A dispensing device for ALD precursor sources

Abstract

The utility model discloses a kind of ALD precursor source's split charging device, specifically relates to ALD filling field, a kind of ALD precursor source's split charging device, including first valve, second valve, third valve, fourth valve, fifth valve, sixth valve, seventh valve, eighth valve, ninth valve, tenth valve, eleventh valve, twelfth valve, thirteenth valve, fourteenth valve, cold trap vacuum buffer tank, cleaning solvent tank, ALD source raw material tank, ALD source finished product receiving tank.The utility model described a kind of ALD precursor source's split charging device, by solvent cleaning pipeline design, can be thoroughly cleaned to pipeline before and after split charging, effectively remove residual precursor or solvent, avoid batch pollution, guarantee product purity;With the cooperation of PLC control system and electronic scale with signal transmission function, digital pressure gauge, can realize automatic filling, automatic stop, automatic cleaning and other operations, effectively reduce human operation error and pollution risk.

Description

Technical Field

[0001] This utility model relates to the field of ALD filling, and in particular to a dispensing device for ALD precursor sources. Background Technology

[0002] Semiconductor technology is developing rapidly, and advanced processes place increasingly stringent demands on key materials. Every step in the semiconductor material manufacturing process requires extremely strict control. During product manufacturing, it is crucial to minimize manual operation and control human factors. However, during the pre-deriver source packaging process, if not strictly controlled, particulate contaminants can easily be introduced, leading to product deterioration and quality incidents. Furthermore, trace amounts of liquid chemicals may remain on the inner walls of the packaging pipelines. Traditional methods of pump-fill-displacement pipelines are insufficient to completely remove these trace chemical sources. Therefore, this paper proposes a pre-deriver source packaging device to address these issues. Utility Model Content

[0003] The main objective of this invention is to provide a packaging device for ALD precursor sources, which can effectively solve the problems in the background art.

[0004] To achieve the above objectives, the technical solution adopted by this utility model is as follows: A dispensing device for an ALD precursor source includes a first valve, a second valve, a third valve, a fourth valve, a fifth valve, a sixth valve, a seventh valve, an eighth valve, a ninth valve, a tenth valve, an eleventh valve, a twelfth valve, a thirteenth valve, a fourteenth valve, a cold trap vacuum buffer tank, a cleaning solvent tank, an ALD source raw material tank, an ALD source finished product receiving tank, a cleaning solvent receiving tank, N2, VENT, VAC, a second digital display pressure gauge, and a first digital display pressure gauge. The first valve, second valve, third valve, fourth valve, fifth valve, sixth valve, seventh valve, eighth valve, ninth valve, and tenth valve... The eleventh, twelfth, thirteenth, and fourteenth valves, the cold trap vacuum buffer tank, the cleaning solvent tank, the ALD source raw material tank, the ALD source finished product receiving tank, and the cleaning solvent receiving tank are connected by pipelines. Each of the cleaning solvent tank, ALD source raw material tank, ALD source finished product receiving tank, and cleaning solvent receiving tank is equipped with an electronic scale at its bottom. The electronic scale has a data signal transmission function and can automatically fill by setting the filling weight on the PLC system. Once the filling weight is reached, the filling can be automatically stopped to ensure the accuracy of the filling weight. PT1 and PT2 are digital display pressure gauges with data transmission function.

[0005] Preferably, the cleaning solvent tank is connected to the ALD source material tank via a fifth valve, a sixth valve, and a pipeline.

[0006] Preferably, the cleaning solvent tank is connected to the ALD source finished product receiving tank via a fifth valve, an eighth valve, and a pipeline.

[0007] Preferably, the cleaning solvent tank is connected to the cleaning solvent receiving tank via a fourth valve, a thirteenth valve, and a pipeline. A second digital pressure gauge, a first valve, a second valve, and a third valve are connected to the pipeline between the fourth valve and the thirteenth valve. The first valve is connected to N2, the second valve is connected to VENT, and the third valve is connected to the cold trap vacuum buffer tank via a pipeline. The cold trap vacuum buffer tank is connected to VAC.

