A track transmission device of an online radio frequency plasma cleaning machine

Abstract

The utility model discloses a track transmission device of online radio frequency plasma cleaning machine, through frame and fixed, place the workpiece of waiting for washing on transmission belt, start motor, motor drives transmission shaft rotation, transmission shaft drives bearing rotation, bearing drives transmission belt rotation, and transmission belt can move the workpiece of waiting for washing to the work station of waiting for washing. When the workpiece of different specifications shape is encountered, can manually rotate rotating handle, and handle drives the nut on ball screw to send displacement, then the nut will drive second support board movement, and the sliding block is slid on the slide rail to the second support board drive, thereby realize the adjustment to two transmission belt width, to adapt to the effect of transporting different shape, regular workpiece.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor device cleaning equipment technology, and in particular to a track transmission device for an online radio frequency plasma cleaner. Background Technology

[0002] In modern industrial production, especially in fields such as semiconductors, electronic circuits, and precision manufacturing, the requirements for workpiece surface cleanliness and performance have reached unprecedented levels. Traditional cleaning methods, such as solvent cleaning and ultrasonic cleaning, have revealed many drawbacks. Solvent cleaning not only generates large amounts of chemical waste, causing serious environmental pollution, but also leaves solvent residues that are difficult to completely remove, affecting product quality. While ultrasonic cleaning improves cleaning efficiency to some extent, it is not effective at cleaning tiny crevices, the interior of complex workpiece structures, and nanoscale contaminants, failing to meet the demands of high-precision processes.

[0003] Existing batch plasma cleaning machines suffer from low automation and limited production efficiency. For example, Chinese utility model patent CN120127032A discloses a semiconductor device cleaning equipment and its cleaning process, including a frame with a vacuum chamber installed inside. A chamber door is installed on one side of the frame, which can cover the open side of the vacuum chamber. An RF matching unit is installed on the upper part of the vacuum chamber and electrically connected to an RF power supply within the frame. The RF matching unit is used to excite plasma into the vacuum chamber. A rack is installed inside the vacuum chamber to hold the workpieces to be cleaned, and the rack has at least one layer of space for placing the workpieces. The anode and cathode plates of the rack are horizontally designed. Compared to a vertical anode plate design, this design is simpler, lighter, and more operable. The anode and cathode plates can be installed by sliding inwards and disassembled by sliding outwards, thus easily achieving the assembly and disassembly of the anode and cathode plates. This semiconductor device cleaning equipment can better meet the needs of plasma cleaning.

[0004] However, this semiconductor device cleaning equipment requires manual movement of the workpieces in and out of the vacuum chamber during the cleaning process, which results in low efficiency when cleaning large batches of workpieces with different shapes and specifications. Utility Model Content

[0005] The purpose of this invention is to provide a track transport device for an online radio frequency plasma cleaner, in order to solve the problem of low efficiency when cleaning large batches of workpieces with different shapes and specifications.

[0006] To achieve the above objectives, this utility model provides a track transmission device for an online radio frequency plasma cleaning machine, comprising a frame for fixing, a first support plate fixedly laid on the frame; a slide rail fixed on the frame, the extension line of the slide rail being perpendicular to the extension line of the first support plate; a slider slidably connected to the slide rail; a second support plate fixedly connected to the slider, the extension line of the second support plate in the length direction being parallel to the extension line of the first support plate in the length direction; a plurality of bearings installed on the first support plate and the second support plate, a transmission belt for workpiece transmission installed between the plurality of bearings, a drive shaft connecting the bearings on the first support plate and the bearings on the second support plate for rotation, and a motor driving the drive shaft; a ball screw fixedly connected at one end to the first support plate, a nut on the ball screw fixedly connected to the second support plate, and a rotating handle for controlling the rotation of the ball screw.

[0007] Preferably, it further includes at least two guide bars, which are fixedly connected to the first support plate and the second support plate respectively. The two guide bars are located away from the central axis between the first support plate and the second support plate. The guide bars are located on the side of the transmission belt away from the frame and press against the transmission belt.

