A reticle carrier that is easy to handle

Abstract

The utility model discloses a convenient to carry's photomask carrier, including bearing box body, apron subassembly, crown block disc and locking mechanism. Crown block disc realizes detachable assembly through the up and down sliding block and slide, and the slide is provided with the flange and gradually widens to the direction limit of convenient for, and bearing box body both sides set up the handle, and enhance the stability through the back -to -back shape boss structure. This design structure is reasonable, and convenient operation can improve the stability and reliability of photomask handling and installation, and is applicable to the storage and transportation of high -precision photomask.

Description

Technical Field

[0001] This utility model relates to the technical field of photomask carriers, and in particular to a photomask carrier that is easy to transport. Background Technology

[0002] In the semiconductor manufacturing industry, photomasks, as critical lithography tools, are used to transfer circuit patterns onto wafers. Their transportation must strictly avoid contamination, vibration, and damage. Traditional photomask carriers typically employ metal or plastic housings, providing basic protection, but are often bulky and heavy, making them inconvenient to handle in cleanrooms or between production lines, increasing labor costs and potential risks. As integrated circuit processes advance towards finer nodes, the requirements for photomask precision and cleanliness are increasing. The portability limitations of existing carriers have become a bottleneck restricting production efficiency. Therefore, there is an urgent need for a structurally optimized photomask carrier that is easy to hold and carry. Utility Model Content

[0003] The purpose of this section is to outline some aspects of embodiments of the present invention and to briefly describe some preferred embodiments. Simplifications or omissions may be made in this section, as well as in the abstract and title of this application, to avoid obscuring the purpose of these documents; however, such simplifications or omissions should not be construed as limiting the scope of the present invention.

[0004] In view of the following technical problems existing in the prior art, the present invention provides a photomask carrier that is easy to transport, including a carrier box, a cover plate assembly, a crane plate, and a locking mechanism. The cover plate assembly is assembled to the carrier box via the locking mechanism. The crane plate is detachably assembled to the carrier box via a connecting assembly. The connecting assembly includes an upper connecting assembly and a lower connecting assembly. The upper connecting assembly includes an upper slider one and an upper slider two. The lower connecting assembly includes a lower slide rail one and a lower slide rail two. Upper slider one is provided on both sides of the crane plate. The upper slider one is slidably connected to the lower slide rail one on the carrier box. An upper slider two is provided on the lower end of the crane plate away from the cover plate assembly. The upper slider two is slidably connected to the lower slide rail two on the carrier box.

[0005] As a preferred technical solution for a photomask carrier that is easy to transport, the first and second sliding tracks are provided with raised edges around them, and the width of the first sliding track gradually increases from the inside to the outside.

[0006] As a preferred technical solution for a photomask carrier that is easy to transport, the carrier box is provided with handles on both sides, the carrier box is provided with a U-shaped protrusion on both sides, the handle is provided with a U-shaped protrusion, and the U-shaped protrusion is matched with the U-shaped protrusion.

[0007] As a preferred technical solution for a photomask carrier that is easy to transport, the locking mechanism includes a rotating wheel, a connecting arm, a locking tongue assembly, and an S-shaped elastic element. The rotating wheel is rotatably disposed in the cover plate assembly. The rotating wheel is connected to the locking tongue assembly through the connecting arm and the cover plate assembly through the S-shaped elastic element. Two centrally symmetrical slides are provided on the rotating wheel. The connecting arm is slidably connected to the slides through an optical axis, and a sliding sleeve is disposed on the optical axis.

[0008] As a preferred technical solution for a photomask carrier that is easy to transport, the cover plate assembly includes a cover plate housing and a panel. The cover plate housing is installed at the opening of the carrier box, and the panel and the cover plate housing form a receiving space. The locking mechanism is located in the receiving space.

[0009] As a preferred technical solution for a photomask carrier that is easy to transport, the slide is provided with a buffer.

[0010] As a preferred technical solution for a photomask carrier that is easy to transport, the rotating wheel has a rotating hole, and protrusions are provided around the rotating hole.

[0011] As a preferred technical solution for a photomask carrier that is easy to transport, the connecting arm has a connecting hole, a connecting pin is disposed in the connecting hole, and the connecting pin is fixed to the cover plate housing.

[0012] As a preferred technical solution for a photomask carrier that is easy to transport, the latch assembly includes a mounting shaft, a rotating shaft, and a latch. The rotating shaft is fixedly disposed above the mounting shaft, and the latch is fixedly connected to the rotating shaft.

