Vacuum multi-arc ion plating control system

Abstract

The utility model relates to the field of vacuum coating, specifically provides a kind of vacuum multi-arc ion coating control system, the control system includes: the main control module of realizing general control work;Valve controller for valve opening / closing, the communication link is established between the valve controller with the main control module by wireless connection;Sensor, for obtaining the working condition of coating equipment, the communication link is established between the sensor with the main control module by wireless connection;Self-powered module, located in the valve controller side and with the valve controller electrical connection to power supply;Power module connected with commercial power, for the power supply of the sensor, main control module;The utility model reduces the arrangement of wire rod by setting self-powered module and wireless communication structure, reduces system wiring complexity, improves equipment maintenance convenience.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating, and in particular to a vacuum multi-arc ion coating control system. Background Technology

[0002] Vacuum ion plating refers to a process in which a target material (such as titanium, chromium, zirconium, etc.) is evaporated or sputtered in a vacuum atmosphere using an electric arc discharge. Some of the evaporated or sputtered particles are ionized, excited, and reacted in the gas discharge space, and finally deposited onto the substrate to form a thin film.

[0003] Existing vacuum multi-arc ion plating systems still have some shortcomings in practical applications. For example, switches and sensors typically use independent wiring, meaning each switch or sensor corresponds to at least one signal line (some also include a power line) to achieve a one-to-one connection with the control system. With the increasing integration and intelligence of vacuum plating systems, the number of switches and sensors continues to increase to meet the needs of monitoring multiple process parameters and coordinating the control of multiple actuators, leading to a dramatic increase in the number of wiring harnesses within the system. Specifically, each switch requires a separate control signal line, and each sensor requires a separate data signal line and power supply line, resulting in a large number of wiring harnesses densely arranged inside the equipment.

[0004] Excessive wire harnesses lead to several problems: First, the wiring becomes complex, hindering the compact design of the equipment structure. Second, maintenance becomes more difficult; when switches or sensors malfunction, it is necessary to check each wire harness individually, which is time-consuming and increases the workload and difficulty for maintenance personnel. Fourth, reliability is reduced; after long-term use, wire harness connectors are prone to loosening or poor contact due to vibration, aging, etc., and friction and entanglement between wire harnesses may accelerate the wear of the insulation layer, further causing system failures and increasing equipment downtime and maintenance costs. Therefore, this application proposes a vacuum multi-arc ion plating control system. Utility Model Content

[0005] The purpose of this invention is to provide a vacuum multi-arc ion plating control system to solve the problem of complex wiring in current vacuum plating equipment.

[0006] To achieve the above objectives, this utility model provides the following technical solution: A vacuum multi-arc ion plating control system, the control system comprising: The main control module that enables overall control operations; A valve controller for opening / closing valves, wherein the valve controller and the main control module establish a communication link via a wireless connection; A sensor is used to acquire the working status of the coating equipment, and the sensor establishes a communication link with the main control module through a wireless connection. A self-powered module is located on one side of the valve controller and electrically connected to the valve controller to supply power to it; A power module connected to the mains power supply is used to power the sensors and the main control module.

[0007] Furthermore, the self-powered module includes: The power supply circuit is electrically connected to the valve controller; A storage battery, wherein the power supply circuit is electrically connected to the storage battery.

[0008] Furthermore, the self-powered module also includes: The power detection circuit is used to monitor the power status of the battery in real time and feed the detection data back to the main control module via wireless communication.

[0009] Furthermore, the self-powered module also includes: Self-generating components are used to generate electrical energy; A charging circuit electrically connected to the self-generating component and the battery.

[0010] Furthermore, the self-generating component includes: An impeller housing is provided with a transition gas pipe tangential to it, and an impeller that mates with it is provided on its inner side. The transition gas pipe is connected to the gas line of the coating equipment. A generator, wherein the input end of the generator is fixedly connected to the impeller shaft; The post-processing circuit is used to process the electrical energy generated by the generator and output electrical energy with a stable voltage. The post-processing circuit is electrically connected to the battery.

