A coating loading device and a coating apparatus
Patent Information
- Application Number
- CN202522092776.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-09-28
- Publication Date
- 2026-10-30
- Estimated Expiration
- 2035-09-28
AI Technical Summary
若是采用双面镀膜PVD设备制备这类膜层结构，一方面，由于现有的载板通常为沿水平方向设置的平面，镀膜时，电池片平放在载板上，沿垂直方向延伸设置的相连侧面难以均匀镀膜；另一方面，由于第二表面仅是需要在四周边缘镀膜，造成第二表面上的靶材利用率相对较低，造成不必要的材料浪费
[0022]本实用新型中，通过在载物基座上设置呈向上倾斜设置的倾斜坡面，电池片以第二表面背向倾斜坡面的状态放置于承载表面后，电池片的至少部分区域置于倾斜坡面上，电池片在倾斜坡面的作用下随倾斜坡面的倾斜方向倾斜，配合遮挡件遮挡电池片的非镀膜区域，位于承载表面与遮挡件之间(即放置空间)的电池片能够仅通过暴露区域露出需要镀膜的相连侧面及第二表面的边缘区域(也即电池片当前需要镀膜的镀膜区域)，且相连侧面及第二表面的边缘区域呈向上倾斜状态，电池片在此状态下，能够同时完成相连侧面及第二表面的边缘区域的镀膜作业，且相连侧面更容易形成均匀膜层。另一方面，本实用新型的镀膜装载装置能够在承载表面与遮挡件之间同时堆叠多片电池片，同时完成多片电池片上相连侧面及第二表面的边缘区域的镀膜作业，有效提高靶材利用率及镀膜效率。
Smart Images
Figure CN224917882U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of solar cell technology, and in particular to a coating loading device and coating equipment. Background Technology
[0002] Currently, in the manufacturing process of solar cells, such as the electroplating of metallized electrodes, PVD (Physical Vapor Deposition) is often used to coat the cells. A solar cell typically includes a first surface and a second surface arranged opposite each other, where one is the light-receiving surface and the other is the backlight surface. In some film structures, the film needs to be coated on the entire first surface of the cell, and then coated around the edges of the cell via the connecting side between the first and second surfaces to the second surface, with coating also applied to the edge regions of the second surface. If a double-sided PVD coating equipment is used to prepare this type of film structure, on the one hand, since existing carrier plates are usually horizontally oriented planes, it is difficult to uniformly coat the connecting side, which is vertically oriented, when the cell is placed flat on the carrier plate during coating; on the other hand, since the second surface only needs to be coated at its edges, the utilization rate of the target material on the second surface is relatively low, resulting in unnecessary material waste. Utility Model Content
[0003] The purpose of this invention is to address the existing technological situation by providing a coating loading device and coating equipment. The coating loading device of this invention can effectively improve the coating uniformity of the side of the battery cell connected to the coating layer, and improve the utilization rate of the target material and the coating efficiency.
[0004] To achieve the above objectives, the present invention adopts the following technical solution:
[0005] First, this utility model provides a coating loading device, comprising:
[0006] A shielding component, used to shield the non-coated areas of a workpiece;
[0007] A carrying base includes a bearing surface for bearing a workpiece, the bearing surface including an inclined slope for making the workpiece inclined relative to a horizontal plane, the inclined slope including a first end and a second end arranged sequentially along its inclined direction, the height of the first end being greater than the height of the second end.
[0008] A placement space for placing at least one workpiece is formed between the bearing surface and the shielding member, and an exposed area that is not blocked by the shielding member is provided above the placement space.
[0009] In some embodiments, the angle between the inclined slope and the horizontal plane where the second end is located is less than 20°.
[0010] In some embodiments, the bearing surface includes a bottom bearing surface capable of bearing the bottom of the workpiece, the bottom bearing surface being disposed on the side of the inclined slope away from the first end.
[0011] In some embodiments, the carrier base further includes a blocking portion for preventing the workpiece from sliding away from the inclined slope.
[0012] In some embodiments, the blocking portion includes a flange disposed on the bottom bearing surface, and at least a portion of the flange is higher than the bottom bearing surface.
[0013] In some embodiments, the flange has an upwardly inclined top abutment on the side facing the inclined slope.
