Evaporation boat and evaporation system
Patent Information
- Application Number
- CN202522625232.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-12-10
- Publication Date
- 2026-10-30
- Estimated Expiration
- 2035-12-10
AI Technical Summary
当送丝机构由于送丝不稳或蒸汽原因或金属熔化导致金属丝抖动时，金属熔液滴落到蒸发舟时位置产生变动，则会产生飞溅
[0020]本申请通过在蒸发舟的熔池蒸发区两端设置防蔓延区，能够防止熔池蒸发区内的熔液向蒸发舟第一端部和第二端部之外蔓延；且，通过使送丝通道的出口的下边缘到凹槽的底部的距离小于凹槽的预设深度，从而使得金属丝通过送丝通道能够直接送到熔池蒸发区底部，金属丝在送丝通道出口与金属溶池直接接触融化，避免了送丝抖动问题，从而解决由于送丝抖动导致的熔液飞溅问题。
Smart Images
Figure CN224917872U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of lithium battery technology, and more specifically, to an evaporation boat and an evaporation system. Background Technology
[0002] Vacuum evaporation coating is a process where, under vacuum conditions, a heated evaporation source vaporizes and evaporates metal within it. The vapor atoms or molecules then deposit onto a substrate and condense to form a thin film. Current technologies typically utilize a power source connected to both ends of an evaporation boat. Most evaporation boats currently employ an evaporation pool on their upper surface or with grooves designed into the surface, where the metal to be deposited evaporates.
[0003] In related technologies, a wire feeding mechanism delivers the metal wire to be evaporated to the top of an evaporation boat. After the metal wire melts, it drips into the evaporation tank and then vaporizes to coat the substrate. When the wire feeding mechanism vibrates due to unstable wire feeding, steam issues, or the melting of the metal, the position of the molten metal dripping onto the evaporation boat changes, resulting in splashing. Utility Model Content
[0004] The purpose of this application is to provide an evaporation boat and evaporation system that can solve the technical problem of metal wires splashing during the evaporation process.
[0005] This application provides an evaporation boat, comprising:
[0006] The evaporation boat body has a first end and a second end located at both ends along its length;
[0007] The molten pool evaporation zone is located on the upper side of the evaporation boat body and between the first end and the second end. The molten pool evaporation zone is formed as a groove of a predetermined depth along the height direction of the evaporation boat body.
[0008] The anti-spreading zone includes a first anti-spreading protrusion located at the first end and a second anti-spreading protrusion located at the second end. The first anti-spreading protrusion and the second anti-spreading protrusion are used to prevent the molten liquid in the evaporation zone of the molten pool from spreading outside the first end and the second end.
[0009] The wire feeding channel includes a first wire feeding channel that passes through the first anti-spreading protrusion and a second wire feeding channel that passes through the second anti-spreading protrusion, and the distance from the lower edge of the outlet of the first wire feeding channel and the outlet of the second wire feeding channel to the bottom of the groove is less than the preset depth of the groove.
[0010] In some embodiments, at least one of the outlets of the first wire feeding channel and the second wire feeding channel is tangent to the bottom of the groove.
[0011] In some embodiments, at least one of the outlets of the first wire feeding channel and the second wire feeding channel is equidistant from both sides of the groove in the width direction of the groove.
[0012] In some embodiments, at least one of the first wire feeding channel and the second wire feeding channel is inclinedly disposed within the first anti-spreading protrusion or the second anti-spreading protrusion, and the inlet of at least one of the first wire feeding channel and the second wire feeding channel is higher than the outlet.
[0013] In some embodiments, the distance from the inlet of at least one of the first wire feeding channel and the second wire feeding channel to the top of the first anti-spreading protrusion or the second anti-spreading protrusion is 6mm-14mm.
[0014] In some embodiments, at least one of the first anti-spreading protrusion and the second anti-spreading protrusion has a slope on the side facing the evaporation zone of the molten pool.
[0015] In some embodiments, the inclination angle of the inclined surface is greater than the inclination angles of the first wire feeding channel and the second wire feeding channel.
