A liquid storage tank

Abstract

The utility model provides a kind of liquid storage tank, including liquid storage tank shell, adding device and liquid supplement pipeline, the adding device includes adding mouth and adding pipeline, the top of adding mouth is provided with adding mouth sealing cover, the lower end of adding mouth is connected with the adding pipeline, adding mouth sealing cover and the adding mouth are all arranged on the outside of the liquid storage tank shell, the adding pipeline is extended from the liquid storage tank shell to the inside of the liquid storage tank shell;The liquid supplement pipeline extends to the inside of the liquid storage tank shell.The utility model can realize chelating agent conveniently add, reduce the risk that operator contacts harmful substance simultaneously, and can effectively inhibit chelating agent volatilization, prevent toxic gas from escaping and impurity into.In addition, liquid storage tank inside is also provided with spraying device, water inlet pipe and liquid outlet, facilitate to clean liquid storage tank, avoid its pollution to newly injected chelating agent.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor equipment technology, and in particular relates to a liquid storage tank. Background Technology

[0002] In the etching machine cleaning process, chelating agents are usually added to the alkaline bath to enhance the cleaning effect. Because these chelating agents need to form stable chelates with metal ions and adapt to the alkaline cleaning environment, they generally have chemical properties such as low toxicity, strong alkalinity, and irritation. Their strong alkalinity may cause corrosive damage to the skin and mucous membranes of operators, and their irritating odor may also harm the respiratory system. Their low toxicity, however, poses health risks with long-term exposure.

[0003] Currently, chelating agents are added to the alkali tank through a storage tank within a storage cabinet. In practice, the top cover of the storage tank needs to be opened, and the replenishment pipeline from the alkali tank needs to be inserted into the tank opening. Because the replenishment pipeline needs to remain inside the tank for an extended period to ensure continuous supply, the top cover of the storage tank cannot be closed, leaving it constantly open. This situation not only causes the chelating agent inside the tank to be in prolonged contact with air, leading to oxidation and hydrolysis, but also allows external dust and impurities to fall into the tank through the open opening, causing contamination of the chelating agent. Furthermore, the gases produced by the volatilization of the chelating agent are prone to leaking from the open opening, resulting in raw material loss and compromising the safety of the operating environment. Utility Model Content

[0004] In view of the shortcomings of the prior art described above, the purpose of this utility model is to provide a liquid storage tank to solve the problem that the liquid storage tank in the prior art is in an open state during use.

[0005] To achieve the above and other related objectives, this utility model provides a liquid storage tank, which includes at least:

[0006] Storage tank shell;

[0007] An adding device is used to add a chelating agent to the storage tank. The adding device includes an adding port and an adding pipe. The top of the adding port is provided with an adding port sealing cover. The lower end of the adding port is connected to the adding pipe. The adding port sealing cover and the adding port are both located on the outside of the storage tank shell. The adding pipe extends through the storage tank shell and into the interior of the storage tank shell.

[0008] A replenishment pipeline extends into the interior of the storage tank shell and is used to replenish the alkali tank.

[0009] A bubbling pipe extends through the liquid storage tank shell and into the interior of the liquid storage tank shell.

[0010] Preferably, the adding device further includes a filter screen disposed inside the adding port, and the outer periphery of the filter screen is adapted to the inner wall of the adding port to cover the entire cross-section of the adding port.

[0011] Preferably, the replenishment pipeline extends from the top surface of the liquid storage tank shell to the inner bottom of the liquid storage tank shell, or is connected from the bottom of the outer side of the liquid storage tank shell.

[0012] Preferably, the liquid storage tank is equipped with N≥1 liquid level sensors, and when N>1 liquid level sensors are provided, the N liquid level sensors are located at different heights of the liquid storage tank.

[0013] Preferably, the liquid storage tank further includes at least one spray device, which is disposed above the inner wall of the liquid storage tank shell. The installation height of the spray device is higher than the maximum liquid level line of the liquid storage tank under normal operating conditions, and the outlet of the spray device faces the side opposite to the installation surface.

[0014] Preferably, the liquid storage tank further includes an observation window, which is located above the outer wall of the liquid storage tank shell and is higher than the height of the spray device.

[0015] Preferably, the liquid storage tank further includes a water inlet pipe, which is located on the top surface of the liquid storage tank shell, and the water outlet of the water inlet pipe is connected to the interior of the liquid storage tank shell for cleaning the liquid storage tank.

