A kind of evaporation coating device

Abstract

The application discloses an evaporation coating device, which comprises a base, a crucible, a conductive spiral, a power supply, a high-frequency transformer and a water cooling assembly, the crucible and the conductive spiral are sequentially arranged on the base in the vertical direction, the positive electrode and the negative electrode of the power supply are electrically connected with the conductive spiral and the high-frequency transformer respectively, the conductive spiral is electrically connected with the high-frequency transformer, the conductive spiral is provided with a cooling channel in the spiral direction of the conductive spiral, and the cooling channel is communicated with the water cooling assembly. The above scheme can solve the problem that the water cooling structure is complex in the related art, the water cooling cover only absorbs the heat transferred to the quartz tube, cannot directly cool the electromagnetic induction coil, and thus the cooling effect is poor.

Description

Technical Field

[0001] This utility model relates to the field of battery cell passivation technology, and in particular to a vapor deposition coating device. Background Technology

[0002] In the passivation process of whole, half, or multi-cell solar cells, an electromagnetic coil surrounds a crucible in which the coating material and an inductor are placed. The electromagnetic coil causes the inductor to heat up through electromagnetic induction, melting and evaporating the coating material, thus achieving the effect of coating the surface of the solar cell. However, the heat dissipated from the crucible can affect the magnetic field of the electromagnetic coil, making the electromagnetic induction heating of the inductor unstable and difficult to control.

[0003] In related technologies, the patent with publication number CN112501693A discloses that an electromagnetic induction coil is surrounded by a quartz tube, and a water-cooled cover is surrounded by the quartz tube and the electromagnetic induction coil. The water-cooled cover uniformly reduces the radiation temperature. However, the above structure is complex. The water-cooled cover only absorbs the heat transferred to the quartz tube and cannot directly cool the electromagnetic induction coil, resulting in poor cooling effect. Utility Model Content

[0004] The purpose of this invention is to provide a vapor deposition coating apparatus to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a vapor deposition coating apparatus, comprising a base, a crucible, a conductive spiral component, a power supply, a high-frequency transformer, and a water-cooling assembly. The crucible and the conductive spiral component are vertically spaced on the base. The conductive spiral component and the high-frequency transformer are both electrically connected to the power supply. The conductive spiral component is electrically connected to the high-frequency transformer. The conductive spiral component has a cooling channel along its own spiral direction, and the cooling channel is connected to the water-cooling assembly.

[0006] Preferably, it further includes a heat insulation cover, which is located between the crucible and the conductive spiral member and covers the conductive spiral member.

[0007] Preferably, a first conductive tube is provided at one central end of the conductive spiral component, and a second conductive tube is provided at the other end of the outer edge of the conductive spiral component. Both the first and second conductive tubes are connected to the cooling channel. The first and second conductive tubes are respectively connected to the water inlet and water outlet of the water-cooling component. One of the first and second conductive tubes is electrically connected to the power supply, and the other is electrically connected to the high-frequency transformer.

[0008] Preferably, the base includes a base body, a bracket, a high-temperature resistant support plate, a heat insulation cover, and a locking ring. The bracket is disposed on the base body, the high-temperature resistant support plate and the conductive spiral are spaced apart on the bracket, the locking ring is threadedly engaged with the heat insulation cover, the locking ring presses the crucible into the heat insulation cover, and the high-temperature resistant support plate is clamped between the locking ring and the heat insulation cover.

[0009] Preferably, it also includes a hydrogen supply component, the output end of which passes through the base body and faces the conductive spiral.

[0010] Preferably, the center of the crucible coincides with the projection of the center of the conductive spiral in the vertical direction.

[0011] Preferably, the distance between the outer bottom wall of the crucible and the upper surface of the conductive spiral is 0.5 mm to 1 mm.

[0012] Preferably, in the vertical direction, the projected area of ​​the crucible is smaller than the projected area of ​​the conductive spiral component. Preferably, the inner bottom wall of the crucible has at least one groove for holding the coating material.

[0013] Preferably, the base is provided with a lifting drive component, the driving end of the lifting drive component is connected to the conductive spiral component, and the conductive spiral component is provided with a groove, the groove being opposite to the crucible.

[0014] The technical solution adopted in this application can achieve the following beneficial effects: In the vapor deposition apparatus disclosed in this application, a crucible and a conductive spiral are arranged vertically on a base. The positive and negative terminals of the power supply are electrically connected to the conductive spiral and a high-frequency transformer, respectively. The conductive spiral is electrically connected to the high-frequency transformer. The conductive spiral has a cooling channel along its own spiral direction, and the cooling channel is connected to a water-cooling assembly.

