An integrated intelligent correction wheel carrying device

Abstract

The utility model relates to correction wheel processing technical field, concretely is a kind of integrated intelligent correction wheel handling device, including storage platform, workstation, correction wheel and installation backboard, the front side surface of installation backboard is provided with guide rail sliding block module, the outside of guide rail sliding block module is connected with support platform, the front of support platform is vertically provided with main support arm. This kind of integrated intelligent correction wheel handling device, through the cooperation of motor and screw guide rail, the directional carrying motion of correction wheel is realized, the device compact structure, through installation base plate and equipment connection, the degree of integration is high, adopt servo motor drive main screw block to carry out vertical direction's action, through cylinder drive auxiliary screw block to carry out horizontal direction's action, through the structure of motor drive main gear drive driven wheel realizes rotation, overall rigidity is strong, not influenced by correction wheel size weight.

Description

Technical Field

[0001] This utility model relates to the field of correction wheel processing technology, specifically an integrated intelligent correction wheel handling device. Background Technology

[0002] The dressing wheel is a core consumable component in CMP equipment. Its function is to remove polishing byproducts attached to the surface of the polishing pad and restore its roughness through continuous friction with the polishing pad, thereby ensuring the stability of the polishing process and the polishing quality of the wafer. In the current production and maintenance process, the handling of dressing wheels mainly relies on manual handling or simple tools.

[0003] When operators manually handle the correction wheel, they wear gloves and handle it manually. The edge of the correction wheel may be sharp, posing a risk of scratching the operator. In addition, manual operation inevitably involves uneven force, shaking, or bumping, which can easily cause damage, chipping, or contamination to the microstructure of the correction wheel surface, resulting in irreversible losses. This is especially true for correction wheels used with large-sized equipment, which are large in diameter and heavy, making manual operation quite strenuous.

[0004] When handling simple tools, general-purpose tools such as stackers and mechanical grippers are usually used. Although direct contact is avoided, the operation is cumbersome, lacks intelligent sensing, and there is a risk of unstable gripping or improper placement. The whole process relies on the operator's experience and visual judgment. At the same time, it is still difficult to operate the large and heavy correction wheels.

[0005] To address the aforementioned issues, we propose an integrated intelligent correction wheel transport device. Utility Model Content

[0006] To solve the above-mentioned technical problems, this utility model provides the following technical solution:

[0007] This utility model provides an integrated intelligent correction wheel handling device, including a storage platform, a workbench, a correction wheel and a mounting back plate. The front surface of the mounting back plate is provided with a guide rail slider module. The guide rail slider module is externally connected to a support platform. The front of the support platform is vertically provided with a main support arm.

[0008] The bottom of the main support arm is rotatably connected to a driven gear and a driving gear, the end of the main support arm is hinged to a support arm, and the upper part of the support arm is slidably connected to an extension arm.

[0009] The top of the extension arm is connected to a telescopic cylinder, and the bottom of the end of the extension arm is equipped with a universal joint, and the bottom of the universal joint is provided with a cross-shaped carriage.

[0010] The carriage has supports extending outward from four directions, and each support has a hinged pawl at its end. The pawl clamps the correction wheel from inside the correction wheel.

[0011] As a preferred technical solution of this utility model, a lifting motor is installed on the top of the mounting back plate, a lead screw is coaxially fixedly connected to the output shaft of the lifting motor, a slider is externally connected to the lead screw, and the slider is connected to the guide rail slider module.

[0012] As a preferred technical solution of this utility model, a rotary motor is installed at the top of the end of the main support arm, the output shaft of the rotary motor is coaxially and fixedly connected to the driving gear, and the driven gear meshes with the driving gear.

[0013] As a preferred embodiment of this utility model, a fixed seat is connected to the top of the support arm, one end of the telescopic cylinder is connected to the fixed seat, and the other end of the telescopic cylinder is connected to the extension arm.

[0014] As a preferred embodiment of this utility model, a rotating seat is installed at the top of the end of the extension arm, and a drive assembly is installed inside the rotating seat. The rotating seat is coaxially and fixedly connected to the universal joint.

[0015] As a preferred embodiment of this utility model, the joint claw is hinged to the support, and a drive component for rotating the joint claw is installed inside the support.

