Pickup device and test handler

Abstract

The application relates to the technical field of semiconductor testing, and discloses a pickup device and a test sorting machine. The pickup device comprises a first mounting base, a second mounting base, a piston rod, a plurality of connecting pipes and a plurality of vacuum nozzles. The first mounting base is provided with a piston cavity extending along a first direction, a first interface, a first channel communicating between one end of the piston cavity and the first interface, a second interface, a second channel communicating between the other end of the piston cavity and the second interface, a plurality of third interfaces and a plurality of third channels corresponding to the third interfaces. The two ends of the connecting pipe are slidably arranged at the other end of a third channel and fixed to the second mounting base. A vacuum nozzle is communicated with a third channel through a fourth channel arranged in the second mounting base and a connecting pipe. The piston part of the piston rod is slidably arranged in the piston cavity, and the rod part of the piston rod is fixed to the second mounting base. In the above manner, the manufacturing cost of the pickup device can be reduced.

Description

Technical Field

[0001] This application relates to the field of semiconductor testing technology, and in particular to a pickup device and a test sorting machine. Background Technology

[0002] The test sorting machine is used to load semiconductor devices from the user tray to the test tray, and then transfer the semiconductor devices to the test equipment along with the test tray. After the test is completed, the semiconductor devices are unloaded from the test tray to the user tray.

[0003] The pick-up device of the test sorting machine uses vacuum nozzles to pick up semiconductor devices from the test tray. Current pick-up devices use multiple vacuum nozzles to pick up multiple semiconductor devices simultaneously. Each vacuum nozzle has a corresponding telescopic mechanism to drive the vacuum nozzle closer to or further away from the test tray. The use of multiple telescopic mechanisms increases the manufacturing cost of the pick-up device. Utility Model Content

[0004] In view of the problems existing in the background art, the purpose of this application is to provide a pickup device and a test sorting machine that overcomes or at least partially solves the above problems.

[0005] According to a first aspect of this application, a pickup device is provided, including a first mounting base, a second mounting base, a piston rod, a plurality of connecting tubes, and a plurality of vacuum nozzles. The first mounting base has a piston cavity, a first channel, a first interface, a second channel, a second interface, a plurality of third interfaces, and a plurality of third channels. The piston cavity extends along a first direction and includes a first end and a second end disposed opposite to each other along the first direction. The two ends of the first channel are respectively connected to the first end and the first interface. The two ends of the second channel are respectively connected to the second end and the second interface. A third interface is connected to one end of a third channel. The second mounting base has a plurality of fourth channels. The piston rod includes a piston portion and a rod portion connected together. The piston portion is slidably disposed in the piston cavity, and the end of the rod portion away from the piston portion passes through the first mounting base and is fixed to the second mounting base. The two ends of a connecting tube are respectively connected to the other end of a third channel and one end of a fourth channel. One end of the connecting tube is slidably disposed along the first direction at the other end of a third channel, and the other end of the connecting tube is fixed to the second mounting base. A plurality of vacuum nozzles are disposed on the second mounting base, and one vacuum nozzle is connected to the other end of a fourth channel.

[0006] In one or more of the above optional embodiments, the piston rod includes a first sealing ring, a first bushing and a second sealing ring, and the outer wall of the piston portion is provided with a first annular groove, a second annular groove and a third annular groove arranged sequentially along a first direction. The first sealing ring is disposed in the first annular groove, the first bushing is disposed in the second annular groove and the second sealing ring is disposed in the third annular groove.

[0007] In one or more of the above optional embodiments, a guide rod is included, one end of which is slidably disposed on a first mounting base along a first direction, and the other end of which is fixed to a second mounting base.

