A nano-thin film repairing device adaptable to multi-size substrates

Abstract

The utility model discloses a kind of nano film repairing devices of adaptable multiple size base material, including operation platform, the one side of operation platform is fixedly connected with two L-shaped mounting columns, the top of two L-shaped mounting columns is fixedly connected with controller, the upper surface of operation platform is equipped with two first mobile grooves, the bottom of operation platform is fixedly connected with two fixed plates.The utility model, by setting first connecting plate, second connecting plate, first threaded rod, second servo motor etc., first threaded rod drives second mobile frame to move downward on corresponding sliding column, so that second mobile frame drives batten to press on the upper surface of base material, base material is fixed by pressing, when pressure reaches threshold value, second pressure sensor passes signal to controller, two second servo motors stop by controller control, the structure is suitable for different size base material, improve the flexibility of use.

Description

Technical Field

[0001] This invention relates to the field of nanofilm repair technology, and in particular to a nanofilm repair device that can be adapted to substrates of multiple sizes. Background Technology

[0002] Nanofilm materials are increasingly widely used in high-end manufacturing fields such as semiconductor chips, flexible electronics, optical components, and new energy devices. However, during the preparation, transportation, and use of nanofilms, microscopic defects such as pinholes, scratches, and contamination are inevitably generated, which can seriously affect the performance and reliability of devices. Therefore, it is necessary to precisely repair defective nanofilms to mitigate losses and improve yield.

[0003] However, in the existing technology, the substrate fixing and motion platform is usually designed for a specific size and cannot be applied to substrates of different sizes. Therefore, a nanofilm repair device that can be adapted to substrates of multiple sizes is proposed. Utility Model Content

[0004] The purpose of this invention is to address the shortcomings of existing technologies by proposing a nanofilm repair device that can be adapted to substrates of multiple sizes.

[0005] To achieve the above objectives, the present invention adopts the following technical solution: a nanofilm repair device adaptable to substrates of multiple sizes, comprising an operating table, two L-shaped mounting columns fixedly connected to one side of the operating table, a controller fixedly connected to the top of the two L-shaped mounting columns, two first moving slots opened on the upper surface of the operating table, two fixed plates fixedly connected to the bottom of the operating table, a fixed structure provided on the operating table, a second moving slot opened on one side of the operating table, and a moving structure provided in the second moving slot;

[0006] The fixed structure includes a bidirectional threaded rod rotatably connected to one side of two fixed plates. A first servo motor is fixedly connected to one side of one of the fixed plates. The output shaft of the first servo motor is fixedly connected to one end of the bidirectional threaded rod. The first servo motor is electrically connected to a controller. The controller controls the first servo motor to start, and the first servo motor drives the bidirectional threaded rod to rotate.

[0007] As a further description of the above technical solution:

[0008] Each of the first moving slots is fixedly connected to a sliding rod, and two first moving frames are slidably connected to the two sliding rods. The two first moving frames are respectively threaded to the threaded segments corresponding to the bidirectional threaded rods. Each of the first moving frames is fixedly connected to a clamping plate on its upper surface. Multiple first pressure sensors are installed inside the two clamping plates. Each pressure sensor is electrically connected to the controller. The first moving frames move along the opposite threaded segments of the threaded rods, causing them to slide on the two sliding rods and move closer together. The first moving frames drive the corresponding clamping plates to move, so that the clamping plates clamp the two sides of the substrate. When the pressure reaches a threshold, the first pressure sensor transmits a signal to the controller, which then controls the first servo motor to stop.

[0009] As a further description of the above technical solution:

[0010] Each of the clamping plates has two third moving slots on one side, and a sliding column is fixedly connected in each of the third moving slots. A second moving frame is slidably connected to the two sliding columns on the same side. A pressure strip is fixedly connected to one side of each second moving frame. Multiple second pressure sensors are installed inside each pressure strip. Each second pressure sensor is electrically connected to the controller. The second moving frame drives the pressure strip to press down on the upper surface of the substrate to fix the substrate. When the pressure reaches a threshold, the second pressure sensor transmits a signal to the controller, which then controls the two second servo motors to stop.