[0016] In some embodiments, the diameter of at least one of the first wire feeding channel and the second wire feeding channel is equal to the preset depth of the groove.
[0017] In some embodiments, the grooves in the evaporation zone of the molten pool are rectangular, elliptical, or elongated.
[0018] This application also provides an evaporation system, including: a metal wire and an evaporation boat as described in any of the above, wherein the metal wire extends into the molten pool evaporation zone along the first wire feeding channel and the second wire feeding channel for evaporation.
[0019] Compared with the prior art, the embodiments of this application have the following technical effects:
[0020] This application prevents the molten liquid in the evaporation zone of the evaporation boat from spreading beyond the first and second ends of the evaporation boat by setting anti-spreading zones at both ends of the evaporation zone of the evaporation boat. Furthermore, by making the distance from the lower edge of the wire feeding channel outlet to the bottom of the groove less than the preset depth of the groove, the metal wire can be directly fed to the bottom of the evaporation zone of the molten pool through the wire feeding channel. The metal wire melts directly in contact with the molten pool at the outlet of the wire feeding channel, avoiding the problem of wire feeding vibration and thus solving the problem of molten liquid splashing caused by wire feeding vibration. Attached Figure Description
[0021] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments consistent with this application and, together with the description, serve to explain the principles of this application. It is obvious that the drawings described below are merely some embodiments of this application, and those skilled in the art can obtain other drawings based on these drawings without any inventive effort. In the drawings:
[0022] Figure 1 This is a schematic diagram of the overall structure of the evaporation boat according to some embodiments of this application.
[0023] Figure 2 This is a cross-sectional structural diagram of an evaporation boat according to some embodiments of this application.
[0024] Explanation of reference numerals in the attached figures:
[0025] Evaporation boat body 10, first end 11, second end 12; molten pool evaporation zone 20; anti-spread zone 30, first anti-spread protrusion 31, second anti-spread protrusion 32; wire feeding channel 40, first wire feeding channel 41, second wire feeding channel 42, first wire feeding channel outlet 411, second wire feeding channel outlet 421; metal wire 50; support structure 60. Detailed Implementation
[0026] To make the objectives, technical solutions, and advantages of this application clearer, the application will be further described in detail below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.
[0027] The terminology used in the embodiments of this application is for the purpose of describing particular embodiments only and is not intended to limit the application. The singular forms “a,” “said,” and “the” used in the embodiments of this application and the appended claims are also intended to include the plural forms, and “multiple” generally includes at least two unless the context clearly indicates otherwise.
[0028] It should be understood that the term "and / or" used in this article is merely a description of the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent: A existing alone, A and B existing simultaneously, and B existing alone. Additionally, the character " / " in this article generally indicates that the preceding and following related objects have an "or" relationship.
[0029] It should be understood that although the terms first, second, third, etc., may be used to describe embodiments of this application, these terms should not be used in isolation. These terms are only used to distinguish between different terms. For example, first may also be referred to as second without departing from the scope of embodiments of this application, and similarly, second may also be referred to as first.
[0030] It should also be noted that the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that an article or device that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such an article or device. Without further limitation, an element defined by the phrase "comprising one" does not exclude the presence of other identical elements in the article or device that includes said element.
[0031] In related technologies, the wire feeding mechanism delivers the metal wire to be evaporated to a preset height above the molten pool of the evaporation boat. As the evaporation boat heats up, the metal wire above the molten pool melts and drips into the molten pool, where it then forms vapor. This vapor atoms or molecules are deposited onto the substrate and condense to form a thin film. However, if the wire feeding mechanism vibrates due to unstable wire feeding, vapor disturbance, or metal melting, the position of the molten metal dripping onto the evaporation boat will change, causing splashing and affecting the entire evaporation process.
