Automatic crucible gripping device

Abstract

The utility model discloses a kind of automatic clamping devices of crucible, the automatic clamping device of crucible is clamped by gripper subassembly, gripper subassembly includes first clamping arm, second clamping arm and electric gripper, first clamping arm and second clamping arm are connected with interval on electric gripper, electric gripper drives first clamping arm and second clamping arm to rotate, to make first clamping arm and second clamping arm relatively close or far away;First clamping arm and second clamping arm are respectively connected with first gripper hand and second gripper hand by guide pillar, first gripper hand and second gripper hand are respectively contacted with first clamping arm and second clamping arm by ball, to make first gripper hand and second gripper hand clamp and take crucible and move along guide pillar.The automatic clamping device of crucible provided by the utility model realizes the fast, accurate handling and placement of crucible by AGV dolly, industrial arm and other equipment, greatly improves operation speed and accuracy, makes the installation and dismounting of crucible feeding and discharging process from crucible handling to equipment on all realize automatic, no longer rely on manual participation.

Description

Technical Field

[0001] This utility model belongs to the technical field of material loading and unloading equipment, and particularly relates to an automatic crucible clamping device. Background Technology

[0002] Silicon carbide (SiC), as an important wide-bandgap semiconductor material, has excellent properties such as high breakdown electric field, high electron mobility, and high thermal conductivity, and shows great application potential in fields such as high frequency, high voltage, high power, high speed and radiation resistance.

[0003] The common loading and unloading methods involve workers manually carrying silicon carbide crystal growth crucibles into the equipment, or manual loading and unloading, or semi-automatic loading and unloading of crucibles by installing special tooling on the equipment and using the equipment's loading and unloading and rotation modules. When necessary, manual intervention is also required for alignment and other tasks. This method is characterized by low production efficiency and difficulty in meeting the needs of large-scale production.

[0004] Therefore, there is an urgent need to design an automatic crucible clamping device to solve the problems mentioned above. Utility Model Content

[0005] To address the technical problems mentioned in the background art, such as low production efficiency and difficulty in meeting the needs of large-scale production due to manual loading and unloading and manual alignment, an automatic crucible clamping device is provided to solve the problem of automatic crucible loading and unloading.

[0006] To achieve the above objectives, the specific technical solution of the automatic crucible clamping device of this utility model is as follows: An automatic crucible gripping device comprises an AGV (Automated Guided Vehicle) trolley that drives an industrial arm to move between a worktable and a graphite shaft. A vision camera performs an initial identification of the crucible on the worktable, and the industrial arm grips the crucible using a gripper assembly. The vision camera then performs a second identification of the graphite shaft, and the gripper assembly places the crucible onto the graphite shaft. The gripper assembly includes a first gripper arm, a second gripper arm, and an electric gripper. The electric gripper is connected to the first and second gripper arms at intervals and drives the first and second gripper arms to rotate, causing them to move closer or further apart. A first gripper hand and a second gripper hand are respectively connected to the first and second gripper arms via guide posts. The first and second gripper hands abut against the first and second gripper arms via ball bearings, allowing them to move along the guide posts when gripping the crucible.

[0007] Furthermore, symmetrical limiting grooves are formed along the length direction of the first and second clamping arms, and the first and second grippers are respectively set on the limiting grooves of the first and second clamping arms through guide posts.

[0008] Furthermore, limiting holes are respectively provided on the side of the first clamping arm and the second clamping arm away from the electric gripper, and guide holes are respectively provided on the first gripper hand and the second gripper hand. The guide post passes through the limiting hole and the guide hole in sequence, so that the first gripper hand and the second gripper hand are positioned on the side of the first clamping arm and the second clamping arm away from the electric gripper to grip the crucible.

[0009] Furthermore, a nut is screwed onto the end of the guide post to fix the guide post on the first clamping arm and the second clamping arm.

[0010] Furthermore, multiple guide posts are symmetrically arranged along the length of the first and second clamping arms, respectively.

[0011] Furthermore, the first gripper and the second gripper are each provided with a plurality of balls at intervals. The balls abut against the limiting grooves of the first gripper and the second gripper respectively, so that the first gripper and the second gripper move along the length of the guide column when gripping the crucible.

[0012] Furthermore, the diameter of the guide hole for the first and second grippers is larger than the diameter of the guide post, so that the first and second grippers can move radially along the guide post when gripping the crucible.

[0013] Furthermore, the electric gripper is connected to the industrial arm on the side away from the first and second grippers.

[0014] Furthermore, a vision camera is connected to the electric gripper. The vision camera controls the electric gripper to drive the first and second gripping arms to pick up the crucible based on the position of the crucible.