[0016] Preferably, the liquid storage tank further includes a drain port for discharging the liquid inside the liquid storage tank, and the drain port is located at the bottom of the liquid storage tank shell.

[0017] Preferably, the liquid storage tank further includes an exhaust port, which is located on the top surface of the liquid storage tank shell, with one end of the exhaust port connected to the interior of the liquid storage tank shell and the other end connected to an exhaust pipe.

[0018] As described above, the present invention provides a liquid storage tank, which has the following beneficial effects:

[0019] 1. This utility model, by adding an adding device and a replenishment pipeline, enables more convenient addition of chelating agents while reducing the risk of operators coming into contact with harmful substances. The top of the adding port of the adding device is equipped with a sealing cover, which effectively inhibits the volatilization of the chelating agent, preventing the escape of toxic gases and the entry of impurities into the chelating agent. The adding device includes a filter screen, which filters the injected chelating agent, effectively blocking impurities from entering the storage tank, thereby avoiding equipment malfunctions caused by impurities clogging subsequent pipelines or valves.

[0020] 2. This utility model is equipped with a spray device to clean the inside of the tank. It is also equipped with a water inlet pipe, which can work with the spray device to efficiently remove impurities and crystals deposited at the bottom of the tank, preventing them from contaminating the newly injected chelating agent and thus ensuring the purity of the liquid. In addition, the storage tank is also equipped with a drain port to facilitate the discharge of the cleaned liquid.

[0021] 3. This utility model is equipped with an observation window, through which the liquid level of the chelating agent in the storage tank can be observed, whether there is sedimentation or stratification, and the cleanliness of the inside of the storage tank can be checked after cleaning.

[0022] 4. This utility model is equipped with an exhaust vent, which can promptly remove harmful gases volatilized from the liquid storage tank, preventing them from accumulating in the tank and causing corrosion, or endangering the safety of operators due to sudden gas release during opening operations.

[0023] 5. This utility model is equipped with a bubbling pipeline, which can effectively prevent the chelating agent from crystallizing due to long-term standing, thereby ensuring its uniform and stable concentration. Attached Figure Description

[0024] Figure 1 The diagram shown is a structural schematic of a liquid storage tank according to this utility model.

[0025] Figure 2 The diagram shown is a structural schematic of another liquid storage tank according to this utility model.

[0026] Component designation explanation

[0027] 100 Storage tank shell 200 Add device 210 Add port 220 Add sealing cover plate 230 Add pipes 240 Filter 300 fluid replenishment tubing 400 Liquid level sensor 500 Spraying device 600 Inlet pipe 700 Observation window 800 drain port 900 exhaust vent 110 Bubble pipe Detailed Implementation

[0028] The following specific embodiments illustrate the implementation of this utility model. Those skilled in the art can easily understand other advantages and effects of this utility model from the content disclosed in this specification.

[0029] Please see Figures 1 to 2It should be understood that the structures, proportions, sizes, etc., illustrated in the accompanying drawings are merely for illustrative purposes to aid those skilled in the art and are not intended to limit the scope of this invention. Therefore, they have no substantial technical significance. Any modifications to the structure, changes in proportions, or adjustments to size, without affecting the effectiveness and purpose of this invention, should still fall within the scope of the disclosed technical content. Furthermore, the terms "upper," "lower," "left," "right," "middle," and "one" used in this specification are merely for clarity and not intended to limit the scope of this invention. Changes or adjustments to their relative relationships, without substantially altering the technical content, should also be considered within the scope of this invention.

[0030] like Figure 1 As shown, this utility model embodiment provides a liquid storage tank, which includes at least:

[0031] Storage tank shell 100;

[0032] An adding device 200 is used to add a chelating agent to the storage tank. The adding device 200 includes an adding port 210 and an adding pipe 230. The top of the adding port 210 is provided with an adding port sealing cover 220, and the lower end of the adding port 210 is connected to the adding pipe 230. The adding port sealing cover 220 and the adding port 210 are both provided on the outside of the storage tank shell 100. The adding pipe 230 extends through the storage tank shell 100 and into the interior of the storage tank shell 100.

[0033] A replenishment pipeline 300 extends into the interior of the storage tank shell 100 and is used to replenish the alkali tank.

[0034] Bubbling pipe 110 extends through the liquid storage tank shell 100 and into the interior of the liquid storage tank shell 100.

[0035] Specifically, the shape of the liquid storage tank shell 100 may be square or circular, but is not limited to this, and is set according to the actual application requirements.

