Infrared electron gun crucible arrangement

Abstract

The utility model relates to the field of coating technology, and specifically provides an infrared electron gun crucible device, which comprises: multiple crucibles, a base, a rotating shaft, a crucible cover plate, the rotating shaft is arranged at the center of the base, the base rotates around the rotating shaft, multiple grooves are evenly distributed on the base in the circumferential direction, the crucibles are arranged in the grooves, the crucible cover plate covers the upper surface of the base, the crucible cover plate has multiple fan-shaped areas, the multiple fan-shaped areas are enclosed to form an inner hole, the crucible cover plate is provided with multiple crucible holes, and the multiple crucible holes are evenly distributed in the multiple fan-shaped areas in the circumferential direction. The infrared electron gun crucible device of the utility model can only disassemble the crucible cover plate after coating and clean it, realizes crucible stain prevention, is simple and easy to operate, and is high in maintenance efficiency.

Description

Technical Field

[0001] This utility model relates to the field of coating technology, specifically providing an infrared electron gun crucible device. Background Technology

[0002] Ytterbium fluoride and germanium are commonly used in the infrared electron gun evaporation process. Material evaporation is achieved by heating the material with a high-energy electron gun to gain sufficient kinetic energy, allowing it to evaporate onto the substrate surface. Therefore, after evaporation, dust residue accumulates around the crucible. When the material is changed in the crucible, the scanning spot of the electron beam irradiates the area around the crucible cavity, leading to material contamination.

[0003] Currently, to avoid material contamination, the existing procedure is to remove the crucible base and perform sandblasting. However, this process is complex and cumbersome, not only with a long cleaning cycle and inability to guarantee that the material is completely free from contamination, but also because of the presence of cooling water, frequent disassembly of the crucible base is time-consuming and poses risks of leakage and poor sealing. Therefore, designing a crucible base cover is an effective way to solve the above problems.

[0004] The crucible base is provided by the equipment manufacturer. A review of similar modification cases revealed that adding a new cover plate usually requires modifying the crucible base to provide positioning points and prevent cover plate misalignment during operation. This article presents a crucible auxiliary positioning design that avoids secondary modifications to the crucible base. Furthermore, existing related designs often use one-piece cover plates, which deteriorate in flatness after prolonged use and heating, leading to warping and affecting crucible rotation. Utility Model Content

[0005] To solve the above problems, this utility model provides an infrared electron gun crucible device. The crucible base is covered with a segmented, detachable crucible cover plate. After each coating is completed, the cover plate can be replaced for sandblasting and cleaning without removing the magnetic poles, which effectively saves maintenance time, increases maintenance frequency, and avoids cross-contamination of materials.

[0006] The infrared electron gun crucible device provided by this utility model includes: Multiple crucibles, base, rotating shaft, crucible cover plate; The rotating shaft is located at the center of the base, and the base rotates around the rotating shaft; Multiple grooves are evenly distributed along the circumference of the base, and the crucible is placed in the grooves. The crucible lid covers the upper surface of the base; The crucible cover plate has multiple fan-shaped areas, which together form an inner hole; The crucible cover plate is provided with multiple crucible holes, which are evenly distributed circumferentially in multiple fan-shaped areas.

[0007] Preferably, the upper surface of the crucible is 2.5 mm higher than the upper surface of the base.

[0008] Preferably, the crucible lid is made of oxygen-free copper.

[0009] Preferably, the thickness of the crucible cover plate is 2.5 mm.

[0010] Preferably, the diameter of the crucible hole is the same as that of the groove.

[0011] Preferably, the distance between the upper surface of the crucible cover plate and the infrared electron gun is 3 mm.

[0012] Preferably, one groove accommodates one crucible, and one crucible corresponds to one crucible hole.

[0013] Preferably, the multiple sector regions are all the same size and shape.

[0014] Compared with the prior art, the present invention can achieve the following beneficial effects: In this invention, after the crucible cover plate is placed over the upper surface of the base, the upper surface of the crucible cover plate is flush with the upper surface of the crucible, which prevents the dust and coating material from falling off the coating from falling on other locations outside the crucible cover plate, thus facilitating the centralized treatment of dust and coating material.

