A coated lifting device with built-in active cooling system
Patent Information
- Application Number
- CN202522295577.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-10-30
- Publication Date
- 2026-10-30
- Estimated Expiration
- 2035-10-30
AI Technical Summary
[0003]在实际使用时,在PVD镀膜过程中,工件会暴露在高温等离子体或反应气体中,温度急剧升高,过高的温度会导致;其一,基体微观结构变化:工件材料会发生回火、退火,导致硬度下降、尺寸变形;其二,膜层与基体间产生脆性相:高温会促进膜层材料与基体材料之间的相互扩散,形成脆性的中间相,严重降低膜层的附着力
1、通过设置主动导流机构,与现有技术相比,利用多个导热铜管和导流道可以将冷却液逐渐沿着定位杆和多列挂杆内部进行流动,能将定位杆、挂杆和工件处于相对稳定的温度,保证了膜层与基体之间具有牢固的化学键合,而非脆性结合,从而极大地提高了膜层的附着力、硬度和耐磨性;
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Figure CN224917885U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of coating hanger technology, and more specifically, to a coating hanger with a built-in active cooling system. Background Technology
[0002] Vacuum coating technology is a technique that deposits a thin film on the surface of a substrate in a high vacuum environment using physical or chemical methods. This technology is widely used in many fields such as optoelectronic systems, optical instruments, semiconductors, microelectromechanical systems, architectural glass, automotive industry, and decorative items. For example, vacuum coating technology is indispensable in the manufacturing process of products such as digital cameras, telescopes, projectors, lasers, filters, and eyeglass lenses. Typically, coating hangers are used to position the workpiece for coating processing.
[0003] In practical applications, during the PVD coating process, the workpiece is exposed to high-temperature plasma or reactive gases, causing a rapid increase in temperature. Excessive temperature can lead to two problems: First, changes in the microstructure of the substrate: the workpiece material may undergo tempering or annealing, resulting in decreased hardness and dimensional deformation. Second, the formation of a brittle phase between the film and the substrate: high temperatures promote the interdiffusion between the film material and the substrate material, forming a brittle intermediate phase that severely reduces the adhesion of the film. Utility Model Content
[0004] In order to overcome the above-mentioned defects of the prior art, the present invention provides a coating hanger with a built-in active cooling system to solve the problems mentioned in the background art.
[0005] To achieve the above objectives, this utility model provides the following technical solution: A coating hanger with a built-in active cooling system includes a positioning rod and multiple rows of hanging rods arranged in a ring array outside the positioning rod. A storage tank is fixedly connected to the bottom end of the positioning rod. Multiple pads are fixedly connected to the lower surface of the storage tank. A cavity for storing coolant is provided inside the storage tank. A water inlet pipe is connected to the upper surface of the storage tank. An active flow guiding mechanism is provided inside the positioning rod and the storage tank. The active flow guiding mechanism includes a water pump installed inside the storage tank. A water delivery pipe is fixedly connected to the output end of the water pump, and a water delivery pipe is fixedly connected to one end of the water delivery pipe. A flow channel for recovering coolant is provided inside the positioning rod, and the bottom end of the flow channel communicates with the cavity inside the storage tank. The positioning rod and the multiple rows of hanging rods have internal openings... There are interconnected channels, and heat-conducting copper pipes are arranged inside the channels. One end of the heat-conducting copper pipe is connected to the water supply pipe, and the other end of the heat-conducting copper pipe extends to the top of the guide channel and is connected to it. Multiple rows of hanging rods are arranged in a circular array around the guide channel on the outer surface of the positioning rod, and multiple heat-conducting copper pipes are evenly distributed inside the positioning rod and multiple rows of hanging rods. A water outlet pipe is fixedly connected to the bottom of the positioning rod. One end of the water outlet pipe extends to the inside of the storage box and is connected to a water outlet box. One side of the water outlet box is fixedly connected to the inner wall of the storage box cavity. A water outlet is provided at the bottom of the water outlet box, and multiple diverter plates are fixedly connected to the inner wall of the water outlet. The multiple diverter plates are evenly distributed inside the water outlet. A cooling mechanism is provided inside the storage box.