[0036] Specifically, the liquid storage tank shell 100 may be made of polytetrafluoroethylene material, but is not limited to this.

[0037] In this embodiment, the liquid storage tank shell 100 is preferably made of polytetrafluoroethylene (PTFE). Since chelating agents are often highly alkaline and corrosive, using PTFE effectively resists their chemical corrosion, preventing chelating agent leakage due to component corrosion. Simultaneously, PTFE's low surface energy reduces chelating agent residue adhesion, lowering the risk of mixing different chelating agents during component replacement and facilitating subsequent cleaning and maintenance. Furthermore, PTFE's insulating properties prevent electrochemical corrosion caused by contact between metal components and corrosive chelating agents, further improving equipment lifespan and operational safety.

[0038] Specifically, the adding device 200 is used to add chelating agent to the storage tank. The adding port 210 cooperates with the adding pipe 230 to form a chelating agent adding channel, which not only facilitates the adding operation of the chelating agent, but also prevents the drug solution from leaking to the outside during the adding process. The adding port sealing cover 220 seals the adding port 210 in the non-adding state, which is used to block the connection between the adding port 210 and the external environment, thereby preventing the release of toxic gases generated by the volatilization of the chelating agent.

[0039] As an example, the adding device 200 further includes a filter screen 240 disposed within the adding port 210, and the outer periphery of the filter screen 240 is adapted to the inner wall of the adding port 210 to cover the entire cross section of the adding port 210.

[0040] Specifically, the filter screen 240 is detachably or fixedly installed in the internal channel of the addition port 210. The filter screen 240 can ensure that when the chelating agent enters the addition pipe 230 through the addition port 210, it can block any particulate impurities that may be contained in the chelating agent. This prevents impurities from entering the storage tank with the chelating agent and clogging subsequent pipes and valves, which could lead to equipment failure. At the same time, the adapted outer peripheral contour design can also prevent the drug solution from leaking from the gap between the filter screen 240 and the inner wall.

[0041] As an example, the replenishment pipeline 300 may extend from the top surface of the liquid storage tank housing 100 to the inner bottom end of the liquid storage tank housing 100, or may be connected from the bottom of the outer side of the liquid storage tank housing 100, but is not limited thereto. The installation position and method of the replenishment pipeline 300 shall be set according to the actual application requirements.

[0042] In this example, such as Figure 1As shown, the replenishment pipeline 300 is arranged to extend from the top surface of the storage tank shell 100 to its internal bottom. After passing through the top surface of the storage tank shell 100, the replenishment pipeline 300 extends vertically downward to the internal bottom area of ​​the storage tank. Its penetration point is reliably sealed by a sealing element to prevent leakage of the chelating agent. The inlet end of the replenishment pipeline 300 is always immersed in the chelating agent in the tank. Even when the liquid level drops to the minimum level, it can still ensure that the residual liquid at the bottom of the tank is extracted, minimizing liquid waste. At the same time, the top-through structure avoids the risk of bottom pressure leakage caused by openings at the bottom of the storage tank shell 100, ensuring a stable and smooth replenishment process and continuously supplying sufficient chelating agent to the alkali tank.

[0043] In another embodiment, such as Figure 2 As shown, the replenishment pipeline 300 is connected from the bottom of the outer side of the storage tank shell 100, and its interface is sealed to the bottom side wall of the storage tank shell 100. The inlet end of the replenishment pipeline 300 is close to the bottom of the tank, allowing direct extraction of low-level liquid from the storage tank. Gravity-assisted replenishment reduces the pressure requirement on the pumping device, minimizes the space occupied by the pipeline within the tank, and avoids interference with other pipelines and components. Furthermore, the bottom-connected structure facilitates quick disconnection from the storage tank during maintenance of the replenishment pipeline 300, and the low-level extraction minimizes the residue of chelating agent in the storage tank, adapting to the daily maintenance and chelating agent emptying needs of the storage tank, ensuring efficient and economical replenishment of the alkali tank.

[0044] As an example, the replenishment line 300 is equipped with a pneumatic valve and / or a replenishment pump (not shown).

