A graphite cylinder hoisting system

Abstract

The application provides a graphite cylinder hoisting system, which comprises a hoisting bearing part and a hoisting tool; the hoisting bearing part comprises a plurality of hoisting holes and a plurality of lifting rods which are arranged correspondingly, the hoisting hole is arranged on the cylinder wall of the graphite cylinder, the lifting rod is arranged through the hoisting hole along the radial direction of the graphite cylinder, one end of the lifting rod is located in the external space of the graphite cylinder, and the other end is located in the internal space of the graphite cylinder; the hoisting tool comprises a support and a plurality of hooks which are arranged on the support, each hook is provided with two claws, and the two claws are used for simultaneously hooking one end of the same lifting rod which is located in the external space of the graphite cylinder and the other end which is located in the internal space of the graphite cylinder. The graphite cylinder hoisting system can safely and stably hoist the thin-walled graphite cylinder by arranging the lifting rod through the hoisting hole in the radial direction and simultaneously hooking the inner and outer ends of the lifting rod by the hook, the synchronous lifting by the double claws can ensure that each hoisting hole is uniformly stressed, the overall structure is simple and reliable, and the hoisting safety and the adaptability to the compact thermal field environment are effectively improved.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, specifically to a graphite cylinder hoisting system. Background Technology

[0002] In semiconductor thermal environments, graphite tubes are used to isolate the curing felt from the heater and to support components such as the upper flow guide tube. These tubes typically weigh over 60 kg, have a diameter greater than 1000 mm, and a height greater than 750 mm. Due to their large size, heavy weight, and brittle nature, these components are difficult to handle and install manually, and are highly susceptible to damage.

[0003] Currently, there are two main methods for hoisting such graphite cylinders: First, using clamps to engage with recesses in the outer wall of the graphite cylinder for hoisting. However, this method requires a relatively thick wall (usually greater than 20mm) to form sufficient structural strength, and also requires ample operating space for the clamps around the graphite cylinder, which is often unacceptable in compact thermal field structures. Second, using clamps for locking, relying on friction to lift the graphite cylinder. However, graphite material itself has good lubricity, requiring a very large locking force to provide sufficient friction, which poses a risk of the cylinder slipping during hoisting. At the same time, the clamp locking mechanism itself also requires a large radial operating space, which contradicts the reality that the graphite cylinder is usually wrapped with insulation felt and the space is limited.

[0004] Therefore, existing technologies make it difficult to achieve safe and reliable hoisting of large thin-walled graphite cylinders without increasing the thickness of the graphite cylinder wall and with limited external space. Utility Model Content

[0005] Given that existing technologies using clamps or grippers to lift large graphite cylinders are unsuitable for thin-walled environments with limited external space due to reliance on thick cylinder walls or external operating space, and also suffer from uneven lifting force and poor safety, this application provides a graphite cylinder lifting system. This system, through the use of lifting rods with lifting holes extending radially through the cylinder wall and lifting fixtures with hooks, achieves synchronous and stable lifting of the graphite cylinder from both sides axially. The system is simple and reliable, ensuring safety and stability during the lifting process, effectively improving installation efficiency and preventing component damage.

[0006] This application provides a graphite cylinder hoisting system, including:

[0007] The lifting support includes multiple lifting holes and multiple lifting rods; the lifting holes are provided on the wall of the graphite cylinder; the lifting rods are provided corresponding to the lifting holes, and the lifting rods pass through the lifting holes in the radial direction of the graphite cylinder, with one end of the lifting rod located in the outer space of the graphite cylinder and the other end located in the inner space of the graphite cylinder;

[0008] The hoisting fixture includes a support frame and multiple hooks mounted on the support frame. Each hook has two claws, which are used to simultaneously hook the same hoisting rod at one end located in the outer space of the graphite cylinder and at the other end located in the inner space of the graphite cylinder.

[0009] In one implementation, each of the hooks is connected to the bracket via a resilient component.