[0008] In one or more of the above optional embodiments, the second end is provided with a first opening, the first opening is provided with a first sealing sleeve, the rod is inserted through the first sealing sleeve, the outer wall of the first sealing sleeve is provided with a fourth annular groove, the fourth annular groove is provided with a third sealing ring, the third sealing ring is used to seal the gap between the outer wall of the first sealing sleeve and the inner wall of the first opening, the inner wall of the first sealing sleeve is provided with a fifth annular groove, the fifth annular groove is provided with a fourth sealing ring, the fourth sealing ring is used to seal the gap between the inner wall of the first sealing sleeve and the outer wall of the rod.

[0009] In one or more of the above optional embodiments, the other end of the third channel is provided with a second opening, the second opening is provided with a second sealing sleeve, the connecting tube passes through the second sealing sleeve, the outer wall of the second sealing sleeve is provided with a sixth annular groove, the sixth annular groove is provided with a fifth sealing ring, the fifth sealing ring is used to seal the gap between the outer wall of the second sealing sleeve and the inner wall of the second opening, the inner wall of the second sealing sleeve is provided with a seventh annular groove, the seventh annular groove is provided with a sixth sealing ring, the sixth sealing ring is used to seal the gap between the inner wall of the second sealing sleeve and the outer wall of the connecting tube.

[0010] In one or more of the above optional embodiments, the first mounting base and the second mounting base are disposed opposite to each other along a first direction, and the first end and the second end are arranged sequentially along the direction from the first mounting base to the second mounting base. A first stop is provided at the end of the piston portion facing away from the rod portion, the first stop abutting against the inner wall of the first end along the direction from the second end to the first end, and / or a second stop is provided on the surface of the second mounting base facing the first mounting base, the second stop abutting against the surface of the first mounting base facing the second mounting base along the direction from the second end to the first end.

[0011] In one or more of the above optional embodiments, the second mounting base includes a first base body, a second base body, and a seventh sealing ring. The first base body is detachably and fixedly connected to the second base body along a first direction. One end of the rod away from the piston portion and the other end of the connecting tube are fixed to the first base body. Multiple vacuum nozzles are disposed on the second base body. The fourth channel includes a first part, a second part, and a connecting part. The first part is disposed on the first base body and communicates with the other end of the connecting tube. The second part is disposed on the second base body. The vacuum nozzles are disposed on the second base body and communicate with the second part. The opposing surfaces of the first base body and the second base body together enclose the connecting part, connecting the first part and the second part. The seventh sealing ring is disposed between the opposing surfaces of the first base body and the second base body and surrounds the connecting part, sealing the connecting part.

[0012] In one or more of the above optional embodiments, there are multiple seventh sealing rings, and the surface of the first seat facing the second seat is provided with multiple first grooves, one first groove and the second seat together form a connecting portion, and a seventh sealing ring is disposed around one first groove; and / or there are multiple seventh sealing rings, and the surface of the second seat facing the first seat is provided with multiple second grooves, one second groove and the first seat together form a connecting portion, and a seventh sealing ring is disposed around one second groove.

[0013] In one or more of the above optional embodiments, a first positioning groove is provided on the surface of the first base facing the second base, and a second positioning groove is provided on the surface of the second base facing the first base. The second mounting base includes a positioning sleeve. Along a first direction, the first positioning groove and the second positioning groove are aligned, and the opposite ends of the positioning sleeve are respectively located in the first positioning groove and the second positioning groove. A threaded hole is provided at the bottom of the first positioning groove, and a bolt hole is provided at the bottom of the second positioning groove. The bolt hole penetrates the second base along the direction from the first base to the second base. The second mounting base also includes a mounting bolt. Along the direction from the second base to the first base, the mounting bolt passes through the bolt hole and the positioning sleeve and is screwed and fixed to the threaded hole.

[0014] According to a second aspect of this application, a test sorting machine is provided, including the aforementioned pickup device.