[0045] Specifically, the replenishment pipeline 300 is equipped with a pneumatic valve and / or a replenishment pump. The pneumatic valve can control the opening and closing of the replenishment pipeline 300 through air pressure, realizing rapid start and stop of the replenishment process. Its corrosion-resistant material is suitable for the strongly alkaline environment of the chelating agent, ensuring reliable sealing. The replenishment pump provides power for the delivery of the chelating agent, which is especially suitable for replenishment scenarios with long distances or high liquid level differences, and can accurately control the delivery flow rate. When used in combination, the pneumatic valve is responsible for pipeline on / off control, and the replenishment pump is responsible for pressure and flow regulation, forming a collaborative control mechanism. When used alone, the pneumatic valve can be used with gravity flow to achieve simple replenishment, and the replenishment pump can simplify the pipeline structure through its own start and stop control. This configuration can flexibly adapt to different replenishment conditions, improve the controllability and stability of delivering the chelating agent to the alkaline tank, and avoid the cleaning effect being affected by flow fluctuations.

[0046] As an example, the liquid storage tank is equipped with N≥1 liquid level sensors 400, and when N>1 liquid level sensors 400 are provided, the N liquid level sensors 400 are located at different heights of the liquid storage tank.

[0047] Specifically, if the storage tank is equipped with four liquid level sensors 400, the first liquid level sensor 400 serves as the full liquid warning level for the storage tank. When the chelating agent level reaches this position, the liquid level sensor 400 can trigger a full liquid signal, requiring drainage. The second liquid level sensor 400 serves as the upper limit of the normal operating liquid level. After reaching this level, the replenishment of chelating agent into the storage tank stops. The third liquid level sensor 400 serves as the lower limit of the normal operating liquid level, requiring chelating agent replenishment. The corresponding liquid level sensors 400 can provide real-time feedback on whether the chelating agent is within the effective inventory range that meets production needs. The fourth liquid level sensor 400 serves as the low liquid emergency warning level. When the liquid level drops to this position, the liquid level sensor 400 will trigger a low liquid alarm, reminding operators to replenish the chelating agent in time to prevent the cleaning process from being interrupted due to depletion of the chelating agent. The height of each liquid level needs to be set according to actual application requirements and is not limited here. It should be noted that, in practice, the number of liquid level sensors 400 can be set to any integer greater than 1, such as 2, 3, 5, 6, 7, 8, 9, etc. The specific number can be flexibly determined according to the actual situation such as the liquid level requirements of the storage tank, and no unique limit is made here.

[0048] In this embodiment, the storage tank has a capacity of 75L and is equipped with four liquid level sensors 400. The first liquid level sensor 400 is set at 70L, and when the chelating agent liquid level reaches this position, drainage is required. The second liquid level sensor 400 is set at 60L, which is the maximum replenishment level, and replenishment of chelating agent to the storage tank should be stopped when the liquid level reaches this position. The third liquid level sensor 400 is set at 25L, and when the chelating agent liquid level drops to this position, replenishment of chelating agent is required. The fourth liquid level sensor 400 is set at 5L, which is the minimum liquid level, and an alarm will be triggered when the liquid level reaches this liquid level sensor 400.

[0049] As an example, the liquid storage tank also includes at least one spray device 500, which is disposed above the inner side wall of the liquid storage tank shell 100. The installation height of the spray device 500 is higher than the maximum liquid level line of the liquid storage tank under normal operating conditions, and the outlet of the spray device 500 faces the side opposite to the installation surface.

[0050] Specifically, the spraying device 500 is used to clean the inner wall and bottom of the storage tank after chelating agent replacement, maintenance, or long-term shutdown. The spraying device 500 can be connected to an external water source and uses spray nozzles to spray high-pressure water or cleaning fluid into the storage tank, washing away any residual chelating agent layer on the tank wall to prevent performance failure caused by mixing different types of chelating agents. It also removes impurities and crystals deposited at the bottom of the tank, preventing contamination of newly injected chelating agent and ensuring the purity of the solution. Furthermore, spray cleaning requires no manual operation, reducing the risk of injury from highly alkaline residues and shortening the cleaning time of the storage tank. This provides a clean storage environment for subsequent chelating agent replacement or replenishment, indirectly improving production efficiency.

[0051] Specifically, the number of spray devices 500 is set to at least one, and each spray device 500 is installed at a preset mounting position on the inner side wall of the liquid storage tank. The combined spray range of one or more spray devices 500 can cover the area of ​​the liquid storage tank to be cleaned. The specific number of spray devices 500 is set according to the cleaning requirements of liquid storage tanks of different volumes.

[0052] In this embodiment, as Figure 1 As shown, there are two spray devices 500, which are respectively installed on both sides of the inner wall of the liquid storage tank.

