Annealing furnace for quartz products

Abstract

The utility model provides a kind of annealing furnace for quartz product, it includes base and furnace body, furnace body is provided with at least three temperature control zones along length direction, each temperature control zone is equipped with sub-controller, at least two groups of heating components and at least one group of detection components, at least two groups of heating components and at least one group of detection components are staggered arrangement, sub-controller is electrically connected with at least two groups of heating components, at least one group of detection components respectively.Heating component includes mounting bracket and heating wire, and detection component includes insulating fixing piece and temperature sensor.In each temperature control zone, sub-controller can accurately adjust the power of corresponding heating component according to the temperature signal fed back by detection component, realize accurate, independent regulation and control to the temperature of different areas in furnace, improve the consistency of temperature distribution in furnace, greatly improve annealing effect, effectively solve the problem of uneven temperature of large-size furnace body.

Description

Technical Field

[0001] This utility model relates to the field of quartz product processing equipment, and in particular to an annealing furnace for quartz products. Background Technology

[0002] Quartz tubes, as a special type of glass product with excellent high-temperature resistance, chemical stability, and light transmittance, are widely used in many high-tech fields such as semiconductor manufacturing, photovoltaic energy, optical instruments, and chemical reaction vessels. Annealing is a crucial step in the production and processing of quartz tubes. Its core purpose is to eliminate internal stress generated during the melting and forming process, as well as to remove hydroxyl groups, reduce brittleness, improve mechanical properties and dimensional stability, and enhance optical transparency, mechanical strength, and thermal stability. This ensures the reliability and service life of the quartz tube in subsequent use.

[0003] As downstream applications increasingly demand larger sizes and higher precision quartz tubes, the corresponding quartz tube annealing furnaces are also being designed to be larger. However, in practical applications, due to the large length of the furnace body, traditional annealing furnaces typically use a single temperature control system to drive the entire heating assembly. This heating method struggles to meet the temperature requirements of different areas within the furnace, easily leading to significant temperature gradients along the furnace's length. Some areas are excessively hot while others are too cold, resulting in severe temperature unevenness. This affects the annealing effect of the quartz tubes, causing inconsistent stress relief in different parts of the tube. Consequently, the products may exhibit warping, deformation, and uneven mechanical properties, failing to meet the requirements of high-precision applications. Utility Model Content

[0004] The purpose of this invention is to address the shortcomings of existing technologies by proposing an annealing furnace for quartz products, which enables precise temperature control within the furnace and ensures consistent temperature distribution.

[0005] To achieve the above objectives, the present invention adopts the following technical solution: This utility model provides an annealing furnace for quartz products, the annealing furnace for quartz products includes a base and a furnace body covered on the base.

[0006] The furnace body has at least three temperature control zones along its length. Each temperature control zone is equipped with a sub-controller, at least two sets of heating components, and at least one set of detection components. The sub-controller is located on the outer wall of the furnace body corresponding to the temperature control zone. The at least two sets of heating components and the at least one set of detection components are respectively located on the inner wall of the furnace body corresponding to the temperature control zone. The at least two sets of heating components and the at least one set of detection components are staggered. The sub-controller is electrically connected to the at least two sets of heating components and the at least one set of detection components respectively.

[0007] The heating assembly includes a mounting bracket and a heating wire. The mounting bracket is installed on the inner wall of the furnace body corresponding to the temperature control zone. The heating wire is arranged in the mounting bracket. The mounting bracket has a diffusion hole on the side facing the center of the furnace body.

[0008] The detection component includes an insulating fastener and a temperature sensor. The insulating fastener is disposed on the inner wall of the furnace body corresponding to the temperature control zone, and the temperature sensor is disposed on the insulating fastener.

[0009] Preferably, the annealing furnace for quartz products further includes a main controller, which is electrically connected to the sub-controllers of each temperature control zone.

[0010] Preferably, the heating wires in at least two sets of heating components in each temperature control zone are connected in parallel.

[0011] Preferably, the heating wire is U-shaped or M-shaped.

[0012] Preferably, the mounting brackets in two adjacent heating components fit together.

[0013] Preferably, the mounting bracket is made of alumina ceramic.