[0008] Preferably, the ALD source raw material tank is connected to the ALD source finished product receiving tank through a seventh valve, a ninth valve and a pipeline. A first digital pressure gauge is connected to the pipeline connecting the ninth valve and the ALD source finished product receiving tank, and a twelfth valve is provided between the first digital pressure gauge and the pipeline.

[0009] Preferably, the ALD source material tank is connected to the cleaning solvent receiving tank via a tenth valve, a fourteenth valve, and pipelines.

[0010] Preferably, the ALD source finished product receiving tank is connected to the cleaning solvent receiving tank via the eleventh valve, the fourteenth valve, and pipelines.

[0011] Preferably, the first valve, the second valve, and the third valve are all connected to the cleaning solvent tank, the ALD source raw material tank, the ALD source finished product receiving tank, and the cleaning solvent receiving tank respectively through the fourth valve, the seventh valve, the ninth valve, the thirteenth valve, and pipelines.

[0012] Preferably, the first valve, second valve, third valve, fourth valve, fifth valve, sixth valve, seventh valve, eighth valve, ninth valve, tenth valve, eleventh valve, twelfth valve, thirteenth valve, and fourteenth valve are all pneumatic diaphragm valves, VAC is a vacuum line, VENT is an vent line, and N2 is a high-purity nitrogen gas line.

[0013] Preferably, the system comprises a PLC control system consisting of a first valve, a second valve, a third valve, a fourth valve, a fifth valve, a sixth valve, a seventh valve, an eighth valve, a ninth valve, a tenth valve, an eleventh valve, a twelfth valve, a thirteenth valve, a fourteenth valve, an electronic scale, a second digital pressure gauge, and a first digital pressure gauge.

[0014] Compared with the prior art, the present invention has the following beneficial effects: This utility model discloses a dispensing device for ALD precursor sources. It employs a PLC control system in conjunction with an electronic scale and digital pressure gauge with signal transmission function, enabling automatic filling, automatic stopping, and automatic cleaning operations, effectively reducing human error and contamination risks. Through a solvent cleaning pipeline design, the pipeline can be thoroughly cleaned before and after dispensing, effectively removing residual precursors or solvents, avoiding batch-to-batch contamination, and ensuring product purity. The integrated nitrogen pressurization, vacuum suction, exhaust pressure relief (VENT), and cold trap buffer tank enable positive pressure delivery, negative pressure extraction, pressure balancing, and safe discharge, ensuring stable and controllable operation. Electronic scales are installed at the bottom of each tank, and digital pressure gauges are equipped on key pipelines, enabling real-time monitoring and feedback of filling weight and system pressure, ensuring dispensing accuracy. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the overall structure of this utility model.

[0016] In the diagram: 1. First valve; 2. Second valve; 3. Third valve; 4. Fourth valve; 5. Fifth valve; 6. Sixth valve; 7. Seventh valve; 8. Eighth valve; 9. Ninth valve; 10. Tenth valve; 11. Eleventh valve; 12. Twelfth valve; 13. Thirteenth valve; 14. Fourteenth valve; 15. Electronic scale; 16. First digital pressure gauge; 17. Second digital pressure gauge; 101. Cold trap vacuum buffer tank; 102. Cleaning solvent tank; 103. ALD source raw material tank; 104. ALD source finished product receiving tank; 105. Cleaning solvent receiving tank. Detailed Implementation

[0017] To make the technical means, creative features, objectives and effects of this utility model easier to understand, the present utility model will be further described below in conjunction with specific embodiments.

