Parylene vapor deposition apparatus

Abstract

The utility model discloses a parylene vapor deposition equipment, specifically relates to the technical field of vapor deposition, including raw material heating box, be provided with deposition assembly on the raw material heating box, the deposition assembly includes the deposition box of setting in the raw material heating box top, the outside of raw material heating box is provided with the pump machine, the output and input of pump machine are provided with the pipe respectively, and the pipe one end of pump machine output belongs to and is provided with the spray plate. The utility model discloses through setting the deposition base plate of arc structure, cooperates the directional jet design of spray plate, effectively solved the problem that gaseous parylene dimer raw material is easy to scatter, improved the raw material utilization rate, guaranteed the uniformity of workpiece surface coating simultaneously.

Description

Technical Field

[0001] This utility model relates to the field of vapor deposition technology, and more specifically, to a Parylene vapor deposition device. Background Technology

[0002] Chemical vapor deposition (CVD) is a material surface modification technology that has developed rapidly in the last 30 years. It utilizes reactions between gases to deposit a thin film on the surface of various materials and products, imparting special properties to the material surface. For example, phenelzine films are made from p-xylene cyclodisomers or their derivatives through a CVD process. The CVD process requires specific equipment.

[0003] Among them, patent CN219260196U discloses a Perelin membrane deposition device with multiple evaporation and pyrolysis systems, belonging to the field of chemical vapor deposition technology. This Perelin membrane deposition device with multiple evaporation and pyrolysis systems includes an evaporation chamber, a pyrolysis chamber, and a settling chamber. The evaporation chamber corresponds to the pyrolysis chamber, and the pyrolysis chamber is located between the evaporation chamber and the settling chamber. The settling chamber corresponds to multiple evaporation chambers and pyrolysis chambers.

[0004] When in use, this structure integrates multiple independent evaporation and pyrolysis devices into a single coating machine, allowing the deposition chamber volume to be several times larger than that of conventionally sized coating machines. The film quality and performance remain unchanged. However, during the deposition process, it is not easy to gather the gaseous phenelzine dimer raw material, which makes it easy for it to disperse during the deposition process. Utility Model Content

[0005] In order to overcome the above-mentioned defects of the prior art, the present invention provides a Perylene vapor deposition apparatus, which aims to solve the problems mentioned in the background art.

[0006] This utility model provides the following technical solution: a Parelin vapor deposition equipment, including a raw material heating box, on which a deposition component is provided; The deposition assembly includes a deposition box located on top of the raw material heating box. A pump is located on the outside of the raw material heating box. The pump has conduits at its output end and input end. A spray plate is located at one end of the conduit to which the pump output end belongs. The pump to which the pump input end belongs extends into the raw material heating box and is connected to the raw material heating box. The spray plate is located in the middle of the deposition box, and a deposition pad is hinged to the top of the raw material heating box.

[0007] Optionally, in a possible implementation, the vertical cross-sectional shape of the deposition pad is set to arc shape, and a plurality of workpiece positioning holes are opened through the deposition pad. A support frame is provided on one side of the top of the raw material heating box, and a rotating shaft is rotatably connected to the support frame. A support rod is provided on one side of the support frame, and two rollers are provided at the top of the support rod. A haul rope is sleeved on the outside of the rotating shaft, and the haul rope extends to the outside of the rollers. One end of the haul rope passes through the deposition box and extends to one end of the deposition pad. A motor is provided at one end of the support frame, and the output end of the motor extends to one end of the rotating shaft. The technical effects and advantages of this utility model are as follows: By setting up an arc-shaped deposition pad and combining it with the directional jetting design of the spray plate, the problem of easy dispersion of gaseous phenelzine dimer raw material is effectively solved, the raw material utilization rate is improved, and the uniformity of the coating on the workpiece surface is ensured. The workpiece positioning holes on the deposition pad can precisely fix the workpiece, preventing it from shifting during the deposition process and further ensuring the coating quality. The transmission assembly, consisting of a motor, shaft, pull rope, and rollers, allows for easy adjustment of the angle of the deposition pad, adapting to the deposition needs of workpieces of different sizes and shapes, thus enhancing the equipment's versatility. Attached Figure Description

[0008] To more clearly illustrate the technical solutions in this disclosure, the accompanying drawings used in some embodiments will be briefly described below. Obviously, the drawings described below are only drawings of some embodiments of this disclosure, and those skilled in the art can obtain other drawings based on these drawings. In addition, the drawings described below can be regarded as schematic diagrams and are not intended to limit the actual size of the product, the actual flow of the method, the actual timing of the signals, etc. involved in the embodiments of this disclosure.

