A horizontally positionally fine-adjustable suction head mounting base

CN224916987UActive Publication Date: 2026-10-30JHT DESIGN CO LTD
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Patent Information

Application Number
CN202522642555.2
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-12-12
Publication Date
2026-10-30
Estimated Expiration
2035-12-12

AI Technical Summary

Technical Problem

[0002]半导体测试分选机上的一种芯片拾取吸头机构为气缸伸缩带动吸嘴升降,进行芯片的取放,气缸式吸头取放机构的优点为体积小、集成度高,缺点为气缸的活塞杆和缸筒导向套的配合为滑动间隙配合,配合间隙较大,以避免因分选机取放效率较高,气缸需要不停伸缩取放芯片、工作时间长而造成的热膨胀卡涩,造成活塞杆和缸筒无法获得较高的同轴度;同时气缸装在变距机构上进行变距移动以适应不同芯片间距的取放,变距机构的凸轮和变距斜槽配合也存在间隙,多个气缸联动后,间距无法达到理想的等距,造成吸嘴无法吸取芯片的正中心容易造成芯片放下时歪斜

Benefits of technology

[0003]本实用新型目的在于解决上述技术问题,提供一种水平位置可微调的吸头安装座。

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Abstract

The utility model relates to a kind of suction head mounting seat with horizontally positionable fine adjustment, including butt flange, cylinder piston rod, suction nozzle mounting seat and suction nozzle seat fixing sleeve, the butt flange is fixed on cylinder piston rod, the suction nozzle mounting seat and the suction nozzle seat fixing sleeve clamp the butt flange, the butt flange with the suction nozzle mounting seat is reserved fine adjustment gap in horizontal plane, the suction nozzle mounting seat can be moved relative to the butt flange in horizontal direction to compensate position error.
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Description

Technical Field

[0001] This utility model relates to the field of chips, and in particular to a suction head mounting base with adjustable horizontal position. Background Technology

[0002] One type of chip pick-up head mechanism on a semiconductor testing and sorting machine uses a cylinder to extend and retract, driving the nozzle to rise and fall for chip picking and placement. The advantages of this cylinder-type pick-up head mechanism are its small size and high integration. However, its disadvantages include a sliding clearance fit between the cylinder piston rod and the cylinder guide sleeve. This clearance is relatively large, which is to prevent thermal expansion and jamming caused by the high picking and placing efficiency of the sorting machine, requiring continuous extension and retraction of the cylinder for chip picking and placement over long periods. This would prevent the piston rod and cylinder from achieving a high degree of coaxiality. Furthermore, the cylinder is mounted on a pitch-changing mechanism to adapt to different chip spacings. However, the cam and pitch-changing groove of the pitch-changing mechanism also have clearances. When multiple cylinders are linked, the spacing cannot reach an ideal equidistant distance, causing the nozzle to fail to pick up the chip at its exact center, potentially leading to chip misalignment when placed down. Utility Model Content

[0003] The purpose of this utility model is to solve the above-mentioned technical problems and provide a suction head mounting base with adjustable horizontal position.

[0004] A horizontally adjustable suction head mounting base includes a mating flange, a cylinder piston rod, a suction nozzle mounting base, and a suction nozzle seat fixing sleeve. The mating flange is fixed on the cylinder piston rod. The suction nozzle mounting base and the suction nozzle seat fixing sleeve clamp the mating flange. A fine-tuning gap is reserved between the mating flange and the suction nozzle mounting base in the horizontal plane. The suction nozzle mounting base can move horizontally relative to the mating flange to compensate for positional errors.

[0005] When the piston rod and cylinder barrel are misaligned, the threads between the nozzle mounting seat and the nozzle seat fixing sleeve can be loosened, the nozzle mounting seat can be finely adjusted to be concentric with the cylinder barrel, and then tightened again to correct the horizontal misalignment. When multiple cylinders have a misalignment due to errors in the pitch mechanism, causing one group of cylinder barrels to have reached the required pitch, while another group cannot accurately adjust to the same pitch, fine-tuning one of the nozzle mounting seats that has not been adjusted to the correct pitch can maintain the equal pitch of the nozzles, thus connecting the nozzle mounting seat and the cylinder. When the piston rod and cylinder barrel are misaligned due to manufacturing errors, for example, the nozzle seat flange and piston rod are misaligned by 0.22mm, the nozzle seat fixing sleeve and nozzle mounting seat can be finely adjusted by 0.22mm relative to the former two to maintain coaxiality with respect to the cylinder barrel. The cylinder is mounted on an external pitch-changing mechanism (not shown in the drawing). Due to the error of the pitch-changing mechanism, for example, if the pitch of one set of cylinders has been changed to 20mm, but the other set cannot be changed to the same pitch and can only be changed to 20.3mm, the nozzle seat fixing sleeve and nozzle mounting seat of the eccentric cylinder set can be finely adjusted by 0.3mm to ensure that the nozzle pitch is still 20mm.