[0015] During the use of the vapor deposition equipment, the high-frequency transformer converts the 380V or 220V AC power output by the power supply into DC power through rectification and filtering, and then performs high-frequency inversion to generate high-frequency AC power of 10kHz~1MHz. After the high-frequency current is passed through the conductive spiral component, a uniform strong alternating magnetic field is formed around it. The crucible and the coating material it carries are subjected to electromagnetic induction to generate closed eddy currents. Under the resistance of the crucible and the coating material it carries, the eddy currents convert electrical energy into heat energy, achieving rapid heating. At the same time, the cooling water output by the water cooling component circulates in the cooling channel. The cooling water can directly absorb the heat received by the conductive spiral component, ensuring that the conductive spiral component is not affected by its own temperature and stably generates a controllable strong alternating magnetic field.

[0016] The above structure can directly cool the conductive spiral component by opening a cooling channel on the conductive spiral component, and also avoids the need to add additional structures such as water cooling covers in related technologies. The structure is simple and easy to install. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0018] Figure 1 This is a schematic diagram of the vapor deposition apparatus disclosed in the embodiments of this application; Figure 2 This is a partial cross-sectional view of the vapor deposition apparatus disclosed in the embodiments of this application; Figure 3 This is a top view of the conductive spiral component disclosed in the embodiments of this application; Figure 4 This is a top view of the crucible disclosed in the embodiments of this application.

[0019] In the diagram: 100, base; 110, base body; 120, bracket; 130, high-temperature resistant support plate; 140, heat insulation cover; 150, locking ring; 200, crucible; 300, conductive spiral component; 400, heat insulation cover; 510, first conductive tube; 520, second conductive tube; 600, hydrogen supply assembly. Detailed Implementation

[0020] To facilitate understanding of this utility model, a more complete description will be given below with reference to the accompanying drawings. The drawings illustrate preferred embodiments of this utility model. However, this utility model can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided to provide a more thorough and complete understanding of the disclosure of this utility model.

[0021] It should be noted that when a component is said to be "set on" another component, it can be directly on the other component or there may be an intervening component. When a component is said to be "connected to" another component, it can be directly connected to the other component or there may be an intervening component.

[0022] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used in this specification is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention.

[0023] like Figures 1 to 4 As shown, this application discloses a vapor deposition coating apparatus, which includes a base 100, a crucible 200, a conductive spiral component 300, a power supply, a high-frequency transformer, and a water-cooling assembly.

[0024] Specifically, the crucible 200 and the conductive spiral component 300 are arranged vertically on the base 100 at intervals. The conductive spiral component 300 and the high-frequency transformer are both electrically connected to the power supply. The conductive spiral component 300 is electrically connected to the high-frequency transformer. The conductive spiral component 300 has a cooling channel along its own spiral direction, and the cooling channel is connected to the water cooling component.

[0025] During the operation of the vapor deposition equipment, the high-frequency transformer converts the 380V or 220V AC power output into DC power through rectification and filtering, and then performs high-frequency inversion to generate 10kHz~1MHz high-frequency AC power. When the high-frequency current is applied to the conductive spiral component 300, a uniform and strong alternating magnetic field is formed around it. The crucible 200 and the coating material it carries generate closed eddy currents through electromagnetic induction. Under the resistance of the crucible 200 and the coating material it carries, the eddy currents convert electrical energy into heat energy, achieving stable and rapid heating to coat the material. The material is stably melted and evaporated. Compared with the method of heat conduction to the crucible 200 by the resistance of the energized coil in related technologies, the crucible 200 generates heat through its own resistance. The heat is uniform and can be transferred to the coating material in a timely manner, resulting in more uniform heating. The coating material itself can also generate heat through resistance. At the same time, the cooling water output by the water cooling component circulates in the cooling channel. The cooling water can directly absorb the heat radiated by the crucible 200 and the coating material from the conductive spiral component 300, ensuring that the conductive spiral component 300 is not affected by its own temperature and stably generates a controllable strong alternating magnetic field.

[0026] The above structure can directly cool the conductive spiral component 300 by opening a cooling channel on the conductive spiral component 300, and also avoids the need to add additional structures such as water cooling covers in related technologies. The structure is simple and easy to install.

[0027] In the embodiments of this application, the disclosed vapor deposition apparatus may further include a heat insulation cover 400. Specifically, the heat insulation cover 400 is located between the crucible 200 and the conductive spiral 300, and is covered outside the conductive spiral 300. The heat insulation cover 400 can isolate the heat emitted by the crucible 200 and the coating material during the vapor deposition process, thereby reducing the absorption of heat by the conductive spiral 300, ensuring that the conductive spiral 300 is not affected by its own temperature, and stably generating a controllable strong alternating magnetic field.

[0028] In addition, the heat insulation cover 400 can be a boron nitride cover, asbestos cover, rock wool cover, etc., and this application does not impose any restrictions on it.