[0009] Figure 1 This is a front view of the overall structure of this utility model.

[0010] Figure 2 This is a side view of the overall structure of this utility model.

[0011] Figure 3 This is a schematic diagram of the sedimentation tank, pump, conduit, and spray plate of this utility model.

[0012] Figure 4 This is a schematic diagram of the raw material heating box, support frame, rotating shaft, motor, support rod, support roller and deposition pad of this utility model.

[0013] The attached diagram is labeled as follows: 1. Raw material heating box; 2. Sedimentation box; 3. Pump; 4. Conduit; 5. Spray plate; 6. Sedimentation pad; 7. Workpiece positioning hole; 8. Support frame; 9. Rotating shaft; 10. Support rod; 11. Support roller; 12. Pull rope; 13. Motor. Detailed Implementation

[0014] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0015] The perylene vapor deposition equipment disclosed in this embodiment includes a raw material heating box 1 and a deposition assembly disposed on the raw material heating box 1. The components work together to achieve efficient aggregation and precise deposition of gaseous perylene raw material.

[0016] The raw material heating chamber 1 serves as the sublimation site for the phenelzine dimer raw material. A deposition chamber 2 is fixedly installed on its top, providing a sealed space for the deposition reaction of the gaseous raw material. A pump 3 is installed on the outer wall of the raw material heating chamber 1. Both the output and input ends of the pump 3 are connected to conduits 4 via flanges. The end of the conduit 4 connected to the pump 3's input end, away from the pump 3, penetrates the side wall of the raw material heating chamber 1 and extends into the interior, communicating with the internal space of the raw material heating chamber 1. This conduit is used to extract the sublimated gaseous phenelzine dimer from within the raw material heating chamber 1. The end of the conduit 4 connected to the pump 3's output end, away from the pump 3, is connected to a spray plate 5. The specific connection structure is shown in the attached diagram. Figure 2 and 3 As shown, the spray plate 5 is horizontally positioned in the middle of the sedimentation tank 2. Several small air jet holes are evenly distributed on the spray plate 5, which can evenly spray out the gaseous raw materials delivered by the pump 3, avoiding the dispersion and scattering of the raw materials.

[0017] At the top edge of the raw material heating chamber 1, a deposition pad 6 is hinged. The deposition pad 6 can rotate vertically around the hinge point, facilitating the placement or removal of the workpiece to be coated by the operator. The vertical cross-sectional shape of the deposition pad 6 is arc-shaped. This arc-shaped structure can gather and guide the gaseous permethrin raw material sprayed from the spray plate 5, reducing the diffusion range of the raw material within the deposition chamber 2. Simultaneously, several workpiece positioning holes 7 are drilled through the deposition pad 6. The diameter of the workpiece positioning holes 7 matches the outer diameter of the workpiece to be coated, such as small electronic components or medical device accessories, ensuring that the workpiece surface can uniformly receive the gaseous raw material and improving coating consistency.

[0018] As attached Figure 4As shown, a support frame 8 is welded and fixed to one side of the top of the raw material heating box 1. The support frame 8 has a U-shaped structure, and a rotating shaft 9 is rotatably connected inside it. The two ends of the rotating shaft 9 are rotatably engaged with the side wall of the support frame 8 through bearings. At one end of the support frame 8, a motor 13 is fixedly installed through a motor bracket. The output end of the motor 13 is connected to one end of the rotating shaft 9 through a coupling. The motor 13 can drive the rotating shaft 9 to rotate clockwise or counterclockwise around its own axis.