[0032] This application provides an evaporation boat, comprising: an evaporation boat body having a first end and a second end located at both ends along its length; a molten pool evaporation zone located on the upper side of the evaporation boat body and between the first end and the second end, the molten pool evaporation zone being formed as a groove of a predetermined depth along the height direction of the evaporation boat body; an anti-spreading zone including a first anti-spreading protrusion located at the first end and a second anti-spreading protrusion located at the second end, the first anti-spreading protrusion and the second anti-spreading protrusion being used to prevent the molten liquid in the molten pool evaporation zone from spreading outside the first end and the second end; and a wire feeding channel including a first wire feeding channel penetrating the first anti-spreading protrusion and a second wire feeding channel penetrating the second anti-spreading protrusion, wherein the distance from the lower edge of the outlet of the first wire feeding channel and the outlet of the second wire feeding channel to the bottom of the groove is less than the predetermined depth of the groove.
[0033] This application prevents the molten liquid in the evaporation zone of the evaporation boat from spreading beyond the first and second ends of the evaporation boat by setting anti-spreading zones at both ends of the evaporation zone of the evaporation boat. Furthermore, by making the distance from the lower edge of the wire feeding channel outlet to the bottom of the groove less than the preset depth of the groove, the metal wire can be directly fed to the bottom of the evaporation zone of the molten pool through the wire feeding channel. The metal wire melts directly in contact with the molten pool at the outlet of the wire feeding channel, avoiding the problem of wire feeding vibration and thus solving the problem of molten liquid splashing caused by wire feeding vibration.
[0034] The optional embodiments of this application are described in detail below with reference to the accompanying drawings.
[0035] like Figure 1 This application provides an evaporation boat for melting metal wire fed to the evaporation boat, thereby causing the metal wire to form vapor, which is then deposited onto a substrate by vapor atoms or molecules and condensed to form a vapor-deposited thin film. The evaporation boat includes an evaporation boat body 10, a molten pool evaporation zone 20, an anti-spread zone 30, and a wire feeding channel 40.
[0036] To clearly express the positional relationships between the structural features of the evaporation boat, a Cartesian coordinate system is constructed, such as... Figure 1 As shown, the length of the evaporation boat is along the positive and negative X-axis, the width is along the positive and negative Y-axis, and the vertical or height direction is along the positive and negative Z-axis. Typically, during the use of the evaporation boat, the XY plane is a horizontal plane.
[0037] Specifically, the evaporation boat body 10 has a first end 11 and a second end 12 located at both ends along its length. The first end 11 and the second end 12 are connected to external electrodes to heat the evaporation boat to a preset temperature. The evaporation boat body 10 has a length h1, a width h2, and a thickness h3. For example, the length h1 is 150 mm, the width h2 is 40 mm, and the thickness h3 is 10 mm. The molten pool evaporation zone 20 is located on the upper side of the evaporation boat body 10 and between the first end 11 and the second end 12. The molten pool evaporation zone 20 is formed as a groove of a preset depth along the height direction of the evaporation boat body 10. This preset depth can be set according to the evaporation process, for example, 3 mm to 5 mm. An edge is formed around the groove to prevent molten metal from overflowing. The anti-spreading zone 30 is located at the end of the molten pool evaporation zone 20 along its length. The anti-spreading zone 30 includes a first anti-spreading protrusion 31 located at the first end 11 and a second anti-spreading protrusion 32 located at the second end 12. The first anti-spreading protrusion 31 and the second anti-spreading protrusion 32 prevent the molten liquid in the molten pool evaporation zone 20 from spreading beyond the first end 11 and the second end 12, thus preventing short circuits caused by contact with the positive and negative electrodes. The wire feeding channel 40 includes a first wire feeding channel 41 penetrating the first anti-spreading protrusion 31 and a second wire feeding channel 42 penetrating the second anti-spreading protrusion 32. The distance from the lower edge of the outlet of the first wire feeding channel 41 and the outlet of the second wire feeding channel 42 to the bottom of the groove is less than the preset depth of the groove. This allows the metal wire to extend directly to the bottom of the molten pool evaporation zone 20 along the first wire feeding channel 41 and the second wire feeding channel 42. The metal wire melts directly in contact with the molten metal pool at the outlet of the wire feeding channel 40, avoiding the problem of wire feeding vibration and thus solving the problem of molten liquid splashing caused by wire feeding vibration.
