Transport device for a vacuum coating apparatus

Abstract

The utility model provides a transmission device for vacuum coating equipment relates to transmission device technical field, including mounting bracket, the top of mounting bracket is installed magnetic suspension conveying line, the top of magnetic suspension conveying line is installed magnetic suspension dynamic, the inside of bearing station is provided with clamping mechanism, through being provided with mounting mechanism in the top of magnetic suspension dynamic, utilize the mutual cooperation between mounting mechanism, can realize bearing station quick assembly and disassembly, greatly shorten work piece specification switching and maintenance downtime, need not to disassemble core drive component, reduce operation difficulty and labour intensity, at the same time, avoid the precision damage of dynamic, track to repeatedly dismounting, guarantee bearing station positioning consistency and vacuum seal reliability, reduce coating defect, its adaptation multi -specification work piece and process demand, improve equipment flexibility and application scope, reduce maintenance and production comprehensive cost, satisfy efficient precision production demand.

Description

Technical Field

[0001] This utility model relates to the field of transmission device technology, and in particular to a transmission device for vacuum coating equipment. Background Technology

[0002] Vacuum coating technology is a core process for manufacturing high-end products such as semiconductors, optical components, and electronic devices. The coating quality is directly related to the stability and positioning accuracy of the substrate transfer within the vacuum chamber. The carrier platform in the transfer device is the core component that directly supports and fixes the workpiece to be coated. Its flexibility of use is crucial to production efficiency and process adaptability.

[0003] In existing technologies, the transmission devices of vacuum coating equipment are inconvenient for the convenient disassembly and installation of the carrier platform. The carrier platform, magnetic levitation mover, and track components often use integrated fixed or complex bolted connections, resulting in a cumbersome and time-consuming disassembly and assembly process. When switching between different specifications of workpieces or adjusting the process, a large number of parts need to be disassembled with special tools, which may even damage the vacuum environment, resulting in long downtime and seriously affecting production continuity. When maintenance needs arise, such as blockage of the carrier platform's adsorption holes or wear of the positioning structure, the complex disassembly and assembly not only increases labor intensity but also easily damages precision components such as the mover and track, increasing operating costs. At the same time, repeated disassembly and assembly can cause the positioning reference of the connection parts to shift, reduce the flatness and positioning accuracy of the carrier platform, and cause workpiece transmission deviation, affecting the uniformity and adhesion of the film. Furthermore, repeated disassembly and assembly of the seals can easily cause scratches and installation deviations, resulting in vacuum leakage and damaging the coating environment. Therefore, this utility model proposes a transmission device for vacuum coating equipment to solve the above problems. Utility Model Content

[0004] To address the aforementioned problems, this utility model proposes a transmission device for vacuum coating equipment, which solves the problem of inconvenient disassembly and installation of the support platform in the prior art.

[0005] To achieve the purpose of this utility model, the utility model is implemented through the following technical solution: a transmission device for vacuum coating equipment, including a mounting frame, a magnetic levitation conveyor line mounted above the mounting frame, a magnetic levitation mover mounted above the magnetic levitation conveyor line, an installation mechanism provided above the magnetic levitation mover, a support platform mounted at the top of the installation mechanism, and a clamping mechanism provided on the inner side of the support platform;

[0006] The installation mechanism includes a mounting base, a mounting cavity, a mounting block, a positioning hole, a positioning block, and a transmission structure. The mounting base is installed on the top of the magnetic levitation mover. The mounting base has a mounting cavity inside, and the mounting cavity has a mounting block inside. The top of the mounting block is connected to the bottom of the support platform. The mounting block has a positioning hole inside, and the positioning hole has a positioning block inside.

[0007] A further improvement is made in that: the transmission structure includes a fixed cavity, a servo motor, a threaded rod, a threaded sleeve, and a limiting structure. The fixed cavity is installed at one end of the mounting base, and a servo motor is installed at one end of the fixed cavity. A threaded rod is installed at the lower part of the interior of the fixed cavity. One end of the servo motor is connected to one end of the threaded rod. A threaded sleeve is provided on the outer wall of the threaded rod, and one end of the threaded sleeve is connected to one end of the positioning block.

[0008] A further improvement is that the positioning hole and the positioning block are mutually adapted to each other, and the positioning hole and the positioning block form a locking structure.

[0009] A further improvement is that the limiting structure includes a limiting rod and a limiting sleeve. The limiting rod is installed above the inside of the fixed cavity, and a limiting sleeve is provided on the outer side wall of the limiting rod. One end of the limiting sleeve is connected to one end of the positioning block.

