A ground substrate and a discharge mechanism for ozone generation based on a plurality of round gaskets

Abstract

The utility model discloses a kind of grounding substrate and discharge mechanism for ozone generation based on multiple round gaskets, it is related to ozone production technical field, the grounding substrate includes substrate main body;Discharge cavity for ionizing oxygen-containing gas is opened on the substrate main body, further include round gasket;The round gasket is provided with multiple, and it is equidistantly distributed in the discharge cavity, the side inner wall of the discharge cavity is tangentially provided with gas inlet hole for oxygen-containing gas to enter;Ozone gas outlet hole is opened in the center position of the bottom in the discharge cavity.The utility model is formed by tangentially arranged gas inlet hole, so that oxygen-containing gas in the discharge cavity forms rotating vortex, and pass through each round gasket distributed in circumference, and pass through the gap between different position adjacent round gaskets, and ozone gas outlet hole in central position is radially collected, it is convenient for airflow to be efficiently and evenly diffused through entire discharge cavity, it is favorable to improve the uniformity and efficiency of ozone generation, ensure that ozone is fully generated.

Description

Technical Field

[0001] This utility model relates to the field of ozone production technology, and in particular to a grounding substrate based on multiple circular pads and a discharge mechanism for ozone generation. Background Technology

[0002] Ozone plays multiple roles in semiconductor manufacturing processes. For example, ozone is an excellent precursor in the ALD (Alternating Discharge) process. When depositing high-dielectric-constant materials or metal oxides, ozone provides a sufficient oxygen source to ensure accurate stoichiometry, high purity, good density, and controllable growth rate of the thin film. Therefore, ozone generation devices are required in semiconductor manufacturing processes.

[0003] Ozone generating devices generally mainly include a discharge mechanism. The discharge mechanism discharges oxygen-containing gas to produce ozone for use in semiconductor manufacturing. Existing ozone generating discharge mechanisms consist of conductive plates, ceramic separators, ceramic pads, tungsten plates, and base plates arranged sequentially from top to bottom. The tungsten plate and base plate form the grounding electrode. The ceramic pads are generally arranged in multiple circular pieces, distributed between the tungsten plate and the conductive plate or the dielectric plate below the conductive plate. They support the conductive plate and facilitate the formation of a discharge gap between the tungsten plate and the conductive plate, allowing the incoming oxygen-containing gas to react and generate ozone.

[0004] The shortcomings of existing ozone generation discharge mechanisms are as follows: because the existing discharge mechanisms use multiple ceramic gaskets as support components at the edge of the discharge gap between the conductive plate and the grounding electrode, they only serve a supporting function. After the oxygen-containing gas is directly injected into the discharge gap through the pipe, it cannot be effectively guided to flow and diffuse evenly. It is easy for most of the gas to flow directly from the gas inlet to the gas outlet through the shortest path, failing to fully benefit from the ionization effect of the electric field in the discharge gap. Furthermore, after the gas flow enters the discharge gap, due to the lack of effective guidance, the flow is relatively disordered and unevenly distributed, easily forming stagnation dead zones, thus affecting the ozone generation effect and efficiency. Utility Model Content

[0005] The purpose of this invention is to provide a grounding substrate based on multiple circular pads and a discharge mechanism for ozone generation, so as to solve the technical problem that the discharge mechanism in the prior art is not convenient to make the oxygen-containing gas pass through the entire discharge gap sufficiently and evenly, resulting in poor ozone generation effect.

[0006] The technical problem to be solved by this utility model can be achieved through the following technical solution: A grounding substrate based on multiple circular pads includes a substrate body, the substrate body being a conductive metal body and grounded through a wire; the substrate body has a discharge cavity for ionizing oxygen-containing gas and also includes circular pads; Multiple circular gaskets are provided and are circumferentially distributed in the discharge cavity. Each circular gasket is spaced apart from the inner wall of the discharge cavity. An air inlet for oxygen-containing gas is provided tangentially on one side of the inner wall of the discharge cavity. An ozone outlet is provided at the center of the bottom of the discharge cavity.

[0007] Preferably, the substrate body is a stainless steel structure.

[0008] Preferably, the height of the circular pad can be equal to the depth of the discharge cavity.