[0011] Furthermore, the self-generating component also includes: A speed-increasing mechanism is fixedly connected to the input shaft of the impeller and the generator to transmit power.

[0012] Furthermore, the speed-increasing mechanism includes an input gear and an output gear that mesh with each other, wherein the number of teeth on the input gear is greater than the number of teeth on the output gear, the input gear is connected to the impeller shaft, and the output gear is connected to the generator input shaft.

[0013] Furthermore, the generator is detachably connected to the impeller housing, the output gear is provided with a hexagonal hole, and the output shaft of the generator is provided with a hexagonal head. The hexagonal hole and the hexagonal head are inserted and engaged to realize torque transmission. In summary, this utility model has the following advantages compared with the prior art: The vacuum multi-arc ion plating control system disclosed in this embodiment of the invention reduces the amount of wiring by setting up a self-powered module and a wireless communication structure, thereby reducing the complexity of system wiring and improving the convenience of equipment maintenance. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the vacuum multi-arc ion plating control system disclosed in an embodiment of the present invention.

[0015] Figure 2 This is a schematic diagram of the self-powered module in the vacuum multi-arc ion plating control system disclosed in an embodiment of this utility model.

[0016] Figure 3 This is a schematic diagram of the self-generating module in the vacuum multi-arc ion plating control system disclosed in an embodiment of this utility model.

[0017] Figure 4 This is an exploded view of the self-generating module in the vacuum multi-arc ion plating control system disclosed in this embodiment of the present invention.

[0018] Figure 5 This is a front view of the self-generating module in the vacuum multi-arc ion plating control system disclosed in this embodiment of the utility model.

[0019] Figure 6 for Figure 5 Sectional view of AA.

[0020] Figure label: 100. Main control module; 200. Valve controller; 300. Sensor; 400. Self-powered module; 401. Battery; 402. Power supply circuit; 410. Impeller housing; 411. Transition air pipe; 412. Upper housing; 413. Lower housing; 414. Sealing ring; 415. Connecting platform; 420. Impeller; 430. Speed-increasing mechanism; 431. Speed-increasing housing; 432. Input gear; 433. Output gear; 434. Hexagonal hole; 435. Speed-increasing cover; 436. Transition gear; 440. Generator; 450. Post-processing module; 500. Power module. Detailed Implementation

[0021] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model without creative effort are within the protection scope of the present utility model.

[0022] like Figure 1As shown in the figure, an embodiment of this utility model provides a vacuum multi-arc ion plating control system. The control system includes a main control module 100, a valve controller 200, a sensor 300, a self-powered module 400, and a power supply module 500. The main control module 100 is electrically connected to the plating equipment to achieve real-time monitoring and precise control of the plating process. The valve controller 200 is electrically connected to the valve actuator in the plating equipment to control the opening / closing of the valves in the plating equipment. The valve controller 200 and the main control module 100 are electrically connected to enable the main control module 100 to dynamically monitor the valve status. The sensors 300 are distributed on the coating equipment to collect data such as pressure, temperature and gas flow in the coating environment in real time and transmit the collected data to the main control module 100 in real time to realize closed-loop feedback control. The self-powered module 400 is electrically connected to the valve controller 200, the valve actuator and the sensor 300 located at the valve controller 200 to realize the self-powered power supply of the valve controller 200 and the valve, thereby reducing the arrangement of wires. The power module 500 is electrically connected to the main control module 100 and the sensor 300 located in each chamber of the coating equipment.