[0016] As a preferred embodiment of this utility model, the storage platform is used to place the correction wheel before and after processing, and the workbench is used to process the correction wheel.

[0017] As a preferred embodiment of this utility model, a protective cover is installed on the top of the support arm.

[0018] The beneficial effects of this utility model are as follows: This integrated intelligent correction wheel handling device achieves directional handling of the correction wheel through the cooperation of a motor and a lead screw guide rail. The device has a compact structure, is connected to the equipment via a mounting base plate, and has a high degree of integration. It uses a servo motor to drive the main lead screw slider for vertical movement, a cylinder to drive the auxiliary lead screw slider for horizontal movement, and a motor-driven main gear to drive the driven wheel for rotation. The device has high overall rigidity and is not affected by the size and weight of the correction wheel. It is compatible with any type of CMP polishing equipment. It connects to the equipment PLC via the MODBUS protocol, allowing adjustment of parameters such as displacement distance and angle within the PLC, making it more flexible to use. In case of a malfunction, it can promptly alarm and stop the operation to avoid damage to the equipment. Attached Figure Description

[0019] The accompanying drawings are provided to further illustrate the present invention and form part of the specification. They are used together with the embodiments of the present invention to explain the present invention, but do not constitute a limitation thereof. In the drawings:

[0020] Figure 1 This is a schematic diagram of the overall working structure of this utility model;

[0021] Figure 2 This is a schematic diagram of the storage platform placement structure of this utility model;

[0022] Figure 3 This is a partial structural diagram of the support arm of this utility model;

[0023] Figure 4 This is a schematic diagram of the lower structure of the support arm of this utility model;

[0024] In the diagram: 1. Storage platform; 2. Workbench; 3. Correction wheel; 4. Mounting backplate; 5. Guide rail slider module; 6. Lifting motor; 7. Support platform; 8. Protective cover plate; 9. Extension arm; 10. Rotary motor; 11. Main support arm; 12. Lead screw; 13. Telescopic cylinder; 14. Support arm; 15. Rotary seat; 16. Universal joint; 17. Carriage; 18. Articulated chuck; 19. Driven gear; 20. Driven gear; 21. Support. Detailed Implementation

[0025] The preferred embodiments of the present invention will be described below with reference to the accompanying drawings. It should be understood that the preferred embodiments described herein are for illustration and explanation only and are not intended to limit the present invention.

[0026] Example: Figure 1-4 As shown, an integrated intelligent correction wheel handling device includes a storage platform 1, a workbench 2, a correction wheel 3 and a mounting back plate 4. A guide rail slider module 5 is provided on the front surface of the mounting back plate 4. A support platform 7 is externally connected to the guide rail slider module 5. A main support arm 11 is vertically arranged at the front of the support platform 7.

[0027] The bottom of the main support arm 11 is rotatably connected to a driven gear 19 and a driving gear 20. The end of the main support arm 11 is hinged to a support arm 14, and the upper part of the support arm 14 is slidably connected to an extension arm 9.

[0028] The top of the extension arm 9 is connected to a telescopic cylinder 13, and the bottom of the end of the extension arm 9 is equipped with a universal joint 16, and the bottom of the universal joint 16 is provided with a cross-shaped carriage 17.

[0029] Supports 21 extend outward from the outside of the carriage 17 in four directions. The ends of the supports 21 are respectively hinged with articulated claws 18, which clamp the correction wheel 3 from the inside.

[0030] A lifting motor 6 is installed on the top of the mounting back plate 4. A lead screw 12 is coaxially fixedly connected to the output shaft of the lifting motor 6. A slider is externally connected to the lead screw 12, and the slider is connected to the guide rail slider module 5.

[0031] A rotary motor 10 is installed at the top of the end of the main support arm 11. The output shaft of the rotary motor 10 is coaxially and fixedly connected to the drive gear 20, and the driven gear 19 meshes with the drive gear 20.

[0032] A fixed base is connected to the top of the support arm 14, one end of the telescopic cylinder 13 is connected to the fixed base, and the other end of the telescopic cylinder 13 is connected to the extension arm 9.

[0033] A rotating seat 15 is installed at the top of the end of the extension arm 9. A drive assembly is installed inside the rotating seat 15. The rotating seat 15 is coaxially and fixedly connected to the universal joint 16.