[0013] As a preferred technical solution for a photomask carrier that is easy to transport, the connecting arm has a mounting groove at the end away from the turntable, the mounting shaft is installed in the mounting groove, the cover plate housing has a bracket, the rotating shaft is rotatably connected to the bracket, the cover plate housing has a through groove, the locking tongue can pass through the through groove and lock to the latch on the carrier box, the cover plate housing has a recess on the side away from the panel, and two sets of elongated protrusions are provided on both sides of the recess, each of the elongated protrusions has several pressure point protrusions, and the pressure point protrusions are diamond-shaped.

[0014] This utility model features a detachable connection structure between the overhead crane plate and the carrier box, enabling quick assembly and disassembly of the overhead crane plate, thus improving flexibility and convenience during use. The sliding cooperation between the upper slider and the lower slide, combined with the design of the raised edge and the gradually increasing slide width, not only ensures guiding and limiting functions but also effectively reduces assembly difficulty, avoids misalignment, and improves installation stability. The matching design of the handles on both sides of the carrier box and the U-shaped protrusions makes the grip more secure during handling and less prone to slippage, while also enhancing the connection between the carrier box and the handles. As a result, the overall design achieves the beneficial effects of convenient operation, safe handling, and reliable assembly. Attached Figure Description

[0015] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort. Among them: Figure 1 This is a schematic diagram of the overall structure of the device of this utility model; Figure 2 This is an exploded schematic diagram of the device of this utility model; Figure 3 This is a schematic diagram of the overhead crane platform; Figure 4 This is a schematic diagram of the locking mechanism in the device of this utility model; Figure 5 This is a partially enlarged schematic diagram of the locking tongue assembly in the device of this utility model; Figure 6 This is a schematic diagram of the assembly of the rotating wheel, connecting arm, and locking tongue assembly in the device of this utility model; Figure 7 This is a schematic diagram of the connecting arm in the device of this utility model; Figure 8 This is a schematic diagram of the locking tongue assembly in the device of this utility model; Figure 9 This is a schematic diagram of the internal structure of the support box of the device of this utility model; Figure 10 This is a schematic diagram of the structure of the pressure point protrusion of the device of this utility model.

[0016] Reference numerals: 100, Carrier box; 101, Lower slide rail one; 102, Lower slide rail two; 103, Protruding edge; 104, U-shaped protrusion one; 200, Cover plate assembly; 201, Cover plate housing; 201a, Bracket; 201b, Through groove; 201c, Recess; 202, Panel; 203, Accommodating space; 300, Locking mechanism; 301, Rotating wheel; 301a, Slide rail; 301b, Optical axis; 301c, Sliding sleeve; 301d, Rotating hole; 301e. 301f, Buffer; 302, Connecting arm; 302a, Connecting hole; 302b, Connecting pin; 302c, Mounting groove; 303, Locking tongue assembly; 303a, Mounting shaft; 303b, Rotating shaft; 303e, Locking tongue; 304, S-shaped elastic element; 400, Long strip protrusion; 500, Pressure point protrusion; 600, Photomask; 700, Overhead crane plate; 701, Upper slider one; 702, Upper slider two; 800, Handle; 801, Rectangular protrusion two. Detailed Implementation

[0017] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings.

[0018] Many specific details are set forth in the following description in order to provide a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Those skilled in the art can make similar extensions without departing from the spirit of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0019] Secondly, the term "an embodiment" or "embodiment" as used herein refers to a specific feature, structure, or characteristic that may be included in at least one implementation of the present invention. The phrase "in one embodiment" appearing in different places in this specification does not necessarily refer to the same embodiment, nor is it a single or selective embodiment that excludes other embodiments.

[0020] Secondly, this utility model is described in detail with reference to the schematic diagrams. When describing the embodiments of this utility model, for ease of explanation, the cross-sectional views illustrating the device structure may be partially enlarged, not adhering to the usual scale. Furthermore, the schematic diagrams are merely examples and should not limit the scope of protection of this utility model. In addition, actual manufacturing should include the three-dimensional spatial dimensions of length, width, and depth.

[0021] Please refer to Figures 1 to 10As shown, a photomask carrier that is easy to transport includes a carrier box 100, a cover plate assembly 200, and a locking mechanism 300. The cover plate assembly 200 is assembled to the carrier box 100 via the locking mechanism 300. The locking mechanism 300 includes a rotating wheel 301, a connecting arm 302, a locking tongue assembly 303, and an S-shaped elastic element 304. The rotating wheel 301 is rotatably disposed in the cover plate assembly 200. The rotating wheel 301 is connected to the locking tongue assembly 303 via the connecting arm 302. The rotating wheel 301 is connected to the cover plate assembly 200 via the S-shaped elastic element 304. The rotating wheel 301 has two centrally symmetrical slide rails 301a. The connecting arm 302 is slidably connected to the slide rails 301a via an optical axis 301b. A sliding sleeve 301c is disposed on the optical axis 301b.