[0009] Preferably, the discharge cavity is a cylindrical cavity.

[0010] Preferably, the diameter of the air inlet is larger than the diameter of the ozone outlet.

[0011] A discharge mechanism for ozone generation includes a grounding substrate based on a plurality of circular pads.

[0012] The beneficial effects of this utility model are: 1. This utility model uses a tangentially arranged air inlet to create a rotating vortex of oxygen-containing gas entering the discharge cavity. The gas then passes through each circumferentially distributed circular pad and is evenly and radially converged at the ozone outlet at the center through the gaps between adjacent circular pads at different positions. This facilitates efficient and uniform diffusion of the airflow throughout the discharge cavity, which helps improve the uniformity and efficiency of ozone generation and ensures sufficient ozone generation.

[0013] 2. By tangentially setting the air inlet and circumferentially equidistantly distributed multiple circular pads, this utility model can increase the effective path length of gas flow and correspondingly extend the residence time, so that the oxygen-containing gas can be uniformly, fully and efficiently acted on in the electric field, which is conducive to the full generation of ozone.

[0014] 3. This invention effectively enhances the gas diffusion process by radially converging the gas through the gaps between the circumferentially distributed circular gaskets and by the effect of rotating vortices, thereby further promoting ozone generation. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the overall structure of a grounding substrate based on multiple circular pads in this utility model; Figure 2 This is a schematic diagram showing the relative positions of the substrate body, conductive sheet, and circular pad in this utility model. Figure 3 This is a schematic diagram of the overall structure of a discharge mechanism for ozone generation in this utility model; Figure 4 This is a schematic diagram of the overall structure of the discharge mechanism after the cooling plate is assembled in this utility model.

[0016] Explanation of reference numerals in the attached figures: 1. Conductive sheet; 2. Power cord; 3. Gas supply pipe; 4. Dielectric board; 5. Substrate body; 6. Discharge cavity; 7. Circular gasket; 8. Ozone outlet; 9. Cooling plate; 10. Air inlet; 11. Through hole. Detailed Implementation

[0017] The specific embodiments of this utility model are described in detail below, but it should be understood that the protection scope of this utility model is not limited to the specific embodiments.

[0018] Example 1

[0019] like Figures 1-2 As shown, a grounding substrate based on multiple circular pads is used to be installed in an ozone generation discharge mechanism used in semiconductor manufacturing processes. The grounding substrate serves as a grounding electrode, and a potential difference can be generated between it and the conductive sheet 1 of the ozone generation discharge mechanism to facilitate ozone generation through discharge. The grounding substrate includes a substrate body 5, which is a conductive metal body and grounded through a wire. A discharge cavity 6 for ionizing oxygen-containing gas is formed on the substrate body 5. Under the operation of the entire ozone generation discharge mechanism, the discharge cavity 6 generates an alternating electric field. This alternating electric field acts on the oxygen-containing gas in the discharge cavity 6, causing the oxygen molecules to ionize and form plasma. The oxygen molecules decompose into oxygen atoms, which then combine with undecomposed oxygen molecules to generate ozone. The grounding substrate also includes circular pads 7, of which multiple circular pads 7 are provided and are circumferentially and equally distributed within the discharge cavity 6. Each circular pad 7 maintains a certain distance from the inner wall of the discharge cavity 6. This distance can be set to be equal to or slightly larger than the distance between adjacent circular pads 7, or it can be designed based on the air pressure, the size of the discharge cavity 6, and the size of the circular pads 7. A tangential air inlet 10 is provided on one inner wall of the discharge cavity 6 for oxygen-containing gas to enter. When the air inlet 10 sends airflow into the discharge cavity 6, the airflow first flows along the inner wall of the discharge cavity 6, which facilitates the formation of a rotating vortex. It should be noted that, in order to facilitate the tangential airflow, the air inlet 10 can be set as a relatively short protruding conduit. An ozone outlet 8 is provided at the center of the bottom of the discharge cavity 6.