[0018] like Figure 1As shown, an ALD precursor source dispensing device includes a first valve 1, a second valve 2, a third valve 3, a fourth valve 4, a fifth valve 5, a sixth valve 6, a seventh valve 7, an eighth valve 8, a ninth valve 9, a tenth valve 10, an eleventh valve 11, a twelfth valve 12, a thirteenth valve 13, a fourteenth valve 14, a cold trap vacuum buffer tank 101, a cleaning solvent tank 102, an ALD source raw material tank 103, an ALD source finished product receiving tank 104, a cleaning solvent receiving tank 105, N2, VENT, VAC, a second digital display pressure gauge 17 and a first digital display pressure gauge 16, and an electronic scale 15, a second valve 16, and a second valve 17. The PLC control system comprises a digital pressure gauge 17 and a first digital pressure gauge 16. The first valve 1, second valve 2, third valve 3, fourth valve 4, fifth valve 5, sixth valve 6, seventh valve 7, eighth valve 8, ninth valve 9, tenth valve 10, eleventh valve 11, twelfth valve 12, thirteenth valve 13, fourteenth valve 14, a cold trap vacuum buffer tank 101, a cleaning solvent tank 102, an ALD source raw material tank 103, an ALD source finished product receiving tank 104, and a cleaning solvent receiving tank 105 are connected by pipelines. Each of the cleaning solvent tank 102, ALD source raw material tank 103, ALD source finished product receiving tank 104, and cleaning solvent receiving tank 105 is equipped with an electronic scale 15 at its bottom. The electronic scale 15 can effectively monitor the quality changes of the product during the packaging process, accurately control the weight, and ensure that the packaged product is not overfilled. All pipelines involved in the packaging system are 316L. Made of EP-grade stainless steel, the system uses welding and VCR connections to ensure high sealing performance. Valves 1, 2, 3, 4, 5, 6, 7, 8, 9, 9, 10, 11, 12, 13, and 14 are all pneumatic diaphragm valves. VAC is the vacuum line, VENT is the vent line, and N2 is the high-purity nitrogen line. The solvent used for cleaning the lines is an electronic-grade saturated alkane solvent, which is inexpensive, readily available, and easily volatile. The system is evacuated via a cold trap vacuum buffer tank connected to the VAC system; pressurization, purging, and pressure maintenance are achieved via the high-purity nitrogen line N2; and pressure is safely released via the vent line VENT.

[0019] The cleaning solvent tank 102 is connected to the ALD source raw material tank 103 through the fifth valve 5, the sixth valve 6 and pipelines, so as to realize the function of transporting the cleaning solvent from the cleaning solvent tank 102 to the ALD source finished product tank 103.

[0020] The cleaning solvent tank 102 is connected to the ALD source finished product receiving tank 104 through the fifth valve 5, the eighth valve 8 and pipelines, so as to realize the function of transporting the cleaning solvent from the cleaning solvent tank 102 to the ALD source finished product receiving tank 104.

[0021] The cleaning solvent tank 102 is connected to the cleaning solvent receiving tank 105 via a fourth valve 4, a thirteenth valve 13, and a pipeline. A second digital pressure gauge 17, a first valve 1, a second valve 2, and a third valve 3 are connected to the pipeline between the fourth valve 4 and the thirteenth valve 13. The first valve 1 is connected to N2, the second valve 2 is connected to VENT, and the third valve 3 is connected to the cold trap vacuum buffer tank 101 via a pipeline. The cold trap vacuum buffer tank 101 is connected to VAC, thereby realizing the function of transporting the cleaning solvent from the cleaning solvent tank 102 to the cleaning solvent receiving tank 105.