[0010] A further improvement is that the cross-section of the limiting rod is smaller than the cross-section of the limiting sleeve, and the limiting rod and the limiting sleeve form a sliding structure.

[0011] A further improvement is made in that: the clamping mechanism includes a vacuum adsorption hole, a connecting pipe, an electric push rod, a clamping block, a plastic pad, a guide hole, and a guide rod. The vacuum adsorption hole is located inside the support platform. The connecting pipe is installed on one side of the support platform. The electric push rod is installed on both sides of the support platform. The clamping block is installed inside the support platform. One end of the electric push rod is connected to one end of the clamping block. A plastic pad is provided on the inner side of the clamping block. Guide holes are provided on both sides of the support platform. A guide rod is provided inside the guide hole. One end of the guide rod is connected to one end of the clamping block.

[0012] The beneficial effects of this utility model are as follows: By setting an installation mechanism above the magnetic levitation mover, and utilizing the mutual cooperation between the mounting base, mounting cavity, mounting block, positioning hole, positioning block, fixing cavity, servo motor, threaded rod, threaded sleeve, limit rod, and limit sleeve of the installation mechanism, the bearing platform can be quickly assembled and disassembled, significantly shortening the downtime for workpiece specification switching and maintenance. It eliminates the need to disassemble the core drive components, reducing operational difficulty and labor intensity. Simultaneously, it avoids damage to the precision of the mover and track caused by repeated disassembly and assembly, ensuring the consistency of bearing platform positioning and the reliability of vacuum sealing, and reducing coating defects. This design adapts to various workpiece specifications and process requirements, enhancing equipment flexibility and application range, reducing overall maintenance and production costs, and meeting the demands of high-efficiency and precision production. A clamping mechanism is installed inside the support platform. Utilizing the interplay between the vacuum adsorption holes, connecting pipes, electric push rods, clamping blocks, plastic pads, guide holes, and guide rods of this mechanism, the two elements work synergistically. Vacuum adsorption uses uniform negative pressure to ensure the workpiece is flat and firmly attached, preventing damage to brittle and flexible workpieces. The non-contact design reduces particulate contamination, and the mechanical clamping precisely locks the positioning reference, suppressing transmission vibration and offset, resulting in high positioning accuracy. This structure is adaptable to workpieces of various specifications and materials, ensuring reliable vacuum sealing, improving coating uniformity and yield, and enhancing equipment process adaptability. Attached Figure Description

[0013] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0014] Figure 2 This is a schematic diagram of the overall structure of the installation mechanism of this utility model;

[0015] Figure 3 This is a cross-sectional structural diagram of the installation mechanism of this utility model;

[0016] Figure 4 This is a schematic diagram of the overall structure of the clamping mechanism of this utility model.

[0017] The components are: 1. Mounting frame; 2. Magnetic levitation conveyor line; 3. Magnetic levitation mover; 4. Support platform; 5. Mounting base; 6. Mounting cavity; 7. Mounting block; 8. Positioning hole; 9. Positioning block; 10. Fixing cavity; 11. Servo motor; 12. Threaded rod; 13. Threaded sleeve; 14. Limiting rod; 15. Limiting sleeve; 16. Vacuum adsorption hole; 17. Connecting pipe; 18. Electric push rod; 19. Clamping block; 20. Plastic pad; 21. Guide hole; 22. Guide rod. Detailed Implementation

[0018] To deepen the understanding of this utility model, the following detailed description will be provided in conjunction with embodiments. These embodiments are only used to explain this utility model and do not constitute a limitation on the scope of protection of this utility model.

[0019] according to Figure 1 , 2 As shown in Figures 3 and 4, this embodiment proposes a transmission device for a vacuum coating equipment, including a mounting frame 1. A magnetic levitation conveyor line 2 is mounted above the mounting frame 1. A magnetic levitation actuator 3 is mounted above the magnetic levitation conveyor line 2. An installation mechanism is provided above the magnetic levitation actuator 3. A support platform 4 is mounted at the top of the installation mechanism. A clamping mechanism is provided on the inner side of the support platform 4.