[0015] The beneficial effects of the embodiments of this application are as follows: When the pickup device provided in the embodiments of this application is applied to a test sorting machine, it drives the piston rod to slide relative to the first mounting base via gas, thereby causing the second mounting base to reciprocate relative to the first mounting base in a direction parallel to the first direction. This allows multiple vacuum nozzles mounted on the second mounting base to move together simultaneously. Compared to the prior art, which uses multiple drive mechanisms to drive multiple vacuum nozzles one by one, the overall structure is simpler and helps reduce the manufacturing cost of the pickup device. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the specific embodiments of this application or the prior art, the accompanying drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. In all the drawings, similar elements or parts are generally identified by similar reference numerals. In the drawings, the elements or parts are not necessarily drawn to scale.

[0017] Figure 1 A perspective view of a pickup device provided in an embodiment of this application; Figure 2 A cross-sectional schematic diagram of a first mounting base for a pickup device provided in an embodiment of this application; Figure 3A cross-sectional schematic diagram of the first and second seats of a pickup device provided in an embodiment of this application; Figure 4 An exploded view of a pickup device provided in an embodiment of this application; Figure 5 This is a cross-sectional schematic diagram of a pickup device provided in an embodiment of this application; Figure 6 for Figure 5 Enlarged view of point A in the middle; Figure 7 for Figure 5 Enlarged view of point B in the middle; Figure 8 for Figure 5 A magnified view of point C in the middle. Detailed Implementation

[0018] To facilitate understanding of this application, a more detailed description is provided below with reference to the accompanying drawings and specific embodiments. It should be noted that when an element is described as being "fixed to" another element, it can be directly on the other element, or one or more intermediate elements may exist between them. When an element is described as being "connected" to another element, it can be directly connected to the other element, or one or more intermediate elements may exist between them. The terms "vertical," "horizontal," "left," "right," "inner," "outer," and similar expressions used in this specification are for illustrative purposes only.

[0019] Unless otherwise defined, all technical and scientific terms used in this specification have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used in this specification is for the purpose of describing particular embodiments only and is not intended to limit the scope of the application. The term "and / or" as used in this specification includes any and all combinations of one or more of the associated listed items.

[0020] Furthermore, the technical features involved in the different embodiments of this application described below can be combined with each other as long as they do not conflict with each other.

[0021] Please see Figures 1-5In some embodiments, the pickup device 100 includes a first mounting base 1, a second mounting base 2, a piston rod 3, multiple connecting tubes 4, and multiple vacuum nozzles 5. The first mounting base 1 has a piston chamber 11, a first channel 12, a first interface 13, a second channel 14, a second interface 15, multiple third interfaces 16, and multiple third channels 17. The piston chamber 11 extends along a first direction X and includes a first end 11a and a second end 11b disposed opposite each other along the first direction X. The two ends of the first channel 12 are respectively connected to the first end 11a and the first interface 13. The two ends of the second channel 14 are respectively connected to the second end 11b and the second interface 15. A third interface 16 is connected to one end of a third channel 17. The second mounting base 2 has multiple fourth channels 21. The piston rod 3 includes a piston portion 31 and a rod portion 32 connected together. The piston portion 31 is slidably disposed in the piston chamber 11, and the end of the rod portion 32 away from the piston portion 31 passes through the first mounting base 1 and is fixed to the second mounting base 2. One end of a connecting tube 4 is connected to one end of a third channel 17 away from the third interface 16 and one end of a fourth channel 21, respectively. One end of the connecting tube 4 is slidably disposed along the first direction X at the end of the third channel 17 away from the third interface 16, and the other end of the connecting tube 4 is fixed to the second mounting base 2. Multiple vacuum nozzles 5 are disposed on the second mounting base 2, and one vacuum nozzle 5 is connected to the other end of the fourth channel 21.

