Workpiece rotating structure of vacuum evaporation machine

Abstract

The utility model relates to the field of vacuum evaporation coating machine, concretely relates to a workpiece rotating structure of vacuum evaporation coating machine, including rotating shaft, the upper support ring is fixedly installed on rotating shaft, the lower support ring is detachably installed below the upper support ring, the top of lower support ring is installed with the pot cover plate for carrying the workpiece with coating, the bottom of upper support ring is installed with the multiple sets of connecting assembly that are arranged in the circumferential even interval around rotating shaft, and connecting assembly is equipped with connecting seat, and the side of connecting seat close to rotating shaft is equipped with the mounting groove that extends along the radial direction of rotating shaft, and the support block is slidably installed in the mounting groove, even if the gap of lower support ring edge is not aligned with the support block, can also smoothly install lower support ring to the top of support block.

Description

Technical Field

[0001] This utility model relates to the field of vacuum evaporation coating machines, and specifically to a workpiece rotation structure for a vacuum evaporation coating machine. Background Technology

[0002] Vacuum evaporation, or evaporation for short, refers to a process in which a coating material is evaporated and vaporized under vacuum conditions using a specific heating and evaporation method, and the particles fly to the surface of a substrate and condense to form a film.

[0003] In the prior art, utility model patent application number CN202510665907.8 discloses a rotating mechanism of a vacuum evaporation coating machine. The lower part of the rotating device is connected to a support assembly, which includes an upper support ring and a lower support ring. The lower support ring is used to support the carrier for receiving the coating. Multiple detachable lower hanging connectors are provided between the upper support ring and the lower support ring. The lower hanging connectors include a lower hanging device and a supporting device.

[0004] When the lower hanging device of the aforementioned rotating mechanism is connected to the support device, it relies on the pins on the lower hanging device to be embedded in the concave holes of the support device for guidance and positioning. However, since there are multiple sets of lower hanging connectors between the upper support ring and the lower support ring, it is not convenient to align the multiple sets of pins with the concave holes simultaneously when connecting the lower hanging device to the support device, which makes the installation of the lower support ring very inconvenient. Utility Model Content

[0005] The purpose of this invention is to provide a workpiece rotation structure for a vacuum evaporation coating machine, which facilitates the installation of the lower support ring, thereby solving the defects mentioned in the background art.

[0006] To achieve the above objectives, this utility model provides the following technical solution: A workpiece rotation structure for a vacuum evaporation coating machine includes a rotating shaft, an upper support ring fixedly mounted on the rotating shaft, and a lower support ring detachably mounted below the upper support ring. A lid plate for supporting the coated workpiece is mounted on the top of the lower support ring. Multiple sets of connecting assemblies are evenly spaced around the rotating shaft at the bottom of the upper support ring. Each connecting assembly has a connecting seat. The lower support ring is located between the multiple connecting seats. A mounting groove extending radially along the rotating shaft is provided on the side of each connecting seat near the rotating shaft. A support block is slidably mounted in the mounting groove. A spring is also provided in the mounting groove to push one end of the support block out of the mounting groove. The ends of the multiple support blocks extending out of the mounting groove collectively support the lower support ring. The edge of the lower support ring also has a notch for the support block to pass through. A guide slope is provided at the bottom of the end of the support block extending out of the mounting groove.

[0007] As a further improvement, when the lower support ring passes upward between the multiple support blocks, the edge of the lower support ring contacts the guide ramp and pushes the support block into the mounting groove.

[0008] As a further improvement, a sliding column extending radially along the rotation axis is fixedly installed on the support block, and a through hole is provided at the end of the connecting seat away from the rotation axis for the sliding column to pass through. The spring is sleeved on the sliding column located between the support block and the inner wall of the mounting groove, and a baffle located on the outer side of the connecting seat is fixedly installed at the end of the sliding column away from the support block.

[0009] As a further improvement, the connecting assembly also includes a connecting arm fixedly installed at the bottom of the upper support ring, a vertically extending guide post fixedly installed at the top of the connecting seat, a guide hole matching the guide post at the lower end of the connecting arm, and an adjustment assembly for adjusting the height of the connecting seat between the connecting arm and the connecting seat.