[0053] Specifically, the spraying device 500 has at least one spray head, which is connected to the spraying body and can convert the cleaning water source into a high-pressure water stream or atomized droplets and spray them into the interior of the storage tank. A single spray head can be designed at a specific angle to cover the core area inside the storage tank, while multiple spray heads can be distributed along the axial direction of the spraying body. The number and layout of the spray heads can be adapted to the volume and shape of the storage tank to ensure that the cleaning fluid can act evenly on all contact surfaces inside the storage tank, effectively removing residual chelating agents.

[0054] As an example, the spraying device 500 also includes a drive component (not shown), and the drive component can drive the spraying body of the spraying device 500 to rotate around a preset axis so as to adjust the spraying angle through the rotation of the spraying body.

[0055] Specifically, the power output of the drive component enables the spray body to reciprocate within a set angle range, thereby dynamically adjusting the spray angle. This allows the cleaning fluid sprayed by the spray body to cover all areas of the inner wall of the storage tank, preventing incomplete cleaning. Simultaneously, the rotation speed of the spray body can be controlled by adjusting the rotation speed of the drive component to adapt to different cleaning needs, thereby improving the internal cleaning of the storage tank and providing a cleaner environment for subsequent chelating agent conversion or storage. It should be noted that the spray range and spray angle of the spray device 500 are set according to actual application requirements.

[0056] In this embodiment, the driving component can drive the spraying device 500 to rotate up and down within a range of 60°, thereby cleaning the inner wall of the storage tank.

[0057] As an example, the liquid storage tank also includes a water inlet pipe 600; the water inlet pipe 600 is located on the top surface of the liquid storage tank shell 100, and the water outlet end of the water inlet pipe 600 is connected to the interior of the liquid storage tank shell 100 for cleaning the liquid storage tank.

[0058] Specifically, the inlet pipe 600 is fixedly installed on the top surface of the storage tank shell 100. Its inlet end can be connected to an external cleaning water source, while its outlet end extends directly into and communicates with the internal cavity of the storage tank shell 100, specifically for providing water support for cleaning the inside of the storage tank. When the storage tank needs to be cleaned, the control valve of the inlet pipe 600 can be opened to allow cleaning water to flow into the storage tank through the outlet end. This, combined with the rotating spray action of the spray device 500 inside the storage tank, helps to remove residual chelating agent deposits and impurities; providing a clean storage environment for the injection of new chelating agent, further ensuring the purity of the chelating agent and the stability of equipment operation.

[0059] As an example, the storage tank also includes an observation window 700, which is located above the outer arm of the storage tank housing 100 and below the height of the spray device 500.

[0060] Specifically, the observation window 700 is located in the upper area of ​​the outer wall of the storage tank shell 100, and its installation height is lower than that of the spray device 500. The observation window 700 is made of transparent and corrosion-resistant material, allowing operators to directly observe the liquid level of the chelating agent in the storage tank, and whether there is any precipitation or stratification of the chelating agent. This provides a convenient visual method for daily inspections, helps to determine whether the state of the chelating agent in the storage tank meets the process requirements, and enables timely detection and handling of abnormalities. At the same time, the observation window 700 can also be used to check the cleanliness of the inside of the storage tank after cleaning.

[0061] As an example, the liquid storage tank also includes a drain port 800 for discharging liquid inside the liquid storage tank, and the drain port 800 is located at the bottom of the liquid storage tank shell 100.

[0062] Specifically, the drain port 800 is used to discharge the liquid inside the storage tank to the outside; the end of the drain port 800 away from the inside of the storage tank is connected to the plant drainage system, so that the liquid in the storage tank flows out through the drain port 800 and directly enters the plant drainage system, thus forming a path for liquid discharge.

[0063] As an example, the liquid storage tank also includes an exhaust port 900, which is located on the top surface of the liquid storage tank shell 100. One end of the exhaust port 900 is connected to the interior of the liquid storage tank shell 100, and the other end is connected to an exhaust pipe.

[0064] Specifically, since the chelating agent is highly alkaline, its volatile gases may form a corrosive mixture with the residual air in the storage tank. The exhaust vent 900 can use the negative pressure of the exhaust pipe to promptly remove the harmful gases volatilized from the storage tank, preventing the accumulation of gases in the storage tank that could lead to corrosion of the tank shell 100 or sudden release that could endanger operators during opening operations. At the same time, the directional connection with the exhaust system ensures that harmful gases are professionally treated before being discharged, preventing direct leakage and environmental pollution, and further improving the safety and environmental friendliness of the storage tank operation.