[0006] By adopting the above technical solution, coolant is injected into the positioning rod and multiple rows of hanging rods through multiple heat-conducting copper pipes, thereby indirectly absorbing heat from the workpiece sleeved on the surface of the hanging rod, thus maintaining the temperature of the positioning rod, hanging rod and workpiece, and ensuring the adhesion of the film layer.
[0007] As a further description of the above technical solution: the cooling mechanism includes a partition frame disposed on the side of the storage box, a semiconductor cooling chip disposed inside the partition frame, a heat-conducting fin fixedly connected to the cold end of the semiconductor cooling chip, and the heat-conducting fin extending into the inner cavity of the storage box, a heat dissipation fin fixedly connected to the hot end of the semiconductor cooling chip, and a fan fixedly connected to one side of the partition frame.
[0008] By adopting the above technical solution, the heat-conducting fins are made into multi-point contact with the heat-carrying coolant, and the hot end of the semiconductor cooling chip is dissipated through the fan and heat dissipation fins, thereby cooling the coolant and ensuring the continuous recycling of the coolant.
[0009] The technical effects and advantages of this utility model are as follows: 1. By setting up an active flow guiding mechanism, compared with the existing technology, multiple heat-conducting copper pipes and flow channels can be used to gradually guide the coolant along the positioning rod and the interior of multiple rows of hanging rods. This can keep the positioning rod, hanging rod and workpiece at a relatively stable temperature, ensuring that the film layer and the substrate have a strong chemical bond, rather than a brittle bond, thereby greatly improving the adhesion, hardness and wear resistance of the film layer. 2. By setting up a cooling mechanism, compared with the existing technology, the cooling liquid carrying heat is dispersed and cooled by the cold end of the semiconductor cooling chip and the heat-conducting fins, so that the cooling liquid maintains a relatively stable temperature during the circulation process, ensuring stable cooling of the coating hanger and the workpiece. Attached Figure Description
[0010] Figure 1 This is a schematic diagram of the overall structure of this utility model.
[0011] Figure 2 This is a schematic diagram of the right side of the present invention.
[0012] Figure 3 This is a schematic diagram of the left side structure of this utility model.
[0013] Figure 4 This is a partial schematic diagram of the connection between the positioning rod and the water outlet pipe of this utility model.
[0014] Figure 5 This is a partial schematic diagram of the connection between the water supply pipe and the water supply circular pipe of this utility model.
[0015] Figure 6 This is a partial schematic diagram of the connection between the partition frame and the semiconductor cooling chip of this utility model.
[0016] Figure 7 For the present utility model Figure 4 Enlarged diagram of A in the middle.
[0017] Figure 8 For the present utility model Figure 4 Enlarged diagram of B in the middle.
[0018] Figure 9 For the present utility model Figure 4 Enlarged diagram of C.
[0019] The attached diagram is labeled as follows: 1. Positioning rod; 2. Hanging rod; 3. Storage box; 4. Pad; 5. Water inlet pipe; 6. Water pump; 7. Water supply pipe one; 8. Water supply round pipe; 9. Heat-conducting copper pipe; 10. Guide channel; 11. Water outlet pipe; 12. Water outlet box; 13. Partition frame; 14. Semiconductor cooling chip; 15. Heat-conducting fins; 16. Heat dissipation fins; 17. Fan; 18. Diverter plate. Detailed Implementation
[0020] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.
