A target mold and a target preparation device

Abstract

The utility model discloses a target material mold and target material preparation device belong to target material preparation technical field, a target material mold, including fixed part and movable part, the fixed part bottom fixed setting has the bottom disc, the movable part is established on the bottom disc, the fixed part faces movable part one end lateral wall and is established with right arc -shaped groove, the movable part faces fixed part one end lateral wall and is established with left arc -shaped groove, the fixed part lateral wall is seted with recess, the recess is established with pressboard, the fixed part is seted with working cavity, working cavity is communicated with recess, the working cavity is established with the fixed mechanism for fixing movable part. Through setting target material preparation device and the matched mold, make the staff can integrally take out the target material after pressing from the mold, thereby facilitating the subsequent work.

Description

Technical Field

[0001] This utility model belongs to the field of target material preparation technology, and in particular relates to a target material mold and a target material preparation device. Background Technology

[0002] Sputtering targets are a key material used in physical vapor deposition (PVD) processes. In thin film manufacturing, such as sputtering or evaporation deposition, targets are used as source materials to generate the thin film to be deposited onto the substrate. High-purity sputtering targets mainly refer to metallic or non-metallic targets with a purity of 99.9%–99.9999% (between 3N and 6N), and are crucial materials for preparing surface electronic thin films for wafers, panels, and solar cells. There are many methods for preparing target materials, such as melting and casting, powder metallurgy, and cold pressing sintering. Taking cold pressing sintering as an example, this method involves applying high pressure to powder at room temperature to compress it, causing the powder particles to align tightly and form a blank with a certain strength. The blank is then placed in a high-temperature environment for sintering to further enhance the bonding force between the particles, ultimately obtaining the desired target material. Before cold pressing, pre-treated powder is loaded into a mold, and workers use a scraper to remove excess powder. After pressing, the blank needs to be removed from the mold. Although the blank already has a certain geometric shape, its density is low, so workers must be very careful to remove it intact, as the edges of the blank may be damaged.

[0003] To address these issues, we propose a target mold and a target preparation device. Utility Model Content

[0004] The purpose of this utility model is to solve the problems in the prior art by proposing a target mold and a target preparation device.

[0005] To achieve the above objectives, the present invention adopts the following technical solution: A target mold includes a fixed part and a movable part. A base is fixedly mounted on the bottom of the fixed part, and the movable part is mounted on the base. A right arc-shaped groove is provided on the side wall of the fixed part facing the movable part, and a left arc-shaped groove is provided on the side wall of the movable part facing the fixed part. A groove is formed on the side wall of the fixed part, and a pressing plate is installed in the groove. A working cavity is formed in the fixed part, and the working cavity communicates with the groove. A fixing mechanism for fixing the movable part is installed in the working cavity.

[0006] Preferably, the bottom of the movable part has two placement slots, and an upper hook rod is fixedly installed in each of the two placement slots.

[0007] Preferably, the top of the chassis has two movement grooves, the positions of the two movement grooves correspond to the positions of the two placement grooves, and a lower hook rod is slidably connected in the movement groove.

[0008] Preferably, the fixing mechanism includes a lifting block, a push rod, a vertical plate, and a first telescopic spring. The lifting block is installed at the bottom of the pressing plate, the push rod is slidably connected to the bottom of the working chamber, the lifting block abuts against the side wall of the push rod, and both the lifting block and the push rod are arc-shaped. The other end of the push rod is fixedly connected to the side wall of the lower hook rod, the vertical plate is fixedly installed at the top of the push rod, one end of the first telescopic spring is fixedly connected to the side wall of the vertical plate, and the other end is fixedly connected to the side wall of the working chamber.

[0009] Preferably, the fixed part has a through groove on the side wall opposite to the movable part, a connecting rod is fixedly installed between the two lifting blocks, a first support rod is rotatably connected to the side wall of the connecting rod, a horizontal groove is opened on the side wall of the connecting rod, a slider is slidably connected in the horizontal groove, a second support rod is rotatably connected to the side wall of the slider, a central shaft is rotatably connected to the end of the first support rod away from the working cavity and the end of the second support rod away from the slider, the central shaft is located above the through groove, a horizontal plate is also fixedly connected to the side wall of the slider, an arc-shaped block is fixedly installed on the top of the horizontal plate, a top block is fixedly installed on the bottom of the pressing plate, the top block is also arc-shaped, and the arc-shaped block abuts against the top block.