[0065] As an example, in this embodiment, the bubbling pipe 110 extends from the top surface of the liquid storage tank housing 100 to the bottom of the interior of the liquid storage tank housing 100.

[0066] Specifically, the top of the bubbling pipe 110 can be connected to an external compressed air source, and the bottom is provided with multiple air outlets. During operation, compressed gas is transported through the pipe to the bottom of the storage tank and sprayed out from the air outlets, forming microbubbles in the chelating agent. Through the rising and stirring action of the bubbles, crystallization of the chelating agent due to long-term standing can be avoided, ensuring uniform concentration of the chelating agent. At the same time, it can enhance the contact between the chelating agent and the residual air in the storage tank, assist the exhaust port 900 in the extraction efficiency of volatile gases, and ensure the stable performance of the chelating agent.

[0067] In summary, this utility model provides a liquid storage tank, including a tank shell, an adding device, and a replenishment pipeline. The adding device includes an adding port and an adding pipe. A sealing cover is provided at the top of the adding port, and the lower end of the adding port is connected to the adding pipe. Both the sealing cover and the adding port are located on the outer side of the tank shell. The adding pipe extends through the tank shell and into its interior. The replenishment pipeline also extends into the tank shell. This utility model allows for convenient addition of chelating agents, reduces the risk of operator contact with harmful substances, and effectively inhibits the volatilization of chelating agents, preventing the escape of toxic gases and the entry of impurities. Furthermore, the tank interior is equipped with a spray device, a water inlet pipe, and a drain outlet for easy cleaning, preventing contamination of the newly added chelating agent. Therefore, this utility model effectively overcomes the various shortcomings of existing technologies and has high industrial application value.

[0068] The above embodiments are merely illustrative of the principles and effects of this utility model and are not intended to limit the scope of this utility model. Any person skilled in the art can modify or alter the above embodiments without departing from the spirit and scope of this utility model. Therefore, all equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in this utility model should still be covered by the claims of this utility model.

Claims

1. A liquid storage tank, characterized in that, The liquid storage tank includes at least: Storage tank shell; An adding device is used to add a chelating agent to the storage tank. The adding device includes an adding port and an adding pipe. The top of the adding port is provided with an adding port sealing cover. The lower end of the adding port is connected to the adding pipe. The adding port sealing cover and the adding port are both located on the outside of the storage tank shell. The adding pipe extends through the storage tank shell and into the interior of the storage tank shell. A replenishment pipeline extends into the interior of the storage tank shell and is used to replenish the alkali tank. A bubbling pipe extends through the liquid storage tank shell and into the interior of the liquid storage tank shell.

2. The liquid storage tank according to claim 1, characterized in that: The adding device also includes a filter screen disposed inside the adding port, and the outer periphery of the filter screen is adapted to the inner wall of the adding port to cover the entire cross-section of the adding port.

3. The liquid storage tank according to claim 1, characterized in that: The replenishment pipeline extends from the top surface of the liquid storage tank shell to the inner bottom of the liquid storage tank shell, or is connected from the bottom of the outer side of the liquid storage tank shell.

4. The liquid storage tank according to claim 1, characterized in that: The liquid storage tank is equipped with N≥1 liquid level sensors, and when N>1 liquid level sensors are provided, the N liquid level sensors are located at different heights of the liquid storage tank.

5. The liquid storage tank according to claim 1, characterized in that: The liquid storage tank also includes at least one spray device, which is disposed above the inner wall of the liquid storage tank shell. The installation height of the spray device is higher than the maximum liquid level line of the liquid storage tank under normal operating conditions, and the outlet of the spray device faces the side opposite to the installation surface.

6. The liquid storage tank according to claim 5, characterized in that: The storage tank also includes an observation window, which is located above the outer wall of the storage tank shell and is higher than the height of the spray device.

7. The liquid storage tank according to claim 1, characterized in that: The liquid storage tank also includes a water inlet pipe, which is located on the top surface of the liquid storage tank shell, and the water outlet end of the water inlet pipe is connected to the interior of the liquid storage tank shell for cleaning the liquid storage tank.

8. The liquid storage tank according to claim 1, characterized in that: The liquid storage tank also includes a drain port for discharging the liquid inside the liquid storage tank, and the drain port is located at the bottom of the liquid storage tank shell.

9. The liquid storage tank according to claim 1, characterized in that: The liquid storage tank also includes an exhaust port, which is located on the top surface of the liquid storage tank shell. One end of the exhaust port is connected to the interior of the liquid storage tank shell, and the other end is connected to an exhaust pipe.

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