[0021] The embodiments disclosed in this application are as follows: Figures 1-9 The coating hanger shown includes a positioning rod 1 and a multi-row hanging rod 2 arranged in a ring array outside the positioning rod 1. A storage tank 3 is fixedly connected to the bottom end of the positioning rod 1. Multiple pads 4 are fixedly connected to the lower surface of the storage tank 3. A cavity for storing coolant is provided inside the storage tank 3. A water inlet pipe 5 is connected to the upper surface of the storage tank 3. An active flow guiding mechanism is provided inside the positioning rod 1 and the storage tank 3. The active flow guiding mechanism includes a water pump 6 installed inside the storage tank 3. A water delivery pipe 7 is fixedly connected to the output end of the water pump 6. A water delivery pipe 8 is fixedly connected to one end of the water delivery pipe 7. A flow channel 10 for recovering coolant is provided inside the positioning rod 1. The bottom end of the flow channel 10 is connected to the cavity inside the storage tank 3. Openings are provided inside the positioning rod 1 and the multi-row hanging rod 2. A connected channel is provided, and a heat-conducting copper pipe 9 is arranged inside the channel. One end of the heat-conducting copper pipe 9 is connected to the water supply pipe 8, and the other end of the heat-conducting copper pipe 9 extends to the top of the guide channel 10 and is connected to it. Multiple rows of hanging rods are arranged in a ring array around the guide channel 10 on the outer surface of the positioning rod 1. Multiple heat-conducting copper pipes 9 are evenly distributed inside the positioning rod 1 and multiple rows of hanging rods 2. The bottom end of the positioning rod 1 is fixedly connected to the water outlet pipe 11. One end of the water outlet pipe 11 extends to the inside of the storage box 3 and is connected to the water outlet box 12. One side of the water outlet box 12 is fixedly connected to the inner wall of the cavity of the storage box 3. The bottom of the water outlet box 12 is provided with a water outlet, and multiple diversion plates 18 are fixedly connected to the inner wall of the water outlet. Multiple diversion plates 18 are evenly distributed inside the water outlet. A cooling mechanism is provided inside the storage box 3. The coolant is gradually injected from bottom to top into the positioning rod 1 and multiple rows of hanging rods 2 using the water supply pipe 8 and multiple heat-conducting copper pipes 9. The coolant is then guided back through the guide channel 10, water outlet pipe 11, water outlet box 12 and partition frame 13, so that the coolant can circulate in the positioning rod 1, hanging rod 2 and liquid storage tank 3, thereby maintaining the temperature balance of the positioning rod 1, hanging rod 2 and workpiece.
[0022] Reference Figure 1 , Figure 3 and Figure 6As shown, the cooling mechanism includes a partition frame 13 disposed on the side of the storage tank 3. A thermoelectric cooler 14 is disposed inside the partition frame 13. A heat-conducting fin 15 is fixedly connected to the cold end of the thermoelectric cooler 14, and the heat-conducting fin 15 extends into the inner cavity of the storage tank 3. A heat dissipation fin 16 is fixedly connected to the hot end of the thermoelectric cooler 14. A fan 17 is fixedly connected to one side of the partition frame 13. The heat-conducting fin 15 increases the contact surface with the coolant in the inner cavity of the storage tank 3. Through the cooperation of the thermoelectric cooler 14, the heat-conducting fin 15, the heat dissipation fin 16 and the fan 17, the coolant carrying heat is effectively cooled, ensuring the continuous circulation of the coolant.
[0023] The working principle of this utility model is as follows: Before coating the objects, multiple objects are hung sequentially on the surface of multiple rows of hanging rods 2 outside the positioning rod 1. Then, during the coating process of multiple objects, the positioning rod 1, hanging rods 2 and the coated objects will continuously heat up. First, the coolant is injected into the cavity inside the storage tank 3 through the inlet pipe 5, and the water pump 6 is started to input the coolant into the water supply pipe 7 through the input pipe. Then, the coolant enters the interior of the water supply pipe 8 through the water supply pipe 7. At the same time, under the continuous delivery of the water pump 6, the coolant will flow from bottom to top through multiple heat-conducting copper pipes 9 along the positioning rod 1 and multiple rows of hanging rods 2. Then, under the continuous flow of the coolant in the multiple heat-conducting copper pipes 9, the coolant will carry away the heat of the positioning rod 1, hanging rod 2 and the workpiece on the surface of the multiple rows of hanging rods 2. Then, the coolant is injected into the interior of the guide channel 10 from the top of the multiple heat-conducting copper pipes 9, and the coolant carrying heat flowing out of the multiple heat-conducting copper pipes 9 is collected and guided through the guide channel 10. Then the guide channel 10 and the outlet pipe 11 cause the coolant to gather and flow into the interior of the outlet box 12. Then, through the outlet on one side of the outlet box 12, the coolant flows downward and the multiple diverter plates 18 disperse the coolant. The external power supply device supplies power to the thermoelectric cooler 14, so that the cold end of the thermoelectric cooler 14 cools the heat-conducting fins 15. At the same time, the coolant flowing out of the water outlet box 12 and the diverter plate 18 falls to the top of the heat-conducting fins 15, thereby cooling the coolant. Then, the hot end of the thermoelectric cooler 14 comes into contact with the heat dissipation fins 16, and the fan 17 is activated to blow air onto the heat dissipation fins 16 to dissipate heat, so that the heat from the hot end of the thermoelectric cooler 14 can be discharged. It is worth noting that the cooling liquid flowing inside the liquid storage tank 3 is cooled by using the cold end of the semiconductor cooling chip 14 and the heat-conducting fins 15, so that the cooling liquid can continuously cool the positioning rod 1 and the multi-row hanging rod 2. To further elaborate on the coolant circulation process in this equipment, the coolant first enters the storage tank 3 through the inlet pipe 5. The water pump 6 then delivers the coolant to each heat-conducting copper pipe 9 through the water delivery pipe 8. The top of each heat-conducting copper pipe 9 is connected to the top of the guide channel 10, while the bottom of the guide channel 10 is connected to the outlet pipe 11. After the heat-conducting copper pipe 9 delivers the coolant to the guide channel 10, it is then delivered to the outlet box 12 through the outlet pipe 11. Finally, it returns to the storage tank through the outlet box 12, forming a complete coolant circulation.