[0022] It should be noted that the rotating wheel 301, as the core driving component, can rotate within the cover assembly 200. It is slidably connected to the optical axis 301b of the connecting arm 302 via a centrally symmetrical slide rail 301a, thus transmitting motion. The sliding sleeve 301c on the optical axis 301b reduces sliding friction, ensuring smooth movement of the connecting arm 302 within the slide rail 301a. When the rotating wheel 301 rotates, it drives the locking tongue assembly 303 to undergo linear displacement via the connecting arm 302, thereby extending or retracting the locking tongue 303e to lock or unlock the connection between the cover assembly 200 and the carrier box 100. The S-shaped elastic element 304 connects the rotating wheel 301 and the cover assembly 200, providing elastic restoring force to ensure the rotating wheel 301 maintains a stable state when not subjected to external force, and enhancing the reliability and operational feel of the locking mechanism 300. This design achieves efficient and smooth switching operation through the rotation of the wheel 301, the sliding engagement of the slide rail 301a and the optical axis 301b, and the assistance of the elastic element, making it suitable for the rapid locking and unlocking requirements of the photomask carrier.

[0023] The device of this utility model also includes a crane plate 700, which is detachably assembled to the carrier box 100 via a connecting assembly. The connecting assembly includes an upper connecting assembly and a lower connecting assembly. The upper connecting assembly includes an upper slider 701 and an upper slider 702, and the lower connecting assembly includes a lower slide rail 101 and a lower slide rail 102. The crane plate 700 has upper sliders 701 on both sides, and the upper sliders 701 are slidably connected to the lower slide rail 101 on the carrier box 100. The crane plate 700 has an upper slider 702 on the lower end away from the cover plate assembly 200, and the upper slider 702 is slidably connected to the lower slide rail 102 on the carrier box 100. The lower slide rails 101 and 102 are surrounded by protruding edges 103, and the width of the lower slide rails 101 gradually increases from the inside to the outside. The support box 100 is provided with handles 800 on both sides, and the support box 100 is provided with a U-shaped protrusion 104 on both sides. The handles 800 are provided with a U-shaped protrusion 2 801, and the U-shaped protrusion 104 matches the U-shaped protrusion 2 801.

[0024] It should be noted that the overhead crane plate 700 is detachably assembled via upper and lower connecting components mounted on the carrier housing 100. The upper connecting component includes two sets of upper sliders that correspond to and slidably connect with the lower sliding track 301a on the carrier housing 100, allowing the overhead crane plate 700 to be smoothly installed and removed from the carrier housing 100. The width of the lower sliding track 101 gradually increases from the inside out, and it is surrounded by protruding edges 103, which not only serve as guides and limits but also automatically correct the position during installation, improving the smoothness and reliability of assembly. The handles 800 and corresponding U-shaped protrusions on both sides of the carrier housing 100 match the U-shaped protrusions on the carrier housing 100, forming a stable locking structure that facilitates handling and enhances overall stability. Through this structural design, the device can significantly improve the convenience and reliability of handling, installation, and disassembly while maintaining the safety of the carrier photomask.

[0025] The cover plate assembly 200 includes a cover plate housing 201 and a panel 202. The cover plate housing 201 is installed at the opening of the support box 100. The panel 202 and the cover plate housing 201 form a receiving space 203, and the locking mechanism 300 is located in the receiving space 203. A buffer member 301f is provided in the slide rail 301a. A rotating hole 301d is provided on the rotating wheel 301, and protrusions 301e are provided around the rotating hole 301d. A connecting hole 302a is provided on the connecting arm 302, and a connecting pin 302b is disposed in the connecting hole 302a. The connecting pin 302b is fixed to the cover plate housing 201.

