Automatic levelling mechanism for heavy-load cantilever paddle

Abstract

The utility model discloses a kind of big load cantilever paddle automatic leveling mechanism, it is related to big load cantilever paddle leveling technical field, including cantilever paddle, the end of cantilever paddle is cooperatively installed with clamping fixed component, the bottom of the clamping fixed component is fixedly installed with support frame, the bottom of the support frame is hingedly installed with fixed frame, one end of the support frame close to cantilever paddle is hingedly installed with connecting rod, the upper end of the connecting rod is fixedly installed with cam portion, the cam portion and the top surface of fixed frame abut, the bottom of the fixed frame is cooperatively installed with electric cylinder, the output end of the electric cylinder is connected with connecting rod. The utility model design scheme is by the rotation angle of the cam portion of electric cylinder's push force conversion, the physical characteristics of cam are used to realize the leveling of cantilever paddle, so that the push force of electric cylinder is effectively amplified, even small push force, small volume electric cylinder can also drive big load cantilever paddle to carry out accurate adjustment.

Description

Technical Field

[0001] This utility model relates to the field of heavy-duty cantilever propeller leveling technology, and in particular to an automatic leveling mechanism for heavy-duty cantilever propellers. Background Technology

[0002] In the semiconductor industry, equipment such as oxidation diffusion furnaces and annealing furnaces are commonly used for the production and processing of wafers of different sizes, including integrated circuits, discrete devices, and MEMS, through processes such as diffusion, thin film oxidation, annealing, and alloying. To facilitate the use of these devices, a cantilever paddle is the core carrier that supports and transports the quartz boat (wafer carrier). Its structural feature is that it resembles an arm, with one end fixed to the feeding mechanism and the other end (the part that carries the quartz boat) suspended in the air and extending into the long furnace tube.

[0003] To prevent the cantilever paddle from tilting during production, Chinese utility model patent application number 202522374211.8 discloses an automatic leveling structure for the cantilever paddle, which includes a cantilever paddle, a clamping and fixing component installed at the end of the cantilever paddle, a base plate hinged to the clamping and fixing component, an electric cylinder installed on the clamping and fixing component, a pressure sensor installed on the electric cylinder, and the output end of the electric cylinder connected to the base plate.

[0004] The aforementioned technical solution adjusts the angle between the fixed base and the base plate by directly applying the thrust of the electric cylinder to level the cantilever propeller. However, due to the limited thrust of the electric cylinder, it suffers from insufficient thrust and low adjustment accuracy when leveling heavy-load cantilever propellers. This results in existing technical solutions requiring larger electric cylinders and greater thrust, making them unsuitable for high-precision, high-load adjustment needs. Utility Model Content

[0005] In order to overcome the above-mentioned defects in the prior art, this utility model provides an automatic leveling mechanism for a heavy-duty cantilever paddle.

[0006] The technical solution adopted by this utility model to solve its technical problem is: an automatic leveling mechanism for a heavy-duty cantilever paddle, including a cantilever paddle, a clamping and fixing component installed at the end of the cantilever paddle, a support frame fixedly installed at the bottom of the clamping and fixing component, a fixing frame hingedly installed at the bottom of the support frame, a connecting rod hingedly installed at one end of the support frame near the cantilever paddle, a cam portion fixedly installed at the upper end of the connecting rod, the cam portion abutting against the top surface of the fixing frame, an electric cylinder installed at the bottom of the fixing frame, and the output end of the electric cylinder connected to the connecting rod.

[0007] Furthermore, a first connecting frame is fixedly installed at the bottom end of the support frame away from the cantilever propeller, a second connecting frame is rotatably installed on the first connecting frame, the second connecting frame is fixedly installed on the fixed frame, and a third connecting frame is fixedly installed at the bottom end of the support frame near the cantilever propeller, and the connecting rod is rotatably installed on the third connecting frame.

[0008] Furthermore, a support base is fixedly installed at the bottom of the fixed frame, and a push rod is slidably installed on the support base. The push rod is connected to the output end of the electric cylinder. A connector is provided at the end of the push rod away from the electric cylinder. A connecting shaft is fixedly installed on the connector. A clearance groove is opened on the fixed frame, and the lower end of the connecting rod extends through the clearance groove to the bottom of the fixed frame. An oblong hole is opened at the lower end of the connecting rod, and the connecting shaft is slidably installed in the oblong hole.

[0009] Furthermore, a pressure sensor is installed at the tail end of the electric cylinder, and the electric cylinder is a servo electric cylinder.