[0010] In one embodiment, each of the elastic components includes a limiting member, a guide rod, an elastic member, a pressure block, and a locking member. The guide rod passes through the hook, the bracket, the limiting member, the pressure block, and the locking member sequentially from bottom to top. The elastic member is disposed in the internal cavity of the limiting member. The limiting member is sleeved on the guide rod through the elastic member. The pressure block is disposed on the top of the elastic member.

[0011] In one implementation, the top of the elastic member is higher than the top of the limiting member in its natural state; when the force on the elastic member exceeds its preset maximum elastic force, the bottom of the pressing block abuts against the top of the limiting member.

[0012] In one implementation, the elastic element is a spring.

[0013] In one embodiment, the hook includes a hook body and an opening disposed on the hook body. The opening includes a top, a bottom, and a sidewall. The top and the bottom each include a sloped section and a planar section connected sequentially from the outside to the inside. The planar section is connected to the sidewall.

[0014] In one embodiment, the planar segment and the sidewall are connected by an arc-shaped surface segment.

[0015] In one embodiment, the thickness of the graphite cylinder wall is between 8 mm and 20 mm.

[0016] In one implementation, a universal joint is provided at the geometric center of the bracket.

[0017] In one embodiment, the lifting hole is a threaded hole, and the lifting rod has a thread at the middle.

[0018] As described above, the graphite cylinder hoisting system of this application has the following beneficial effects:

[0019] The graphite cylinder hoisting system of this application uses a boom that penetrates radially through the graphite cylinder wall and hooks both the inner and outer ends of the boom simultaneously. This effectively overcomes the dependence of existing claw and clamp methods on thick walls and external space. It can safely and stably hoist thin-walled graphite cylinders under conditions of limited space around the graphite cylinder. The synchronous lifting of the double claws ensures that each hoisting hole is evenly stressed. The overall structure is simple and reliable, effectively improving hoisting safety and adaptability to compact thermal environments. Attached Figure Description

[0020] Figure 1 The diagram shows a structural schematic of a thermal field in the prior art.

[0021] Figure 2 The diagram shown is a structural schematic of the graphite cylinder of this utility model;

[0022] Figure 3 The diagram shown is a structural schematic of the hoisting fixture of this utility model;

[0023] Figure 4 The diagram shows the structure of the hook and graphite cylinder of this utility model in cooperation.

[0024] Figure 5 The diagram shown is a side view of the hook and elastic component of this utility model.

[0025] Component designation explanation

[0026] 10, Guide tube; 20, Heater; 30, Curing felt; 40, Crucible; 100, Graphite tube; 210, Support; 220, Hook; 221, Claw; 222, Opening; 230, Universal lifting ring; 300, Elastic component; 310, Guide rod; 320, Limiting component; 330, Pressure block; 340, Locking component; 350, Elastic component; 2221, Inclined section; 2222, Flat section; 2223, Side wall. Detailed Implementation

[0027] The following specific examples illustrate the implementation of this utility model. Those skilled in the art can easily understand other advantages and effects of this utility model from the content disclosed in this specification. This utility model can also be implemented or applied through other different specific embodiments, and various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of this utility model.

[0028] Please see Figures 1 to 5It should be noted that the illustrations provided in this embodiment are only schematic representations of the basic concept of this utility model. Therefore, the illustrations only show the components related to this utility model and are not drawn according to the actual number, shape and size of the components in the actual implementation. In the actual implementation, the form, quantity and proportion of each component can be arbitrarily changed, and the layout of the components may also be more complex.

[0029] In the field of semiconductor silicon single crystal growth, the thermal field is a core basic structure, such as... Figure 1 As shown, the thermal field structure mainly includes a flow guide tube 10, a heater 20, a crucible 40, a graphite tube 100, and a curing felt 30. Among them, the graphite tube 100 is one of the key components. Its function is to isolate the curing felt 30 from the heater 20, prevent the heater 20 from discharging and igniting, and at the same time bear the heavy responsibility of supporting the upper flow guide tube 10 and other thermal field components. The required support weight usually exceeds 100 kg.

[0030] As the size of the thermal field increases to 32 inches and above, the diameter of integrated graphite cylinders is generally greater than 1000 mm and the height exceeds 750 mm, resulting in a significant increase in weight, typically exceeding 60 kg. These components are characterized by their large size and heavy weight. If manual handling and installation methods continue to be used, uneven stress or collisions can easily damage the graphite cylinder itself or surrounding precision thermal field components.