[0010] As a further improvement, the adjusting assembly includes a nut fixedly mounted on the connecting arm, an adjusting screw internally threaded onto the nut, a coaxial optical axis at the lower end of the adjusting screw, a stop block at the lower end of the optical axis, the diameter of the adjusting screw and the stop block being larger than the diameter of the optical axis, a connecting plate fixedly mounted on the connecting seat, the connecting plate having a vertically penetrating opening slot, the opening slot being U-shaped with one side open, the width of the opening slot matching the diameter of the optical axis, and the closed end of the opening slot being an arc shape conforming to the outer wall of the optical axis.

[0011] As a further improvement, a positioning post is fixedly installed on the top of the support block, a positioning hole is provided on the lower support ring for the positioning post to be inserted, and a clearance groove is provided on the top wall of the mounting groove for the positioning post to enter.

[0012] Compared with the prior art, the beneficial effects of this utility model are: 1. By aligning or misaligning the notch on the lower support ring with the support block, it is convenient to disassemble and assemble the lower support ring and the pot lid. 2. By setting a retractable support block and a guide slope at the bottom of one end of the support block, the lower support ring can be installed smoothly onto the top of the support block even if the notch on the edge of the lower support ring is not aligned with the support block, making the installation of the lower support ring more convenient. 3. By rotating the adjusting screw, the overall height of the lower support ring and the pot cover plate can be adjusted. This also facilitates the leveling of the lower support ring and the pot cover plate, allowing them to rotate smoothly with the rotating shaft and the upper support ring, thereby improving the uniformity of the vapor deposition. Attached Figure Description

[0013] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0014] Figure 1 This is a structural schematic diagram of an embodiment of the present utility model; Figure 2 This is an exploded view of the connecting component according to an embodiment of the present utility model; Figure 3 This is a schematic diagram of the connecting seat according to an embodiment of the present utility model.

[0015] In the diagram: 1-Rotating shaft; 2-Upper support ring; 3-Support rod; 4-Lower support ring; 5-Pot lid plate; 6-Connecting assembly; 7-Connecting seat; 8-Mounting groove; 9-Support block; 10-Sliding column; 11-Spring; 12-Baffle; 13-Notch; 14-Guide slope; 15-Positioning column; 16-Positioning hole; 17-Leaning groove; 18-Guide column; 19-Guide hole; 20-Nut; 21-Adjusting screw; 22-Optical axis; 23-Stop block; 24-Connecting plate; 25-Opening groove; 26-Connecting arm. Detailed Implementation

[0016] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0017] like Figures 1 to 3 As shown, a workpiece rotation structure of a vacuum evaporation coating machine includes a vertically extending rotating shaft 1, an upper support ring 2 fixedly mounted on the rotating shaft 1, and a plurality of support rods 3 connecting the rotating shaft 1 and the upper support ring 2; a lower support ring 4 is detachably mounted below the upper support ring 2, the rotating shaft 1, the upper support ring 2, and the lower support ring 4 are coaxially arranged, a pot cover plate 5 for supporting the coated workpiece is mounted on the top of the lower support ring 4, and a positioning groove for placing the pot cover plate 5 is provided on the top of the lower support ring 4.