[0014] Preferably, the insulating fastener is a hollow structure with one end open and the other end closed. The open end of the insulating fastener is connected to the inner wall of the furnace body corresponding to the temperature control zone. The closed end of the insulating fastener is provided with a mounting hole. The non-detection end of the temperature sensor is located inside the insulating fastener, and the detection end of the temperature sensor passes through the mounting hole.

[0015] Preferably, a heat-insulating buffer layer is provided at the mounting hole, and the heat-insulating buffer layer covers the corresponding part of the temperature sensor.

[0016] Preferably, the connection between the base and the furnace body is provided with a mutually cooperating sealing and fitting structure, the sealing and fitting structure including a sealing groove provided on one of the base and the furnace body and a sealing ring provided on the other of the base and the furnace body.

[0017] Preferably, the furnace body comprises, from the outside to the inside, a steel structure protective layer, a ceramic support layer, a nano-insulation layer, a ceramic fiber layer, and an aluminum foil reflective layer.

[0018] Compared with the prior art, the beneficial effects of this utility model are as follows: This utility model sets at least three temperature control zones along the length of the annealing furnace body. Each temperature control zone is equipped with an independent sub-controller, at least two sets of heating components, and at least one set of detection components. The heating components and detection components are staggered and electrically connected by the sub-controllers respectively, realizing precise and independent control of the temperature in different areas of the furnace, effectively solving the problem of uneven temperature in large-size furnace bodies. The heating components are equipped with diffusion holes to promote uniform heat diffusion and ensure consistent temperature distribution within the furnace. The insulating fasteners of the detection components ensure stable operation of the temperature sensors and accurate temperature monitoring. This annealing furnace can be applied to the annealing process of large-size quartz tubes and other quartz products, significantly improving the annealing effect, reducing production costs, ensuring stable operation of the annealing furnace, and extending the service life of the equipment. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the structure of an annealing furnace for quartz products according to the present invention.

[0020] Figure 2 This is a bottom view of the furnace body in this utility model.

[0021] Figure 3 This is a cross-sectional view of the annealing furnace in this utility model.

[0022] Figure 4 This is a schematic diagram of the internal structure of the furnace body in this utility model.

[0023] Figure 5 This is a cross-sectional view of the furnace body in this utility model.

[0024] Figure 6 This is a schematic diagram of the detection component in this utility model.

[0025] Figure 7 This is the electrical connection diagram of the annealing furnace for quartz products in this utility model.

[0026] In the diagram, 10-base, 11-sealing groove, 20-furnace body, 21-steel structure protective layer, 22-ceramic support layer, 23-nano heat insulation layer, 24-ceramic fiber layer, 25-aluminum foil reflective layer, 26-sealing ring, 30-temperature control zone, 40-sub-controller, 50-heating component, 51-mounting bracket, 511-diffuser hole, 52-heating wire, 60-detection component, 61-insulating fastener, 611-mounting hole, 612-heat insulation buffer layer, 62-temperature sensor, 70-main controller. Detailed Implementation

[0027] To make the objectives, technical solutions, and advantages of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the described embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model. It is understood that, without conflict, some technical means of the various embodiments described herein can be substituted for or combined with each other.

[0028] In the description of this utility model, the terms "first," "second," etc., are used only to distinguish the described objects and have no sequential or technical meaning. Therefore, objects specified with "first," "second," etc., may explicitly or implicitly include one or more of those objects. Furthermore, the words "one" or "a" do not indicate a quantity limitation, but rather indicate the presence of at least one, while "multiple" indicates at least two.

[0029] In the description of this utility model, references to "one embodiment" or "some embodiments" mean that one or more embodiments of the utility model include the specific features, structures, or characteristics described in connection with that embodiment. Therefore, the phrases "one embodiment," "some embodiments," "other embodiments," "and other embodiments," etc., appearing in different parts of this specification do not necessarily refer to the same embodiment, but rather mean "one or more, but not all, embodiments," unless otherwise specifically emphasized.

[0030] This utility model provides an annealing furnace for quartz products, as shown in the reference. Figure 1 In some embodiments, the annealing furnace for quartz products includes a base 10 and a furnace body 20 covered on the base 10. The base 10 serves as the supporting foundation for the furnace body 20 and is made of high-strength alloy material. Its bottom may be equipped with anti-slip and shock-absorbing pads (not marked) to effectively distribute the overall weight of the furnace body 20, prevent displacement due to vibration during equipment operation, and reduce the impact of vibration on the annealing process of quartz products inside the furnace. The furnace body 20 has a hollow cavity structure, and its dimensions are designed according to the processing specifications of the quartz products.