[0010] Preferably, a second telescopic spring is fixedly connected to the side wall of the horizontal plate away from the slider, and a fixing plate is fixedly connected to the side wall of the connecting rod. The end of the second telescopic spring away from the horizontal plate is fixedly connected to the side wall of the fixing part.

[0011] A target preparation apparatus includes a pressurizing device and a pressurizing head, characterized in that the pressurizing head is located above the pressurizing device, the pressurizing device has a pressurizing cavity, and the mold described in any of the above-mentioned embodiments is placed in the pressurizing cavity.

[0012] Preferably, a cylinder is installed in the pressurization chamber, and a top plate is fixedly installed at the output end of the cylinder. Two fixing rods are fixedly connected to the top of the top plate, and the positions of the two fixing rods correspond to the positions of two through slots. The mold is placed on the top plate.

[0013] In summary, the technical effects and advantages of this utility model are as follows: The powder is poured into the recess between the fixed part and the movable part, and then pressed by the pressure head. It will be gradually compacted. After the pressing is completed, the cylinder will push the mold out. After the mold is removed, the button will automatically pop up. By pressing the button, the operator can release the fixed relationship between the movable part and the fixed part, which makes it easier for the operator to remove the movable part and remove the target material completely from the chassis. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the overall structure of a target material preparation device according to the present invention; Figure 2 This is a schematic diagram of the overall structure of a target mold according to the present invention; Figure 3 This is a schematic diagram of the fixed part and the movable part in a target mold; Figure 4 This is a schematic diagram of the structural connection of a fixing mechanism in a target mold; Figure 5 This is a schematic diagram of the structure of a target mold, including a pressing plate, a top block, an arc block, and a horizontal plate. Figure 6 This is a schematic diagram of the internal structure of the pressure chamber in a target material preparation device.

[0015] In the diagram: 1. Fixed part; 2. Movable part; 3. Chassis; 4. Right arc-shaped groove; 5. Left arc-shaped groove; 6. Groove; 7. Press plate; 8. Placement groove; 9. Upper hook rod; 10. Movement groove; 11. Lower hook rod; 12. Lifting block; 13. Push rod; 14. Vertical plate; 15. First telescopic spring; 16. Through groove; 17. First support rod; 18. Horizontal groove; 19. Slider; 20. Second support rod; 21. Central shaft; 22. Horizontal plate; 23. Arc-shaped block; 24. Top block; 25. Second telescopic spring; 26. Fixed plate; 27. Pressurizing chamber; 28. Pressurizing head; 29. ​​Cylinder; 30. Top plate; 31. Fixed rod; 32. Connecting rod. Detailed Implementation

[0016] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0017] like Figure 1 - Figure 6 As shown, a target mold includes a fixed part 1 and a movable part 2. A base 3 is fixedly installed at the bottom of the fixed part 1, and the movable part 2 is installed on the base 3. Two placement slots 8 are opened at the bottom of the movable part 2, and an upper hook rod 9 is fixedly installed in each of the two placement slots 8. Two movement slots 10 are opened at the top of the base 3, and the positions of the two movement slots 10 correspond to the positions of the two placement slots 8. A lower hook rod 11 is slidably connected in the movement slots 10. Both the upper hook rod 9 and the lower hook rod 11 are "L" shaped. Therefore, when the lower hook rod 11 is driven to move in the direction of the upper hook rod 9, the two will interlock with each other, thereby achieving the effect of limiting the position.

[0018] A right arc-shaped groove 4 is provided on the side wall of the fixed part 1 facing the movable part 2, and a left arc-shaped groove 5 is provided on the side wall of the movable part 2 facing the fixed part 1. The right arc-shaped groove 4 and the left arc-shaped groove 5 can be combined to form a complete circle. The distance between the fixed part 1 and the movable part 2 is very small, so when the two are combined, powder will not fill the gap between them. A groove 6 is provided on the side wall of the fixed part 1, and a pressing plate 7 is installed in the groove 6.