[0022] VENT lines serve as "pressure relief valves" and "exhaust gas outlets" for the safe operation of the system. They are responsible for safely directing the gas within the system to external treatment facilities. When pressure is generated during nitrogen purging, system pressurization, or reactions, VENT lines provide a controlled path to safely remove overpressure gas, preventing dangerous situations caused by excessive system pressure. Before or after liquid transfer, VENT lines are used to balance the pressure of relevant containers with atmospheric or exhaust gas system pressure, facilitating smooth operation of valves and connections. During the filling (dispensing) process of the high-purity nitrogen pipeline N2, a slightly positive pressure nitrogen gas can be introduced into the ALD source material tank 103 to provide a gentle driving force (pressure delivery) for liquid transfer. This is more controllable and efficient than relying solely on gravity flow. After connecting a new cylinder or opening the system, nitrogen is repeatedly introduced and discharged ("charge-discharge" cycle) to replace the air (oxygen and water vapor) in the pipeline and container, establishing an inert environment. After solvent cleaning the pipeline, nitrogen is immediately introduced for purging, which can quickly remove residual volatile solvents, accelerate pipeline drying, and prevent solvent residue from affecting the purity of the next batch of products. After system maintenance or cylinder change, nitrogen gas is introduced into the system at a certain pressure and the valve is closed. The pressure is monitored by observing the pressure gauge (e.g., PT1). Check the system's sealing performance by checking if the PT2 reading is stable. During the dispensing interval, maintain a slightly positive nitrogen environment in the system to prevent external air from being drawn back into the system and form a continuous inert gas barrier. Fill the pipeline with nitrogen through valve 1 (N2) and then safely discharge it through valve 2 (VENT). Repeat this several times to replace the air. After cleaning, close the solvent valve and open the nitrogen valve to purge and dry the wet pipeline. After dispensing, there may be positive pressure in the receiving tank (104). Release the pressure to the set value safely by replacing it with controlled nitrogen or connecting the VENT pipeline. The cold trap vacuum buffer tank is connected to VAC to realize system vacuuming and contaminant collection. When "negative pressure holding before filling" or "vacuum purging after cleaning" is required, the PLC opens the valve connecting the main system and the cold trap tank (valve 3 in the figure). The vacuum pump evacuates the cold trap tank and the system pipeline connected to it to reach the set vacuum level.

[0023] The ALD source raw material tank 103 is connected to the ALD source finished product receiving tank 104 via a seventh valve 7, a ninth valve 9 and a pipeline. A first digital pressure gauge 16 is connected to the pipeline connecting the ninth valve 9 and the ALD source finished product receiving tank 104, and a twelfth valve 12 is provided between the first digital pressure gauge 16 and the pipeline, so as to realize the function of transporting ALD source from the ALD source raw material tank 103 to the ALD source finished product tank 104.

[0024] The ALD source material tank 103 is connected to the cleaning solvent receiving tank 105 through the tenth valve 10, the fourteenth valve 14 and pipelines, so as to realize the function of transferring the cleaning solvent from the ALD source material tank 103 to the cleaning solvent receiving tank 105.

[0025] The ALD source finished product receiving tank 104 is connected to the cleaning solvent receiving tank 105 through the eleventh valve 11, the fourteenth valve 14 and pipelines, so as to realize the function of transferring the cleaning solvent from the ALD source finished product receiving tank 104 to the cleaning solvent receiving tank 105.

[0026] The first valve 1, the second valve 2 and the third valve 3 are all connected to the cleaning solvent tank 102, the ALD source raw material tank 103, the ALD source finished product receiving tank 104 and the cleaning solvent receiving tank 105 respectively through the fourth valve 4, the seventh valve 7, the ninth valve 9, the thirteenth valve 13 and pipelines.