[0015] Furthermore, the first and second clamping arms are generally arc-shaped.

[0016] The automatic crucible clamping device of this utility model has the following advantages: (1) This application uses an adaptively adjustable gripper assembly to automatically adjust the crucible if it is slightly misaligned with the graphite shaft during placement, or if the lifting module and the rotating module move the crucible up and down asynchronously. This avoids stress concentration on the graphite shaft or increased load on the industrial arm during installation, which could damage the graphite parts or the industrial arm.

[0017] (2) By setting the self-adjustable gripper assembly on the AGV, this application makes the overall automation solution feasible, and enables the crucible loading and unloading process to be automated from crucible handling to equipment installation and disassembly, without relying on manual intervention, thus realizing the possibility of large-scale mass production.

[0018] (3) This application realizes the rapid and accurate handling and placement of crucibles through AGV trolleys, industrial arms and other equipment, which greatly improves the operation speed and precision; at the same time, it can operate in a relatively closed and clean environment, reducing the introduction of external pollutants, which is conducive to ensuring the stability of the crystal growth environment and improving product quality. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the gripper assembly of the automatic crucible gripping device of this utility model; Figure 2 This is a schematic diagram of the structure of the second clamping arm and the second gripper hand of the automatic crucible clamping device of this utility model; Figure 3 This is a schematic diagram showing the connection between the AGV trolley and the industrial arm of the automatic crucible gripping device of this utility model. Figure 4 This is a schematic diagram of the automatic crucible clamping device of this utility model for loading and unloading crucibles.

[0020] Explanation of markings in the diagram: 1. AGV trolley; 2. Industrial arm; 3. Gripper assembly; 31. First gripper arm; 32. Second gripper arm; 33. Electric gripper; 34. Guide post; 35. First gripper hand; 36. Second gripper hand; 37. Ball bearing; 4. Limiting groove; 5. Limiting hole; 6. Guide hole; 7. Nut; 8. Vision camera; 9. Crucible; 10. Camera recognition axis; 11. Up and down lifting module; 12. Rotating module; 13. Crystal growth equipment. Detailed Implementation

[0021] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0022] Those skilled in the art will understand that although some embodiments herein include certain features included in other embodiments but not others, combinations of features from different embodiments are intended to be within the scope of this invention and form different embodiments. For example, in the claims, any of the claimed embodiments can be used in any combination.

[0023] The following is a reference to the appendix. Figure 1 To be continued Figure 4 This invention describes an automatic crucible clamping device.

[0024] like Figure 1 and Figure 4 As shown, the automatic crucible gripping device of this utility model is driven by an AGV trolley 1 to move an industrial arm 2 between a worktable and a graphite shaft. A vision camera 8 performs a first identification of the crucible 9 on the worktable. The industrial arm 2 grips the crucible 9 through a gripper assembly 3. The vision camera 8 then performs a second identification of the graphite shaft and places the crucible 9 on the graphite shaft through the gripper assembly 3.

[0025] The gripper assembly 3 includes a first gripper arm 31, a second gripper arm 32, and an electric gripper 33. The first gripper arm 31 and the second gripper arm 32 are connected at intervals on the electric gripper 33. The electric gripper 33 drives the first gripper arm 31 and the second gripper arm 32 to rotate, so that the first gripper arm 31 and the second gripper arm 32 are relatively close or far apart. The first gripper arm 31 and the second gripper arm 32 are respectively connected to the first gripper hand 35 and the second gripper hand 36 through the guide post 34. The first gripper hand 35 and the second gripper hand 36 abut against the first gripper arm 31 and the second gripper arm 32 through the ball bearing 37, so that the first gripper hand 35 and the second gripper hand 36 move along the guide post 34 when gripping the crucible 9.

[0026] As a preferred embodiment, in the actual production process, when the equipment needs to replace the crucible 9, an instruction is sent to the scheduling system, and an AGV trolley 1 is dispatched to the room where the crucible 9 is filled. The vision camera 8 identifies the crucible 9 on the designated workbench in the room, and the industrial arm 2 transports it to the crucible waiting area A on the AGV trolley 1. Then, the AGV trolley 1 arrives at the equipment where the crucible 9 needs to be replaced, and the vision camera 8 positions the crucible 9 on the equipment. The industrial arm 2 drives the gripper assembly 3 to clamp the crucible 9, and then cooperates with the up and down lifting module 11 and the rotating module 12 on the equipment to realize the unloading process of the crucible 9.