[0019] On the side of the support frame 8 away from the motor 13, a support rod 10 is welded and fixed. The support rod 10 extends vertically upward, and its top is rotatably connected to two rollers 11 via a rotating shaft. The two rollers 11 are symmetrically distributed, and their axes are parallel to the axis of the rotating shaft 9. A pull rope 12 is wound around the outer wall of the rotating shaft 9. The pull rope 12 is made of high-strength nylon and has good tensile strength. One end of the pull rope 12 is fixed to the rotating shaft 9, and the other end passes around the outside of the two rollers 11, passes through the through hole opened in the side wall of the sedimentation tank 2, extends into the interior of the sedimentation tank 2, and is fixedly connected to the end of the sedimentation pad 6 away from the hinge point.

[0020] The specific working principle is as follows: solid pyrene dimer raw material is placed inside the raw material heating box 1, and then the workpieces to be coated are inserted one by one into the workpiece positioning holes 7 on the deposition pad 6 to complete the workpiece fixation.

[0021] Start motor 13, which drives shaft 9 to rotate clockwise. As shaft 9 rotates, it winds around the grouting rope 12. Guided by roller 11, the grouting rope 12 pulls the end of the deposition pad 6 away from the hinge point upward, causing the deposition pad 6 to rotate around the hinge point to an angle that matches the spray direction of the spray plate 5, usually 30°-60°, to maximize the reception of gaseous raw materials. If it is necessary to lower the angle of the deposition pad 6, motor 13 can be controlled to rotate counterclockwise, shaft 9 releases the grouting rope 12, and the deposition pad 6 slowly falls back under its own weight until it is adjusted to the target angle.

[0022] Close the door of deposition chamber 2 to ensure it is sealed. Heat the raw material heating chamber 1 to raise the internal temperature to the sublimation temperature of phenelzine dimer, causing the solid raw material to sublimate into gaseous phenelzine dimer. Start pump 3, which draws gaseous raw material from the heating chamber 1 through the input conduit 4 and delivers it to the spray plate 5 through the output conduit 4. The gaseous raw material is then evenly sprayed onto the workpiece on the deposition pad 6 through the nozzles on the spray plate 5. Due to the arc-shaped structure of the deposition pad 6, the gaseous raw material is not easily dispersed and can efficiently adhere to the workpiece surface, gradually polymerizing to form a uniform and dense phenelzine film.

[0023] Stop heating the raw material heating box 1 and stop pump 3. After the equipment cools down to room temperature, control motor 13 to adjust the deposition pad 6 back to the horizontal position, open the door of deposition box 2, and take out the workpiece that has been coated.

[0024] The above are merely preferred embodiments of the present utility model and are not intended to limit the present utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model shall be included within the protection scope of the present utility model.

Claims

1. A Parylene vapor deposition apparatus, comprising a raw material heating chamber (1), characterized in that: The raw material heating box (1) is equipped with a deposition assembly; The deposition assembly includes a deposition box (2) set on top of the raw material heating box (1), a pump (3) is set on the outside of the raw material heating box (1), the output end and the input end of the pump (3) are respectively provided with conduits (4), and a spray plate (5) is set on one end of the conduit (4) to which the output end of the pump (3) belongs; the pump (3) to which the input end of the pump (3) belongs extends into the raw material heating box (1) and is connected to the raw material heating box (1); The spray plate (5) is located in the middle of the deposition box (2), and the top of the raw material heating box (1) is hinged with a deposition pad (6).

2. The Perelin vapor deposition apparatus according to claim 1, characterized in that: The vertical cross-sectional shape of the deposition pad (6) is set to arc shape, and a number of workpiece positioning holes (7) are opened through the deposition pad (6).

3. The Perelin vapor deposition apparatus according to claim 1, characterized in that: A support frame (8) is provided on one side of the top of the raw material heating box (1), and a rotating shaft (9) is rotatably connected to the support frame (8).

4. The Perelin vapor deposition apparatus according to claim 3, characterized in that: A support rod (10) is provided on one side of the support frame (8), and two rollers (11) are provided on the top of the support rod (10).

5. The Perelin vapor deposition apparatus according to claim 4, characterized in that: A pull rope (12) is fitted on the outside of the rotating shaft (9). The pull rope (12) extends to the outside of the support roller (11), and one end of the pull rope (12) passes through the sedimentation tank (2) and extends to one end of the sedimentation pad (6).

6. The Perelin vapor deposition apparatus according to claim 3, characterized in that: A motor (13) is provided at one end of the support frame (8), and the output end of the motor (13) extends to one end of the rotating shaft (9).

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