[0008] Preferably, the guide strip is made of hard alloy material.

[0009] Preferably, a first cylinder is also fixed on the frame, and a Teflon buffer sleeve is fixedly connected to the upper end of the first cylinder.

[0010] Preferably, multiple sensors are arranged along the length of the transmission belt.

[0011] Preferably, the motor is a closed-loop stepper motor.

[0012] Preferably, the track conveying device further includes a pusher assembly for removing the workpiece from the conveyor belt.

[0013] Preferably, the pusher assembly includes a linear module, the extension line of the linear module in the length direction being parallel to the extension line of the first support plate in the length direction; a support frame slidably connected to the linear module, the support frame being located on the side of the transmission belt away from the frame; a pusher cylinder fixedly connected to the support frame; and a cable chain laid parallel to the linear module.

[0014] The beneficial effects of this invention are as follows: The workpiece to be cleaned is placed on the conveyor belt and fixed in place by the frame. The motor is started, driving the drive shaft to rotate, which in turn drives the bearing to rotate. The bearing then drives the conveyor belt, which moves the workpiece to the cleaning station. When encountering workpieces of different shapes and sizes, the handle can be manually rotated. The handle drives the nut on the ball screw to move, which in turn moves the second support plate. The second support plate then moves the slider on the slide rail, thereby adjusting the width of the two conveyor belts to accommodate workpieces of different shapes and regular sizes. This meets the high-efficiency requirements for radio frequency plasma cleaning of large batches of workpieces. Attached Figure Description

[0015] Figure 1 This is a top view of the track transmission device of this utility model; Figure 2 This is a schematic diagram of the structure of the track transmission device of this utility model; Figure 3 A schematic diagram of the structure of a plasma cleaner.

[0016] In the diagram: 100-track transmission device, 10-frame, 20-first support plate, 30-slide rail, 40-slider, 50-second support plate, 60-bearing, 70-drive shaft, 80-transmission belt, 90-motor, 110-ball screw, 111-nut, 120-rotating handle, 130-guide bar, 140-first cylinder, 141-Teflon buffer sleeve, 150-push assembly, 151-linear module, 152-support frame, 153-second cylinder, 154-drag chain, 160-sensor, 200-plasma cleaner. Detailed Implementation

[0017] The present invention will be further described below with reference to the accompanying drawings and embodiments. It should be noted that in the description of the present invention, the terms "upper," "lower," "left," "right," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing the present invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific manner. Therefore, they should not be construed as limitations on the present invention. The terms "first," "second," and "third," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0018] like Figures 1 to 3 The aforementioned track transmission device 100 for use in radio frequency plasma cleaning machines includes a frame 10 for fixing, and a first support plate 20 fixedly laid on the frame 10. And a slide rail 30 fixed on the frame 10, wherein the extension line of the slide rail 30 is perpendicular to the extension line of the first support plate 20; and, and slider 40 slidably connected to the slide rail 30; And a second support plate 50 fixedly connected to the slider 40, wherein the extension line of the second support plate 50 in the length direction is parallel to the extension line of the first support plate 20 in the length direction. In addition, a plurality of bearings 60 are installed on the first support plate 20 and the second support plate 50, a conveyor belt 80 for workpiece conveying is installed between the plurality of bearings 60, a drive shaft 70 for rotating the bearings 60 on the first support plate 20 and the bearings 60 on the second support plate 50, and a motor 90 for driving the drive shaft 70. In addition, a ball screw 110 is fixedly connected at one end to the first support plate 20, a nut 111 on the ball screw 110 is fixedly connected to the second support plate 50, and a rotating handle 120 is provided to control the rotation of the ball screw 110.

[0019] In this way, the workpiece to be cleaned is placed on the conveyor belt 80 and fixed by the frame 10. The motor 90 is started, driving the drive shaft 70 to rotate, which in turn drives the bearing 60 to rotate. The bearing 60 then drives the conveyor belt 80 to rotate, moving the workpiece to the cleaning station. When encountering workpieces of different shapes and sizes, the handle 120 can be manually turned. The handle drives the nut 111 on the ball screw 110 to move, which in turn moves the second support plate 50. The second support plate 50 then moves the slider 40 along the slide rail 30, thereby adjusting the width of the two conveyor belts 80 to accommodate workpieces of different shapes and regular sizes. This meets the high-efficiency requirements for radio frequency plasma cleaning of large batches of workpieces.

