A CVD coating tool suitable for sheet-like products

Abstract

The utility model discloses a CVD coating frock suitable for flaky product, including air diffuser, be equipped with a plurality of air holes on air diffuser, be equipped with support subassembly on air diffuser, and support subassembly includes at least two groups of support column, and the lower extreme of support column is equipped with the column, and the column is inserted in the through -hole on air diffuser, and be equipped with a plurality of insertion hole on support column, still include cross bar subassembly, and cross bar subassembly includes cross bar main part, and the both ends fixed connection of cross bar main part have inserted column, and the inserted column detachably inserts in insertion hole, and the both sides of cross bar main part all are equipped with a plurality of support arms, and the end of each support arm is equipped with at least one top rod, and the end of top rod is the tip. The utility model discloses the insertion type assembly technology, has improved frock dismounting's efficiency and flexibility, and adopts the top rod of tip end and supports flaky product, not only reduces the contact area of single point position, effectively reduces "process blind area", and avoids the positioning deviation caused by the repeated dismounting wear of thread pair.

Description

Technical Field

[0001] This utility model belongs to the technical field of chemical vapor deposition (CVD) equipment, specifically relating to a CVD coating fixture suitable for thin sheet products, especially suitable for coating processing of planar thin sheet products with a thickness of 0.1-15mm in a high-temperature CVD environment. Background Technology

[0002] In CVD coating processes, the clamping fixtures for sheet-like products have a decisive impact on coating uniformity, product yield, and production efficiency. In existing technologies, sheet-like products are typically installed in the furnace using bolt fixing or single-point spherical supports, which presents the following technical drawbacks: First, traditional tooling clamping methods suffer from severe coating masking and uniformity deviations. Traditional tooling often employs "surface contact" or "multi-bolt hard connection" clamping methods, resulting in an excessively large contact area between the tooling and the sheet (typically exceeding 20mm²). This directly prevents CVD deposition at the contact points, creating "process blind spots." For sheets smaller than 100mm, the effective coating area loss rate is often as high as 15%–20%. Simultaneously, the tooling structure significantly obstructs the reactive gases, easily forming airflow vortex zones on the sheet surface, causing coating thickness deviations exceeding ±10%, severely impacting product performance consistency.

[0003] Secondly, traditional tooling is difficult to balance assembly and disassembly efficiency with positioning accuracy. Bolted tooling requires tightening or loosening the threaded fasteners one by one to fix and disassemble the thin sheet. The assembly and disassembly time for a single product often exceeds 30 seconds. Moreover, after multiple assembly and disassembly, the threaded pair is prone to wear, which leads to a decrease in the positioning accuracy of the tooling and further exacerbates the dispersion of the coating position and thickness.

[0004] Third, the existing tooling has poor product compatibility and application flexibility. Most tooling is "customized" and can only be adapted to thin sheet products of a single specification. When it is necessary to process thin sheets of different sizes and shapes, the entire set of tooling needs to be replaced, which is costly and time-consuming, making it difficult to meet the production needs of multiple varieties and small batches.

[0005] In summary, the shortcomings of existing CVD coating tooling in terms of "ensuring coating uniformity, improving assembly and disassembly efficiency, and adapting to multiple specifications" have become bottlenecks restricting the upgrading of CVD processes for thin sheet products. An innovative tooling solution is urgently needed to overcome these technical limitations. Utility Model Content

[0006] The purpose of this invention is to overcome the shortcomings of the prior art and provide a CVD coating fixture suitable for thin sheet products, so as to solve the defects of existing CVD fixtures for thin sheet products, such as severe coating masking, poor uniformity, low disassembly and assembly efficiency, easy decay of positioning accuracy, and insufficient compatibility.

[0007] To achieve the above objectives, the technical solution adopted by this utility model is as follows: A CVD coating fixture suitable for thin sheet products includes a venting plate with a plurality of venting holes and a support assembly. The support assembly includes at least two sets of support columns, each with a locking pin at its lower end. The locking pin is inserted into the venting holes on the venting plate. The support column has a plurality of insertion holes, including a first insertion hole and a second insertion hole. The first insertion hole and the second insertion hole are arranged vertically on the support column, and are staggered along the axial direction of the support column. It also includes a crossbar assembly, which includes a crossbar body, with plug-in posts fixedly connected to both ends of the crossbar body. The plug-in posts are detachably inserted into the plug-in holes. Several support arms are provided on both sides of the crossbar body, and each support arm has at least one top rod at its end. The end of the top rod is a pointed tip, which is used to support the back of the sheet product.

[0008] Furthermore, the push rod is threadedly connected to the support arm.