[0019] The fixing part 1 has a working cavity, which is connected to the groove 6. The working cavity is equipped with a fixing mechanism for fixing the movable part 2. The fixing mechanism includes a lifting block 12, a push rod 13, a vertical plate 14 and a first telescopic spring 15. The lifting block 12 is installed at the bottom of the button plate 7. The push rod 13 is slidably connected to the bottom of the working cavity. The lifting block 12 and the side wall of the push rod 13 abut against each other. Both the lifting block 12 and the push rod 13 are arc-shaped. The other end of the push rod 13 is fixedly connected to the side wall of the lower hook rod 11. The vertical plate 14 is fixedly installed at the top of the push rod 13. One end of the first telescopic spring 15 is fixedly connected to the side wall of the vertical plate 14 and the other end is fixedly connected to the side wall of the working cavity. The force applied by the first telescopic spring 15 to the vertical plate 14 will keep the lower hook rod 11 in the state of facing the button plate 7 at the end of the moving groove 10.

[0020] When the staff presses the button 7, the button 7 will drive the lifting block 12 to move downward, which will cause the lifting block 12 to squeeze the push rod 13, causing the push rod 13 to drive the lower hook rod 11 to slide along the motion groove 10, so that the lower hook rod 11 can hook the upper hook rod 9.

[0021] A through groove 16 is provided on the side wall of the fixed part 1 facing away from the movable part 2. A connecting rod 32 is fixedly installed between the two lifting blocks 12. A first support rod 17 is rotatably connected to the side wall of the connecting rod 32. A horizontal groove 18 is provided on the side wall of the connecting rod 32. A slider 19 is slidably connected in the horizontal groove 18. A second support rod 20 is rotatably connected to the side wall of the slider 19. A central shaft 21 is rotatably connected to the end of the first support rod 17 away from the working cavity and the end of the second support rod 20 away from the slider 19. The central shaft 21 is located above the through groove 16. A horizontal plate 22 is also fixedly connected to the side wall of the slider 19. An arc-shaped block 23 is fixedly installed on the top of the horizontal plate 22. A top block 24 is fixedly installed on the bottom of the pressing plate 7. The top block 24 is also arc-shaped. The arc-shaped block 23 abuts against the top block 24.

[0022] When the fixing rod 31 is inserted into the through groove 16, the fixing rod 31 will push the central shaft 21 upward, thereby causing the first support rod 17 and the second support rod 20 to rotate. The second support rod 20 will push the slider 19 to slide along the transverse groove 18, thereby causing the transverse plate 22 to drive the arc block 23 to move, so that the arc block 23 and the top block 24 are misaligned. Therefore, the top block 24 and the pressing plate 7 will fall into the groove 6.

[0023] When the fixing rod 31 is not inserted into the through groove 16, the pressing plate 7 will protrude from the groove 6, making it convenient for the operator to press. When the fixing rod 31 is inserted into the through groove 16, the pressing plate 7 will remain flush with the groove 6, making it convenient for the pressure head 28 to press the powder inside the mold.

[0024] A second telescopic spring 25 is fixedly connected to the side wall of the horizontal plate 22 away from the slider 19, and a fixing plate 26 is fixedly connected to the side wall of the connecting rod 32. The end of the second telescopic spring 25 away from the horizontal plate 22 is fixedly connected to the side wall of the fixing part 1. The force applied by the second telescopic spring 25 to the horizontal plate 22 will make the top block 24 and the arc block 23 maintain a mutually supportive state.