[0014] In some embodiments, the width of the exposed area in the horizontal direction is:
[0015]
[0016] Where w is the width of the exposed area in the horizontal direction, N is the number of workpieces in the placement space, N≥1; a i b is the thickness of the i-th workpiece; i The width of the coating area on the light-receiving or back-light-receiving side of the i-th workpiece.
[0017] In some embodiments, the shielding member is movably disposed on the bearing surface.
[0018] In some embodiments, the orthographic projection of the exposed area onto the bearing surface at least partially falls onto the sloping surface.
[0019] In some embodiments, the shielding element is a shielding plate, which is disposed in a direction parallel to the inclined slope.
[0020] Secondly, this utility model also provides a coating equipment, including the above-mentioned coating loading device.
[0021] The beneficial effects of this utility model are as follows:
[0022] In this invention, by setting an upwardly inclined slope on the carrier base, the battery cell is placed on the carrier surface with its second surface facing away from the inclined slope. At least a portion of the battery cell is placed on the inclined slope, and the battery cell tilts along the slope direction under the action of the inclined slope. With the help of a shielding member to shield the non-coating areas of the battery cell, the battery cell located between the carrier surface and the shielding member (i.e., the placement space) can expose only the connected side and the edge area of the second surface (i.e., the coating area of the battery cell) that need to be coated, and the connected side and the edge area of the second surface are in an upwardly inclined state. In this state, the battery cell can simultaneously complete the coating operation on the edge areas of the connected side and the second surface, and a uniform film layer is more easily formed on the connected side. Furthermore, the coating loading device of this invention can simultaneously stack multiple battery cells between the carrier surface and the shielding member, and simultaneously complete the coating operation on the edge areas of the connected side and the second surface of multiple battery cells, effectively improving the target material utilization rate and coating efficiency. Attached Figure Description
[0023] Figure 1 This is a schematic diagram of the structure of a coating loading device according to an embodiment of the present invention.
[0024] Figure 2 This is a schematic diagram of the structure of a coating loading device in use according to an embodiment of the present invention.
[0025] Figure 3 This is a schematic diagram of the structure of a coating device according to an embodiment of the present utility model.
[0026] Figure 4 This is a perspective view of a coating loading device according to an embodiment of the present utility model.
[0027] Figure 5 This is a top view of a coating loading device according to an embodiment of the present invention.
[0028] Figure 6 This is a schematic diagram of the carrier base according to an embodiment of the present utility model.
[0029] Figure 7 This is a schematic diagram of the film layer structure of a solar cell.
[0030] In the picture:
[0031] Load base 1; inclined slope 11; first end 111; second end 112; bottom bearing surface 12; placement space 13; exposed area 131;
[0032] Shielding component 2;
[0033] Blocking part 3; flange 31; inclined top abutment surface 311;
[0034] Battery cell 4; first surface 41; second surface 42; connected side 43. Detailed Implementation
[0035] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model. Furthermore, it should be understood that the specific embodiments described herein are merely for explaining this utility model and are not intended to limit this utility model.
[0036] In the description of this utility model, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Therefore, features defined with "first," "second," etc., may explicitly or implicitly include one or more of the stated features. In the description of this utility model, "multiple" or "several" means two or more, unless otherwise explicitly specified.
[0037] In the description of this utility model, unless otherwise expressly specified and limited, the first feature "above" or "below" the second feature may include the first feature and the second feature being in direct contact, or the first feature and the second feature not being in direct contact but being in contact through another feature between them.
[0038] First, see Figures 1 to 2 and Figure 4 As shown, this utility model embodiment discloses a coating loading device, comprising:
[0039] Shielding component 2 is used to shield the non-coated area of the workpiece;
[0040] The base 1 includes a bearing surface for bearing a workpiece. The bearing surface includes an inclined slope 11 for making the workpiece inclined relative to the horizontal plane. The inclined slope 11 includes a first end 111 and a second end 112 arranged sequentially along its inclined direction. The height of the first end 111 is greater than the height of the second end 112.
[0041] A placement space 13 for placing at least one workpiece is formed between the bearing surface and the shielding member 2, and an exposed area 131 that is not shielded by the shielding member 2 is provided above the placement space 13.