[0031] Specifically, in conjunction with reference Figures 2 to 7The furnace body 20 has at least three temperature control zones 30 along its length. Each temperature control zone 30 is equipped with a sub-controller 40, at least two sets of heating elements 50, and at least one set of detection elements 60. The sub-controller 40 is located on the outer wall of the furnace body 20 corresponding to the temperature control zone 30. The at least two sets of heating elements 50 and the at least one set of detection elements 60 are respectively located on the inner wall of the furnace body 20 corresponding to the temperature control zone 30. The at least two sets of heating elements 50 and the at least one set of detection elements 60 are staggered to avoid the heat generated by the heating elements 50 directly radiating to the detection elements 60, which could lead to temperature detection deviations. The sub-controller 40 is electrically connected to the at least two sets of heating elements 50 and the at least one set of detection elements 60. Each temperature control zone can use a closed-loop PID temperature control algorithm. The sub-controller 40 can accurately adjust the power of the corresponding heating elements 50 based on the temperature signal fed back by the detection elements 60, achieving independent temperature control for each zone. This solves the problem of uneven temperature caused by the large furnace size in traditional single-temperature-control zone annealing furnaces and improves the consistency of annealing quality for quartz products.

[0032] The heating assembly 50 includes a mounting bracket 51 and a heating wire 52. The mounting bracket 51 is located on the inner wall of the furnace body corresponding to the temperature control zone 30. The heating wire 52 is arranged in the mounting bracket 51. A diffusion hole 511 is provided on the side of the mounting bracket 51 facing the center of the furnace body 20. The heating wire 52 can be made of silicon carbide rod or high-resistance nickel-chromium alloy wire, which has the characteristics of high temperature resistance, oxidation resistance and long service life.

[0033] The detection component 60 includes an insulating fastener 61 and a temperature sensor 62. The insulating fastener 61 is disposed on the inner wall of the furnace corresponding to the temperature control zone 30, and the temperature sensor 62 is disposed on the insulating fastener 61. The insulating fastener 61 can be made of aluminum nitride ceramic material, whose high-temperature resistant insulation properties can ensure that the temperature sensor 62 operates stably in high-temperature environments and avoid detection errors caused by external interference. The temperature sensor 62 can be a resistance sensor product from existing technology, such as a platinum resistance sensor, which has high measurement accuracy, a wide measurement range, and can accurately acquire furnace temperature data in real time.

[0034] In the aforementioned annealing furnace for quartz products, the furnace body 20 is provided with at least three temperature control zones 30 along its length. Each temperature control zone 30 is equipped with an independent sub-controller 40, at least two sets of heating components 50, and at least one set of detection components 60. The heating components 50 and detection components 60 are staggered and electrically connected to each other by the sub-controller 40, enabling precise and independent temperature control of different areas within the furnace and effectively solving the problem of uneven temperature in large-size furnace bodies 20. The mounting bracket 51 of the heating component 50 is provided with diffusion holes 511, which can promote uniform heat diffusion and ensure consistent temperature distribution within the furnace. The insulating fixing component 61 of the detection component 60 can ensure the stable operation of the temperature sensor 62 and ensure accurate temperature monitoring. This annealing furnace can be applied to the annealing process of large-size quartz tubes and other quartz products, significantly improving the annealing effect, reducing production costs, ensuring stable operation of the annealing furnace, and extending the service life of the equipment.

[0035] In the application, the housing of the sub-controller 40 can be made of high-temperature resistant insulating material, and its surface can be equipped with a display screen and operation buttons (unmarked). The display screen can display the temperature data of the corresponding temperature control zone 30 and the working status of the heating component 50 in real time, and the operation buttons make it convenient for the staff to manually adjust the temperature parameters.

[0036] Reference Figure 7 In some preferred embodiments, the annealing furnace for quartz products further includes a main controller 70, which is electrically connected to the sub-controllers 40 of each temperature control zone 30. The main controller 70 can be a PLC control system, which supports batch setting of parameters for each sub-controller 40, facilitating centralized management of the annealing furnace and reducing manual operation.