[0034] The articulated pawl 18 is hinged to the support 21, and the support 21 has a drive assembly installed inside to rotate the articulated pawl 18.

[0035] The storage platform 1 is used to place the correction wheel 3 before and after processing, and the worktable 2 is used to process the correction wheel 3.

[0036] A protective cover plate 8 is installed on the top of the support arm 14.

[0037] Working Principle: This integrated intelligent correction wheel handling device, during use, drives the joint jaws 18 to rotate via the drive component, adjusting the distance between the joint jaws 18 to clamp the correction wheel 3 from the inside, and sequentially transports the correction wheel 3 from the storage platform 1 to the workbench 2. After processing, the correction wheel is again sequentially transported from the workbench 2 back to the storage platform 1 via the joint jaws 18. The entire device is connected to the wall via the mounting back plate 4. The lifting motor 6 drives the lead screw 12, which in turn drives the guide rail slider module 5 to achieve vertical movement of the correction wheel 3. The main support arm 11 is the main load-bearing component. The rotary motor 10 drives the drive gear 20 and the driven gear 19 to achieve the rotation of the support arm 14. The telescopic cylinder 13 can realize the extension and retraction of the extension arm 9. The universal joint 16 can realize the picking and placing of the correction wheel at any angle. The joint jaws 17 are the output end devices of the correction wheel handling device, used to connect the correction wheel 18.

[0038] Finally, it should be noted that the above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. An integrated intelligent correction wheel handling device, comprising a storage platform (1), a workbench (2), a correction wheel (3), and a mounting backplate (4), characterized in that: The front surface of the mounting back plate (4) is provided with a guide rail slider module (5), and the outside of the guide rail slider module (5) is connected to a support platform (7). The front of the support platform (7) is vertically provided with a main support arm (11). The bottom of the main support arm (11) is rotatably connected to a driven gear (19) and a driving gear (20), and the end of the main support arm (11) is hinged to a support arm (14), and the upper part of the support arm (14) is slidably connected to an extension arm (9). The top of the extension arm (9) is connected to a telescopic cylinder (13), and a universal joint (16) is installed at the bottom of the end of the extension arm (9). A cross-shaped carriage (17) is provided at the bottom of the universal joint (16). The slide (17) has supports (21) extending outward from four directions. The ends of the supports (21) are respectively hinged with articulated claws (18), which clamp the correction wheel (3) from the inside of the correction wheel (3).

2. The integrated intelligent correction wheel conveying device according to claim 1, characterized in that, A lifting motor (6) is installed on the top of the mounting back plate (4). A lead screw (12) is coaxially fixedly connected to the output shaft of the lifting motor (6). A slider is connected to the outside of the lead screw (12). The slider is connected to the guide rail slider module (5).

3. The integrated intelligent correction wheel conveying device according to claim 1, characterized in that, A rotary motor (10) is installed at the top of the end of the main support arm (11). The output shaft of the rotary motor (10) is coaxially and fixedly connected to the drive gear (20). The driven gear (19) meshes with the drive gear (20).

4. The integrated intelligent correction wheel conveying device according to claim 1, characterized in that, The top of the support arm (14) is connected to a fixed seat, one end of the telescopic cylinder (13) is connected to the fixed seat, and the other end of the telescopic cylinder (13) is connected to the extension arm (9).

5. The integrated intelligent correction wheel conveying device according to claim 1, characterized in that, A rotating seat (15) is installed at the top of the end of the extension arm (9). A drive assembly is installed inside the rotating seat (15). The rotating seat (15) is coaxially fixedly connected to the universal joint (16).

6. The integrated intelligent correction wheel conveying device according to claim 1, characterized in that, The articulated claw (18) is hinged to the support (21), and the support (21) is equipped with a drive assembly that drives the articulated claw (18) to rotate.

7. The integrated intelligent correction wheel conveying device according to claim 1, characterized in that, The storage platform (1) is used to place the correction wheel (3) before and after processing, and the workbench (2) is used to process the correction wheel (3).

8. The integrated intelligent correction wheel conveying device according to claim 1, characterized in that, The top of the support arm (14) is fitted with a protective cover plate (8).

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