[0022] During operation, gas is introduced into the first interface 13, and the gas flows through the first channel 12 to the first end 11a, thereby pushing the piston 31 to slide along the first end 11a towards the second end 11b. This causes the second mounting base 2 to move via the rod 32 fixed to the second mounting base 2. During this process, the connecting pipe 4 moves with the second mounting base 2, causing one end of the connecting pipe 4 slidably disposed in the third channel 17 to slide relative to the third channel 17 along the direction from the first end 11a to the second end 11b. Similarly, gas is introduced into the second interface 15, and the gas flows through the second channel 14 to the second end 11b, thereby pushing the piston 31 to slide along the second end 11b towards the first end 11a. This causes the second mounting base 2 to move via the rod 32 fixed to the second mounting base 2. During this process, the connecting pipe 4 moves with the second mounting base 2, causing one end of the connecting pipe 4 slidably disposed in the third channel 17 to slide relative to the third channel 17 along the direction from the second end 11b to the first end 11a. In this way, the second mounting base 2 can be moved back and forth relative to the first mounting base 1 in a direction parallel to the first direction X.

[0023] When applied to the pickup device 100, multiple third interfaces 16 are used to communicate with a vacuum device. The vacuum device is connected to a vacuum nozzle 5 through a corresponding third interface 16, a third channel 17, a connecting tube 4, and a fourth channel 21. When a semiconductor device needs to be picked up, the vacuum device puts the vacuum nozzle 5 under negative pressure, and the vacuum nozzle 5 picks up the semiconductor device. When a semiconductor device needs to be removed, the vacuum device puts the vacuum nozzle 5 under normal pressure, and the vacuum nozzle 5 puts down the semiconductor device. By reciprocating in a direction parallel to the first direction X, the vacuum nozzle 5 located on the second mounting base 2 moves closer to the test tray or user tray to pick up or put down the semiconductor device, and moves further away from the test tray or user tray to transfer the semiconductor device picked up by the vacuum nozzle 5.

[0024] The pickup device 100 provided in this embodiment, when applied to a test sorting machine, uses a gas-driven piston rod 3 to slide relative to the first mounting base 1, thereby causing the second mounting base 2 to reciprocate relative to the first mounting base 1 in a direction parallel to the first direction X. This simultaneously drives multiple vacuum nozzles 5 mounted on the second mounting base 2 to move together. Compared to the prior art, which uses multiple drive mechanisms to drive multiple vacuum nozzles 5 one-to-one, the overall structure is simpler and helps reduce the manufacturing cost of the pickup device 100.

[0025] In some embodiments, the first mounting base 1 and the second mounting base 2 are disposed opposite to each other along the first direction X, and the first end 11a and the second end 11b are arranged sequentially along the direction from the first mounting base 1 to the second mounting base 2.

[0026] In some embodiments, the first interface 13, the second interface 15 and the third interface 16 are all located on the surface of the first mounting base 1 facing away from the second mounting base 2.

[0027] In some embodiments, the first interface 13 and the second interface 15 are respectively provided with a first connector 131 and a second connector 151, which are used to connect to the air tube of the ventilation device.

[0028] In some embodiments, each third interface 16 is provided with a corresponding third connector 161, which is used to connect to the air pipe of the vacuum equipment.

[0029] Please see Figure 1 , Figure 5 and Figure 6In some embodiments, the piston rod 3 includes a first sealing ring 33, a first bushing 34, and a second sealing ring 35. The outer wall of the piston part 31 is provided with a first annular groove 3a, a second annular groove (not shown) and a third annular groove 3c arranged sequentially along the first direction X. The first sealing ring 33 is disposed in the first annular groove 3a and is used to seal the gap between the piston part 31 and the inner wall of the piston cavity 11. The first bushing 34 is disposed in the second annular groove, and the second sealing ring 35 is disposed in the third annular groove 3c. The third sealing ring 1912 is used to seal the gap between the piston part 31 and the inner wall of the piston cavity 11.

[0030] In some embodiments, the first sealing ring 33 and the second sealing ring 35 are both Y-shaped sealing rings. The cooperation between the two Y-shaped sealing rings and the first bushing 34 helps to satisfy the sealing performance between the piston part 31 and the inner wall of the piston cavity 11 while reducing the frictional force when the piston rod 3 slides relative to the piston cavity 11.