[0031] Currently, a dedicated hoisting solution is urgently needed to address the installation challenges of large, thin-walled graphite cylinders. However, existing hoisting methods are insufficient: claw-type hoisting requires creating load-bearing recesses in the cylinder wall, necessitating increased wall thickness (typically greater than 20mm) and sufficient radial space for claw operation; while clamp-type hoisting relies on the friction of the graphite cylinder's outer surface. Due to the inherent lubricity of graphite, insufficient locking force risks the cylinder slipping during hoisting, and the clamp mechanism itself requires significant radial space. In actual, compact thermal structures, the graphite cylinder is typically tightly surrounded by insulation material, leaving extremely limited radial space. Furthermore, to control cost and weight, the cylinder wall thickness is usually no more than 20mm, making the aforementioned existing hoisting methods unsuitable.

[0032] To address the shortcomings of the prior art and the aforementioned deficiencies, this application provides a graphite cylinder hoisting system. The following embodiments will provide a detailed description.

[0033] This embodiment provides a graphite cylinder hoisting system, such as Figure 2 and Figure 3 As shown, the graphite cylinder hoisting system includes a hoisting support unit and hoisting fixtures.

[0034] Among them, such as Figure 2As shown, the lifting support includes multiple lifting holes 110 provided on the cylinder wall of the graphite cylinder 100, and multiple lifting rods 120 (such as...). Figure 4 (As shown). The lifting rods 120 are correspondingly arranged with the lifting holes 110, meaning the number of lifting rods 120 is the same as the number of lifting holes 110, with one lifting rod 120 passing through each lifting hole 110. The lifting rods 120 pass through the lifting holes 110 along the radial direction of the graphite cylinder 100, such that one end of the lifting rod 120 is located in the external space of the graphite cylinder 100, and the other end is located in the internal space of the graphite cylinder 100. Optionally, the size of the lifting holes 110 can be calculated based on the number of lifting holes 110 and the weight of the graphite cylinder 100. When the number of lifting holes 110 is greater than two, uneven force distribution during lifting must be considered, ensuring that the graphite cylinder 100 can be safely lifted even when only two lifting holes 110 are under force.

[0035] like Figure 3 As shown, the lifting fixture includes a support 210 and multiple hooks 220 mounted on the support 210. The hooks 220 are correspondingly positioned to hook onto the lifting rods 120, thereby achieving the lifting of the graphite cylinder 100. Optionally, multiple supports 210 can be provided, each support 210 having one hook 220, and the number of supports 210 or hooks 220 is the same as the number of lifting rods 120. Figure 4 As shown, each hook 220 is equipped with two claws 221, with a certain gap between the two claws 221. One claw 221 is used to hook the end of the lifting rod 120 located in the external space of the graphite cylinder 100, and the other claw 221 is used to simultaneously hook the end of the same lifting rod 120 located in the internal space of the graphite cylinder 100. Optionally, the support 210 can be made of stainless steel.

[0036] The graphite cylinder hoisting system provided in this embodiment constructs a unique hoisting force structure by setting a lifting rod 120 that radially penetrates the wall of the graphite cylinder 100 and a double-claw hook 220 that works in conjunction with it. The double-claw hook 220 acts simultaneously on the inner and outer ends of the same lifting rod 120, forming a stable force couple. This effectively overcomes the overturning moment that may be generated by lifting in one direction and avoids damage to the hoisting hole 110. As a result, the hoisting force is evenly distributed to each hoisting point on the cylinder wall. This makes the graphite cylinder hoisting system provided in this embodiment particularly suitable for graphite cylinders with thin walls. At the same time, the graphite cylinder hoisting system of this embodiment has a simple and reliable structure, ensuring the safety and stability of the hoisting process, effectively improving installation efficiency and avoiding damage to components.