[0006] Preferably, the fine-tuning gap includes a first horizontal gap between the nozzle seat fixing sleeve and the docking flange, and a second horizontal gap between the nozzle mounting seat and the docking flange.

[0007] Preferably, the first horizontal gap includes the gaps formed by the nozzle seat fixing sleeve and the two sides of the mating flange, and the second horizontal gap is the gap between the end face of the nozzle mounting seat and the end face of the mating flange.

[0008] Preferably, the assembly further includes a cylinder, a ball bearing sleeve, a nozzle, and a nozzle-fixing ball bearing. The mating flange and the cylinder are connected by threads, and the anti-loosening screw abuts against the cylinder piston rod thread. The nozzle seat fixing sleeve and the nozzle mounting seat are connected by threads, and when locked, the nozzle seat fixing sleeve and the nozzle mounting seat clamp the mating flange. The nozzle-fixing ball bearing is used for the connection between the nozzle and the nozzle mounting seat, and the ball bearing sleeve surrounds the ball bearing to restrict the nozzle on the nozzle mounting seat. The horizontal clearance between the nozzle seat fixing sleeve and the mating flange, and the horizontal clearance between the nozzle mounting seat and the mating flange, are used as space allowances to eliminate eccentricity errors.

[0009] Preferably, the nozzle mounting base and the nozzle seat fixing sleeve clamp the mating flange by a threaded connection. Attached Figure Description

[0010] Figure 1 This is an exploded view of the present invention.

[0011] Figure 2 This is a schematic diagram of the disassembled structure of this utility model.

[0012] Figure 3This is a cross-sectional view of the nozzle mounting base of this utility model.

[0013] Figure 4 This is a schematic diagram of the adjustment state when the piston rod is eccentric according to this utility model.

[0014] Figure 5 This is a schematic diagram showing the adjustment state of the cylinder unequal distance suction nozzle mounting base of this utility model.

[0015] Figure 6 This is a schematic diagram of the nozzle pickup chip of this utility model. Detailed Implementation

[0016] This utility model is described in conjunction with the accompanying drawings.

[0017] Reference Figures 1 to 5 A horizontally adjustable suction head mounting base includes a docking flange 3, a cylinder piston rod 102, a suction nozzle mounting base 5, and a suction nozzle seat fixing sleeve 2. The docking flange 3 is fixed on the cylinder piston rod 102. The suction nozzle mounting base 5 and the suction nozzle seat fixing sleeve 2 clamp the docking flange 3. A fine-tuning gap is reserved between the docking flange 3 and the suction nozzle mounting base 5 in the horizontal plane. The suction nozzle mounting base 5 can move horizontally relative to the docking flange 3 to compensate for positional errors.

[0018] When the piston rod 102 and cylinder 101 are misaligned, the threads between the nozzle mounting seat 5 and the nozzle seat fixing sleeve 2 can be loosened, the nozzle mounting seat 5 can be finely adjusted to be concentric with the cylinder 101, and then tightened again to restore the horizontal position of the misalignment. When the pitch mechanism error of multiple cylinders 1 causes the pitch of one group of cylinders 101 to reach the required pitch, while another group cannot accurately pitch to the same pitch, the nozzle mounting seat 5 that has not been pitched to the correct position can be finely adjusted to maintain the equal pitch of the nozzles, thus connecting the nozzle mounting seat 5 and the cylinder 1. When the piston rod 102 and cylinder 101 are misaligned due to manufacturing errors, for example, the nozzle seat flange 3 and piston rod 102 are misaligned by 0.22mm, the nozzle seat fixing sleeve 2 and nozzle mounting seat 5 can be finely adjusted by 0.22mm relative to the former two to maintain coaxiality with respect to the cylinder 101. The cylinder 1 is mounted on an external pitch-changing mechanism (not shown in the drawing). Due to the error of the pitch-changing mechanism, for example, if the pitch of one set of cylinders 101 has been changed to 20mm, but the other set cannot be accurately changed to the same pitch and can only be changed to 20.3mm, the nozzle seat fixing sleeve 2 and the nozzle mounting seat 5 of the eccentric cylinder 1 set can be finely adjusted by 0.3mm to ensure that the nozzle pitch is still 20mm.