[0020] In practice, this track conveying device 100 is used on an radio frequency plasma cleaner 200 for cleaning workpieces in the fields of semiconductors, electronic circuits, and precision manufacturing technologies. Two track conveying mechanisms can be configured: one serves as the workpiece infeed channel, and the other as the workpiece discharge channel after cleaning. Workpiece cleaning occurs between the two track conveying devices 100. An adjustable-width conveying track is used, allowing for flexible adjustments to the track width and conveying method for workpieces of different sizes and shapes. For example, continuous track conveying is used for long, strip-shaped workpieces such as lead frames; intermittent track conveying is used for small, sheet-like workpieces. The track surface is coated with a layer of hard alloy, providing low friction and anti-static properties, while also preventing scratches or electrostatic damage to the workpiece surface. During the conveying process, multiple sensors 160 are installed to monitor the workpiece position and conveying status in real time. If any abnormalities such as jamming or misalignment occur, the system immediately alarms and automatically stops.

[0021] Furthermore, it also includes at least two guide bars 130, which are fixedly connected to the first support plate 20 and the second support plate 50 respectively. The two guide bars 130 are located away from the central axis between the first support plate 20 and the second support plate 50. The guide bars 130 are located on the side of the transmission belt 80 away from the frame 10, and the guide bars 130 press against the transmission belt 80.

[0022] In this way, because the guide bar 130 is located on the outside of the conveyor belt 80, it restricts the position of the workpiece in the width direction when the workpiece is being transported, preventing the workpiece from falling off during transportation. By pressing down a portion of the conveyor belt 80 with the guide bar 130, the conveyor belt 80 can be prevented from running off course or curling up.

[0023] Furthermore, the guide strip 130 is made of hard alloy material.

[0024] In practice, a hard ceramic coating such as chromium nitride is generally prepared on the surface of the guide bar 130 using a PVD process. This coating has properties such as low friction and antistatic properties, and also avoids scratches or electrostatic damage to the workpiece surface.

[0025] Furthermore, a first cylinder 140 is fixed on the frame 10, and a Teflon buffer sleeve 141 is fixedly connected to the upper end of the first cylinder 140.

[0026] During implementation, because the products are conveyed by a belt, the belt line positioning is inaccurate. When the track conveyor 100 is used as the feeding channel, the first cylinder 140 is used for positioning, intercepting the workpiece between the feeding channel and the cleaning station. When the track conveyor 100 is used as the discharging channel, the first cylinder 140 blocks the product. The main purpose is that if the downstream equipment gives an instruction that it can enter the downstream, then the product will not be blocked and will directly enter the downstream equipment. If the downstream equipment gives an instruction that it cannot enter the downstream, then the product needs to be blocked to stop, thus performing physical limiting.

[0027] Furthermore, a plurality of sensors 160 are provided along the length of the transmission belt 80.

[0028] During implementation, displacement sensors 160 are installed before and after the track to control its operation, and a pressure sensor 160 is installed above the track to sense the transfer of materials. The industry uses photoelectric sensors 160 plus springs to control the transfer limit, but since the spring is a fixed mechanical component, the photoelectric sensor 160 can only sense deformation and cannot be used for products of different specifications. Now, the pressure sensor 160 is used to sense the magnitude of displacement force, so it can adapt to the transfer of materials of different lengths or irregular shapes.

[0029] Furthermore, the motor 90 is a closed-loop stepper motor 90.

[0030] In this way, the transmission method can be flexibly adjusted according to the different shapes of the workpieces by controlling the working state of the closed-loop stepper motor 90. For example, a continuous transmission mode is used for long strip-shaped workpieces such as lead frames; an intermittent transmission mode is used for small sheet-shaped workpieces.