[0024] All contents not described in detail in the specification are existing technologies known to those skilled in the art, and the model parameters of each electrical appliance are not specifically limited; conventional equipment can be used. Electrical control components not mentioned in this technical solution are not shown in the figures because they are existing technologies, and will not be described here.
[0025] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.
Claims
1. A coating hanger with a built-in active cooling system, comprising a positioning rod (1) and a multi-row hanging rod (2) arranged in a ring array outside the positioning rod (1), characterized in that: The bottom end of the positioning rod (1) is fixedly connected to a storage box (3), and multiple pads (4) are fixedly connected to the lower surface of the storage box (3). The storage box (3) is used to store coolant, and the upper surface of the storage box (3) is connected to a water inlet pipe (5). An active flow guiding mechanism is provided inside the positioning rod (1) and the storage box (3). The active flow guiding mechanism includes a water pump (6) installed inside the storage box (3), the output end of the water pump (6) is fixedly connected to a water delivery pipe (7), and one end of the water delivery pipe (7) is fixedly connected to a water delivery round pipe (8). The positioning rod (1) is provided with a guide channel (10) for recovering coolant, and the bottom end of the guide channel (10) is connected to the inner cavity of the storage box (3). The positioning rod (1) and the multiple hanging rods (2) have interconnected channels inside, and heat-conducting copper pipes (9) are arranged inside the channels. One end of the heat-conducting copper pipe (9) is connected to the water conveying pipe (8), and the other end of the heat-conducting copper pipe (9) extends to the top of the guide channel (10) and is connected to it. A cooling mechanism is provided inside the storage box (3).
2. The coating hanger with a built-in active cooling system according to claim 1, characterized in that: The multiple rows of hanging rods are arranged in a ring array around the guide channel (10) on the outer surface of the positioning rod (1), and multiple heat-conducting copper pipes (9) are evenly distributed inside the positioning rod (1) and the multiple rows of hanging rods (2).
3. The coating hanger with a built-in active cooling system according to claim 1, characterized in that: The bottom end of the positioning rod (1) is connected to a water outlet pipe (11), one end of which extends to the inside of the storage box (3) and is connected to a water outlet box (12). One side of the water outlet box (12) is fixedly connected to the inner wall of the cavity of the storage box (3).
4. The coating hanger with a built-in active cooling system according to claim 3, characterized in that: The water outlet box (12) has a water outlet at the bottom, and multiple diversion plates (18) are fixedly connected to the inner wall of the water outlet. The multiple diversion plates (18) are evenly distributed on the inner side of the water outlet.
5. The coating hanger with a built-in active cooling system according to claim 1, characterized in that: The cooling mechanism includes a partition (13) disposed on the side of the storage box (3), and a semiconductor cooling chip (14) is disposed inside the partition (13).
6. The coating hanger with a built-in active cooling system according to claim 5, characterized in that: The cold end of the semiconductor cooling chip (14) is fixedly connected to a heat-conducting fin (15), and the heat-conducting fin (15) extends into the inner cavity of the storage box (3).
7. The coating hanger with a built-in active cooling system according to claim 5, characterized in that: The hot end of the semiconductor cooling chip (14) is fixedly connected to a heat dissipation fin (16), and a fan (17) is fixedly connected to one side of the partition (13).