[0037] In optional embodiments, such as Figure 3 and Figure 5As shown, each hook 220 is connected to the bracket 210 via an elastic component 300. By configuring an elastic component 300 for each hook 220, each lifting point has independent floating adjustment capability during the lifting process. The elastic component 300 can automatically compensate for the axial machining error of the lifting hole (e.g., axial machining error within 10mm), ensuring that all hooks can synchronously contact and evenly distribute the load at the moment of lifting, effectively avoiding local stress concentration caused by uneven force. Thus, while achieving stable lifting, it provides crucial overload protection for the brittle thin-walled graphite cylinder 100, significantly improving the safety and reliability of the lifting process.

[0038] In optional embodiments, such as Figure 3 and Figure 5 As shown, each elastic component 300 includes a limiting member 320, a guide rod 310, an elastic member 350, a pressure block 330, and a locking member 340. The guide rod 310 is sequentially threaded from bottom to top by a hook 220, a bracket 210, a limiting member 320, a pressure block 330, and a locking member 340. The elastic member 350 is disposed within the internal cavity of the limiting member 320, and the limiting member 320 is sleeved on the guide rod 310 through the elastic member 350. The pressure block 330 is disposed on the top of the elastic member 350. By setting up an elastic component 300 consisting of a limiting component 320, a guide rod 310, an elastic component 350, a pressure block 330, and a locking component 340, the hook 220 is connected to the bracket 210, forming an elastic support structure with precise guidance and reliable limiting. This structure not only automatically absorbs and compensates for the positional error of the hoisting system through elastic deformation to ensure uniform load distribution, but also can immediately switch to rigid support through a rigid limiting mechanism when encountering unexpected overload, effectively preventing the failure of elastic components and structural damage. Thus, it provides multiple protections for the thin-walled graphite cylinder under complex working conditions, greatly improving the self-adaptability and safety redundancy of the hoisting system.

[0039] Specifically, each elastic component 300 includes two limiting members 320, two guide rods 310, two elastic members 350, one pressure block 330, and two locking members 340. A connecting plate (not shown in the figure) is provided between the bracket 210 and the hook 220. The bracket 210 and the connecting plate are connected by locking members, which can be bolts. The two guide rods 310 are symmetrically arranged and pass through the upper part of the hook 220 body, the connecting plate, and the pressure block 330 from bottom to top. A limiting member 320 is fitted on each guide rod 310 between the pressure block 330 and the connecting plate. A cavity is provided between the limiting member 320 and the guide rod 310. An elastic member 350 is placed in the cavity and is also fitted on the guide rod 310. A locking member 340 is fitted on the guide rod 310 located above the pressure block 330. The locking member 340 limits the top of the pressure block 330 by locking. The locking element 340 can be a nut, and the guide rod 310 is provided with threads that mate with the nut.

[0040] In an optional embodiment, the top of the elastic element 350 is higher than the top of the limiting element 320 in its natural state. When the force on the elastic element 350 exceeds its preset maximum elastic force, the bottom of the pressure block 330 abuts against the top of the limiting element 320. By setting the structure so that the elastic element 350 is higher than the limiting element 320 in its natural state, two-stage force control is achieved during the hoisting process: within the normal load range, the height of each hoisting point is automatically adjusted by the compression deformation of the elastic element 350 to ensure uniform load distribution; when an overload occurs, the pressure block 330 forms a rigid abutment with the limiting element 320, immediately switching to mechanical limiting protection, effectively preventing the elastic element 350 from crushing and failing. The above structure gives the hoisting system the dual advantages of flexible self-adaptation and rigid overload protection, significantly improving the safety and reliability of the hoisting system while ensuring the stability of the thin-walled graphite cylinder hoisting.

[0041] In an optional embodiment, the elastic element 350 is a spring. Specifically, the number of hooks 220 is set to n. Since each hook 220 corresponds to two springs, the total number of springs is 2n. The maximum elastic force that each spring can withstand is 1 / 2n of the weight of the graphite cylinder 100. By specifically defining the elastic element 350 as a spring and specifying its load-bearing capacity as 1 / 2n of the weight of the graphite cylinder 100, a precise mechanical distribution mechanism is established for the lifting system. This quantitative design ensures that all springs can deform collaboratively under normal working conditions to achieve automatic leveling and load distribution. When the load at any lifting point abnormally exceeds this threshold, limit protection is triggered. This achieves adaptive floating while constructing a precise and controllable safety protection system, improving the stability of the thin-walled graphite cylinder lifting process and the predictability of overload protection. Specifically, as... Figure 3 As shown, the number of hooks 220 is 4, so the number of springs is 8. The maximum elastic force that each spring can withstand is 1 / 8 of the weight of the graphite cylinder 100. This embodiment does not specify a particular number of hooks 220.