[0027] Meanwhile, the removed crucible 9 is placed in the crucible waiting area B on the AGV trolley 1, and then the crucible 9 in the crucible waiting area A is sent to the camera recognition axis 10 at the equipment end. While keeping the gripper assembly 3 stationary, the up-and-down lifting module 11 and the rotating module 12 on the equipment work to place the crucible 9 on the graphite axis of the crystal growth device 13 in the equipment, so as to achieve the purpose of automatic and fast replacement of crucible 9.

[0028] This application uses an AGV trolley 1 to move the crucible 9 as a whole, while the industrial arm 2 can move the crucible 9 in six directions: up and down, left and right, and front and back.

[0029] Furthermore, such as Figure 1 and Figure 2As shown, limiting grooves 4 are respectively opened along the length direction of the first clamping arm 31 and the second clamping arm 32. The limiting grooves 4 are symmetrically opened on the adjacent side of the first clamping arm 31 and the second clamping arm 32. Preferably, the first gripper 35 and the second gripper 36 are respectively set on the limiting grooves 4 of the first clamping arm 31 and the second clamping arm 32 through the guide post 34, so as to realize the crucible 9 by gripping the first gripper 35 and the second gripper 36.

[0030] Specifically, the first clamping arm 31 and the second clamping arm 32 are respectively provided with limiting holes 5 on the side away from the electric gripper 33. The limiting holes 5 are symmetrically provided on both sides of the limiting groove 4. The first gripper 35 and the second gripper 36 are respectively provided with guide holes 6. The guide post 34 passes through the limiting hole 5 and the guide hole 6 in sequence, thereby realizing that the first gripper 35 and the second gripper 36 are positioned on the side of the first clamping arm 31 and the second clamping arm 32 away from the electric gripper 33 to grip the crucible 9.

[0031] Meanwhile, a nut 7 is screwed into one end of the guide post 34 through the limiting hole 5, thereby fixing the guide post 34 on the first clamping arm 31 and the second clamping arm 32, so that the first gripper 35 and the second gripper 36 are stably set on the first clamping arm 31 and the second clamping arm 32 respectively.

[0032] Furthermore, such as Figure 2 As shown, in this embodiment, a plurality of guide posts 6 are symmetrically arranged along the length direction of the first clamping arm 31 and the second clamping arm 32. Preferably, a plurality of limiting holes 5 are spaced apart on the side of the first clamping arm 31 and the second clamping arm 32 away from the electric gripper 33. A plurality of guide holes 6 are correspondingly opened on the first gripper hand 35 and the second gripper hand 36. The first gripper hand 35 and the second gripper hand 36 are then positioned on the first clamping arm 31 and the second clamping arm 32 by the plurality of guide posts 34.

[0033] Meanwhile, multiple balls 37 are spaced apart along the length of the first gripper 35 and the second gripper 36. The multiple balls 37 abut against the limiting grooves 4 of the first gripper 34 and the second gripper 32 respectively. When the first gripper 35 and the second gripper 36 grip the crucible 9, the balls 37 drive the first gripper 35 and the second gripper 36 to move within the limiting grooves 4 along the length of the guide post 34.

[0034] Preferably, the diameter of the guide hole 6 on the first gripper 35 and the second gripper 36 is larger than the diameter of the guide post 34, thereby forming a gap between the guide hole 6 and the guide post 34, so that the first gripper 35 and the second gripper 36 can move radially along the guide post 34 when gripping the crucible 9.

[0035] In a preferred embodiment, when the crucible 9 is being gripped, when the first gripper 35 and the second gripper 36 clamp the crucible 9 below the rotating module 12 of the equipment, considering the possible errors, namely the positioning error of the AGV trolley 1 or the positioning error of the vision camera 8, which may cause the crucible 9 to be out of concentricity with the camera recognition axis 10 at the equipment end, the first gripper 35 and the second gripper 36 can move along the length of the guide post 34 and along the radial direction of the guide post 34. This avoids stress concentration on the graphite shaft or increased load on the industrial arm 2 during installation, which could damage the graphite parts or the industrial arm 2.

[0036] Furthermore, such as Figure 1 and Figure 3 As shown, the electric gripper 33 is connected to the industrial arm 2 on the side away from the first gripper arm 31 and the second gripper arm 32. The electric gripper 33 is controlled by the vision camera 8 to drive the first gripper arm 31 and the second gripper arm 32 to move closer or further away.

[0037] Specifically, a vision camera 8 is connected to the electric gripper 33. The vision camera 8 controls the electric gripper 33 to drive the first gripper arm 31 and the second gripper arm 32 to grasp the crucible 9 according to the position of the crucible 9. Preferably, the vision camera 8 first identifies the position of the crucible 9, then controls the AGV trolley 1 to move and the industrial arm 2 to move through the controller, and finally controls the electric gripper 33 to drive the first gripper arm 31 and the second gripper arm 32 to move closer or further away, so that the crucible 9 can be grasped by the first gripper hand 35 and the second gripper hand 36.