[0015] The diameter of the crucible hole is the same as the diameter of the groove. Therefore, during the coating process, after placing the crucible cover plate on the base and then installing the crucible in the groove, the crucible cover plate can be fixed and positioned by the crucible itself. No additional fixing or positioning devices for the crucible cover plate are needed, simplifying the overall structure and reducing costs. The auxiliary positioning design of the crucible prevents the crucible cover plate from shifting during operation and avoids secondary modifications to the base for positioning the crucible cover plate.

[0016] After coating is completed, the crucible cover can be removed without disassembling the infrared electron gun for cleaning. This simple and easy-to-implement method saves maintenance time, increases maintenance frequency, and avoids cross-contamination of coating materials. The cleaned crucible cover can be reused.

[0017] The crucible cover is designed with a segmented structure of multiple fan-shaped areas. After deformation or warping occurs, it can be restored to flatness with the help of external force or other means, thus extending the service life of the crucible cover. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the infrared electron gun crucible device according to an embodiment of the present invention; Figure 2 This is a schematic diagram of the anti-fouling cover structure provided according to an embodiment of the present utility model.

[0019] The reference numerals in the figures include: 1. Crucible; 2. Rotating shaft; 3. Crucible cover plate; 31. Inner hole; 32. First sector area; 33. Second sector area; 34. Third sector area; 35. Crucible hole; 4. Base; 5. Groove. Detailed Implementation To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only for explaining the invention and do not constitute a limitation thereof. Similar elements in different embodiments are referred to by associated similar element reference numerals. In the following embodiments, many details are described to facilitate a better understanding of the invention. However, those skilled in the art will readily recognize that some features may be omitted in different situations, or may be replaced by other elements, materials, or methods. In some cases, some operations related to the invention are not shown or described in the specification. This is to avoid obscuring the core parts of the invention with excessive description. For those skilled in the art, detailed description of these related operations is not necessary; they can fully understand the related operations based on the description in the specification and general technical knowledge in the art.

[0020] It should be noted that, unless otherwise specified, the embodiments and features described in this invention can be combined to form various implementations. Furthermore, the order of the steps or actions in the method description can be changed or adjusted in a manner readily apparent to those skilled in the art. Therefore, the various orders in the specification and drawings are merely for the clear description of a particular embodiment and do not imply a mandatory order, unless otherwise stated that a particular order must be followed.

[0021] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," and "counterclockwise," etc., indicating orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on this invention. Furthermore, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, features defined with "first," "second," etc., may explicitly or implicitly include one or more of that feature. In the description of this invention, unless otherwise stated, "a plurality of" means two or more.

[0022] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art will understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0023] The invention will now be described in detail with reference to the accompanying drawings and embodiments.

[0024] like Figure 1 and Figure 2 As shown, this utility model provides an infrared electron gun crucible device, including multiple crucibles 1, a rotating shaft 2, a crucible cover plate 3, a base 4, and multiple grooves 5. The crucible cover plate 3 includes an inner hole 31, multiple fan-shaped areas, and crucible holes 35.

[0025] A rotating shaft 2 is located at the center of a base 4, which can rotate around the rotating shaft 2. The base 4 supports multiple crucibles 1, which rotate with the base 4 around the rotating shaft 2. Multiple grooves 5 are evenly distributed circumferentially along the base 4, and multiple crucibles 1 are placed within these grooves 5. In this invention, there are 12 grooves 5 and 12 crucibles 1, evenly distributed along the upper surface of the base 4, with one crucible 1 placed in each groove 5.

[0026] A crucible cover plate 3 covers the upper surface of the base 4 to prevent contamination. The crucible cover plate 3 is generally annular in shape and consists of multiple fan-shaped areas, which together form an inner hole 31. The inner hole 31 is used to accommodate the rotating shaft 2, facilitating its rotation. The crucible cover plate 3 is provided with multiple crucible holes 35, which are evenly distributed circumferentially within the multiple fan-shaped areas. Each crucible hole 35 accommodates one crucible 1. In this utility model, the crucible cover plate 3 consists of three fan-shaped areas: a first fan-shaped area 32, a second fan-shaped area 33, and a third fan-shaped area 34. The three fan-shaped areas are all the same size and shape, and each fan-shaped area has four crucible holes 35, for a total of 12 crucible holes.