[0027] The working principle of this utility model is as follows: During operation, the ALD liquid source flows out of the ALD source finished product tank 103, passes through the seventh valve 7, and enters the ALD source finished product receiving tank 104 through the ninth valve 9. The valves on the ALD source finished product tank 103 and the ALD source finished product receiving tank 104 are closed, and the valve on the cleaning solvent tank 102 is opened. The solvent in the cleaning solvent tank 102 passes through the fifth valve 5 and the sixth valve 6 and then enters the pipeline connected to the ALD source finished product tank 103 through the seventh valve 7. This cleans the pipeline between the seventh valve 7 and the ALD source finished product tank 103. The waste solvent after cleaning enters the cleaning solvent receiving tank 105 through the tenth valve 10 and the fourteenth valve 14. Meanwhile, the solvent in the cleaning solvent tank 102 can also enter the pipeline connected to the ALD source finished product receiving tank 104 through the fifth valve 5 and the eighth valve 8, which will clean the pipeline between the ninth valve 9 and the ALD source finished product receiving tank 104. The cleaned solvent enters the cleaning solvent receiving tank 105 through the eleventh valve 11 and the fourteenth valve 14.

[0028] In actual use, The workflow of ALD source material tank 103 is as follows: Bottle replacement before filling: ① Replace the cylinder ② Positive pressure holding before filling ③ Negative pressure holding before filling ④ Purge before filling.

[0029] Solvent cleaning: ① Draw negative pressure into the waste liquid tank ② Add solvent ③ Purge the solvent when draining the solvent.

[0030] Bottle replacement after cleaning: ① System check ② Purge after cleaning ③ Vacuum purging after cleaning ④ Negative pressure holding after cleaning ⑤ Pressurization after cleaning ⑥ Replace the cylinder.

[0031] The workflow of ALD source finished product receiving tank 104 is as follows: Bottle replacement before filling: ① Replace the cylinder ② Positive pressure holding before filling ③ Negative pressure holding before filling ④ Purge before filling.

[0032] Filling: ① Before filling, the cylinder is drawn under negative pressure. ② The raw materials are filled. ③ After filling, the cylinder is depressurized.

[0033] Solvent cleaning: ① Draw negative pressure into the waste liquid tank ② Add solvent ③ Purge the solvent when draining the solvent.

[0034] Bottle replacement after cleaning: ① System check ② Purge after cleaning ③ Vacuum purging after cleaning ④ Negative pressure holding after cleaning ⑤ Pressurization after cleaning ⑥ Replace the cylinder.

[0035] The workflow for cleaning solvent tank 102 is as follows: Bottle changing: ① System check ② Cleaning and purging ③ Cleaning and vacuum purging ④ Cleaning and negative pressure holding ⑤ Cleaning and pressurizing ⑥ Replace the cylinder ⑦ Positive pressure holding before filling ⑧ Negative pressure holding before filling ⑨ Purging before filling.

[0036] The working process for cleaning solvent receiving tank 105 is as follows: Bottle changing: ① System check ② Cleaning and purging ③ Cleaning and vacuum purging ④ Cleaning and negative pressure holding ⑤ Cleaning and pressurizing ⑥ Replace the cylinder ⑦ Positive pressure holding before filling ⑧ Negative pressure holding before filling

[0037] The cleaning solvent tank 102, ALD source raw material tank 103, ALD source finished product receiving tank 104, and cleaning solvent receiving tank 105 are sequentially connected to the dispensing system.

[0038] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claims. The scope of protection of this utility model is defined by the appended claims and their equivalents.

Claims

1. A packaging device for an ALD precursor source, characterized in that: Includes the first valve (1), second valve (2), third valve (3), fourth valve (4), fifth valve (5), sixth valve (6), seventh valve (7), eighth valve (8), ninth valve (9), tenth valve (10), eleventh valve (11), twelfth valve (12), thirteenth valve (13), fourteenth valve (14), cold trap vacuum buffer tank (101), cleaning solvent tank (102), ALD source raw material tank (103), ALD source finished product receiving tank (104), cleaning solvent receiving tank (105), N2, VENT, VAC, second digital display pressure gauge (17) and first digital display pressure gauge (16), ...eleventh valve (12), and first digital display pressure gauge (16). Valves (3), fourth valve (4), fifth valve (5), sixth valve (6), seventh valve (7), eighth valve (8), ninth valve (9), tenth valve (10), eleventh valve (11), twelfth valve (12), thirteenth valve (13), fourteenth valve (14), cold trap vacuum buffer tank (101), cleaning solvent tank (102), ALD source raw material tank (103), ALD source finished product receiving tank (104), and cleaning solvent receiving tank (105) are connected by pipelines. Electronic scales (15) are installed at the bottom of the cleaning solvent tank (102), ALD source raw material tank (103), ALD source finished product receiving tank (104), and cleaning solvent receiving tank (105).