[0020] When oxygen-containing gas enters the discharge cavity 6 tangentially through the air inlet 10, it facilitates the formation of a rotating vortex along the inner wall of the discharge cavity 6. This rotating vortex is forced to pass through each circumferentially distributed circular pad 7, effectively covering the area between all the circular pads 7 and avoiding dead zones in the flow. Furthermore, according to the principles of fluid dynamics, the rotating flow naturally converges towards the center. Thus, guided by the circumferentially distributed circular pads 7, the rotating vortex flows radially from the gaps between the circular pads 7 towards the ozone outlet 8 at the center, achieving efficient and uniform airflow diffusion. This ensures that the gas fully flows through the entire discharge area before being discharged, which is beneficial for improving the uniformity and efficiency of ozone generation and ensuring sufficient ozone generation. The ozone outlet 8 at the center efficiently collects ozone generated in all directions within the discharge cavity 6.

[0021] It should also be noted that the radial convergence of gas through the gaps in the circumferentially distributed circular pads 7, as well as the effect of the rotating vortex, also facilitates the process of gas diffusion and flow.

[0022] In some specific embodiments of this example, the substrate body 5 is a stainless steel structure that is conductive.

[0023] In some specific embodiments of this example, the circular pad 7 and the substrate body 5 are an integrated metal structure, which can be stamped in one go by a stamping process. This makes it easier to ensure that the circular pad 7 is of uniform size and to facilitate the circular pad 7 in supporting the dielectric plate 4 and conductive sheet 1 of the discharge mechanism. This ensures that the discharge cavity 6 is uniform and improves discharge efficiency and stability. Compared with the existing multiple ceramic pads, this avoids problems such as ceramic debris. In addition, the integrated circular pad 7 and the substrate body 5 are made of the same material, which also facilitates the provision of a heat dissipation path with extremely low thermal resistance.

[0024] In addition, when the circular pad 7 is a metal structure, in order to avoid short circuit to ground of the high voltage electrode, a through hole 11 with the same shape as the circular pad 7 is opened on the conductive plate 1 of the discharge mechanism.

[0025] In some other specific embodiments of this example, the circular pad 7 may also be a non-metallic material, such as a Teflon material. If it is a non-metallic material, then there is no need to open a through hole 11 on the conductive sheet 1 of the discharge mechanism.

[0026] In some specific embodiments of this example, the height of the circular pad 7 may be equal to the depth of the discharge cavity 6.

[0027] In some specific embodiments of this example, the discharge cavity 6 is a cylindrical cavity, which facilitates the formation of a rotating vortex by the gas entering.

[0028] In some specific embodiments of this example, the diameter of the air inlet 10 is larger than the diameter of the ozone outlet 8, so as to properly maintain the internal pressure of the discharge cavity 6.

[0029] Example 2

[0030] refer to Figure 3 As shown, a discharge mechanism for ozone generation includes a conductive sheet 1, a dielectric plate 4, a gas supply pipe 3, and a grounding substrate as described in Embodiment 1. A power line 2 is electrically connected to one side of the conductive sheet 1, which energizes the conductive sheet 1. The dielectric plate 4 is disposed between the conductive sheet 1 and the substrate body 5 of the grounding substrate. The dielectric plate 4 is a ceramic sheet, but other insulating materials can also be selected according to actual needs. The gas supply pipe 3 is connected to the air inlet 10 and is used to transport oxygen-containing gas, allowing the oxygen-containing gas to enter the discharge cavity 6 through the air inlet 10. Here, the gas supply pipe 3 avoids the dielectric plate 4 and is connected to the edge of the substrate body 5. It should be noted that the diameter of the dielectric plate 4 is larger than the diameter of the discharge cavity 6, so that the edge of the dielectric plate 4 can be supported on the edge of the discharge cavity 6. The diameter of the conductive sheet 1 is smaller than the diameter of the discharge cavity 6, ensuring that the electric field is effectively generated in the discharge cavity 6.

[0031] The specific principle behind ozone generation is as follows: When high-voltage electricity is applied to the conductive plate 1 through the power line 2, the current cannot flow directly to the grounding electrode due to the obstruction of the dielectric plate 4. Charge accumulates on the side of the dielectric plate 4 closest to the conductive plate 1; this accumulated charge induces an opposite charge on the other side of the dielectric plate 4. This generates an alternating electric field that acts on the discharge cavity 6 filled with oxygen-containing gas. The alternating electric field ionizes the oxygen molecules in the discharge cavity 6, forming plasma. Oxygen molecules decompose into oxygen atoms, which then combine with undecomposed oxygen molecules to generate ozone. In addition, since the height of the circular pad 7 can be equal to the depth of the discharge cavity 6, the circular pad 7 can effectively support the dielectric plate 4 and conductive sheet 1 stacked above.