[0031] Furthermore, the track conveying device 100 also includes a pusher assembly 150 for removing the workpiece from the conveyor belt 80.

[0032] In this way, the workpiece to be cleaned is placed on the conveyor belt 80, and the pusher assembly 150 can push the workpiece to be cleaned on the inlet conveyor belt 80 into the cavity for plasma cleaning. When the workpiece is cleaned, the pusher assembly 150 can be restarted to push the cleaned workpiece out of the cavity for plasma cleaning and onto the discharge channel.

[0033] In practice, the pusher component 150 can also take the form of an automated robotic arm.

[0034] Furthermore, the pusher assembly 150 includes a linear module 151, the extension line of the linear module 151 in the length direction being parallel to the extension line of the first support plate 20 in the length direction. And a support frame 152 slidably connected to the linear module 151, the support frame 152 being located on the side of the transmission belt 80 away from the frame 10; And a second cylinder 153 fixedly connected to the support frame 152; And a cable chain 154 laid parallel to the linear module 151.

[0035] In implementation, the linear module 151 can be an electric lead screw or an electric cylinder with controllable stroke, controlling the support frame 152 to slide along its length extension. A second cylinder 153 is fixed on the support frame 152, with the stroke of the second cylinder 153 facing the direction of workpiece cleaning. Activating the linear module 151 pushes the support frame 152 to slide, and then the second cylinder 153 moves to push the workpiece to the next process. The electrical wiring harness of the entire pusher assembly 150 is constrained by the cable chain 154.

[0036] Finally, it should be noted that in the description of this utility model, the terms "vertical," "upper," "lower," "horizontal," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0037] In the description of this utility model, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0038] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A track transport device for an online radio frequency plasma cleaner, comprising a frame for fixing, characterized in that: A first support plate is fixedly laid on the frame; And a slide rail fixed on the frame, the extension line of the slide rail being perpendicular to the extension line of the first support plate; and, and the slider that is slidably connected to the slide rail; And, and a second support plate fixedly connected to the slider, wherein the extension line of the second support plate in the length direction is parallel to the extension line of the first support plate in the length direction; In addition, a plurality of bearings are mounted on the first support plate and the second support plate, a conveyor belt for workpiece transport is installed between the plurality of bearings, a drive shaft that connects the bearings on the first support plate and the bearings on the second support plate for rotation, and a motor that drives the drive shaft. In addition, a ball screw with one end fixedly connected to the first support plate, a nut on the ball screw being fixedly connected to the second support plate, and a rotating handle for controlling the rotation of the ball screw.

2. The track transmission device for the online radio frequency plasma cleaner as described in claim 1, characterized in that: It also includes at least two guide bars, which are fixedly connected to the first support plate and the second support plate respectively. The two guide bars are located away from the central axis between the first support plate and the second support plate. The guide bars are located on the side of the transmission belt away from the frame and press against the transmission belt.

3. The track transmission device for the online radio frequency plasma cleaner as described in claim 2, characterized in that: The guide bar is made of hard alloy material.

4. The track transport device for the online radio frequency plasma cleaner as described in claim 3, characterized in that: A first cylinder is also fixed on the frame, and a Teflon buffer sleeve is fixedly connected to the upper end of the first cylinder.

5. The track transport device for an online radio frequency plasma cleaner as described in any one of claims 1 to 4, characterized in that: Multiple sensors are arranged along the length of the transmission belt.

6. The track transmission device for the online radio frequency plasma cleaner as described in claim 5, characterized in that: The motor is a closed-loop stepper motor.

7. The track transport device for the online radio frequency plasma cleaner as described in claim 6, characterized in that: The track transport device also includes a pusher assembly for removing the workpiece from the transport belt.

8. The track transport device for the online radio frequency plasma cleaner as described in claim 7, characterized in that: The pusher assembly includes a linear module, and the extension line of the linear module in the length direction is parallel to the extension line of the first support plate in the length direction. And a support frame slidably connected to the linear module, the support frame being located on the side of the transmission belt away from the frame; And a second cylinder fixedly connected to the support frame; And cable chains laid parallel to the linear module.

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