[0020] The installation mechanism includes a mounting base 5, a mounting cavity 6, a mounting block 7, a positioning hole 8, a positioning block 9, and a transmission structure. The mounting base 5 is mounted on the top of the magnetic levitation actuator 3. The mounting base 5 has a mounting cavity 6 inside, and the mounting block 7 is disposed inside the mounting cavity 6. The top of the mounting block 7 is connected to the bottom of the support platform 4. The mounting block 7 has a positioning hole 8 inside, and the positioning block 9 is disposed inside the positioning hole 8. The transmission structure includes a fixed cavity 10, a servo motor 11, a threaded rod 12, and a threaded sleeve 1. 3. A limiting structure is provided. The fixed cavity 10 is installed at one end of the mounting base 5. A servo motor 11 is installed at one end of the fixed cavity 10. A threaded rod 12 is installed at the lower part of the fixed cavity 10. One end of the servo motor 11 is connected to one end of the threaded rod 12. A threaded sleeve 13 is provided on the outer wall of the threaded rod 12. One end of the threaded sleeve 13 is connected to one end of the positioning block 9. The positioning hole 8 and the positioning block 9 are mutually adapted to each other, and the positioning hole 8 and the positioning block 9 form a locking structure. When it is necessary to adjust the bearing platform 4... During replacement, the servo motor 11 is started to drive the threaded rod 12 to rotate, which in turn drives the threaded sleeve 13 to move. Under the limit of the limit rod 14 and the limit sleeve 15, the threaded sleeve 13 drives the positioning block 9 to move, pulling the positioning block 9 out of the positioning hole 8. Then, the mounting block 7 is removed from the mounting cavity 6, the carrier platform 4 is removed, and the new carrier platform 4 is taken out. The mounting block 7 is placed into the mounting cavity 6, and the servo motor 11 is started to reverse, moving the positioning block 9 into the positioning hole 8 to fix the position of the carrier platform 4. This completes the convenient replacement of the carrier platform 4, enabling quick disassembly and assembly of the carrier platform 4. This significantly reduces downtime for workpiece specification switching and maintenance, eliminates the need to disassemble the core drive components, reduces operational difficulty and labor intensity, and avoids damage to the precision of the mover and track caused by repeated disassembly and assembly. It ensures the positioning consistency and vacuum sealing reliability of the carrier platform 4, reduces coating defects, and is suitable for various workpiece specifications and process requirements. This improves the flexibility and application range of the equipment, reduces the overall maintenance and production costs, and meets the needs of high-efficiency and precision production.

[0021] The limiting structure includes a limiting rod 14 and a limiting sleeve 15. The limiting rod 14 is installed above the inside of the fixed cavity 10. The limiting sleeve 15 is provided on the outer side wall of the limiting rod 14. One end of the limiting sleeve 15 is connected to one end of the positioning block 9. The cross-section of the limiting rod 14 is smaller than the cross-section of the limiting sleeve 15. The limiting rod 14 and the limiting sleeve 15 form a sliding structure. In use, the mutual cooperation between the limiting rod 14 and the limiting sleeve 15 can limit the movement of the positioning block 9, making the positioning block 9 more stable when moving.

[0022] The clamping mechanism includes a vacuum suction hole 16, a connecting pipe 17, an electric push rod 18, a clamping block 19, a plastic pad 20, a guide hole 21, and a guide rod 22. The vacuum suction hole 16 is located inside the support platform 4. The connecting pipe 17 is installed on one side of the support platform 4. The electric push rod 18 is installed on both sides of the support platform 4. The clamping block 19 is installed inside the support platform 4, with one end of the electric push rod 18 connected to one end of the clamping block 19. A plastic pad 20 is provided on the inner side of the clamping block 19. Guide holes 21 are provided on both sides of the support platform 4, and guide rods 22 are provided inside the guide holes 21. One end of the guide rod 22 is connected to the clamping block 19. One end is connected. During use, the workpiece is placed inside the support platform 4, and the vacuum adsorption hole 16 adsorbs and positions the workpiece. When clamping and fixing with the clamping block 19 and plastic pad 20 is required, the electric push rod 18 is activated. Under the limit of the guide hole 21 and guide rod 22, the electric push rod 18 drives the clamping block 19 and plastic pad 20 to move, using them to position the workpiece. The two work together complement each other; vacuum adsorption uses uniform negative pressure to make the workpiece flat and fit snugly, avoiding damage to brittle and flexible workpieces. The non-contact design reduces particle contamination, and the mechanical clamping precisely locks the positioning reference, suppressing transmission vibration and offset, resulting in high positioning accuracy. This structure is adaptable to workpieces of various specifications and materials, ensuring reliable vacuum sealing, improving coating uniformity and yield, and enhancing equipment process adaptability.