[0026] It should be noted that the cover assembly 200 consists of a cover housing 201 and a panel 202. The cover housing 201 is installed at the opening of the carrier box 100, forming an accommodating space 203 with the panel 202. The locking mechanism 300 is placed within this space, ensuring a compact and protected structure. The panel 202 has a corresponding keyhole, a medicine key hole, and a rotating hole 301d. By inserting the medicine key into the rotating hole 301d, the rotating wheel 301 can be rotated. The rotating hole 301d has protrusions 301e around its perimeter, ensuring point contact between the rotating wheel 301 and the panel 202, reducing friction and improving service life. The connecting arm 302 is connected to the cover housing 201 via a connecting pin 302b within a connecting hole 302a. The connecting hole 302a is elongated. The connecting arm 302 moves back and forth along the length of the connecting hole 302a via the connecting pin 302b. Simultaneously, its optical axis 301b slides within the slide rail 301a of the rotating wheel 301. The buffer 301f within the slide rail 301a effectively reduces sliding impact, improving operational smoothness and component lifespan. When the rotating wheel 301 rotates, the slide rail 301a guides the optical axis 301b to move, causing the connecting arm 302 to push the locking tongue assembly 303 to achieve locking or unlocking. The S-shaped elastic element 304 provides restoring force to the rotating wheel 301, ensuring its stability in non-operating states. This design, through the rotation of the rotating wheel 301, the buffered sliding of the slide rail 301a and the optical axis 301b, the fixation of the connecting pin 302b, and the assistance of the elastic element, achieves precise and smooth switching operations, meeting the requirements for efficient locking and unlocking of the photomask carrier.

[0027] The latch assembly 303 includes a mounting shaft 303a, a rotating shaft 303b, and a latch 303e. The rotating shaft 303b is fixedly disposed above the mounting shaft 303a, and the latch 303e is fixedly connected to the rotating shaft 303b. The connecting arm 302 has a mounting groove 302c at its end away from the rotating wheel 301. The mounting shaft 303a is installed in the mounting groove 302c. A bracket 201a is provided on the cover housing 201. The rotating shaft 303b is rotatably connected to the bracket 201a. A through groove 201b is provided on the cover housing 201, through which the latch 303e can pass and lock onto the latch on the carrier box 100.

[0028] It should be noted that the latch assembly 303 consists of a mounting shaft 303a, a rotating shaft 303b, and a latch 303e. The rotating shaft 303b is fixed above the mounting shaft 303a, and the latch 303e is fixedly connected to the rotating shaft 303b, forming a complete motion unit. The end of the connecting arm 302 away from the rotating wheel 301 has a mounting groove 302c, in which the mounting shaft 303a is fitted, enabling the connecting arm 302 to move in conjunction with the latch assembly 303. The rotating shaft 303b is rotatably connected to a bracket 201a on the cover housing 201, ensuring the stability of the latch assembly 303's movement. When the rotating wheel 301 rotates, the sliding engagement between the slide rail 301a and the optical shaft 301b drives the connecting arm 302 to move. The connecting arm 302 drives the locking tongue assembly 303 via the mounting shaft 303a, causing the rotating shaft 303b to rotate on the bracket 201a. This, in turn, pushes the locking tongue 303e through the through slot 201b on the cover housing 201, locking or unlocking it with the latch on the carrier box 100. The S-shaped elastic element 304 provides restoring force to the rotating wheel 301, assisting in the stability and smooth operation of the locking mechanism 300. The buffer element 301f in the slide rail 301a and the sliding sleeve 301c on the optical shaft 301b further reduce motion friction and impact. This design achieves efficient and reliable opening and closing operation of the photomask carrier through the rotation of the rotating wheel 301, the linear drive of the connecting arm 302, the rotation of the rotating shaft 303b, and the precise locking action of the locking tongue 303e.

[0029] A recess 201c is provided on the side of the cover plate housing 201 away from the panel 202. The recess 201c and the cover plate housing 201 are stepped to prevent deformation. Two sets of elongated protrusions 400 are provided on both sides of the recess 201c. Each elongated protrusion 400 is provided with several pressure point protrusions 500. The pressure point protrusions 500 are diamond-shaped and can press against the photomask 600.

[0030] It should be noted that a recess 201c is provided on the side of the cover housing 201 away from the panel 202. The recess 201c and the cover housing 201 are designed in a stepped manner. This structure enhances the rigidity of the housing, effectively prevents deformation, and ensures stability during long-term use. Two sets of elongated protrusions 400 are arranged on both sides of the recess 201c. Each set of elongated protrusions 400 has several diamond-shaped pressure point protrusions 500 distributed on it. These protrusions not only increase the friction and gripping force during operation and prevent slippage, but also directly press against the photomask 600, providing additional positioning and fixing functions, and protecting the stability of the photomask 600 within the carrier.