[0037] In some preferred embodiments, the heating wires 52 in at least two sets of heating components 50 in each temperature control zone 30 are connected in parallel. The parallel connection nodes of the heating wires 52 can be connected using high-temperature resistant terminals, and the surface of the terminals is gold-plated to effectively reduce contact resistance and reduce heat loss.

[0038] Reference Figure 4 In some preferred embodiments, the heating wire 52 is U-shaped or M-shaped. Of course, this invention is not limited to this; in other embodiments, the heating wire 52 can also adopt other reasonable shapes. In application, the heating wire 52 can be selected from silicon carbide rods or high-resistance nickel-chromium alloy wires, which have the characteristics of high temperature resistance, oxidation resistance, and long service life, enabling heat to be quickly and evenly transferred into the furnace body 20.

[0039] Reference Figure 4 The mounting brackets 51 in two adjacent heating components 50 fit together to eliminate the gap between the heating components 50, avoid the formation of local low temperature zones in the gaps, further ensure the uniformity of temperature distribution in the furnace, and ensure that the annealing effect of all parts of the quartz product is consistent.

[0040] In some preferred embodiments, the mounting bracket 51 is made of alumina ceramic, which has excellent high temperature resistance, thermal shock resistance and mechanical strength properties, and can extend the service life of the annealing furnace.

[0041] Reference Figure 6 In some preferred embodiments, the insulating fastener 61 is a hollow structure with one open end and one closed end. The open end of the insulating fastener 61 is connected to the inner wall of the furnace body corresponding to the temperature control zone 30, and the closed end of the insulating fastener 61 is provided with a mounting hole 611. The non-detection end of the temperature sensor 62 is located inside the insulating fastener 61, and the detection end of the temperature sensor 62 protrudes through the mounting hole 611. In application, the installation position of the detection component 60 can be reasonably set according to the size of the furnace body 20 to ensure that the detection end of the temperature sensor 62 is located in the core area of ​​the temperature field inside the furnace.

[0042] Furthermore, a heat-insulating buffer layer 612 is provided at the mounting hole 611, which covers the corresponding part of the temperature sensor. The heat-insulating buffer layer 612 can be made of high-temperature resistant flexible ceramic fiber material, which can effectively block the high temperature inside the furnace from being transmitted outward from the mounting hole 611, protecting the signal lines and non-detection ends inside the insulating fastener 61. At the same time, its flexibility can absorb the displacement caused by thermal expansion and contraction of the temperature sensor 62 and the mounting bracket 51, avoiding damage caused by rigid contact between the two and extending the service life of the temperature sensor 62.

[0043] Preferably, the connection between the base and the furnace body is provided with a mutually cooperating sealing and fitting structure, which includes a sealing groove on one of the base and the furnace body and a sealing ring on the other of the base and the furnace body. (Refer to...) Figure 3 In one embodiment, a sealing groove 11 is provided on the base 10, and a sealing ring 26 is provided at the bottom of the furnace body 20. The sealing and fitting structure formed by the sealing groove 11 and the sealing ring 26 can effectively prevent heat from leaking from the connection between the base 10 and the furnace body 20, so as to maintain a stable temperature environment in the furnace, reduce energy waste, and prevent cold air from entering the furnace and causing local temperature fluctuations, thus ensuring the annealing quality of quartz products.

[0044] Reference Figure 5The furnace body 20 comprises, from the outside in, a steel structure protective layer 21, a ceramic support layer 22, a nano-insulation layer 23, a ceramic fiber layer 24, and an aluminum foil reflective layer 25. The steel structure protective layer 21 can be welded from high-strength steel plates, protecting the internal structure of the furnace body 20 from external impact damage. The ceramic support layer 22 is made of high-density ceramic bricks, which have low thermal conductivity and provide stable support for the outer steel structure protective layer 21 and the inner nano-insulation layer 23. The nano-insulation layer 23 uses nano-silica insulation material, exhibiting excellent insulation performance. The ceramic fiber layer 24 uses polycrystalline mullite ceramic fiber blankets, possessing good elasticity and thermal shock resistance, further enhancing the insulation effect of the furnace body 20. The aluminum foil reflective layer 25 uses high-purity aluminum foil with a polished surface, reflecting outward-radiated heat back into the furnace. The multi-layered composite structure of the furnace body 20 provides excellent thermal insulation performance, effectively reducing heat transfer from the furnace interior to the outside.