[0031] In some embodiments, the outer wall of the piston portion 31 is provided with a first annular protrusion 311, a second annular protrusion 312, a third annular protrusion 313 and a fourth annular protrusion 314 arranged sequentially at intervals along a first direction X. A first annular groove 3a is formed between the first annular protrusion 311 and the second annular protrusion 312, a second annular groove is formed between the second annular protrusion 312 and the third annular protrusion 313, and a third annular groove 3c is formed between the third annular protrusion 313 and the fourth annular protrusion 314.

[0032] In some embodiments, one end of the second channel 14 is connected to the side of the fourth annular protrusion 314 opposite to the third annular protrusion 313. After the gas enters the side of the fourth annular protrusion 314 opposite to the third annular protrusion 313 through the second channel 14, it pushes the piston part 31 to slide along the second end 11b toward the first end 11a.

[0033] Please see Figure 1 , Figure 2 and Figure 5 In some embodiments, the pickup device 100 includes a guide rod 6, one end of which is slidably disposed on the first mounting base 1 along the first direction X, and the other end of which is fixed to the second mounting base 2. By setting the guide rod 6 to guide the second mounting base 2 to reciprocate relative to the first mounting base 1 in a direction parallel to the first direction X, it is beneficial to reduce the vibration and offset of the second mounting base 2 during the movement process and improve the stability of the movement of the second mounting base 2.

[0034] In some embodiments, there are two second guide rods 6, which are arranged opposite to each other on both sides of the piston rod 3.

[0035] In some embodiments, the surface of the first mounting base 1 facing the second mounting base 2 is provided with a blind hole 18. The blind hole 18 extends along the first direction X. One end of the guide rod 6 is inserted into the blind hole 18. The guide rod 6 can extend and retract relative to the blind hole 18 in a direction parallel to the first direction X. The end of the blind hole 18 away from the opening is provided with a vent hole 181. The vent hole 181 is used to connect the blind hole 18 with the outside atmosphere.

[0036] In some embodiments, the pickup device 100 includes a second bushing 7, and the blind hole 18 includes a first hole segment 18a and a second hole segment 18b arranged sequentially along a first direction X. The diameter of the second hole segment 18b is larger than the diameter of the first hole segment 18a. The second bushing 7 is fixedly disposed in the second hole segment 18b, and the guide rod 6 is slidably disposed in the second bushing 7.

[0037] Please see Figure 2 , Figure 5 and Figure 6 In some embodiments, the second end 11b is provided with a first opening 111, the first opening 111 is provided with a first sealing sleeve 19, the rod portion 32 is slidably inserted through the first sealing sleeve 19, the outer wall of the first sealing sleeve 19 is provided with a fourth annular groove 1911, the fourth annular groove 1911 is provided with a third sealing ring 1912, the third sealing ring 1912 is used to seal the gap between the outer wall of the first sealing sleeve 19 and the inner wall of the first opening 111, the inner wall of the first sealing sleeve 19 is provided with a fifth annular groove 1913, the fifth annular groove 1913 is provided with a fourth sealing ring 1914, the fourth sealing ring 1914 is used to seal the gap between the inner wall of the first sealing sleeve 19 and the outer wall of the rod portion 32.

[0038] In some embodiments, the first sealing sleeve 19 includes a sleeve body 191 and a fixing part 192 connected to each other, a fourth annular groove 1911 and a fifth annular groove 1913 are provided on the sleeve body 191, and the fixing part 192 is screwed to the first mounting base 1.

[0039] Please see Figure 2 , Figure 5 and Figure 7 In some embodiments, the other end of the third channel 17 is provided with a second opening 171, the second opening 171 is provided with a second sealing sleeve 172, the connecting pipe 4 passes through the second sealing sleeve 172, the outer wall of the second sealing sleeve 172 is provided with a sixth annular groove 1721, the sixth annular groove 1721 is provided with a fifth sealing ring 1722, the fifth sealing ring 1722 is used to seal the gap between the outer wall of the second sealing sleeve 172 and the inner wall of the second opening 171, the inner wall of the second sealing sleeve 172 is provided with a seventh annular groove 1723, the seventh annular groove 1723 is provided with a sixth sealing ring 1724, the sixth sealing ring 1724 is used to seal the gap between the inner wall of the second sealing sleeve 172 and the outer wall of the connecting pipe 4.