[0010] Furthermore, the clamping and fixing assembly includes a fixing base, a clamping base is fixedly installed on the top of the fixing base, and a protective sleeve is clamped and fixed between the fixing base and the clamping base. The protective sleeve is fitted and installed at the end of the cantilever propeller.

[0011] Furthermore, a connecting plate is fixedly installed on the side of the fixing frame.

[0012] The beneficial effect of this utility model is that the design scheme converts the thrust of the electric cylinder into the rotation angle of the cam, and uses the physical characteristics of the cam to achieve the leveling of the cantilever propeller, so that the thrust of the electric cylinder is effectively amplified, and even a small-thrust, small-volume electric cylinder can drive a heavy-duty cantilever propeller for precise adjustment. Attached Figure Description

[0013] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0014] Figure 1 This is the front view of the present invention;

[0015] Figure 2 This is a top view of the present invention;

[0016] Figure 3 for Figure 2 A schematic diagram of the cross-sectional structure along the AA direction.

[0017] In the diagram: 1. Cantilever propeller; 2. Support frame; 3. Fixing frame; 31. Clearance groove; 4. Connecting rod; 41. Cam part; 42. Waist-shaped hole; 5. Electric cylinder; 51. Pressure sensor; 6. First connecting frame; 7. Second connecting frame; 8. Third connecting frame; 9. Support seat; 10. Push rod; 101. Connector; 102. Connecting shaft; 11. Fixing seat; 12. Clamping seat; 13. Protective sleeve; 14. Connecting plate. Detailed Implementation

[0018] To more clearly illustrate the technical solution of this utility model, the following description is made in conjunction with the accompanying drawings. Obviously, the drawings described below are only one embodiment of this utility model. For those skilled in the art, other embodiments can be obtained based on these drawings and embodiments without creative effort, and all of them fall within the protection scope of this utility model.

[0019] according to Figure 1-3 As shown, a heavy-duty cantilever paddle automatic leveling mechanism includes a cantilever paddle 1. A clamping and fixing assembly is installed at the end of the cantilever paddle 1. A support frame 2 is fixedly installed at the bottom of the clamping and fixing assembly. A fixing frame 3 is hingedly installed at the bottom of the support frame 2. A connecting rod 4 is hingedly installed at one end of the support frame 2 near the cantilever paddle 1. A cam part 41 is fixedly installed at the upper end of the connecting rod 4. The cam part 41 abuts against the top surface of the fixing frame 3. An electric cylinder 5 is installed at the bottom of the fixing frame 3. The output end of the electric cylinder 5 is connected to the connecting rod 4. A connecting plate 14 is welded to the side of the fixing frame 3. The fixing frame 3 is connected to the feeding mechanism through the connecting plate 14.

[0020] In this embodiment, a first connecting frame 6 is fixedly installed at the bottom of the support frame 2 away from the cantilever propeller 1. A second connecting frame 7 is rotatably installed on the first connecting frame 6 and is fixedly installed on the fixed frame 3. A third connecting frame 8 is fixedly installed at the bottom of the support frame 2 near the cantilever propeller 1. A connecting rod 4 is rotatably installed on the third connecting frame 8. A support base 9 is fixedly installed at the bottom of the fixed frame 3. A push rod 10 is slidably installed on the support base 9. The push rod 10 is connected to the output end of the electric cylinder 5. A connector 1 is provided at the end of the push rod 10 away from the electric cylinder 5. 01. A connecting shaft 102 is fixedly installed on the connector 101. A relief groove 31 corresponding to the position of the connecting rod 4 is opened on the fixing frame 3. The lower end of the connecting rod 4 extends through the relief groove 31 to the bottom of the fixing frame 3. A waist-shaped hole 42 is opened at the lower end of the connecting rod 4. The connecting shaft 102 is slidably installed in the waist-shaped hole 42. During the leveling process of the cantilever propeller 1, the push rod 10 drives the connecting rod 4 to rotate under the drive of the electric cylinder 5. The cam part 41 rotates synchronously with the connecting rod 4, thereby completing the adjustment of the tilt angle of the support frame 2 and thus leveling the cantilever propeller 1.

[0021] In this embodiment, a pressure sensor 51 is installed at the tail end of the electric cylinder 5. The electric cylinder 5 is a servo electric cylinder. When working, the pressure sensor 51 outputs a voltage signal that is proportional to the pressure. By measuring this signal, the pressure value at the output end of the electric cylinder 5 can be obtained. When the pressure exceeds or falls below the preset value, the system will automatically adjust to automatically level the cantilever paddle 1.