[0042] The following example uses this coating loading device applied to the coating of battery cell 4. For ease of explanation, the workpiece and film structure are described below. (See attached image.) Figure 2 and Figure 7 As shown, the battery cell 4 includes a first surface 41 and a second surface 42 disposed opposite to each other. One of the first surface 41 and the second surface 42 is the light-receiving surface, and the other is the backlight surface. The film layer needs to be deposited on the entire first surface 41 of the battery cell 4, and then deposited around the perimeter of the battery cell 4 through the connecting side 43 between the first surface 41 and the second surface 42 to the second surface 42. The film is also deposited in the edge area of the second surface 42. The specific steps in use are as follows:
[0043] S100. In a PVD device, the solar cell 4 is placed on a conventional carrier plate, and the first surface 41 is coated with a film.
[0044] S200. In the PVD equipment, the battery cell 4 with the first surface 41 fully coated is placed between the bearing surface of the coating loading device and the shielding member 2, so that the edge area of the second surface 42 and the connected side 43 of the battery cell 4 are exposed outside the shielding area of the shielding member 2, thereby coating the edge area of the second surface 42 and the connected side 43.
[0045] In this invention, by setting an upwardly inclined slope 11 on the carrier base 1, the battery cell 4 is placed on the carrier surface with its second surface 42 facing away from the inclined slope 11. At least a portion of the battery cell 4 is placed on the inclined slope 11. Under the action of the inclined slope 11, the battery cell 4 tilts in the direction of inclination of the inclined slope 11. With the shielding member 2 shielding the non-coated area of the battery cell 4, the battery cell 4 located between the carrier surface and the shielding member 2 (i.e., the placement space 13) can expose only the connected side 43 and the edge area of the second surface 42 that need to be coated (i.e., the coating area of the battery cell 4 that currently needs to be coated) through the exposed area 131. The connected side 43 and the edge area of the second surface 42 are in an upwardly inclined state. In this state, the battery cell 4 can simultaneously complete the coating operation of the edge areas of the connected side 43 and the second surface 42, and the connected side 43 is more likely to form a uniform film layer. On the other hand, the coating loading device of this utility model can simultaneously stack multiple battery cells 4 between the bearing surface and the shielding member 2, and simultaneously complete the coating operation of the edge areas of the connected side 43 and the second surface 42 on the multiple battery cells 4, effectively improving the target material utilization rate and coating efficiency.
[0046] In some embodiments, see Figure 1 As shown, the angle r between the inclined slope 11 and the horizontal plane where the second end 112 is located is an acute angle.
[0047] In some embodiments, preferably, see Figure 1 As shown, the angle r between the inclined slope 11 and the horizontal plane where the second end 112 is located is less than 20°.
[0048] For example, the included angle r is 5°, 12°, 15°, 18°, or 19°, but is not limited to this.
[0049] When the included angle r is too small, the included angle between the connected side 43 and the vertical line is small, and the connected side 43 tends to be vertical, which can easily affect the uniformity of the coating on the connected side 43. When the included angle r is too large, the included angle between the second surface 42 and the vertical line is small, which can easily affect the uniformity of the coating on the edge area of the second surface 42. In addition, the edge area of the second surface 42 exposed by the stacked battery cells 4 is too small, which makes it difficult to meet the coating area requirements of the film on the second surface 42.
[0050] It is understood that the inclined slope 11 in this embodiment of the present invention can be a fixed part with a non-adjustable angle to simplify the structure, or it can be a movable part with an adjustable tilt angle to flexibly adapt to different needs, and no limitation is made here.
[0051] In some embodiments, see Figure 1 and Figure 2 As shown, the bearing surface includes a bottom bearing surface 12 that can bear the bottom of the workpiece, and the bottom bearing surface 12 is located on the side of the inclined slope 11 away from the first end 111.
[0052] Through the interaction between the inclined slope 11 and the bottom bearing surface 12, multiple battery cells 4 can be stably placed on the carrier base 1 in a preset inclined state, and the edge areas of the connected side 43 and the second surface 42 of each battery cell 4 are exposed to facilitate the coating of the edge areas of the connected side 43 and the second surface 42.