[0023] In this embodiment, the valves of the coating equipment are installed on the pipeline structure, such as vacuum tubes and gas guide tubes. The opening and closing of the valves are controlled by the main control module 100. When manufacturing the coating equipment, a large number of lines need to be set up, which not only results in numerous pipelines on the coating equipment, but also increases the workload. The valve controller 200 and the sensor 300 with wireless control can greatly reduce the workload and reduce the number of wires. Due to the simplicity of wireless devices, when troubleshooting, there is no need to check the wires, only the wireless connection needs to be checked. The elimination of wires also reduces communication failures caused by problems such as loose or rusted wires.

[0024] During the coating process, the main control module 100 receives feedback data from the sensor 300 in real time and dynamically adjusts the coating environment according to preset process parameters. At the same time, it sends control commands to the valve controller 200 via wireless connection. The valve controller 200 controls the valve actuator to work according to the control commands, adjusts the valve opening to maintain stable pressure in the chamber, and ensures the uniformity and stability of the coating process.

[0025] In this embodiment, the main control module 100 is a prior art, such as the control cabinet or PLC control system in the coating equipment in the prior art, which is responsible for the overall logic operation and instruction scheduling.

[0026] The valve controller 200 employs a low-power wireless communication module, supports bidirectional data transmission, and has self-diagnostic capabilities. It can report device status in real time and automatically switch to a backup communication channel in case of communication failure, ensuring reliable transmission of control commands. The valve controller 200 is existing technology. It is integrated with the valve actuator and can drive the valve actuation via an electromagnetic structure on the actuator. The valve controller 200 and the valve actuator are electrically connected via a plug-in interface, facilitating quick installation and replacement. Disassembly and connection can be completed without specialized tools during maintenance or replacement, improving equipment maintenance efficiency.

[0027] The sensor 300 adopts high-precision sensor and wireless sensor network technology, has anti-electromagnetic interference capability, and can operate stably under complex working conditions. The data it collects is processed by calibration algorithm and then uploaded to the main control module 100 to improve feedback accuracy.

[0028] It should be noted that the sensor 300 located in the chamber of the coating equipment establishes a communication connection with the main control module 100 via electrical connection, while the sensor 300 located in the air circuit of the coating equipment uses wireless connection to adapt to the wiring requirements of different installation environments and improve system flexibility.

[0029] In this embodiment, the sensor 300 located at the valve controller 200 is integrated with the valve controller 200 and establishes a communication connection with the main control module 100 through the communication function of the valve controller 200. It monitors the working status and environmental parameters of the valve actuator in real time and feeds the data back to the main control module 100 through a wireless network to form a closed-loop control.

[0030] In this embodiment, as Figure 2 As shown, the self-powered module 400 includes a battery 401 and a power supply circuit 402. The battery 401 and the power supply circuit 402 are electrically connected. The power supply circuit 402 is electrically connected to the valve controller 200 and the valve actuator to provide power to the valve controller 200 and the valve actuator.

[0031] The storage battery 401 is existing technology, such as an 18650 lithium battery. The storage battery 401 provides a stable DC output to the power supply circuit 402 through a power management circuit. The power supply circuit 402 has voltage conversion and overcurrent protection functions, and can automatically adjust the power supply parameters according to the power requirements of the valve controller 200 and the valve actuator to ensure stable power supply in complex electromagnetic environments.

[0032] Preferably, the power supply circuit 402 also integrates a power monitoring chip, which can monitor the output voltage and current status in real time and feed the power supply data back to the valve controller 200. The valve controller 200 then uploads the data to the main control module 100 via a wireless communication module, thereby realizing remote monitoring and fault warning of the power supply system and further improving the reliability and intelligence level of the system operation.

[0033] Preferably, the power supply circuit 402 also integrates a power detection circuit, which can collect the remaining power information of the battery 401 in real time and transmit the power data to the valve controller 200 through the power supply circuit 402. The data is then uploaded to the main control module 100 via the wireless communication module for centralized display and threshold comparison. When the power level is detected to be lower than the preset alarm value, the system automatically triggers a low power warning mechanism to notify maintenance personnel to replace or charge the battery in advance, thus avoiding control interruption due to power abnormality.