[0009] Furthermore, both the upper and lower ends of the air vent are chamfered.

[0010] Furthermore, both the insertion hole and the insertion post are provided with rounded corners.

[0011] Furthermore, the outer side of the locking post is provided with external threads, and its lower end passes through the vent hole and is threadedly connected to a connecting block.

[0012] Furthermore, the crossbar body is provided with several sleeves, the support arm is inserted into the sleeves, and a fastening bolt is provided on one side of the sleeve for locking the support arm.

[0013] Furthermore, guide grooves are provided on both sides of the crossbar body, and a slider is provided at one end of the sleeve, which is slidably installed in the guide groove; clamping plates are provided on both sides of the sleeve, and locking bolts are threadedly connected to the clamping plates for locking the sleeve and the crossbar body.

[0014] Furthermore, it also includes an anti-slip component, which has the same structure as the crossbar assembly. The anti-slip component is located at the lower part of the crossbar assembly, and the top rod of the anti-slip component abuts against the front of the sheet product.

[0015] The beneficial effects of this utility model are: (1) This utility model adopts a plug-in assembly process, which improves the efficiency and flexibility of tooling disassembly and assembly. Furthermore, the use of a top rod with a pointed end to support the thin sheet product not only reduces the contact area of ​​a single point and effectively reduces the "process blind zone", but also avoids the positioning deviation caused by repeated disassembly and assembly wear of the threaded pair.

[0016] (2) The top rod and the support arm are connected by threads, which makes it easy to adjust the length of the top rod extending out of the support arm according to the angle at which the thin sheet product is placed on the air diffuser, so that the top rod can stably support the thin sheet product.

[0017] (3) A connecting block is threaded at the lower end of the card column. The connecting block is used to fix the support column and the air diffuser plate, ensuring the stability of the support assembly.

[0018] (4) By setting the sleeve, the length of the support arm can be adjusted, which ensures the stability of the support for thin sheet products of different sizes and further improves the flexibility of the tooling.

[0019] (5) The sleeve and the support arm can slide and adjust on the crossbar body. There is no need to replace the whole set of tooling. Only the spacing of the sleeve needs to be adjusted to adapt to the chemical vapor deposition of thin sheet products of different sizes.

[0020] (6) By setting an anti-slip component at the bottom of the crossbar assembly, the top rod of the anti-slip component is used to hold the front of the sheet product, which prevents the sheet product from sliding on the gas diffuser and improves the stability of the sheet product during chemical vapor deposition. Attached Figure Description

[0021] Figure 1 This utility model presents a diagram showing the usage status of a CVD coating fixture suitable for thin sheet products.

[0022] Figure 2 yes Figure 1 Enlarged view of point A in the middle.

[0023] Figure 3 It is an assembly diagram of the support components, crossbar components, and anti-slip components.

[0024] Figure 4 This is an exploded view of the support column and connecting block.

[0025] Figure 5 This is a schematic diagram of the main body of the crossbar.

[0026] Figure 6 This is a schematic diagram of the sleeve and support arm assembly.

[0027] In the diagram, 1. Air diffuser plate; 11. Air diffuser hole; 12. Chamfer; 2. Support assembly; 21. Support column; 22. Insertion hole; 23. Rounded corner; 24. Locking post; 25. Connecting block; 3. Crossbar assembly; 31. Crossbar body; 32. Insertion post; 33. Support arm; 34. Top rod; 35. Sleeve; 36. Guide groove; 37. Slider; 38. Locking plate; 39. Locking bolt; 4. Anti-slip assembly; 5. Thin sheet product. Detailed Implementation

[0028] The following will be combined with the appendix Figures 1-6The technical solutions in the embodiments of this utility model are clearly and completely described herein. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0029] In the description of this utility model, it should be understood that the terms "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0030] like Figure 1 As shown, a CVD coating fixture suitable for thin sheet products includes a venting plate 1 with a plurality of venting holes 11 and a support assembly 2. Figure 3 , Figure 4 As shown, the support assembly 2 includes at least two sets of support columns 21. The lower end of the support column 21 is provided with a locking post 24. The locking post 24 is inserted into the air vent 11 on the air vent plate 1. The support column 21 is provided with a plurality of insertion holes 22. The insertion holes 22 include a first insertion hole and a second insertion hole. The first insertion hole and the second insertion hole are arranged vertically on the support column 21, and the first insertion hole and the second insertion hole are arranged alternately at axial intervals on the support column 21. like Figure 3 As shown, it also includes a crossbar assembly 3, which includes a crossbar body 31. The height of the support column 21 and the length of the crossbar body 31 are determined according to the coating process requirements. The two ends of the crossbar body 31 are fixedly connected to the insertion columns 32, which are detachably inserted into the insertion holes 22. Several support arms 33 are provided on both sides of the crossbar body 31. Each support arm 33 has at least one top rod 34 at its end. The end of the top rod 34 is a pointed tip, which is used to support the back of the sheet product 5.