[0053] It is understood that the length of the bottom bearing surface 12 in the horizontal direction of this utility model embodiment can be set as a fixed part with non-adjustable length to simplify the structure, or it can be set as a movable part with adjustable length to flexibly adapt to different needs, and no limitation is made here.
[0054] In one embodiment, the bottom bearing surface 12 may form a preset angle with the horizontal plane. The preset angle may be set to no more than 20°, for example, 2°, 5°, 8°, 10°, 15°, 18° or 20°, but is not limited thereto.
[0055] In another embodiment, preferably, the bottom bearing surface 12 is arranged in a horizontal direction to facilitate the stable placement of the battery cell 4.
[0056] In some embodiments, see Figure 2 and Figure 6 As shown, the carrier base 1 also includes a blocking part 3 for preventing the workpiece from sliding away from the inclined slope 11, so as to ensure that the battery cell 4 does not shift during the coating process.
[0057] In some embodiments, see Figure 2 and Figure 6 As shown, the blocking part 3 includes a flange 31, which is disposed on the bottom bearing surface 12, and at least a portion of the flange 31 is higher than the bottom bearing surface 12.
[0058] In the first embodiment, see Figure 2 As shown, the bottom bearing surface 12 is provided with a flange 31, which is located at the end of the bottom bearing surface 12 away from the inclined slope 11. In use, the flange 31 can abut against the lower end of the shield 2 to prevent the battery cell 4 located between the bearing surface and the shield 2 from sliding.
[0059] In the second embodiment, see Figure 6 As shown, the bottom bearing surface 12 is provided with a plurality of spaced flanges 31 to give the surface of the bottom bearing surface 12 a certain texture, which facilitates the fixing of the battery cell 4 or the shield 2. In use, the flange 31 on the bottom bearing surface 12 away from the inclined slope 11 can abut against the lower end of the shield 2, and the remaining flanges 31 can abut against the lower end of the battery cell 4 to prevent the battery cell 4 located between the bearing surface and the shield 2 from sliding.
[0060] In some embodiments, the blocking part 3 may also include a rough surface provided on the surface of the inclined slope 11 and / or the surface of the bottom bearing surface 12.
[0061] In some embodiments, see Figure 2 As shown, the flange 31 has an upwardly inclined top abutment surface 311 on the side facing the inclined slope 11.
[0062] When the battery cell 4 or the shielding member 2 is placed on the carrier base 1 in a preset tilted state, the bottom surface of the battery cell 4 or the shielding member 2 is also tilted accordingly. The tilted top surface 311 of the flange 31 can better match the tilted bottom surface so that the battery cell 4 can be stably placed on the carrier base 1 in a preset tilted state.
[0063] In some embodiments, see Figure 2 As shown, the width of the exposed area 131 in the horizontal direction is:
[0064]
[0065] Where w is the width of the exposed area 131 in the horizontal direction, N is the number of workpieces in the placement space 13, N≥1; a i b is the thickness of the i-th workpiece; i The width of the coating area on the light-receiving or back-light-receiving side of the i-th workpiece.
[0066] In some embodiments, when the coating areas of the battery cells 4 stacked on the coating loading device are the same, the width of the exposed area 131 in the horizontal direction is:
[0067]
[0068] Where w is the width of the exposed area 131 in the horizontal direction, N is the number of workpieces in the placement space 13, a is the thickness of the workpiece, and b is the width of the coating area on the light-receiving or back-light-receiving side of the workpiece.
[0069] In some embodiments, see Figure 2 and Figure 5 As shown, the orthographic projection of the exposed area 131 onto the bearing surface at least partially falls on the sloping surface 11.
[0070] The exposed area 131 corresponds to the edge area of the side 43 and the second surface 42 connected after the battery cell 4 is placed on the carrier base 1. When the orthographic projection of the exposed area 131 on the carrier surface has a portion that falls on the side of the first end 111 away from the second end 112, the upper end of the battery cell 4 also has a portion that extends out of the first end 111 of the inclined slope 11. Within a preset range, it is permissible for the upper end of the battery cell 4 to have a portion that extends out in the inclined direction after it is placed on the carrier base 1.