[0023] Working principle: The operator first places the workpiece inside the support platform 4, and uses the vacuum adsorption hole 16 to adsorb and position the workpiece. When it is necessary to use the clamping block 19 and plastic pad 20 to clamp and fix it, the electric push rod 18 is activated. Under the limit of the guide hole 21 and guide rod 22, the electric push rod 18 drives the clamping block 19 and plastic pad 20 to move, using the clamping block 19 and plastic pad 20 to position the workpiece. Then, the magnetic levitation conveyor line 2 is activated to drive the magnetic levitation mover 3 to transport the workpiece. When it is necessary to replace the support platform 4... When the servo motor 11 is started, it drives the threaded rod 12 to rotate, which in turn drives the threaded sleeve 13 to move. Then, under the limit of the limit rod 14 and the limit sleeve 15, the threaded sleeve 13 drives the positioning block 9 to move, pulling the positioning block 9 out of the positioning hole 8. Then, the mounting block 7 is removed from the mounting cavity 6, the support platform 4 is removed, and the new support platform 4 is taken out. The mounting block 7 is placed into the mounting cavity 6, the servo motor 11 is started to reverse, and the positioning block 9 is moved into the positioning hole 8 to fix the position of the support platform 4, thus completing the convenient replacement of the support platform 4.

[0024] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed utility model. The scope of protection of this utility model is defined by the appended claims and their equivalents.

Claims

1. A transfer device for a vacuum coating equipment, comprising a mounting frame (1), characterized in that: A magnetic levitation conveyor line (2) is installed above the mounting frame (1), a magnetic levitation mover (3) is installed above the magnetic levitation conveyor line (2), an installation mechanism is provided above the magnetic levitation mover (3), a support platform (4) is installed at the top of the installation mechanism, and a clamping mechanism is provided on the inner side of the support platform (4). The installation mechanism includes a mounting base (5), a mounting cavity (6), a mounting block (7), a positioning hole (8), a positioning block (9), and a transmission structure. The mounting base (5) is installed on the top of the magnetic levitation actuator (3). The mounting base (5) has a mounting cavity (6) inside. The mounting cavity (6) is provided inside. The mounting block (7) is provided inside. The top of the mounting block (7) is connected to the bottom of the support platform (4). The mounting block (7) has a positioning hole (8) inside. The positioning hole (8) has a positioning block (9) inside.

2. The transmission device for vacuum coating equipment according to claim 1, characterized in that: The transmission structure includes a fixed cavity (10), a servo motor (11), a threaded rod (12), a threaded sleeve (13), and a limiting structure. The fixed cavity (10) is installed at one end of the mounting base (5). The servo motor (11) is installed at one end of the fixed cavity (10). The threaded rod (12) is installed at the lower part inside the fixed cavity (10). One end of the servo motor (11) is connected to one end of the threaded rod (12). The threaded sleeve (13) is provided on the outer wall of the threaded rod (12). One end of the threaded sleeve (13) is connected to one end of the positioning block (9).

3. The transmission device for vacuum coating equipment according to claim 2, characterized in that: The positioning hole (8) and the positioning block (9) are mutually adapted to each other, and the positioning hole (8) and the positioning block (9) form a locking structure.

4. The transmission device for vacuum coating equipment according to claim 3, characterized in that: The limiting structure includes a limiting rod (14) and a limiting sleeve (15). The limiting rod (14) is installed above the inside of the fixed cavity (10). The outer side wall of the limiting rod (14) is provided with a limiting sleeve (15). One end of the limiting sleeve (15) is connected to one end of the positioning block (9).

5. The transmission device for vacuum coating equipment according to claim 4, characterized in that: The cross-section of the limiting rod (14) is smaller than the cross-section of the limiting sleeve (15), and the limiting rod (14) and the limiting sleeve (15) form a sliding structure.

6. The transmission device for a vacuum coating equipment according to claim 1, characterized in that: The clamping mechanism includes a vacuum adsorption hole (16), a connecting pipe (17), an electric push rod (18), a clamping block (19), a plastic pad (20), a guide hole (21), and a guide rod (22). The vacuum adsorption hole (16) is opened inside the support platform (4). The connecting pipe (17) is installed on one side of the support platform (4). The electric push rod (18) is installed on both sides of the support platform (4). The clamping block (19) is installed inside the support platform (4). One end of the electric push rod (18) is connected to one end of the clamping block (19). A plastic pad (20) is provided on the inner side of the clamping block (19). Guide holes (21) are opened on both sides of the support platform (4). A guide rod (22) is provided inside the guide hole (21). One end of the guide rod (22) is connected to one end of the clamping block (19).

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