2. The ALD precursor source packaging device according to claim 1, characterized in that: The cleaning solvent tank (102) is connected to the ALD source material tank (103) via the fifth valve (5), the sixth valve (6) and pipelines.

3. The ALD precursor source packaging device according to claim 1, characterized in that: The cleaning solvent tank (102) is connected to the ALD source finished product receiving tank (104) via the fifth valve (5), the eighth valve (8) and pipelines.

4. The ALD precursor source packaging device according to claim 1, characterized in that: The cleaning solvent tank (102) is connected to the cleaning solvent receiving tank (105) via a fourth valve (4), a thirteenth valve (13) and a pipeline. A second digital pressure gauge (17), a first valve (1), a second valve (2) and a third valve (3) are connected to the pipeline between the fourth valve (4) and the thirteenth valve (13). The first valve (1) is connected to N2, the second valve (2) is connected to VENT, and the third valve (3) is connected to the cold trap vacuum buffer tank (101) via a pipeline. The cold trap vacuum buffer tank (101) is connected to VAC.

5. The ALD precursor source packaging device according to claim 1, characterized in that: The ALD source raw material tank (103) is connected to the ALD source finished product receiving tank (104) through the seventh valve (7), the ninth valve (9) and the pipeline. A first digital pressure gauge (16) is connected to the pipeline connecting the ninth valve (9) and the ALD source finished product receiving tank (104), and a twelfth valve (12) is provided between the first digital pressure gauge (16) and the pipeline.

6. The ALD precursor source packaging device according to claim 1, characterized in that: The ALD source material tank (103) is connected to the cleaning solvent receiving tank (105) via the tenth valve (10), the fourteenth valve (14) and pipelines.

7. The ALD precursor source packaging device according to claim 1, characterized in that: The ALD source finished product receiving tank (104) is connected to the cleaning solvent receiving tank (105) via the eleventh valve (11), the fourteenth valve (14) and pipelines.

8. The ALD precursor source packaging device according to claim 1, characterized in that: The first valve (1), the second valve (2) and the third valve (3) are all connected to the cleaning solvent tank (102), the ALD source raw material tank (103), the ALD source finished product receiving tank (104) and the cleaning solvent receiving tank (105) through the fourth valve (4), the seventh valve (7), the ninth valve (9), the thirteenth valve (13) and the pipeline, respectively.

9. The ALD precursor source packaging device according to claim 1, characterized in that: The first valve (1), the second valve (2), the third valve (3), the fourth valve (4), the fifth valve (5), the sixth valve (6), the seventh valve (7), the eighth valve (8), the ninth valve (9), the tenth valve (10), the eleventh valve (11), the twelfth valve (12), the thirteenth valve (13), and the fourteenth valve (14) are all pneumatic diaphragm valves. VAC is a vacuum line, VENT is an vent line, and N2 is a high-purity nitrogen gas line.

10. A dispensing device for an ALD precursor source according to claim 1, characterized in that: The PLC control system consists of the first valve (1), the second valve (2), the third valve (3), the fourth valve (4), the fifth valve (5), the sixth valve (6), the seventh valve (7), the eighth valve (8), the ninth valve (9), the tenth valve (10), the eleventh valve (11), the twelfth valve (12), the thirteenth valve (13), the fourteenth valve (14), the electronic scale (15), the second digital pressure gauge (17), and the first digital pressure gauge (16).

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