[0025] A target material preparation apparatus includes a pressurizing device and a pressurizing head 28. The pressurizing head 28 is located above the pressurizing device, and the pressurizing device has a pressurizing chamber 27. The mold is placed in the pressurizing chamber 27, and a cylinder 29 is installed in the pressurizing chamber 27. A top plate 30 is fixedly installed at the output end of the cylinder 29. Two fixing rods 31 are fixedly connected to the top of the top plate 30. The positions of the two fixing rods 31 correspond to the positions of two through slots 16. When the mold is placed on the top plate 30, the cylinder 29 will drive the top plate 30 to move upward, thereby lifting the mold and making it convenient for the operator to remove the target material after removing the mold.

[0026] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. A target mold, comprising a fixed part (1) and a movable part (2), characterized in that, The fixed part (1) is fixedly provided with a chassis (3) at its bottom. The movable part (2) is installed on the chassis (3). The fixed part (1) has a right arc groove (4) on one side wall facing the movable part (2). The movable part (2) has a left arc groove (5) on one side wall facing the fixed part (1). The fixed part (1) has a groove (6) on its side wall. A pressing plate (7) is installed in the groove (6). The fixed part (1) has a working cavity. The working cavity is connected to the groove (6). A fixing mechanism for fixing the movable part (2) is installed in the working cavity.

2. The target mold according to claim 1, characterized in that, The bottom of the active part (2) has two placement slots (8), and each of the two placement slots (8) is fixedly provided with an upper hook rod (9).

3. A target mold according to claim 2, characterized in that, The chassis (3) has two motion slots (10) on its top. The positions of the two motion slots (10) correspond to the positions of the two placement slots (8). A lower hook rod (11) is slidably connected in the motion slot (10).

4. A target mold according to claim 3, characterized in that, The fixing mechanism includes a lifting block (12), a push rod (13), a vertical plate (14), and a first telescopic spring (15). The lifting block (12) is installed at the bottom of the push plate (7). The push rod (13) is slidably connected to the bottom of the working chamber. The lifting block (12) abuts against the side wall of the push rod (13). Both the lifting block (12) and the push rod (13) are arc-shaped. The other end of the push rod (13) is fixedly connected to the side wall of the lower hook rod (11). The vertical plate (14) is fixedly installed at the top of the push rod (13). One end of the first telescopic spring (15) is fixedly connected to the side wall of the vertical plate (14), and the other end is fixedly connected to the side wall of the working chamber.

5. A target mold according to claim 4, characterized in that, The fixed part (1) has a through groove (16) on one side wall opposite to the movable part (2). A connecting rod (32) is fixedly installed between the two lifting blocks (12). A first support rod (17) is rotatably connected to the side wall of the connecting rod (32). A transverse groove (18) is opened on the side wall of the connecting rod (32). A slider (19) is slidably connected in the transverse groove (18). A second support rod (20) is rotatably connected to the side wall of the slider (19). The first support rod (17) A central shaft (21) is rotatably connected to the end of the second support rod (20) away from the slider (19). The central shaft (21) is located above the through groove (16). A horizontal plate (22) is also fixedly connected to the side wall of the slider (19). An arc-shaped block (23) is fixedly installed on the top of the horizontal plate (22). A top block (24) is fixedly installed at the bottom of the pressing plate (7). The top block (24) is also arc-shaped. The arc-shaped block (23) abuts against the top block (24).

6. A target mold according to claim 5, characterized in that, A second telescopic spring (25) is fixedly connected to the side wall of the horizontal plate (22) away from the slider (19), and a fixing plate (26) is fixedly connected to the side wall of the connecting rod (32). The end of the second telescopic spring (25) away from the horizontal plate (22) is fixedly connected to the side wall of the fixing part (1).

7. A target preparation apparatus, comprising a pressurizing device and a pressurizing head (28), characterized in that, The pressure head (28) is located above the pressure device, which has a pressure chamber (27) inside, and the mold according to any one of claims 1-6 is placed inside the pressure chamber (27).

8. The target preparation apparatus according to claim 7, characterized in that, A cylinder (29) is installed in the pressurization chamber (27). A top plate (30) is fixedly installed at the output end of the cylinder (29). Two fixing rods (31) are fixedly connected to the top of the top plate (30). The positions of the two fixing rods (31) correspond to the positions of the two through slots (16). The mold is placed on the top plate (30).

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