[0011] As a further description of the above technical solution:

[0012] Each clamping plate has a first connecting plate and a second connecting plate fixedly connected to one side. A first threaded rod is rotatably connected through the bottom of each first connecting plate. One end of each first threaded rod is rotatably connected to the upper surface of the corresponding second connecting plate. Each first threaded rod is threaded through and connected to one side of the corresponding second moving frame. A second servo motor is fixedly connected to the upper surface of each first connecting plate. The output shaft of each second servo motor is fixedly connected to one end of the corresponding first threaded rod. The controller controls the two second servo motors to start. The second servo motors drive the first threaded rods to rotate. The first threaded rods drive the second moving frame to move downward on the corresponding sliding column.

[0013] As a further description of the above technical solution:

[0014] The movable structure includes a second threaded rod rotatably connected within a second movable groove. A third servo motor is fixedly connected to one side of the operating table. The output shaft of the third servo motor is fixedly connected to one end of the second threaded rod. The third servo motor is electrically connected to a controller. A movable block is threaded onto the second threaded rod. The movable block is slidably connected within the second movable groove. An L-shaped support column is fixedly connected to one side of the movable block. An electric push rod is fixedly connected to one end of the L-shaped support column. The electric push rod is electrically connected to the controller. A movable column is fixedly connected to the piston end of the electric push rod. Two mounting blocks are fixedly connected to one side of the movable column. A laser scanner is fixedly connected to one side of both mounting blocks. The laser scanner is electrically connected to the controller. The second threaded rod drives the movable block to move, which in turn drives the L-shaped support column to move, causing the laser repair device below the L-shaped support column to move laterally. Simultaneously, the laser scanner scans the substrate, transmitting the location information of the substrate requiring repair to the controller.

[0015] As a further description of the above technical solution:

[0016] The bottom of the movable column is provided with a sliding groove, and a third threaded rod is rotatably connected in the sliding groove. A fourth servo motor is fixedly connected to one end of the movable column. The output shaft of the fourth servo motor is fixedly connected to one end of the third threaded rod. The fourth servo motor is electrically connected to the controller. The controller controls the fourth servo motor to start, and the fourth servo motor drives the third threaded rod to rotate.

[0017] As a further description of the above technical solution:

[0018] A sliding block is threaded onto the third threaded rod. The sliding block is slidably connected in the sliding groove. A laser repair device is fixedly connected to the bottom of the sliding block. The laser repair device is electrically connected to the controller. The third threaded rod drives the sliding block to move, and the sliding block drives the laser repair device to move longitudinally. Through the precise position information transmitted by the laser scanner, the laser repair device is moved to the position to be repaired and performs the repair operation.

[0019] This utility model has the following beneficial effects:

[0020] 1. Compared with existing technologies, this nanofilm repair device, adaptable to substrates of various sizes, utilizes components such as sliding rods, first moving frames, bidirectional threaded rods, first servo motors, clamping plates, third moving grooves, sliding columns, second moving frames, pressure strips, first connecting plates, second connecting plates, first threaded rods, and second servo motors. The substrate is placed on an operating table, and the controller activates the first servo motor, which drives the bidirectional threaded rod to rotate. The opposite threaded sections of the bidirectional threaded rod cause two first moving frames to slide on the two sliding rods and approach each other. The first moving frames then move the corresponding clamping plates, clamping the substrate. On both sides of the substrate, when the pressure reaches the threshold, the first pressure sensor transmits a signal to the controller. The controller then stops the first servo motor and starts two second servo motors. The second servo motors drive the first threaded rod to rotate, which in turn drives the second moving frame to move downwards on the corresponding sliding column. This causes the second moving frame to press the pressure strip onto the upper surface of the substrate, fixing it in place. When the pressure reaches the threshold, the second pressure sensor transmits a signal to the controller, which then stops the two second servo motors. This structure is suitable for substrates of different sizes, improving the flexibility of use.