[0031] The working principle of this utility model: This utility model's photomask carrier, through the coordinated operation of the carrier box 100, cover plate assembly 200, overhead crane plate 700, and locking mechanism 300, achieves convenient handling and safe storage of the photomask. The overhead crane plate 700 is slidably connected to the lower sliding tracks 101 and 102 on the carrier box 100 via upper slider 1 701 and upper slider 2 702. The gradually increasing width of the lower sliding track 101 and the design of the protruding edge 103 ensure guidance and limiting during assembly, facilitating quick assembly and disassembly and improving stability. The handles 800 on both sides of the carrier box 100 are connected by matching U-shaped protrusions 1 104 and 801, enhancing grip stability and facilitating handling. The locking mechanism 300 drives the connecting arm 302 through the rotation of the rotating wheel 301. The connecting arm 302, through the sliding engagement of the optical shaft 301b and the slide rail 301a, drives the locking tongue 303e of the locking tongue assembly 303 to move in the through groove 201b of the cover plate housing 201, locking or unlocking it to the latch of the carrier box 100, thus achieving a reliable connection between the cover plate assembly 200 and the carrier box 100. The S-shaped elastic element 304 provides restoring force, and the buffer element 301f in the slide rail 301a and the sliding sleeve 301c on the optical shaft 301b reduce friction and impact, ensuring smooth operation. The recess 201c on the cover plate housing 201 and the diamond-shaped pressure point protrusion 500 on the elongated protrusion 400 enhance the structural rigidity and fix the photomask 600, preventing its displacement or damage during transportation, thereby achieving efficient, stable, and safe photomask handling and storage.

[0032] The embodiments are only used to illustrate the technical solutions of this utility model and are not intended to limit it. Although this utility model has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solutions of this utility model without departing from the spirit and scope of the technical solutions of this utility model, and all such modifications or substitutions should be covered within the scope of the claims of this utility model.

Claims

1. A photomask carrier that is easy to transport, characterized in that, The device includes a carrier box, a cover plate assembly, a crane plate, and a locking mechanism. The cover plate assembly is assembled to the carrier box via the locking mechanism. The crane plate is detachably assembled to the carrier box via a connecting assembly, which includes an upper connecting assembly and a lower connecting assembly. The upper connecting assembly includes an upper slider one and an upper slider two, and the lower connecting assembly includes a lower slide rail one and a lower slide rail two. The crane plate has upper slider one on both sides, and the upper slider one is slidably connected to the lower slide rail one on the carrier box. The lower end of the crane plate away from the cover plate assembly has an upper slider two, and the upper slider two is slidably connected to the lower slide rail two on the carrier box.

2. The easily transportable photomask carrier according to claim 1, characterized in that, The first and second sliding tracks are surrounded by raised edges, and the width of the first sliding track gradually increases from the inside to the outside.

3. The easily transportable photomask carrier according to claim 1, characterized in that, The support box is provided with handles on both sides, and the support box is provided with a U-shaped protrusion on both sides. The handle is provided with a U-shaped protrusion, and the U-shaped protrusion matches the U-shaped protrusion.

4. The easily transportable photomask carrier according to claim 1, characterized in that, The locking mechanism includes a rotating wheel, a connecting arm, a locking tongue assembly, and an S-shaped elastic element. The rotating wheel is rotatably disposed in the cover plate assembly. The rotating wheel is connected to the locking tongue assembly through the connecting arm and the cover plate assembly through the S-shaped elastic element. Two centrally symmetrical slide tracks are provided on the rotating wheel. The connecting arm is slidably connected to the slide tracks through an optical axis, and a sliding sleeve is disposed on the optical axis.

5. The easily transportable photomask carrier according to claim 4, characterized in that, The cover assembly includes a cover housing and a panel. The cover housing is installed at the opening of the carrier box, and the panel and the cover housing form a receiving space. The locking mechanism is located in the receiving space.

6. The easily transportable photomask carrier according to claim 5, characterized in that, The slide is equipped with a buffer component.

7. The easily transportable photomask carrier according to claim 6, characterized in that, The rotating wheel has a rotating hole, and protrusions are provided around the rotating hole.

8. The easily transportable photomask carrier according to claim 7, characterized in that, The connecting arm has a connecting hole, and a connecting pin is disposed in the connecting hole. The connecting pin is fixed to the cover plate housing.

9. The easily transportable photomask carrier according to claim 8, characterized in that, The latch assembly includes a mounting shaft, a rotating shaft, and a latch. The rotating shaft is fixedly disposed above the mounting shaft, and the latch is fixedly connected to the rotating shaft.

10. The easily transportable photomask carrier according to claim 9, characterized in that, The connecting arm has a mounting groove at the end away from the rotating wheel, and the mounting shaft is installed in the mounting groove. A bracket is provided on the cover plate housing, and the rotating shaft is rotatably connected to the bracket. A through groove is provided on the cover plate housing, and the locking tongue can pass through the through groove to lock onto the latch on the carrier box. A recess is provided on the side of the cover plate housing away from the panel, and two sets of elongated protrusions are provided on both sides of the recess. Each elongated protrusion is provided with several pressure point protrusions, and the pressure point protrusions are diamond-shaped.

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