[0029] In this embodiment, a first conductive tube 510 may be provided at one central end of the conductive spiral 300, and a second conductive tube 520 may be provided at the other outer end of the conductive spiral 300. Specifically, both the first conductive tube 510 and the second conductive tube 520 are connected to the cooling channel. The first conductive tube 510 and the second conductive tube 520 are respectively connected to the water inlet and the water outlet of the water cooling component. One of the first conductive tube 510 and the second conductive tube 520 is electrically connected to the power supply, and the other is electrically connected to the high-frequency transformer.

[0030] The above structure achieves a dual-purpose effect through the first conductive tube 510 and the second conductive tube 520. It can not only conduct electricity to generate a stable and controllable strong alternating magnetic field in the conductive spiral component 300, but also, together with the cooling channel, form a cooling circulation pipeline for cooling water.

[0031] In this embodiment, the base 100 may include a base body 110, a bracket 120, a high-temperature resistant support plate 130, a heat insulation cover 140, and a locking ring 150. Specifically, the bracket 120 is disposed on the base body 110, the high-temperature resistant support plate 130 and the conductive spiral component 300 are spaced apart on the bracket 120, the locking ring 150 is threadedly engaged with the heat insulation cover 140, the locking ring 150 presses the crucible 200 into the heat insulation cover 140, and the high-temperature resistant support plate 130 is clamped between the locking ring 150 and the heat insulation cover 140.

[0032] In the embodiments of this application, the disclosed vapor deposition apparatus may further include a hydrogen supply component 600. Specifically, the output end of the hydrogen supply component 600 passes through the base body 110 and faces the conductive spiral component 300.

[0033] During the use of the vapor deposition coating device, the hydrogen supply component 600 outputs hydrogen gas from the output end. When the hydrogen gas passes through the conductive spiral component 300 under energized conditions, the crucible 200 under high temperature conditions, and the coating material, it is easy to decompose and form hydrogen ions. The hydrogen ions can attach to the surface of the battery cell to saturate the dangling bonds, thereby weakening the recombination effect.

[0034] Additionally, the hydrogen supply assembly 600 may include a connected hydrogen gas source and a delivery pipeline. Specifically, the output end of the delivery pipeline passes through the base body 110 and faces the conductive spiral member 300.

[0035] If the center of the conductive spiral 300 and the center of the crucible 200 are not aligned, it will lead to an asymmetrical magnetic field distribution, which will affect the uniformity of the eddy current. For example, when the center of the crucible 200 is placed away from the center of the magnetic field, the eddy current density on one side of the crucible 200 may be significantly higher than that on the other side, causing local overheating or insufficient heating. In the embodiments of this application, the projection of the center of the crucible 200 and the center of the conductive spiral 300 along the vertical direction can coincide.

[0036] Because excessive spacing of the conductive spirals 300 can lead to magnetic field dispersion and reduce the energy density of the local heating area, in this embodiment, the spacing of the conductive spirals 300 can be 0.5mm to 1.2mm. The electromagnetic induction heating time of the crucible 200 by the conductive spirals 300 is the shortest. Within the range of 0.5mm to 1.2mm, for example, 0.5mm, 0.6mm, 0.7mm, 0.8mm, 0.9mm, 1mm, 1.1mm, and 1.2mm, it is worth noting that the above spacing range was obtained through multiple experiments by the experimenters. Within this range, the magnetic field of the conductive spirals 300 is more concentrated, and the electromagnetic induction heating efficiency of the crucible 200 is fast.

[0037] Since the distance between the crucible 200 and the conductive screw 300 directly affects the coupling efficiency of the magnetic field, as the distance increases, the magnetic flux decreases with the square of the distance, resulting in a significant reduction in the energy transferred to the crucible 200. To maintain the heating effect, one option is to increase the heating rate by increasing the power supply. In another option, the distance between the outer bottom wall of the crucible 200 and the upper surface of the conductive screw 300 can be 0.5mm to 1mm, such as 0.5mm, 0.6mm, 0.7mm, 0.8mm, 0.9mm, 1mm, etc. It is worth noting that the above-mentioned distance range was obtained through multiple experiments by the experimenters. Within this range, the magnetic field of the conductive screw 300 is more concentrated, the magnetic flux increases, and the heating rate can be improved significantly.

[0038] In this embodiment, the projected area of ​​the crucible 200 can be smaller than the projected area of ​​the conductive spiral 300 along the vertical direction. Increasing the projected area of ​​the conductive spiral 300 undoubtedly involves increasing the number of turns or increasing the cross-sectional diameter, or both. Since a greater number of turns results in a stronger electromagnetic field, it enhances the eddy current effect and improves heating efficiency. Furthermore, a larger cross-sectional diameter reduces the resistance of the conductive spiral 300, thereby reducing energy loss during current flow and improving overall energy efficiency. In this embodiment, the inner bottom wall of the crucible 200 may be provided with at least one groove for holding the coating material. When there are multiple grooves, the coating material can be distributed into multiple grooves in multiple portions. In the case of two equal portions of coating material, compared with the coating material being located in a larger supporting groove, the distribution into multiple grooves in multiple portions greatly increases the contact area between the coating material and the crucible 200, thereby ensuring that the coating material can be heated evenly and is not prone to clumping in the molten state, thus enabling faster evaporation and achieving stable film coating speed on the surface of the battery cell.