[0034] As a further optimization of this embodiment, the self-powered module 400 also includes a self-generating component and a charging circuit electrically connected to the self-generating component and the battery 401. The self-generating component is used to convert part of the energy generated during the operation of the coating equipment into electrical energy and store it in the battery 401, thereby realizing the recycling of energy. In this embodiment, the self-generating component collects airflow energy and converts it into electrical energy.

[0035] Specifically, such as Figures 3 to 6 As shown, the self-generating component includes an impeller housing 410, an impeller 420, a generator 440, and a post-processing module 450. The impeller housing 410 is arranged on the airflow channel of the coating equipment. A transition gas pipe 411 is provided on the impeller housing 410. The transition gas pipe 411 is fixedly connected to the airflow channel. The gas in the airflow channel flows through the impeller housing 410. The impeller 420 is rotatably connected to the impeller housing 410. When the gas flows in the airflow channel, it drives the impeller 420 to rotate. The shaft of the impeller 420 is connected to the input end of the generator 440. When the impeller 420 rotates, it drives the input end of the generator 440 to rotate synchronously, transferring mechanical energy to the generator 440. The generator 440 converts the mechanical energy into electrical energy. The electrical energy output by the generator 440 is rectified and regulated by the post-processing module 450 and then sent to the charging circuit.

[0036] Preferably, in this embodiment, the impeller housing 410 includes an upper housing 412 and a lower housing 413, both of which are semi-circular housing structures. The transition air pipe 411 is located on the lower housing 413 and passes through the lower housing 413. The impeller 420 is rotatably connected between the transition air pipe 411 and the lower housing 413. The transition air pipe 411 and the lower housing 413 are fixedly connected by bolts. The upper housing 412 and the lower housing 413 are spliced ​​together to form a complete cylindrical cavity for accommodating the impeller 420 and airflow guidance.

[0037] Preferably, a sealing ring 414 is provided at the joint between the upper housing 412 and the lower housing 413 to prevent gas leakage and ensure stable airflow inside the cavity to guide the impeller 420 blades. The sealing ring 414 is made of high-temperature resistant elastic sealing material, which can effectively adapt to the internal temperature changes of the coating equipment and ensure sealing performance under long-term operation.

[0038] A connecting platform 415 is provided on the transition air pipe 411. The post-processing module 450 is detachably connected to the connecting platform 415 by bolts. The post-processing module 450 is electrically connected to the output end of the generator 440 by a wire, which facilitates maintenance and replacement. The generator 440 is a miniature permanent magnet generator.

[0039] Preferably, in this embodiment, the self-generating component further includes a speed-increasing mechanism 430, which is located on the impeller 420 and the generator 440 and is used to increase the rotational speed.

[0040] Specifically, the speed-increasing mechanism 430 includes an input gear 432 and an output gear 433. The input gear 432 is fixedly connected to the shaft of the impeller 420, and the output gear 433 is fixedly connected to the input end of the generator 440. The input gear 432 and the output gear 433 mesh with each other. The number of teeth of the input gear 432 is greater than the number of teeth of the output gear 433, thereby increasing the speed of the input end of the generator 440 through the gear transmission ratio when the impeller 420 rotates at low speed.

[0041] The speed-increasing mechanism 430 also includes a speed-increasing housing 431 and a speed-increasing cover 435. The speed-increasing housing 431 has an oblong groove structure and is fixed to the impeller housing 410 by bolts. The speed-increasing cover 435 is fixed to the opening of the speed-increasing housing 431 by bolts. The input gear 432 and the output gear 433 are located inside the speed-increasing housing 431. The generator 440 is fixed to the speed-increasing cover 435 by bolts. The speed-increasing housing 431 and the speed-increasing cover 435 together form a closed gearbox.