[0021] 2. Compared with existing technologies, this nanofilm repair device, adaptable to substrates of various sizes, utilizes a third servo motor, a second threaded rod, a moving block, an L-shaped support column, an electric push rod, a moving column, a mounting block, a laser scanner, a third threaded rod, a fourth servo motor, a sliding block, and a laser repairer. The piston end of the electric push rod drives the moving column downwards. The moving column, via the mounting block, moves the laser scanner to the appropriate position. Then, the controller starts the third servo motor, which drives the second threaded rod to rotate. The second threaded rod moves the moving block, which in turn moves the L-shaped support column, causing the laser repairer below the L-shaped support column to move laterally. Simultaneously, the laser scanner scans the substrate, transmitting the location information requiring repair to the controller. The controller then starts the fourth servo motor, which drives the third threaded rod to rotate. The third threaded rod moves the sliding block, which in turn moves the laser repairer longitudinally. Using the precise location information transmitted by the laser scanner, the laser repairer is moved to the repair position and performs the repair operation, effectively improving the efficiency and accuracy of the repair process. Attached Figure Description

[0022] Figure 1 This is a first-view three-dimensional structural diagram of a nanofilm repair device adaptable to substrates of multiple sizes proposed in this utility model.

[0023] Figure 2 This is a second-view three-dimensional structural diagram of a nanofilm repair device adaptable to substrates of multiple sizes proposed in this utility model.

[0024] Figure 3 This is a schematic diagram of the fixing structure of a nanofilm repair device that can be adapted to substrates of multiple sizes, as proposed in this utility model.

[0025] Figure 4 An exploded view of the fixing structure of a nanofilm repair device adaptable to substrates of multiple sizes proposed in this utility model;

[0026] Figure 5 This invention proposes a nanofilm repair device adaptable to substrates of various sizes. Figure 4 - Enlarged view of section A;

[0027] Figure 6 This is a schematic diagram of the moving structure of a nanofilm repair device adaptable to substrates of multiple sizes proposed in this utility model;

[0028] Figure 7 This is an exploded view of the moving structure of a nanofilm repair device adaptable to substrates of multiple sizes proposed in this utility model.

[0029] Legend:

[0030] 1. Operating table; 2. L-shaped mounting column; 3. Controller; 4. First moving slot; 5. Fixing plate; 6. Fixing structure; 601. Sliding rod; 602. First moving frame; 603. Bidirectional threaded rod; 604. First servo motor; 605. Clamping plate; 606. Third moving slot; 607. Sliding column; 608. Second moving frame; 609. Pressure strip; 610. First connecting plate; 611. Second connecting plate; 612. First threaded rod; 613. Second servo motor; 7. Moving structure; 701. Third servo motor; 702. Second threaded rod; 703. Moving block; 704. L-shaped support column; 705. Electric push rod; 706. Moving column; 707. Mounting block; 708. Laser scanner; 709. Third threaded rod; 710. Fourth servo motor; 711. Sliding block; 712. Laser repair device. Detailed Implementation

[0031] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0032] Reference Figures 1 to 7This utility model provides a nanofilm repair device that can be adapted to substrates of multiple sizes: it includes an operating table 1, two L-shaped mounting columns 2 are fixedly connected to one side of the operating table 1, and a controller 3 is fixedly connected to the top of the two L-shaped mounting columns 2. The controller 3 controls the first servo motor 604, the second servo motor 613, the third servo motor 701, the fourth servo motor 710 and the electric push rod 705 to work together to improve the accuracy of repair. Two first moving slots 4 are opened on the upper surface of the operating table 1, two fixed plates 5 are fixedly connected to the bottom of the operating table 1, a fixed structure 6 is provided on the operating table 1, and a second moving slot is opened on one side of the operating table 1. A moving structure 7 is provided in the second moving slot.