[0018] Multiple sets of connecting assemblies 6 are evenly spaced circumferentially around the rotation axis 1 and mounted on the bottom of the upper support ring 2. Each connecting assembly 6 has a connecting seat 7, and the lower support ring 4 is located between the multiple connecting seats 7. Each connecting seat 7 has a mounting groove 8 extending radially along the rotation axis 1 on the side closest to the side of the connecting seat 7. Figure 3 As shown, a support block 9 is slidably installed in the mounting groove 8. A sliding column 10 extending radially along the rotating shaft 1 is threadedly connected to the side of the support block 9 away from the rotating shaft 1. The end of the connecting seat 7 away from the rotating shaft 1 has a through hole for the sliding column 10 to pass through. A spring 11 is sleeved on the sliding column 10 located between the support block 9 and the inner wall of the mounting groove 8. A baffle 12 located on the outer side of the connecting seat 7 is integrally formed at the end of the sliding column 10 away from the support block 9. The baffle 12 uses the thrust of the blocking spring 11 to completely disengage the support block 9 from the mounting groove 8. When the baffle 12 abuts against the outer wall of the end of the connecting seat 7 away from the rotating shaft 1, the thrust of the spring 11 causes one end of the support block 9 to extend out of the mounting groove 8. The lower support ring 4 is supported by multiple support blocks 9. Thus, during the vacuum evaporation process, the upper support ring 2, the lower support ring 4, and the pot cover plate 5 on the lower support ring 4 are driven to rotate synchronously by the rotating shaft 1.

[0019] The lower support ring 4 is also provided with a notch 13 on its edge for the support block 9 to pass through, and the notch 13 corresponds one-to-one with the support block 9. When it is necessary to disassemble the lower support ring 4 and the pot lid 5, first lift the lower support ring 4 upward, then deflect the lower support ring 4 so that the notch 13 on its edge is aligned with the support block 9, and then lower the lower support ring 4 so that the support block 9 passes through the notch 13, thereby separating the lower support ring 4 and the pot lid 5 from the upper support ring 2.

[0020] Similarly, when installing the lower support ring 4, support the lower support ring 4 and align the notch 13 on the edge of the lower support ring 4 with the support block 9. Then lift the lower support ring 4 upward so that the support block 9 passes through the notch 13. Then deflect the lower support ring 4 so that the notch 13 on its edge is misaligned with the support block 9. The lower support ring 4 is supported by multiple support blocks 9.

[0021] Additionally, the bottom of the end of the support block 9 extending outside the mounting groove 8 is provided with a guide slope 14, and the horizontal distance between the guide slope 14 and the axis of the rotating shaft 1 gradually decreases from bottom to top. When the lower support ring 4 is installed, during the process of lifting the lower support ring 4 upward, even if the notch 13 on the edge of the lower support ring 4 is not aligned with the support block 9, when the lower support ring 4 passes upward between multiple support blocks 9, the edge of the lower support ring 4 contacts the guide slope 14 and pushes the support block 9 into the mounting groove 8, until the lower support ring 4 completely passes upward through the support block 9, the spring 11 pushes the support block 9 to pop out again and supports the lower support ring 4.

[0022] In addition, a vertically extending positioning post 15 is integrally formed on the top of the end of the support block 9 that extends outward from the mounting groove 8. The lower support ring 4 is provided with a positioning hole 16 for the positioning post 15 to be inserted, and the top wall of the mounting groove 8 is provided with a clearance groove 17 for the positioning post 15 to enter. When the support block 9 supports the lower support ring 4, by inserting the positioning post 15 on the support block 9 into the positioning hole 16 on the lower support ring 4, the support block 9 is prevented from accidentally retracting into the mounting groove 8, causing the lower support ring 4 to fall off. At the same time, the lower support ring 4 is also prevented from deflecting at the top of the support block 9.

[0023] like Figure 2 As shown, the connecting assembly also includes a connecting arm 26 fixedly mounted on the bottom of the upper support ring 2 by screws, a vertically extending guide post 18 fixedly mounted on the top of the connecting seat 7, and a guide hole 19 matching the guide post 18 at the lower end of the connecting arm 26, so that the connecting seat 7 can move up and down relative to the connecting arm 26.