[0042] In optional embodiments, such as Figure 5As shown, the hook 221 includes a hook body (not labeled in the figure) and an opening 222 disposed on the hook body. The opening 222 includes a top, a bottom, and a side wall 2223. Both the top and bottom include a sloped section 2221 and a flat section 2222. The sloped section 2221 is disposed near the outside of the opening 222, and its height gradually decreases from the outside to the inside of the opening 222. One end of the flat section 2222 is connected to the sloped section 2221, and the other end is connected to the side wall 2223. By providing the sloped section 2221 and the flat section 2222 from the outside to the inside at the top and bottom of the opening 222 of the hook 221, a support structure with guiding and self-centering functions is constructed. The inclined section 2221 effectively guides the boom 120 to smoothly slide into the opening 222 during the initial stage of hoisting, reducing the alignment accuracy requirements; while the continuous flat section 2222 provides a stable and reliable support plane for the boom 120, ensuring that the hoisting force is uniformly transmitted along the vertical direction. The above structure enables the hoisting system to automatically accommodate circumferential installation deviations of the boom 120 (e.g., circumferential error of 1mm to 10mm), achieving rapid and accurate tool docking in a space-constrained thermal environment, while ensuring the stability of force transmission during hoisting.

[0043] In optional embodiments, such as Figure 5 As shown, the planar segment 2222 and the side wall 2223 are connected by an arc-shaped surface segment. By setting an arc-shaped surface segment between the planar segment 2222 and the side wall 2223, a seamless connection of the internal contour of the hook 221 is achieved. The arc-shaped surface segment can effectively eliminate the stress concentration phenomenon generated at the corner when the lifting rod 120 is under force, preventing the lifting rod 120 from being damaged due to excessive local stress. At the same time, the arc-shaped surface segment has an adaptive guiding effect on the swing of the lifting rod 120, which not only ensures the smooth and stable transmission of force during the lifting process, but also avoids scratching the surface of the lifting rod 120, further improving the compatibility of the lifting system with working condition deviations and the component protection capability.

[0044] In an optional embodiment, the wall thickness of the graphite cylinder 100 is between 8mm and 20mm. Optionally, the wall thickness of the graphite cylinder 100 can be, for example, 8mm, 10mm, 12mm, 14mm, 16mm, 18mm, and 20mm. By limiting the wall thickness of the graphite cylinder 100, it can be shown that the graphite cylinder hoisting system provided in this embodiment can overcome the problems existing in the prior art. The graphite cylinder hoisting system provided in this embodiment successfully eliminates the reliance on the heavy cylinder required for traditional clamp hoisting, and can provide safe and reliable hoisting protection for industry-standard thin-walled graphite cylinders within an extremely compact thermal field space, effectively expanding the design boundaries of advanced thermal field structures towards lightweight and compact designs.

[0045] In an optional embodiment, a universal lifting ring 230 is provided at the geometric center of the support 210. The universal lifting ring 230 can be lifted by a robotic arm or a crane lifting device. The universal lifting ring 230 is located at the geometric center of the support 210, so that the point of application of the lifting force coincides with the center of gravity of the system, fundamentally eliminating the overturning moment caused by the deviation of the force line during the lifting process, ensuring that the load is evenly distributed to each hook 220 through the support 210, so that the graphite cylinder 100 is always in a stable and controlled vertical lifting state, effectively avoiding local stress concentration caused by uneven force on the thin-walled cylinder, and improving the controllability and safety of the lifting process.