[0040] Please see Figure 3 , Figure 4 and Figure 7 In some embodiments, the outer wall of the end of the connecting pipe 4 away from the first mounting base 1 is provided with a fifth annular protrusion 41, the pickup device 100 includes an eighth sealing ring 8, the surface of the second mounting base 2 facing the first mounting base 1 is provided with a third positioning groove 22, the eighth sealing ring 8 is disposed in the third positioning groove 22, the end of the fourth channel 21 communicating with the connecting pipe 4 forms an installation port 221 at the bottom of the third positioning groove 22, the end of the connecting pipe 4 away from the first mounting base 1 is inserted into the installation port 221, the fifth annular protrusion 41 abuts against the eighth sealing ring 8 along the first direction X, the fifth annular protrusion 41 and the bottom of the third positioning groove 22 together hold the eighth sealing ring 8, and the eighth sealing ring 8 seals the connection between the connecting pipe 4 and the fourth channel 21.

[0041] Please see Figure 2 and Figures 4-6 In some embodiments, a first stop 36 is provided at the end of the piston portion 31 facing away from the rod portion 32. The first stop 36 is used to abut against the inner wall of the first end portion 11a in the direction from the second end portion 11b to the first end portion 11a. The first stop 36 serves to protect the piston portion 31 and prevent the piston portion 31 from directly colliding with the inner wall of the piston chamber 11. In some embodiments, the first stop 36 is made of a flexible material.

[0042] In some embodiments, the surface of the second mounting base 2 facing the first mounting base 1 is provided with a second stop 23. The second stop 23 is used to abut against the surface of the first mounting base 1 facing the second mounting base 2 in the direction from the second end 11b to the first end 11a. The second stop 23 is used to protect the first mounting base 1 and the second mounting base 2, preventing the second mounting base 2 from directly colliding with the first mounting base 1. In some embodiments, the second stop 23 is made of a flexible material.

[0043] Please see Figure 1 , Figures 3-5 and Figure 8In some embodiments, the second mounting base 2 includes a first base 2a, a second base 2b and a seventh sealing ring 24. The first base 2a is detachably connected and fixed to the second base 2b along the first direction X. The end of the rod 32 away from the piston 31 and the end of the connecting tube 4 away from the first mounting base 1 are fixed to the first base 2a. Multiple vacuum nozzles 5 are all provided on the second base 2b. The fourth channel 21 includes a first part 21a, a second part 21b, and a connecting part 21c. The first part 21a is located on the first seat 2a and is connected to the end of the connecting tube 4 away from the first mounting seat 1. The second part 21b is located on the second seat 2b. The vacuum nozzle 5 is located on the second seat 2b and is connected to the second part 21b. The opposing surfaces of the first seat 2a and the second seat 2b together form the connecting part 21c, which connects the first part 21a and the second part 21b. A seventh sealing ring 24 is located between the opposing surfaces of the first seat 2a and the second seat 2b and surrounds the connecting part 21c. The seventh sealing ring 24 is used to seal the connecting part 21c. By dividing the second mounting base 2 into two parts, a first base 2a and a second base 2b, and with the first base 2a being detachably fixed to the second base 2b, when it is necessary to change the spacing of each vacuum nozzle 5 to cope with different usage environments, only the second base 2b with different spacing between the vacuum nozzles 5 can be replaced, without replacing the entire pickup device 100. This is beneficial to improving the compatibility of the pickup device 100 and reducing the usage cost of the pickup device 100.

[0044] In some embodiments, the second base 2b is screwed to the first base 2a in a direction parallel to the first direction X.