[0032] Example 3

[0033] Based on Example 2, and referring to Figure 4 To ensure the normal operation of the entire discharge mechanism, cooling plates 9 can be installed on both the upper and lower sides of the entire discharge mechanism to dissipate the heat generated during the ozone generation process. In addition, a layer of dielectric material can be installed above the conductive sheet 1, and a ceramic partition can be installed above the dielectric material. A cylindrical sleeve of matching size can also be fixed between the upper and lower cooling plates 9 to fix and limit the internal dielectric material, conductive sheet 1, grounding substrate and other components, ensuring that the whole is effectively pressed together.

[0034] To facilitate understanding of the embodiments of this solution by those skilled in the art, the working principle of this solution will now be briefly explained in conjunction with specific application scenarios: The tungsten plate and ceramic pads of the original discharge mechanism are removed, so that the substrate body 5 is made of conductive metal material and grounded through a wire, so as to facilitate the generation of a voltage difference between it and the conductive sheet 1, and facilitate the generation of an electric field in the discharge cavity 6. At the same time, multiple circular pads 7 are arranged equidistantly around the circumference in the discharge cavity 6. When the conductive sheet 1 and the dielectric plate 4 are pressed onto the substrate body 5 in sequence, they can be effectively supported by the circular pads 7. Then, oxygen-containing gas is supplied into the discharge cavity 6 through the gas supply pipe 3. The oxygen-containing gas enters the discharge cavity 6 through the air inlet 10 and energizes the conductive sheet 1. When oxygen-containing gas enters the discharge cavity 6 tangentially through the air inlet 10, it facilitates the formation of a rotating vortex along the inner wall of the discharge cavity 6. The rotating vortex is forced to pass through each circumferentially distributed circular pad 7, which can cover the area between all the circular pads 7 and avoid dead zones in the flow. According to the principles of fluid dynamics, the rotating flow will naturally converge towards the center. Thus, under the guidance of each circumferentially distributed circular pad 7, the rotating vortex can flow evenly radially from the gaps between each circular pad 7 to the ozone outlet 8 at the center, achieving efficient and uniform diffusion of the airflow. This ensures that the gas fully flows through the entire discharge area before being discharged, which is beneficial to improving the uniformity and efficiency of ozone generation and ensuring that ozone is fully generated. The ozone outlet 8 at the center efficiently collects the ozone generated in all directions within the discharge cavity 6.

[0035] The above-disclosed embodiments are only a few specific examples of the present utility model. However, the embodiments of the present utility model are not limited thereto. Any changes that can be conceived by those skilled in the art should fall within the protection scope of the present utility model.

Claims

1. A grounding substrate based on multiple circular pads, comprising a substrate body (5); wherein a discharge cavity (6) for ionizing oxygen-containing gas is formed on the substrate body (5), characterized in that, It also includes round gaskets (7); Multiple circular pads (7) are provided and are equidistantly distributed in the discharge cavity (6) in the circumferential direction. Each circular pad (7) is provided with a gap between itself and the inner ring side wall of the discharge cavity (6). An air inlet (10) for oxygen-containing gas to enter is provided tangentially on one side inner wall of the discharge cavity (6). An ozone outlet (8) is provided at the center of the bottom of the discharge cavity (6).

2. A grounding substrate based on multiple circular pads according to claim 1, characterized in that, The substrate body (5) is a stainless steel structure.

3. A grounding substrate based on multiple circular pads according to claim 1, characterized in that, The height of the circular pad (7) is equal to the depth of the discharge cavity (6).

4. A grounding substrate based on multiple circular pads according to claim 1, characterized in that, The discharge cavity (6) is a cylindrical cavity.

5. A grounding substrate based on multiple circular pads according to claim 1, characterized in that, The diameter of the air inlet (10) is larger than the diameter of the ozone outlet (8).

6. A discharge mechanism for ozone generation, characterized in that, The grounding substrate based on a plurality of circular pads as described in any one of claims 1 to 5.

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