[0024] An adjustment assembly for adjusting the height of the connecting arm 26 is also provided between the connecting arm 26 and the connecting seat 7. The adjustment assembly includes a nut 20 fixedly installed on one side of the connecting arm 26 by bolts. An adjustment screw 21 is internally threaded onto the nut 20. A light shaft 22 is coaxially provided at the lower end of the adjustment screw 21. A stop block 23 is provided at the lower end of the light shaft 22. The adjustment screw 21, the light shaft 22, and the stop block 23 are integrally formed. The diameters of the adjustment screw 21 and the stop block 23 are both larger than the diameter of the light shaft 22. A connecting plate 24 is welded to one side of the connecting seat 7. A vertically penetrating opening slot 25 is provided on the connecting plate 24. The opening slot 25 is U-shaped with an opening on the side away from the connecting seat 7. The width of the opening slot 25 matches the diameter of the light shaft 22, and the closed end of the opening slot 25 is an arc shape that fits against the outer wall of the light shaft 22. By rotating the adjusting screw 21 and the stop block 23 at the lower end of the adjusting screw 21, the connecting plate 24 and the connecting seat 7 are raised or lowered, so as to adjust the overall height of the lower support ring 4 and the pot cover plate 5. At the same time, it is also convenient to level the lower support ring 4 and the pot cover plate 5, so that the lower support ring 4 and the pot cover plate 5 rotate smoothly with the rotating shaft 1 and the upper support ring 2, thereby improving the uniformity of vapor deposition.

[0025] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely preferred examples and are not intended to limit the utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed utility model. The scope of protection of this utility model is defined by the appended claims and their equivalents.

Claims

1. A workpiece rotation structure for a vacuum evaporation coating machine, comprising a rotating shaft, an upper support ring fixedly mounted on the rotating shaft, a lower support ring detachably mounted below the upper support ring, and a lid plate for supporting the coated workpiece mounted on the top of the lower support ring, characterized in that: The bottom of the upper support ring is equipped with multiple sets of connecting components evenly spaced around the rotation axis. Each connecting component has a connecting seat. The lower support ring is located between the multiple connecting seats. The side of the connecting seat near the rotation axis has a mounting groove extending radially along the rotation axis. A support block is slidably installed in the mounting groove. A spring is also provided in the mounting groove to push one end of the support block out of the mounting groove. The ends of the multiple support blocks extending out of the mounting groove together support the lower support ring. The edge of the lower support ring also has a notch for the support block to pass through. The bottom of the end of the support block extending out of the mounting groove has a guide slope.

2. The workpiece rotation structure of a vacuum evaporation coating machine as described in claim 1, characterized in that: As the lower support ring passes upward between the multiple support blocks, the edge of the lower support ring contacts the guide ramp and pushes the support block into the mounting groove.

3. The workpiece rotation structure of a vacuum evaporation coating machine as described in claim 1, characterized in that: A sliding column extending radially along the rotation axis is fixedly installed on the support block. The end of the connecting seat away from the rotation axis is provided with a through hole for the sliding column to pass through. The spring is sleeved on the sliding column located between the support block and the inner wall of the mounting groove. A baffle located on the outer side of the connecting seat is fixedly installed on the end of the sliding column away from the support block.

4. The workpiece rotation structure of a vacuum evaporation coating machine as described in claim 1, characterized in that: The connecting assembly further includes a connecting arm fixedly installed at the bottom of the upper support ring, a vertically extending guide post fixedly installed at the top of the connecting seat, a guide hole matching the guide post at the lower end of the connecting arm, and an adjusting assembly for adjusting the height of the connecting seat between the connecting arm and the connecting seat.

5. The workpiece rotation structure of a vacuum evaporation coating machine as described in claim 4, characterized in that: The adjusting assembly includes a nut fixedly mounted on the connecting arm, an adjusting screw internally threaded onto the nut, a coaxial optical axis at the lower end of the adjusting screw, a stop block at the lower end of the optical axis, and the diameters of the adjusting screw and the stop block being larger than the diameter of the optical axis. A connecting plate is fixedly mounted on the connecting seat, and the connecting plate has a vertically penetrating slot. The slot is U-shaped with one side open, the width of the slot matching the diameter of the optical axis, and the closed end of the slot is arc-shaped, conforming to the outer wall of the optical axis.

6. The workpiece rotation structure of a vacuum evaporation coating machine as described in claim 1, characterized in that: A positioning post is fixedly installed on the top of the support block, a positioning hole is provided on the lower support ring for the positioning post to be inserted, and a clearance groove is provided on the top wall of the mounting groove for the positioning post to enter.

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