[0038] In some embodiments, the groove of the molten pool evaporation zone 20 is rectangular, elliptical, or elongated to facilitate adaptation to the structure of the substrate to be coated. For example, the molten pool evaporation zone 20 has a length of 110 mm, a width of 36 mm, and a groove depth of 3 mm.
[0039] In some embodiments, such as Figure 2As shown, the distance between the first anti-spreading protrusion 31 and the second anti-spreading protrusion 32 and the top edge of the evaporation zone 20 of the molten pool is H1, the length of the first anti-spreading protrusion 31 and the second anti-spreading protrusion 32 is H3, and the distance from the inlet of at least one of the first wire feeding channel 41 and the second wire feeding channel 42 to the top of the first anti-spreading protrusion 31 or the second anti-spreading protrusion 32 is H2. As an example, H1 is 25mm-35mm, H2 is 6mm-14mm, and H3 is 15mm-25mm. Optionally, H1 is 30mm, H2 is 10mm, and H3 is 20mm, so that the first anti-spreading protrusion 31 or the second anti-spreading protrusion 32 has sufficient height and length to block molten splashing, and also so that the first wire feeding channel 41 and the second wire feeding channel 42 have sufficient slope to prevent molten liquid from backflowing and overflowing the evaporation zone 20 of the molten pool.
[0040] In some embodiments, at least one of the first anti-spreading protrusion 31 and the second anti-spreading protrusion 32 has a slope on the side facing the evaporation zone 20 of the molten pool, so as to maximize the opening area of the evaporation zone 20 of the molten pool while blocking the overflow of the molten liquid, thereby ensuring the steam area and improving the evaporation efficiency.
[0041] In some embodiments, the first wire feeding channel 41 and the second wire feeding channel 42 are circular holes to facilitate the sliding feeding of the metal wire within the channels. At least one of the outlets 411 and 421 of the first and second wire feeding channels is tangent to the bottom of the groove. Furthermore, by ensuring that at least one of the outlets 411 and 421 is tangent to the bottom of the groove, the wire feeding position is lowered, preventing dripping due to a distance between the outlets 411 and 421 and the bottom of the groove. This helps prevent molten metal splashing caused by dripping.
[0042] In some embodiments, at least one of the first wire feeding channel outlet 411 and the second wire feeding channel outlet 421 is equidistant from both sides of the groove in the width direction of the groove, further ensuring that the end of the wire is in the molten metal and preventing molten metal splashing caused by wire disturbance.
[0043] In some embodiments, at least one of the first wire feeding channel 41 and the second wire feeding channel 42 is inclinedly disposed within the first anti-spreading protrusion 31 or the second anti-spreading protrusion 32, and the inlet of at least one of the first wire feeding channel 41 and the second wire feeding channel 42 is higher than the outlet, forming an inclined arrangement from the outside to the inside, so that when the metal wire 50 melts in the wire feeding channel 40, it can still flow smoothly into the evaporation zone 20 of the molten pool, instead of flowing out of the anti-spreading zone 30 along the wire feeding channel 40.
[0044] In some embodiments, the distance from the inlet of at least one of the first wire feeding channel 41 and the second wire feeding channel 42 to the top of the first anti-spreading protrusion 31 or the second anti-spreading protrusion 32 is 6mm-14mm.
[0045] In some embodiments, the inclination angle of the slopes of the first anti-spreading protrusion 31 and the second anti-spreading protrusion 32 is greater than the inclination angle of the first wire feeding channel 41 and the second wire feeding channel 42, so as to maximize the height of the first anti-spreading protrusion 31 and the second anti-spreading protrusion 32, thereby preventing the molten liquid from backflowing and overflowing the evaporation zone 20 of the molten pool.
[0046] In some embodiments, the aperture of at least one of the first wire feeding channel 41 and the second wire feeding channel 42 is equal to the preset depth of the groove. This allows for maximizing the aperture of the wire feeding channels while ensuring that the metal wire extends into the molten metal, thus enabling the evaporation boat to accommodate different types of metal wires.