[0033] To accommodate different substrate sizes, the fixing structure 6 includes a bidirectional threaded rod 603 rotatably connected to one side of two fixing plates 5. A first servo motor 604 is fixedly connected to one side of one of the fixing plates 5. The output shaft of the first servo motor 604 is fixedly connected to one end of the bidirectional threaded rod 603. The first servo motor 604 is electrically connected to the controller 3. A sliding rod 601 is fixedly connected in each first moving slot 4. Two first moving frames 602 are slidably connected to the two sliding rods 601. The two first moving frames 602 are threadedly connected to the corresponding threaded segments of the bidirectional threaded rod 603. A clamping plate 605 is fixedly connected to the upper surface of each first moving frame 602. Multiple clamping plates 605 are installed inside the two clamping plates 605. Each pressure sensor is electrically connected to the controller 3. Two third moving slots 606 are formed on one side of each clamping plate 605. A sliding column 607 is fixedly connected within each third moving slot 606. A second moving frame 608 is slidably connected to the two sliding columns 607 on the same side. A pressure strip 609 is fixedly connected to one side of each second moving frame 608. Multiple second pressure sensors are installed inside each pressure strip 609. Each second pressure sensor is electrically connected to the controller 3. A first connecting plate 610 and a second connecting plate 611 are fixedly connected to one side of each clamping plate 605. A first threaded rod 612 is rotatably connected through the bottom of each first connecting plate 610. One end of each of the first threaded rods 612 is rotatably connected to the upper surface of the corresponding second connecting plate 611. Each first threaded rod 612 passes through and is threadedly connected to one side of the corresponding second moving frame 608. A second servo motor 613 is fixedly connected to the upper surface of each first connecting plate 610. The output shaft of each second servo motor 613 is fixedly connected to one end of the corresponding first threaded rod 612. The substrate is placed on the operating table 1, and the controller 3 controls the first servo motor 604 to start. The first servo motor 604 drives the bidirectional threaded rod 603 to rotate. The opposite threaded sections of the bidirectional threaded rod 603 drive the two first moving frames 602 to slide on the two sliding rods 601 and move closer together. The first moving frames 602 drive the corresponding clamping plate 605 to move, so that... The clamping plate 605 is clamped on both sides of the substrate. When the pressure reaches the threshold, the first pressure sensor transmits a signal to the controller 3, which then controls the first servo motor 604 to stop. The controller 3 then controls the two second servo motors 613 to start. The second servo motors 613 drive the first threaded rod 612 to rotate. The first threaded rod 612 drives the second moving frame 608 to move downward on the corresponding sliding column 607, so that the second moving frame 608 drives the pressure strip 609 to press down on the upper surface of the substrate, thus fixing the substrate. When the pressure reaches the threshold, the second pressure sensor transmits a signal to the controller 3, which then controls the two second servo motors 613 to stop. This structure is suitable for substrates of different sizes, improving the flexibility of use.