[0045] In some embodiments, there are multiple seventh sealing rings 24, and the surface of the first seat 2a facing the second seat 2b is provided with multiple first grooves (not shown). A first groove and the second seat 2b together form a connecting portion 21c, and a seventh sealing ring 24 is disposed around a first groove.

[0046] In some embodiments, the surface of the first seat 2a facing the second seat 2b is further provided with an eighth annular groove (not shown) that corresponds one-to-one with the first groove, and a seventh sealing ring 24 is provided in the eighth annular groove.

[0047] In some embodiments, there are multiple seventh sealing rings 24, and multiple second grooves 25 are provided on the surface of the second seat 2b facing the first seat 2a. A second groove 25 and the first seat 2a together form a connecting portion 21c, and a seventh sealing ring 24 is disposed around a second groove 25.

[0048] In some embodiments, the surface of the second seat 2b facing the first seat 2a is further provided with a ninth annular groove 26 corresponding to the second groove 25, and a seventh sealing ring 24 is disposed in the ninth annular groove 26.

[0049] Please see Figures 3-5 In some embodiments, the surface of the first base 2a facing the second base 2b is provided with a first positioning groove 27, and the surface of the second base 2b facing the first base 2a is provided with a second positioning groove 28. The second mounting base 2 includes a positioning sleeve 29. Along the first direction X, the first positioning groove 27 and the second positioning groove 28 are aligned. The two opposite ends of the positioning sleeve 29 are respectively located in the first positioning groove 27 and the second positioning groove 28. The bottom of the first positioning groove 27 is provided with a threaded hole 271, and the bottom of the second positioning groove 28 is provided with a bolt hole 281. The bolt hole 281 penetrates the second base 2b along the direction from the first base 2a to the second base 2b. The second mounting base 2 also includes a mounting bolt (not shown). Along the direction from the second base 2b to the first base 2a, the mounting bolt passes through the bolt hole 281 and the positioning sleeve 29 and is screwed and fixed to the threaded hole 271.

[0050] Based on the same inventive concept, this application also provides a test sorting machine, including the picking device 100 in any of the above embodiments.

[0051] The above description is merely an embodiment of this application and does not limit the patent scope of this application. Any equivalent structural or procedural transformations made using the content of this application's specification and drawings, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this application.

Claims

1. A pickup device, characterized in that, include: A first mounting base is provided with a piston chamber, a first channel, a first interface, a second channel, a second interface, a plurality of third interfaces, and a plurality of third channels. The piston chamber extends along a first direction and includes a first end and a second end disposed opposite to each other along the first direction. The two ends of the first channel are respectively connected to the first end and the first interface. The two ends of the second channel are respectively connected to the second end and the second interface. One of the third interfaces is connected to one end of one of the third channels. The second mounting base has multiple fourth channels; A piston rod includes a piston portion and a rod portion connected to each other. The piston portion is slidably disposed in the piston chamber, and one end of the rod portion away from the piston portion passes through the first mounting base and is fixed to the second mounting base. Multiple connecting tubes, one of which has two ends connected to the other end of a third channel and one end of a fourth channel respectively, one end of which is slidably disposed at the other end of a third channel along the first direction, and the other end of which is fixed to the second mounting base; Multiple vacuum nozzles are disposed on the second mounting base, and one of the vacuum nozzles is connected to the other end of the fourth channel.

2. The pickup device according to claim 1, characterized in that, The piston rod includes a first sealing ring, a first bushing, and a second sealing ring. The outer wall of the piston portion is provided with a first annular groove, a second annular groove, and a third annular groove arranged sequentially along the first direction. The first sealing ring is disposed in the first annular groove, the first bushing is disposed in the second annular groove, and the second sealing ring is disposed in the third annular groove.

3. The pickup device according to claim 1, characterized in that, It includes a guide rod, one end of which is slidably disposed on the first mounting base along the first direction, and the other end of which is fixed to the second mounting base.