[0042] Preferably, the speed-increasing mechanism 430 further includes a transition gear 436 located inside the speed-increasing housing 431. The transition gear 436 is a double gear; its pinion meshes with the input gear 432, and its larger pinion meshes with the output gear 433, further amplifying the transmission ratio and increasing the input speed of the generator 440. This double-gear structure achieves two-stage speed increase within a limited space, effectively improving the power generation efficiency of the generator 440 at low airflow speeds.

[0043] Preferably, the output gear 433 is provided with a hexagonal hole 434, and the input end of the generator 440 is provided with a hexagonal head that matches the hexagonal hole 434. The hexagonal hole 434 and the hexagonal head cooperate to achieve stable torque transmission. At the same time, the generator 440 is detachably connected to the speed-increasing cover 435 by bolts, which facilitates quick replacement and maintenance.

[0044] The terminology used in this invention is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The singular forms “a,” “the,” and “the” used in this invention and the appended claims are also intended to include the plural forms unless the context clearly indicates otherwise. It should also be understood that the term “and / or” as used herein refers to and includes any or all possible combinations of one or more of the associated listed items.

[0045] It should be understood that although the terms first, second, third, etc., may be used in this invention to describe various information, this information should not be limited to these terms. These terms are only used to distinguish information of the same type from one another. For example, without departing from the scope of this invention, first information may also be referred to as second information, and similarly, second information may also be referred to as first information. Depending on the context, the word "if" as used herein may be interpreted as "when," "when," or "in response to determination."

[0046] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A vacuum multi-arc ion plating control system, characterized in that, The control system includes: The main control module that enables overall control operations; A valve controller for opening / closing valves, wherein the valve controller and the main control module establish a communication link via a wireless connection; The sensor is used to acquire the working status of the coating equipment, and the sensor establishes a communication link with the main control module through a wireless connection. A self-powered module is located on one side of the valve controller and electrically connected to the valve controller to supply power to it; A power supply module connected to the mains power supply is used to power the sensors and the main control module.

2. The vacuum multi-arc ion plating control system according to claim 1, characterized in that, The self-powered module includes: The power supply circuit is electrically connected to the valve controller; A storage battery, wherein the power supply circuit is electrically connected to the storage battery.

3. The vacuum multi-arc ion plating control system according to claim 2, characterized in that, The self-powered module also includes: The power detection circuit is used to monitor the power status of the battery in real time and feed the detection data back to the main control module via wireless communication.

4. The vacuum multi-arc ion plating control system according to claim 3, characterized in that, The self-powered module also includes: Self-generating components are used to generate electrical energy; A charging circuit electrically connected to the self-generating component and the battery.

5. The vacuum multi-arc ion plating control system according to claim 4, characterized in that, The self-generating component includes: An impeller housing is provided with a transition gas pipe tangential to it, and an impeller that mates with it is provided on its inner side. The transition gas pipe is connected to the gas line of the coating equipment. A generator, wherein the input end of the generator is fixedly connected to the impeller shaft; The post-processing circuit is used to process the electrical energy generated by the generator and output electrical energy with a stable voltage. The post-processing circuit is electrically connected to the battery.

6. The vacuum multi-arc ion plating control system according to claim 5, characterized in that, The self-generating component also includes: A speed-increasing mechanism is fixedly connected to the input shaft of the impeller and the generator to transmit power.

7. The vacuum multi-arc ion plating control system according to claim 6, characterized in that, The speed-increasing mechanism includes an input gear and an output gear that mesh with each other. The number of teeth on the input gear is greater than the number of teeth on the output gear. The input gear is connected to the impeller shaft, and the output gear is connected to the generator input shaft.

8. The vacuum multi-arc ion plating control system according to claim 7, characterized in that, The generator is detachably connected to the impeller housing. The output gear is provided with a hexagonal hole, and the output shaft of the generator is provided with a hexagonal head. The hexagonal hole and the hexagonal head are inserted and matched to realize torque transmission.

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