[0034] To achieve precise positioning, the moving structure 7 includes a second threaded rod 702 rotatably connected within a second moving groove. A third servo motor 701 is fixedly connected to one side of the operating table 1. The output shaft of the third servo motor 701 is fixedly connected to one end of the second threaded rod 702. The third servo motor 701 is electrically connected to the controller 3. A moving block 703 is threaded onto the second threaded rod 702 and slidably connected within the second moving groove. An L-shaped support column 704 is fixedly connected to one side of the moving block 703. An electric push rod 705 is fixedly connected to one end of the L-shaped support column 704. The electric push rod 705 is connected to the controller. 3. Electrical Connection: A movable column 706 is fixedly connected to the piston end of the electric push rod 705. Two mounting blocks 707 are fixedly connected to one side of the movable column 706. A laser scanner 708 is fixedly connected to one side of both mounting blocks 707. The laser scanner 708 is electrically connected to the controller 3. A sliding groove is provided at the bottom of the movable column 706. A third threaded rod 709 is rotatably connected within the sliding groove. A fourth servo motor 710 is fixedly connected to one end of the movable column 706. The output shaft of the fourth servo motor 710 is fixedly connected to one end of the third threaded rod 709. The fourth servo motor 710 is electrically connected to the controller 3. A sliding block 711 is threaded onto 709, and the sliding block 711 is slidably connected in a sliding groove. A laser repair device 712 is fixedly connected to the bottom of the sliding block 711. The laser repair device 712 is electrically connected to the controller 3. The piston end of the electric push rod 705 drives the moving column 706 to move downward. The moving column 706 drives the laser scanner 708 to the appropriate position via the mounting block 707. Then, the controller 3 controls the third servo motor 701 to start. The third servo motor 701 drives the second threaded rod 702 to rotate. The second threaded rod 702 drives the moving block 703 to move. The moving block 703 drives the L-shaped support column 704 to move. The laser repairer 712 under the L-shaped support column 704 moves laterally, while simultaneously driving the laser scanner 708 to scan the substrate. The location information of the substrate that needs to be repaired is transmitted to the controller 3. The controller 3 controls the fourth servo motor 710 to start, which drives the third threaded rod 709 to rotate. The third threaded rod 709 drives the sliding block 711 to move, and the sliding block 711 drives the laser repairer 712 to move longitudinally. With the precise location information transmitted by the laser scanner 708, the laser repairer 712 is moved to the position to be repaired and performs the repair operation, effectively improving the efficiency and accuracy of the repair.

[0035] Working Principle: The substrate is placed on the operating table 1. The controller 3 starts the first servo motor 604, which drives the bidirectional threaded rod 603 to rotate. The opposite threaded sections of the bidirectional threaded rod 603 drive two first moving frames 602 to slide on two sliding rods 601 and move closer together. The first moving frames 602 drive the corresponding clamping plates 605 to move, clamping the substrate on both sides. When the pressure reaches the threshold, the first pressure sensor transmits a signal to the controller 3, which then stops the first servo motor 604. The controller 3 then starts two second servo motors 613, which drive the first threaded rod 612 to rotate. The first threaded rod 612 drives the second moving frame 608 to move downward on the corresponding sliding column 607, causing the second moving frame 608 to press the pressure strip 609 onto the upper surface of the substrate, fixing it in place. When the pressure reaches the threshold, the second pressure sensor transmits a signal to the controller 3, which then stops the two second servo motors 613. This structure is suitable for substrates of different sizes. To improve the flexibility of use, after the substrate is fixed, the piston end of the electric push rod 705 drives the moving column 706 to move downward. The moving column 706 drives the laser scanner 708 to the appropriate position via the mounting block 707. Then, the controller 3 controls the third servo motor 701 to start. The third servo motor 701 drives the second threaded rod 702 to rotate. The second threaded rod 702 drives the moving block 703 to move. The moving block 703 drives the L-shaped support column 704 to move, causing the laser repairer 712 below the L-shaped support column 704 to move laterally. At the same time, it drives the laser scanner 708 to scan the substrate and transmit the location information of the substrate to be repaired to the controller 3. The controller 3 controls the fourth servo motor 710 to start. The fourth servo motor 710 drives the third threaded rod 709 to rotate. The third threaded rod 709 drives the sliding block 711 to move. The sliding block 711 drives the laser repairer 712 to move longitudinally. With the precise location information transmitted by the laser scanner 708, the laser repairer 712 is moved to the position to be repaired and performs the repair operation, effectively improving the efficiency and accuracy of the repair.

[0036] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A nanofilm repair device adaptable to substrates of multiple sizes, comprising an operating table (1), characterized in that: Two L-shaped mounting columns (2) are fixedly connected to one side of the operating table (1), and a controller (3) is fixedly connected to the top of the two L-shaped mounting columns (2). Two first moving slots (4) are opened on the upper surface of the operating table (1). Two fixed plates (5) are fixedly connected to the bottom of the operating table (1). A fixed structure (6) is provided on the operating table (1). A second moving slot is opened on one side of the operating table (1), and a moving structure (7) is provided in the second moving slot. The fixed structure (6) includes a bidirectional threaded rod (603) rotatably connected to one side of the two fixed plates (5), and a first servo motor (604) is fixedly connected to one side of one of the fixed plates (5). The output shaft of the first servo motor (604) is fixedly connected to one end of the bidirectional threaded rod (603), and the first servo motor (604) is electrically connected to the controller (3).