[0038] The vision camera 8 and the controller are existing technologies and will not be described in detail here; at the same time, the components that can realize crucible position recognition and control the AGV trolley 1, industrial arm 2, first clamping arm 31 and second clamping arm 32 to follow the movement are all applicable to this application.

[0039] Meanwhile, the first clamping arm 31, the second clamping arm 32, the first gripper 35, and the second gripper 36 are all set as an arc shape to match the shape of the crucible 9, making it easier to grip the crucible 9.

[0040] The working principle of the automatic crucible clamping device in this utility model is as follows: The vision camera 8 identifies the position of the crucible 9 and controls the AGV trolley 1 to move the industrial arm 2. The industrial arm 2 moves the gripper assembly 3 in six directions: up and down, left and right, and front and back. This causes the first gripper arm 31 and the second gripper arm 32 of the gripper assembly 3 to approach the crucible 9. The first gripper hand 35 and the second gripper hand 36 then grip the crucible 9. The first gripper hand 35 and the second gripper hand 36 move along the length of the guide post 34 and along the radial direction of the guide post 34. This avoids stress concentration on the graphite shaft or increased load on the industrial arm 2 when installing the crucible 9, which could damage the graphite parts or the industrial arm 2. This achieves automatic loading and unloading of the crucible 9.

[0041] The automatic crucible clamping device of this application reduces manual intervention and avoids the need to add tooling fixtures to the equipment, thus eliminating the need for fixture design at the equipment end. At the same time, one AGV trolley 1 can simultaneously meet the loading and unloading needs of multiple devices, meet the needs of large-scale production, and promote the development of the industry towards high efficiency, intelligence, and greenness.

[0042] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present utility model, and are not intended to limit the implementation of the present utility model. Those skilled in the art can make other variations or modifications based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.

Claims

1. An automatic crucible gripping device, comprising an AGV (Automated Guided Vehicle) trolley driving an industrial arm to move between a worktable and a graphite shaft, a vision camera performing an initial identification of the crucible on the worktable, the industrial arm gripping the crucible using a gripper assembly, the vision camera then performing a second identification of the graphite shaft, and the gripper assembly placing the crucible onto the graphite shaft, characterized in that, The gripper assembly includes a first gripper arm, a second gripper arm, and an electric gripper. The first and second gripper arms are connected at intervals on the electric gripper arm. The electric gripper arm drives the first and second gripper arms to rotate, so that the first and second gripper arms move closer or further apart. A first gripper hand and a second gripper hand are respectively connected to the first and second gripper arms via guide posts. The first and second gripper hands abut against the first and second gripper arms via ball bearings, so that the first and second gripper hands move along the guide posts when gripping the crucible.

2. The automatic crucible clamping device according to claim 1, characterized in that, Limiting grooves are symmetrically formed along the length of the first and second clamping arms, and the first and second grippers are respectively set on the limiting grooves of the first and second clamping arms via guide posts.

3. The automatic crucible clamping device according to claim 1, characterized in that, Limiting holes are provided on the side of the first and second clamping arms away from the electric gripper, and guide holes are provided on the first and second gripper hands respectively. Guide pins pass through the limiting holes and guide holes in sequence, so that the first and second gripper hands are positioned on the side of the first and second clamping arms away from the electric gripper to grip the crucible.

4. The automatic crucible clamping device according to claim 3, characterized in that, Nuts are screwed to the end of the guide post to fix the guide post on the first clamping arm and the second clamping arm.

5. The automatic crucible clamping device according to claim 1, characterized in that, Multiple guide posts are symmetrically arranged along the length of the first and second clamping arms, respectively.

6. The automatic crucible clamping device according to claim 2, characterized in that, Multiple balls are spaced apart on both the first and second grippers. The balls abut against the limiting grooves of the first and second grippers, respectively, so that the first and second grippers can move along the length of the guide column when gripping the crucible.

7. The automatic crucible clamping device according to claim 3, characterized in that, The diameter of the guide hole for the first and second grippers is larger than the diameter of the guide post, so that the first and second grippers can move radially along the guide post when gripping the crucible.

8. The automatic crucible clamping device according to claim 1, characterized in that, The electric gripper is connected to the industrial arm on the side away from the first and second grippers.

9. The automatic crucible clamping device according to claim 8, characterized in that, A vision camera is connected to the electric gripper. The vision camera controls the electric gripper to drive the first and second gripping arms to pick up the crucible based on the position of the crucible.

10. The automatic crucible clamping device according to claim 9, characterized in that, The first and second clamping arms are generally arc-shaped.

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