[0071] Preferably, in order to reduce the overall space occupied, the orthographic projection of the exposed area 131 on the bearing surface falls entirely on the inclined slope 11.
[0072] In some embodiments, see Figure 1 As shown, the shielding member 2 is movably mounted on the bearing surface.
[0073] It is understandable that the shielding member 2 is movably disposed on the bearing surface. There may be no connecting parts between the shielding member 2 and the bearing surface. In use, the shielding member 2 can be freely detached from the bearing surface or placed on the bearing surface. Alternatively, there may be a movable connecting part between the shielding member 2 and the bearing surface, so that the shielding member 2 can be movably disposed on the bearing surface in a rotatable, lifting or lowering manner. No limitation is made here.
[0074] The movable design of the shielding component 2 facilitates the placement and removal of the battery cells 4, and also allows for the simultaneous coating of different numbers of battery cells 4 as needed in actual production.
[0075] In some embodiments, see Figure 1 As shown, the shielding member 2 is a shielding plate, which is set in the parallel direction of the inclined slope 11 so as to cover the non-coated area of the battery cell 4 and improve the accuracy of coating.
[0076] Secondly, see Figure 3 As shown in the figure, this utility model embodiment also provides a coating device, including the coating loading device described above.
[0077] In some embodiments, the coating equipment is a PVD equipment.
[0078] In some embodiments, the coating apparatus includes a working chamber with a target inlet, a coating loading device disposed within the working chamber, and the target inlet disposed above the coating loading device.
[0079] In the description of this specification, references to terms such as "some embodiments," "exemplary," "example," or "for example," etc., indicate that a specific feature, structure, material, or characteristic described in connection with an embodiment or example is included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.
[0080] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model in any way. Although the present utility model has been disclosed above with reference to a preferred embodiment, it is not intended to limit the present utility model. Any person skilled in the art can make some modifications or alterations to the above-described technical content to create equivalent embodiments without departing from the scope of the present utility model. Any simple modifications, equivalent changes, and alterations made to the above embodiments based on the technical essence of the present utility model without departing from the scope of the present utility model shall still fall within the scope of the present utility model.
Claims
1. A coating loading device, characterized in that, include: A shielding component, used to shield the non-coated areas of a workpiece; A carrying base includes a bearing surface for bearing a workpiece, the bearing surface including an inclined slope for making the workpiece inclined relative to a horizontal plane, the inclined slope including a first end and a second end arranged sequentially along its inclined direction, the height of the first end being greater than the height of the second end. A placement space for placing at least one workpiece is formed between the bearing surface and the shielding member, and an exposed area that is not blocked by the shielding member is provided above the placement space.
2. The coating loading device according to claim 1, characterized in that, The angle between the inclined slope and the horizontal plane where the second end is located is less than 20°.
3. The coating loading device according to claim 1, characterized in that, The bearing surface includes a bottom bearing surface that can support the bottom of the workpiece, and the bottom bearing surface is located on the side of the inclined slope away from the first end.
4. The coating loading device according to claim 3, characterized in that, The load base also includes a blocking part for preventing the workpiece from sliding away from the inclined slope.
5. A coating loading device according to claim 4, characterized in that, The blocking portion includes a flange disposed on the bottom bearing surface, and at least a portion of the flange is higher than the bottom bearing surface.
6. A coating loading device according to claim 5, characterized in that, The flange has an upwardly inclined top abutment on the side facing the inclined slope.
7. A coating loading device according to claim 1, characterized in that, The width of the exposed area in the horizontal direction is: Where w is the width of the exposed area in the horizontal direction, N is the number of workpieces in the placement space, N≥1; a i b is the thickness of the i-th workpiece; i The width of the coating area on the light-receiving or back-light-receiving side of the i-th workpiece.
8. A coating loading device according to claim 1, characterized in that, The shielding component is movably disposed above the carrier base.
9. A coating loading device according to claim 1, characterized in that, The orthographic projection of the exposed area onto the bearing surface at least partially falls onto the sloping surface.
10. A coating loading device according to claim 1, characterized in that, The shielding element is a shielding plate, which is arranged in a direction parallel to the inclined slope.
11. A coating apparatus, characterized in that, Includes the coating loading device according to any one of claims 1 to 10.