[0022] In this embodiment, the clamping and fixing assembly includes a fixing base 11, and a clamping base 12 is fixedly installed on the top of the fixing base 11 by bolts. A protective sleeve 13 is clamped and fixed between the fixing base 11 and the clamping base 12. The protective sleeve 13 is fitted and installed at the end of the cantilever propeller 1. The protective sleeve 13 is connected to the cantilever propeller 1 by bolts. The protective sleeve 13 protects the cantilever propeller 1 and prevents damage to the cantilever propeller 1 when it is clamped and fixed by the clamping base 12 and the fixing base 11.

[0023] The working principle of this utility model is that when the cantilever propeller 1 generates angular displacement, the electric cylinder 5 pushes the connecting rod 4 through the push rod 10 to adjust the rotation angle of the cam part 41, thereby adjusting the tilt angle of the support frame 2, thus achieving the leveling of the cantilever propeller 1. By utilizing the physical characteristics of the cam, the thrust of the electric cylinder 5 is effectively amplified, so that even a small-thrust, small-volume electric cylinder can drive a heavy-duty cantilever propeller for precise adjustment.

[0024] The above embodiments are merely exemplary embodiments of this utility model and are not intended to limit this utility model. The scope of protection of this utility model is defined by the claims. Those skilled in the art can make various modifications or equivalent substitutions to this utility model within its substance and scope of protection, and such modifications or equivalent substitutions should also be considered to fall within the scope of protection of this utility model.

Claims

1. A heavy-duty cantilever propeller automatic leveling mechanism, comprising a cantilever propeller (1), characterized in that: The end of the cantilever propeller (1) is fitted with a clamping and fixing assembly. The bottom of the clamping and fixing assembly is fixedly fitted with a support frame (2). The bottom of the support frame (2) is hingedly fitted with a fixing frame (3). The end of the support frame (2) near the cantilever propeller (1) is hingedly fitted with a connecting rod (4). The upper end of the connecting rod (4) is fixedly fitted with a cam part (41). The cam part (41) abuts against the top surface of the fixing frame (3). The bottom of the fixing frame (3) is fitted with an electric cylinder (5). The output end of the electric cylinder (5) is connected to the connecting rod (4).

2. The automatic leveling mechanism for a heavy-duty cantilever paddle according to claim 1, characterized in that, A first connecting frame (6) is fixedly installed at the bottom of the support frame (2) away from the cantilever propeller (1). A second connecting frame (7) is rotatably installed on the first connecting frame (6). The second connecting frame (7) is fixedly installed on the fixed frame (3). A third connecting frame (8) is fixedly installed at the bottom of the support frame (2) near the cantilever propeller (1). The connecting rod (4) is rotatably installed on the third connecting frame (8).

3. The automatic leveling mechanism for a heavy-duty cantilever paddle according to claim 2, characterized in that, The bottom of the fixed frame (3) is fixedly installed with a support base (9), and a push rod (10) is slidably installed on the support base (9). The push rod (10) is connected to the output end of the electric cylinder (5). The end of the push rod (10) away from the electric cylinder (5) is provided with a connector (101). A connecting shaft (102) is fixedly installed on the connector (101). The fixed frame (3) is provided with a relief groove (31) whose position corresponds to that of the connecting rod (4). The lower end of the connecting rod (4) extends through the relief groove (31) to the bottom of the fixed frame (3). The lower end of the connecting rod (4) is provided with a waist-shaped hole (42). The connecting shaft (102) is slidably installed in the waist-shaped hole (42).

4. The automatic leveling mechanism for a heavy-duty cantilever paddle according to claim 1, characterized in that, A pressure sensor (51) is installed at the tail end of the electric cylinder (5), and the electric cylinder (5) is a servo electric cylinder.

5. The automatic leveling mechanism for a heavy-duty cantilever paddle according to claim 1, characterized in that, The clamping and fixing assembly includes a fixing seat (11), a clamping seat (12) is fixedly installed on the top of the fixing seat (11), and a protective sleeve (13) is clamped and fixed between the fixing seat (11) and the clamping seat (12). The protective sleeve (13) is fitted and installed at the end of the cantilever propeller (1).

6. The automatic leveling mechanism for a heavy-duty cantilever paddle according to any one of claims 1-5, characterized in that, A connecting plate (14) is fixedly installed on the side of the fixing frame (3).

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