[0047] This application embodiment also provides an evaporation system, which includes a metal wire 50 and an evaporation boat as described in any of the above. The evaporation boat is snapped into the middle of the support structure 60. The metal wire 50 extends into the bottom of the molten pool evaporation zone 20 along the first wire feeding channel 41 and the second wire feeding channel 42 to melt and evaporate, so as to coat the substrate.
[0048] This application prevents the molten liquid in the molten pool evaporation zone 20 from spreading beyond the first end 11 and the second end 12 of the evaporation boat by setting anti-spreading zones at both ends of the evaporation zone 20 of the evaporation boat. Furthermore, by making the distance from the lower edge of the wire feeding channel outlet to the bottom of the groove less than the preset depth of the groove, the metal wire can be directly fed to the bottom of the molten pool evaporation zone 20 through the wire feeding channel. The metal wire directly contacts and melts in the molten pool at the outlet of the wire feeding channel, avoiding the problem of wire feeding vibration and thus solving the problem of molten liquid splashing caused by wire feeding vibration.
[0049] Finally, it should be noted that the various embodiments in this specification are described in a progressive manner, with each embodiment focusing on the differences from other embodiments. The same or similar parts between the various embodiments can be referred to each other.
[0050] The above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this application.
Claims
1. An evaporation boat, characterized in that, include: The evaporation boat body has a first end and a second end located at both ends along its length; The molten pool evaporation zone is located on the upper side of the evaporation boat body and between the first end and the second end. The molten pool evaporation zone is formed as a groove of a predetermined depth along the height direction of the evaporation boat body. The anti-spreading zone includes a first anti-spreading protrusion located at the first end and a second anti-spreading protrusion located at the second end. The first anti-spreading protrusion and the second anti-spreading protrusion are used to prevent the molten liquid in the evaporation zone of the molten pool from spreading outside the first end and the second end. The wire feeding channel includes a first wire feeding channel that passes through the first anti-spreading protrusion and a second wire feeding channel that passes through the second anti-spreading protrusion, and the distance from the lower edge of the outlet of the first wire feeding channel and the outlet of the second wire feeding channel to the bottom of the groove is less than the preset depth of the groove.
2. The evaporation boat according to claim 1, characterized in that, At least one of the outlets of the first wire feeding channel and the second wire feeding channel is tangent to the bottom of the groove.
3. The evaporation boat according to claim 1, characterized in that, At least one of the outlets of the first wire feeding channel and the second wire feeding channel is equidistant from both sides of the groove in the width direction of the groove.
4. The evaporation boat according to claim 1, characterized in that, The first wire feeding channel and the second wire feeding channel are inclinedly disposed within the first anti-spreading protrusion or the second anti-spreading protrusion, and the inlet of the first wire feeding channel and the second wire feeding channel is higher than the outlet.
5. The evaporation boat according to claim 1, characterized in that, The distance from the inlet of at least one of the first wire feeding channel and the second wire feeding channel to the top of the first anti-spreading protrusion or the second anti-spreading protrusion is 6mm-14mm.
6. The evaporation boat according to claim 1, characterized in that, At least one of the first anti-spreading protrusion and the second anti-spreading protrusion has a slope on the side facing the evaporation zone of the molten pool.
7. The evaporation boat according to claim 6, characterized in that, The inclination angle of the inclined plane is greater than the inclination angles of the first wire feeding channel and the second wire feeding channel.
8. The evaporation boat according to claim 1, characterized in that, The diameter of at least one of the first wire feeding channel and the second wire feeding channel is equal to the preset depth of the groove.
9. The evaporation boat according to claim 1, characterized in that, The grooves in the evaporation zone of the molten pool are rectangular, elliptical, or elongated.
10. An evaporation system, characterized in that, include: The metal wire and the evaporation boat according to any one of claims 1-9, wherein the metal wire extends into the evaporation zone of the molten pool along the first wire feeding channel and the second wire feeding channel for evaporation.