[0046] In optional embodiments, such as Figure 4 As shown, the lifting hole 110 is a threaded hole, and the lifting rod 120 has a thread at its center, which matches the thread of the lifting hole 110. This structure not only ensures that the lifting rod 120 will not move axially during lifting, improving the overall stability of the lifting system, but also effectively distributes the lifting force to the interior of the cylinder wall material through the shear resistance of the thread itself, enhancing the load-bearing capacity and reliability of the thin-walled graphite cylinder lifting point, providing a safer and more reliable connection solution for heavy-duty lifting operations in compact spaces. Optionally, both the first end of the lifting rod 120 located in the outer space of the graphite cylinder 100 and the second end located in the inner space of the graphite cylinder 100 can be set as a smooth cylindrical surface, with the diameter of the first end being larger or smaller than that of the second end. Optionally, a locking element can be provided on the first end and / or the second end. The locking element can be a nut.

[0047] The working process of the graphite hoisting system provided in this embodiment is as follows:

[0048] Using a robotic arm or overhead crane, the universal lifting ring 230 is lifted. After the support 210 and hook 220 are raised to a sufficient height, the robotic arm or overhead crane, carrying the lifting fixture, moves directly above the graphite cylinder 100. After adjusting the position, the lifting fixture is lowered to a position where the hook 220 can hook the boom 120. After manually pushing the support 210 of the lifting fixture to rotate a certain angle, the hook 220 hooks the boom 120, and the graphite cylinder 100 is lifted.

[0049] The above embodiments are merely illustrative of the principles and effects of this utility model and are not intended to limit the scope of this utility model. Any person skilled in the art can modify or alter the above embodiments without departing from the spirit and scope of this utility model. Therefore, all equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in this utility model should still be covered by the claims of this utility model.

Claims

1. A graphite cylinder hoisting system, characterized in that, include: The lifting support includes multiple lifting holes and multiple lifting rods; the lifting holes are provided on the wall of the graphite cylinder; the lifting rods are provided corresponding to the lifting holes, and the lifting rods pass through the lifting holes in the radial direction of the graphite cylinder, with one end of the lifting rod located in the outer space of the graphite cylinder and the other end located in the inner space of the graphite cylinder; The hoisting fixture includes a support frame and multiple hooks mounted on the support frame. Each hook has two claws, which are used to simultaneously hook the same hoisting rod at one end located in the outer space of the graphite cylinder and at the other end located in the inner space of the graphite cylinder.

2. The graphite cylinder hoisting system according to claim 1, characterized in that, Each of the hooks is connected to the bracket via a resilient component.

3. The graphite cylinder hoisting system according to claim 2, characterized in that, Each of the elastic components includes a limiting member, a guide rod, an elastic element, a pressure block, and a locking member. The guide rod passes through the hook, the bracket, the limiting member, the pressure block, and the locking member sequentially from bottom to top. The elastic element is disposed in the internal cavity of the limiting member. The limiting member is sleeved on the guide rod through the elastic element. The pressure block is disposed on the top of the elastic element.

4. The graphite cylinder hoisting system according to claim 3, characterized in that, In its natural state, the top of the elastic element is higher than the top of the limiting element; when the force on the elastic element exceeds its preset maximum elastic force, the bottom of the pressing block abuts against the top of the limiting element.

5. The graphite cylinder hoisting system according to claim 3 or 4, characterized in that, The elastic element is a spring.

6. The graphite cylinder hoisting system according to claim 1, characterized in that, The hook includes a hook body and an opening provided on the hook body. The opening includes a top, a bottom and a side wall. The top and the bottom each include a sloped section and a planar section connected in sequence from the outside to the inside. The planar section is connected to the side wall.

7. The graphite cylinder hoisting system according to claim 6, characterized in that, The planar segment is connected to the sidewall by an arc-shaped surface segment.

8. The graphite cylinder hoisting system according to claim 1, characterized in that, The thickness of the graphite cylinder wall is between 8mm~20mm.

9. The graphite cylinder hoisting system according to claim 1, characterized in that, A universal lifting ring is provided at the geometric center of the bracket.

10. The graphite cylinder hoisting system according to claim 1, characterized in that, The lifting hole is a threaded hole, and the lifting rod has a thread in the middle.

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