure generated by the vacuum machine is transmitted to the annular air passage 311 through the connection hole 312. The negative pressure is evenly distributed on the mounting plane 301 around the bottom of the quartz nozzle 2, and the quartz nozzle 2 is tightly adsorbed on the mounting plane 301, making the quartz nozzle 2 more firmly fixed.

[0027] By designing the mounting plane 301 as a four-degree slope, the quartz nozzle 2 is placed on the mounting plane 301, which ensures that the slope on the quartz nozzle 2 is horizontal with the bottom surface of the tool during processing. This eliminates the need for a four-axis machine tool to machine the sealing groove, thus reducing processing costs.

[0028] The present invention has been described above by way of example with reference to the accompanying drawings. Obviously, the specific implementation of the present invention is not limited to the above-described manner. Any non-substantial improvements made using the inventive concept and technical solution of the present invention; or the direct application of the inventive concept and technical solution to other situations without modification, are all within the protection scope of the present invention.

Claims

1. A machining structure for an injector bevel sealing groove, comprising a quartz jig (1) and a quartz nozzle (2), characterized in that, The quartz fixture (1) is provided with a fixing mechanism (3), and the quartz nozzle (2) is disposed in the fixing mechanism (3).

2. The injector inclined sealing groove processing structure according to claim 1, characterized in that: The fixing mechanism (3) includes a mounting plane (301) and a clearance hole (302). The mounting plane (301) is set on the quartz fixture (1), and the clearance hole (302) is set on the mounting plane (301). One end of the quartz nozzle (2) is inserted into the clearance hole (302). A fastening structure (31) is provided on the mounting plane (301).

3. The injector inclined sealing groove processing structure according to claim 2, characterized in that: The fastening structure (31) includes an annular air passage (311) and a connecting hole (312). The annular air passage (311) is disposed on the mounting plane (301). The connecting hole (312) is disposed in the quartz fixture (1) and communicates with the annular air passage (311). The quartz fixture (1) is provided with a connector mounting hole (313). The connector mounting hole (313) communicates with the connecting hole (312). The connector mounting hole (313) is connected to a vacuum machine.

4. The injector inclined sealing groove processing structure according to claim 2, characterized in that: The quartz fixture (1) is provided with a drain hole (4), which is connected to the clearance hole (302).

5. The injector inclined sealing groove processing structure according to claim 2, characterized in that: The quartz nozzle (2) is provided with an abutment plate (5), which abuts against the mounting plane (301).

6. The injector inclined sealing groove processing structure according to claim 5, characterized in that: The mounting plane (301) is provided with an X-axis reference limiting plate (6) and a Y-axis reference limiting plate (7), and the abutting plate (5) abuts against the X-axis reference limiting plate (6) and the Y-axis reference limiting plate (7).

7. The injector inclined sealing groove processing structure according to claim 1, characterized in that: The fixing mechanism (3) is arranged symmetrically on the quartz fixture (1).

8. The injector inclined sealing groove processing structure according to claim 2, characterized in that: The mounting plane (301) is set as an inclined plane with a four-degree angle to the horizontal plane.

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