[0019] The fine-tuning gap includes a first horizontal gap (5A, 5B) between the nozzle seat fixing sleeve 2 and the docking flange 3, and a second horizontal gap (5C) between the nozzle mounting seat 5 and the docking flange 3.

[0020] The first horizontal gap includes the gaps formed by the nozzle seat fixing sleeve 2 and the two sides of the docking flange 3, and the second horizontal gap is the gap between the end face of the nozzle mounting seat 5 and the end face of the docking flange 3.

[0021] It also includes a cylinder 1, a steel ball sleeve, a suction nozzle, and a suction nozzle fixing steel ball 6. The docking flange 3 and the cylinder 1 are connected by threads, and the anti-loosening screw abuts against the thread of the cylinder piston rod 102. The suction nozzle seat fixing sleeve 2 and the suction nozzle mounting seat 5 are connected by threads. When locked, the suction nozzle seat fixing sleeve 2 and the suction nozzle mounting seat 5 clamp the docking flange 3. The suction nozzle fixing steel ball 6 is used for the connection between the suction nozzle and the suction nozzle mounting seat 5. The steel ball sleeve 7 surrounds the steel ball to restrict the suction nozzle on the suction nozzle mounting seat 5. The horizontal gap between the suction nozzle seat fixing sleeve 2 and the docking flange 3, and the horizontal gap between the suction nozzle mounting seat 5 and the docking flange 3 are used as space allowance to eliminate eccentricity error.

[0022] The nozzle mounting base 5 and the nozzle seat fixing sleeve 2 are connected by threads to clamp the mating flange 3.

[0023] Based on the disclosure and teachings of the above specification, those skilled in the art can make changes and modifications to the above embodiments. Therefore, this utility model is not limited to the specific embodiments disclosed and described above, and some modifications and changes to this utility model should also fall within the protection scope of the claims of this utility model. Furthermore, although some specific terms are used in this specification, these terms are only for convenience of explanation and do not constitute any limitation on this utility model.

Claims

1. A suction head mounting base with adjustable horizontal position, characterized in that, It includes a docking flange, a cylinder piston rod, a nozzle mounting base, and a nozzle seat fixing sleeve. The docking flange is fixed on the cylinder piston rod. The nozzle mounting base and the nozzle seat fixing sleeve clamp the docking flange. A fine-tuning gap is reserved between the docking flange and the nozzle mounting base in the horizontal plane. The nozzle mounting base can move horizontally relative to the docking flange to compensate for positional errors.

2. The suction head mounting base according to claim 1, characterized in that, The fine-tuning gap includes a first horizontal gap between the nozzle seat fixing sleeve and the docking flange, and a second horizontal gap between the nozzle mounting base and the docking flange.

3. The suction head mounting base according to claim 2, characterized in that, The first horizontal gap includes the gaps formed between the nozzle seat fixing sleeve and the two sides of the mating flange.

4. The suction head mounting base according to claim 2, characterized in that, The second horizontal gap is the gap between the end face of the suction nozzle mounting seat and the end face of the mating flange.

5. The suction head mounting base according to claim 1, characterized in that, It also includes a cylinder, a ball bearing sleeve, a nozzle, and a nozzle-fixing ball bearing. The mating flange and the cylinder are connected by threads, and the anti-loosening screw abuts against the cylinder piston rod thread. The nozzle seat fixing sleeve and the nozzle mounting seat are connected by threads. When locked, the nozzle seat fixing sleeve and the nozzle mounting seat clamp the mating flange. The nozzle-fixing ball bearing is used for the connection between the nozzle and the nozzle mounting seat. The ball bearing sleeve surrounds the ball bearing to restrict the nozzle on the nozzle mounting seat. The horizontal clearance between the nozzle seat fixing sleeve and the mating flange, and the horizontal clearance between the nozzle mounting seat and the mating flange are used as space allowance to eliminate eccentricity error.

6. The suction head mounting base according to claim 1, characterized in that, The nozzle mounting base and the nozzle base fixing sleeve clamp the mating flange through a threaded connection.