[0039] In this embodiment, the crucible 200 can withstand a temperature higher than the evaporation temperature of the coating material. Specifically, the crucible 200 can be a graphite crucible 200, a tungsten crucible 200, a tantalum crucible 200, a molybdenum crucible 200, and a boron nitride crucible 200, etc. Since the coating material is alumina, silicon oxide, or titanium oxide, the melting temperature of the above-mentioned crucibles 200 is higher than the evaporation temperature of alumina, silicon oxide, or titanium oxide, thereby preventing the crucible 200 from being melted through by the coating material.

[0040] In this embodiment, the base 100 is provided with a lifting drive, the driving end of which is connected to the conductive spiral 300. The conductive spiral 300 is provided with a groove, that is, the conductive spiral 300 is coiled to form a groove, which is opposite to the crucible 200. The lifting drive can drive the conductive spiral 300 to move closer to or away from the crucible 200. When the conductive spiral 300 moves closer, the crucible 200 is at least partially located in the groove. When a high-frequency current is applied to the heating plate 200, a strong alternating magnetic field is formed around it. The crucible 200 and the coating material it carries are directly located in the strong alternating magnetic field and quickly generate closed eddy currents. The crucible 200 and the coating material it carries convert electrical energy into heat energy under its own resistance characteristics.

[0041] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A vapor deposition coating apparatus, characterized in that, The device includes a base (100), a crucible (200), a conductive spiral component (300), a power supply, a high-frequency transformer, and a water-cooling assembly. The crucible (200) and the conductive spiral component (300) are arranged vertically on the base (100). The conductive spiral component (300) and the high-frequency transformer are both electrically connected to the power supply. The conductive spiral component (300) is electrically connected to the high-frequency transformer. The conductive spiral component (300) has a cooling channel along its own spiral direction, and the cooling channel is connected to the water-cooling assembly.

2. The vapor deposition apparatus according to claim 1, characterized in that, It also includes a heat shield (400) located between the crucible (200) and the conductive spiral (300), and covering the conductive spiral (300).

3. The vapor deposition apparatus according to claim 1, characterized in that, The conductive spiral (300) has a first conductive tube (510) at one central end and a second conductive tube (520) at the other outer end. Both the first conductive tube (510) and the second conductive tube (520) are connected to the cooling channel. The first conductive tube (510) and the second conductive tube (520) are respectively connected to the water inlet and the water outlet of the water cooling assembly. One of the first conductive tube (510) and the second conductive tube (520) is electrically connected to the power supply, and the other is electrically connected to the high-frequency transformer.

4. The vapor deposition apparatus according to claim 1, characterized in that, The base (100) includes a base body (110), a bracket (120), a high-temperature resistant support plate (130), a heat insulation cover (140), and a locking ring (150). The bracket (120) is disposed on the base body (110). The high-temperature resistant support plate (130) and the conductive spiral component (300) are spaced apart on the bracket (120). The locking ring (150) is threadedly engaged with the heat insulation cover (140). The locking ring (150) presses the crucible (200) into the heat insulation cover (140), and the high-temperature resistant support plate (130) is clamped between the locking ring (150) and the heat insulation cover (140).

5. The vapor deposition apparatus according to claim 4, characterized in that, It also includes a hydrogen supply assembly (600), the output end of which passes through the base body (110) and faces the conductive spiral (300).

6. The vapor deposition apparatus according to claim 1, characterized in that, The center of the crucible (200) coincides with the vertical projection of the center of the conductive spiral (300).

7. The vapor deposition apparatus according to claim 1, characterized in that, The distance between the outer bottom wall of the crucible (200) and the upper surface of the conductive spiral (300) is 0.5 mm to 1 mm.

8. The vapor deposition apparatus according to claim 1, characterized in that, In the vertical direction, the projected area of ​​the crucible (200) is smaller than the projected area of ​​the conductive spiral (300).

9. The vapor deposition apparatus according to claim 1, characterized in that, The inner bottom wall of the crucible (200) is provided with at least one groove, which is used to hold the coating material.

10. The vapor deposition apparatus according to claim 1, characterized in that, The base (100) is provided with a lifting drive component, the driving end of which is connected to the conductive spiral component (300). The conductive spiral component (300) is provided with a groove, which is opposite to the crucible (200).

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