[0027] In this invention, the upper surface of the crucible 1 is 2.5 mm higher than the upper surface of the base 4, and the thickness of the crucible cover 3 is 2.5 mm. Therefore, after the crucible cover 3 is placed over the upper surface of the base 4, the upper surface of the crucible cover 3 is flush with the upper surface of the crucible 1, which prevents dust and coating material from falling onto other locations outside the crucible cover 3, thus facilitating the centralized treatment of dust and coating material.

[0028] In this invention, the diameter of the crucible hole 35 is the same as the diameter of the groove 5. Therefore, during the coating process, after the crucible cover plate 3 is placed on the base 4 and the crucible 1 is installed in the groove 5, the crucible cover plate 3 can be fixed and positioned by the crucible 1. This allows for multi-point or two-point positioning without the need for additional fixing or positioning devices for the crucible cover plate 3, simplifying the overall structure and reducing costs. The auxiliary positioning design of the crucible 1 prevents the crucible cover plate 3 from shifting during operation and avoids secondary modifications to the base 4 for positioning the crucible cover plate 3.

[0029] In this invention, after the crucible cover plate 3 is placed on the base 4, the distance between the upper surface of the crucible cover plate 3 and the infrared electron gun is 3 mm. Therefore, it will not affect the rotation of the overall device. After the coating is completed, the crucible cover plate 3 can be removed without disassembling the infrared electron gun for cleaning. The operation is simple and easy to implement, saving maintenance time, increasing maintenance frequency, and avoiding cross-contamination of coating materials.

[0030] In this invention, the crucible cover plate 3 is made of oxygen-free copper. Oxygen-free copper possesses advantages such as high electrical and thermal conductivity, good corrosion resistance, and high flexibility and plasticity, ensuring that the crucible cover plate 3 will not be damaged during the coating process. Furthermore, if the crucible cover plate 3 deforms or warps, its flatness can be restored with external force or other means, extending its service life. In addition, this invention sets the crucible cover plate 3 into a segmented structure with multiple fan-shaped regions, resulting in a low warping rate during prolonged heating and easy flatness restoration, further facilitating the modification of its deformation state and the restoration of its flatness.

[0031] After coating, it can be seen that the crucible cover plate 3 is covered with residue. Larger particles can be removed with a vacuum cleaner, while dust can be removed by polishing and then vacuuming. The crucible cover plate 3 can be cleaned and reused after cleaning.

[0032] Although embodiments of the present invention have been shown and described above, it is to be understood that the above embodiments are exemplary and should not be construed as limiting the present invention. Those skilled in the art can make changes, modifications, substitutions, and variations to the above embodiments within the scope of the present invention.

[0033] The specific embodiments of this utility model described above do not constitute a limitation on the scope of protection of this utility model. Any other corresponding changes and modifications made based on the technical concept of this utility model should be included within the scope of protection of the claims of this utility model.

Claims

1. An infrared electron gun crucible device, characterized in that, include: Multiple crucibles, base, rotating shaft, crucible cover plate; The rotating shaft is located at the center of the base, and the base rotates around the rotating shaft; The base has multiple grooves evenly distributed along its circumference, and the crucible is disposed in the grooves. The crucible cover plate covers the upper surface of the base; The crucible cover plate has multiple fan-shaped areas, which enclose an inner hole; The crucible cover plate is provided with multiple crucible holes, which are evenly distributed circumferentially within the multiple fan-shaped areas.

2. The infrared electron gun crucible device as described in claim 1, characterized in that, The upper surface of the crucible is 2.5 mm higher than the upper surface of the base.

3. The infrared electron gun crucible device as described in claim 1, characterized in that, The crucible cover plate is made of oxygen-free copper.

4. The infrared electron gun crucible device as described in claim 1, characterized in that, The thickness of the crucible cover plate is 2.5 mm.

5. The infrared electron gun crucible device as described in claim 1, characterized in that, The diameter of the crucible hole is the same as that of the groove.

6. The infrared electron gun crucible device as described in claim 1, characterized in that, The distance between the upper surface of the crucible cover plate and the infrared electron gun is 3 mm.

7. The infrared electron gun crucible device as described in claim 1, characterized in that, Each of the grooves accommodates one of the crucibles, and each crucible corresponds to one of the crucible holes.

8. The infrared electron gun crucible device as described in claim 1, characterized in that, The multiple sector regions are all the same size and shape.

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