[0045] This invention features an annealing furnace with at least three temperature control zones along its length. Each zone is equipped with an independent sub-controller, at least two sets of heating components, and at least one set of detection components. The heating and detection components are staggered and electrically connected to each other by the sub-controllers, enabling precise and independent temperature control of different areas within the furnace and effectively solving the problem of uneven temperature distribution in large-sized furnaces. The heating components are mounted with diffusion holes to promote uniform heat diffusion and ensure consistent temperature distribution within the furnace. The insulating fasteners of the detection components ensure stable operation of the temperature sensors and accurate temperature monitoring. This annealing furnace can be applied to the annealing process of large-sized quartz tubes and other quartz products, significantly improving the annealing effect, reducing production costs, ensuring stable furnace operation, and extending equipment lifespan.

[0046] This utility model has been described by the above-described embodiments; however, these embodiments are merely examples for implementing this utility model. It must be noted that the disclosed embodiments do not limit the scope of this utility model. Conversely, any modifications and refinements made without departing from the spirit and scope of this utility model are within the scope of patent protection of this utility model.

Claims

1. An annealing furnace for quartz products, characterized in that: The annealing furnace for quartz products includes a base and a furnace body covered on the base; The furnace body has at least three temperature control zones along its length. Each temperature control zone is equipped with a sub-controller, at least two sets of heating components, and at least one set of detection components. The sub-controller is located on the outer wall of the furnace body corresponding to the temperature control zone. The at least two sets of heating components and the at least one set of detection components are respectively located on the inner wall of the furnace body corresponding to the temperature control zone. The at least two sets of heating components and the at least one set of detection components are staggered. The sub-controller is electrically connected to the at least two sets of heating components and the at least one set of detection components respectively. The heating assembly includes a mounting bracket and a heating wire. The mounting bracket is installed on the inner wall of the furnace body corresponding to the temperature control zone. The heating wire is arranged in the mounting bracket. The mounting bracket has a diffusion hole on the side facing the center of the furnace body. The detection component includes an insulating fastener and a temperature sensor. The insulating fastener is disposed on the inner wall of the furnace body corresponding to the temperature control zone, and the temperature sensor is disposed on the insulating fastener.

2. The annealing furnace for quartz products as described in claim 1, characterized in that: The annealing furnace for quartz products also includes a main controller, which is electrically connected to the sub-controllers of each temperature control zone.

3. The annealing furnace for quartz products as described in claim 1, characterized in that: The heating wires in at least two sets of heating components in each temperature control zone are connected in parallel.

4. The annealing furnace for quartz products as described in claim 1, characterized in that: The heating wire is U-shaped or M-shaped.

5. The annealing furnace for quartz products as described in claim 1, characterized in that: The mounting brackets in two adjacent heating components fit together.

6. The annealing furnace for quartz products as described in claim 1, characterized in that: The mounting bracket is made of alumina ceramic.

7. The annealing furnace for quartz products as described in claim 1, characterized in that: The insulating fastener is a hollow structure with one open end and one closed end. The open end of the insulating fastener is connected to the inner wall of the furnace corresponding to the temperature control zone. The closed end of the insulating fastener is provided with a mounting hole. The non-detection end of the temperature sensor is located inside the insulating fastener, and the detection end of the temperature sensor protrudes from the mounting hole.

8. The annealing furnace for quartz products as described in claim 7, characterized in that: A heat-insulating buffer layer is provided at the mounting hole, and the heat-insulating buffer layer covers the corresponding part of the temperature sensor.

9. The annealing furnace for quartz products as described in claim 1, characterized in that: The connection between the base and the furnace body is provided with a mutually cooperating sealing and fitting structure. The sealing and fitting structure includes a sealing groove provided on one of the base and the furnace body and a sealing ring provided on the other of the base and the furnace body.

10. The annealing furnace for quartz products as described in claim 1, characterized in that: The furnace body comprises, from the outside in, a steel structure protective layer, a ceramic support layer, a nano-insulation layer, a ceramic fiber layer, and an aluminum foil reflective layer.

Images