2. The nanofilm repair device adaptable to substrates of multiple sizes according to claim 1, characterized in that: Each of the first moving slots (4) is fixedly connected to a sliding rod (601). Two first moving frames (602) are slidably connected to the two sliding rods (601). The two first moving frames (602) are respectively threaded to the threaded segments corresponding to the bidirectional threaded rods (603). Each of the first moving frames (602) is fixedly connected to a clamping plate (605) on its upper surface. Multiple first pressure sensors are installed inside the two clamping plates (605). Each pressure sensor is electrically connected to the controller (3).

3. The nanofilm repair device adaptable to substrates of multiple sizes according to claim 2, characterized in that: Two third moving slots (606) are provided on one side of each clamp (605). A sliding column (607) is fixedly connected in each third moving slot (606). A second moving frame (608) is slidably connected on the two sliding columns (607) on the same side. A pressure strip (609) is fixedly connected to one side of each second moving frame (608). Multiple second pressure sensors are installed inside each pressure strip (609). Each second pressure sensor is electrically connected to the controller (3).

4. The nanofilm repair device adaptable to substrates of multiple sizes according to claim 3, characterized in that: Each of the clamping plates (605) is fixedly connected to one side with a first connecting plate (610) and a second connecting plate (611). A first threaded rod (612) is rotatably connected through the bottom of each first connecting plate (610). One end of each first threaded rod (612) is rotatably connected to the upper surface of the corresponding second connecting plate (611). Each first threaded rod (612) is threaded through and connected to one side of the corresponding second moving frame (608). A second servo motor (613) is fixedly connected to the upper surface of each first connecting plate (610). The output shaft of each second servo motor (613) is fixedly connected to one end of the corresponding first threaded rod (612).

5. The nanofilm repair device adaptable to substrates of multiple sizes according to claim 1, characterized in that: The movable structure (7) includes a second threaded rod (702) rotatably connected in a second movable slot. A third servo motor (701) is fixedly connected to one side of the operating table (1). The output shaft of the third servo motor (701) is fixedly connected to one end of the second threaded rod (702). The third servo motor (701) is electrically connected to the controller (3). A movable block (703) is threaded onto the second threaded rod (702). The movable block (703) is slidably connected in the second movable slot. One end of the movable block (703)... An L-shaped support column (704) is fixedly connected to the side. An electric push rod (705) is fixedly connected to one end of the L-shaped support column (704). The electric push rod (705) is electrically connected to the controller (3). A moving column (706) is fixedly connected to the piston end of the electric push rod (705). Two mounting blocks (707) are fixedly connected to one side of the moving column (706). A laser scanner (708) is fixedly connected to one side of both mounting blocks (707). The laser scanner (708) is electrically connected to the controller (3).

6. The nanofilm repair device adaptable to substrates of multiple sizes according to claim 5, characterized in that: The bottom of the movable column (706) is provided with a sliding groove, and a third threaded rod (709) is rotatably connected in the sliding groove. A fourth servo motor (710) is fixedly connected to one end of the movable column (706). The output shaft of the fourth servo motor (710) is fixedly connected to one end of the third threaded rod (709). The fourth servo motor (710) is electrically connected to the controller (3).

7. The nanofilm repair device adaptable to substrates of multiple sizes according to claim 6, characterized in that: The third threaded rod (709) is threaded with a sliding block (711), which is slidably connected in the sliding groove. The bottom of the sliding block (711) is fixedly connected with a laser repairer (712), which is electrically connected to the controller (3).

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