4. The pickup device according to claim 1, characterized in that, The second end is provided with a first opening, the first opening is provided with a first sealing sleeve, the rod is inserted through the first sealing sleeve, the outer wall of the first sealing sleeve is provided with a fourth annular groove, the fourth annular groove is provided with a third sealing ring, the third sealing ring is used to seal the gap between the outer wall of the first sealing sleeve and the inner wall of the first opening, the inner wall of the first sealing sleeve is provided with a fifth annular groove, the fifth annular groove is provided with a fourth sealing ring, the fourth sealing ring is used to seal the gap between the inner wall of the first sealing sleeve and the outer wall of the rod.

5. The pickup device according to claim 1, characterized in that, The third channel has a second opening at the other end, and the second opening has a second sealing sleeve. The connecting tube passes through the second sealing sleeve. The outer wall of the second sealing sleeve has a sixth annular groove, and the sixth annular groove has a fifth sealing ring. The fifth sealing ring is used to seal the gap between the outer wall of the second sealing sleeve and the inner wall of the second opening. The inner wall of the second sealing sleeve has a seventh annular groove, and the seventh annular groove has a sixth sealing ring. The sixth sealing ring is used to seal the gap between the inner wall of the second sealing sleeve and the outer wall of the connecting tube.

6. The pickup device according to claim 1, characterized in that, The first mounting base and the second mounting base are disposed opposite to each other along the first direction, and the first end and the second end are arranged sequentially along the direction from the first mounting base to the second mounting base; The piston portion is provided with a first stop at one end opposite to the rod portion. The first stop is used to abut against the inner wall of the first end in the direction from the second end to the first end. And / or the surface of the second mounting seat facing the first mounting seat is provided with a second stop, which is used to abut against the surface of the first mounting seat facing the second mounting seat in the direction from the second end to the first end.

7. The pickup device according to claim 1, characterized in that, The second mounting base includes a first base body, a second base body, and a seventh sealing ring. The first base body is detachably connected and fixed to the second base body along the first direction. One end of the rod away from the piston and the other end of the connecting tube are fixed to the first base body. The plurality of vacuum nozzles are all located on the second base body. The fourth channel includes a first part, a second part, and a connecting part. The first part is disposed on the first seat and communicates with the other end of the connecting tube. The second part is disposed on the second seat. The vacuum nozzle is disposed on the second seat and communicates with the second part. The opposing surfaces of the first and second seats together form the connecting part, which connects the first part and the second part. The seventh sealing ring is disposed between the opposing surfaces of the first and second seats and surrounds the connecting part, and is used to seal the connecting part.

8. The pickup device according to claim 7, characterized in that, The number of the seventh sealing rings is multiple. The surface of the first seat facing the second seat has multiple first grooves. A first groove and the second seat together form a connecting portion. A seventh sealing ring is disposed around a first groove; and / or The number of the seventh sealing rings is multiple, and the surface of the second seat facing the first seat is provided with multiple second grooves. A second groove and the first seat together form a connecting part, and a seventh sealing ring is arranged around a second groove.

9. The pickup device according to claim 7, characterized in that, The first base body has a first positioning groove on its surface facing the second base body, and the second base body has a second positioning groove on its surface facing the first base body. The second mounting base includes a positioning sleeve. Along the first direction, the first positioning groove and the second positioning groove are aligned with each other, and the two opposite ends of the positioning sleeve are respectively located in the first positioning groove and the second positioning groove. The bottom of the first positioning groove is provided with a threaded hole, and the bottom of the second positioning groove is provided with a bolt hole. The bolt hole penetrates the second base body along the direction from the first base body to the second base body. The second mounting base also includes a mounting bolt. Along the direction from the second base body to the first base body, the mounting bolt passes through the bolt hole and the positioning sleeve and is screwed and fixed to the threaded hole.

10. A testing and sorting machine, characterized in that, Includes the pickup device as described in any one of claims 1-9.

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