[0031] This tooling adopts a plug-in assembly process, which improves the efficiency and flexibility of tooling assembly and disassembly. It also uses a top rod 34 with a pointed end to support the thin sheet product, which not only reduces the contact area at a single point and effectively reduces the "process blind zone", but also avoids positioning deviation caused by repeated disassembly and assembly wear of the threaded pair.

[0032] The top rod 34 is threadedly connected to the support arm 33, which facilitates the adjustment of the length of the top rod 34 extending out of the support arm 33, so as to ensure the stability of the support rod 34 for the thin sheet product.

[0033] like Figure 2 As shown, the upper and lower ends of the vent 11 are provided with chamfers 12, which facilitates the uniform distribution of the reaction gas around the thin film and improves the uniformity of the coating.

[0034] like Figure 4 , Figure 5 As shown, both the insertion hole 22 and the insertion post 32 are provided with rounded corners 23. The rounded corners 23 can reduce the risk of structural cracking at high temperatures by dispersing stress and extend the service life of the tooling.

[0035] like Figure 4 As shown, the external thread of the locking post 24 is provided, and its lower end passes through the air vent 11 and is threadedly connected to the connecting block 25. The connecting block 25 is used to fix the support post 21 to the air vent 1, thus ensuring the stability of the support assembly 2.

[0036] like Figure 6 As shown, the crossbar body 31 is provided with several sleeves 35, and the support arm 33 is inserted into the sleeve 35. A fastening bolt (not shown in the figure) is provided on one side of the sleeve 35 for locking the support arm 33. The sleeve 35 facilitates the adjustment of the length of the support arm 33 to adjust the support position of the top rod 34, ensuring the stability of the support for thin sheet products of different sizes and further improving the flexibility of the tooling.

[0037] like Figure 5 , Figure 6 As shown, guide grooves 36 are provided on both sides of the crossbar body 31, and a slider 37 is provided at one end of the sleeve 35. The slider 37 is slidably installed in the guide groove 36, which facilitates the adjustment of the spacing between adjacent support arms 33 according to the size of the sheet product. The sleeve 35 is provided with clamping plates 38 on both sides, and locking bolts 39 are threaded on the clamping plates 38 for locking the sleeve 35 and the crossbar body 31.

[0038] like Figure 3 As shown, it also includes an anti-slip component 4, which has the same structure as the crossbar component 3. The anti-slip component 4 is located at the lower part of the crossbar component 3. The top rod 34 of the anti-slip component 4 abuts against the front of the sheet product 5, preventing the sheet product from sliding on the gas diffuser plate 1 and improving the stability of the sheet product during chemical vapor deposition.

[0039] The usage process of this tooling is as follows: I. Tooling Pre-treatment Component cleaning: Wipe the contact surfaces of all components, including the diffuser plate 1, support column 21, crossbar body 31, support arm 33, top rod 34, and sleeve 35, with anhydrous ethanol to thoroughly remove dust, oil, and residual impurities.

[0040] II. Basic Assembly Positioning of the gas diffuser plate 1: Install the gas diffuser plate 1 onto the base of the coating furnace through the positioning hole in the furnace body, and use a level to calibrate the levelness of the upper surface of the gas diffuser plate 1. Secure the support column 21 to the gas diffuser plate 1 through the connecting block 25, ensuring that the support column 21 is perpendicular to the gas diffuser plate 1.

[0041] Assembly of crossbar assembly 3: First, assemble the sleeve 35 and the support arm 33. Adjust the length of the support arm 33 extending beyond the sleeve 35 according to the size of the sheet product. Then, install the sleeve 35 on the crossbar body 31. According to the sheet size, select a suitable insertion hole 22 on the support column 21 and insert both ends of the crossbar body 31 into the insertion hole 22. Adjust the length of the top rod 34 extending beyond the support arm 33 so that the spacing between adjacent top rods 34 matches the sheet size. For small-sized sheet products, only one top rod 34 can be set on each support arm 33; for large-sized sheet products, multiple top rods 34 can be set on each support arm 33 to ensure the stability of the sheet product 5.

[0042] After the coating is completed, disassemble in reverse order: first take out the product, then take out the crossbar assembly 3, support column 21 and other components in sequence.

[0043] The above description is merely an example and illustration of the structure of this utility model. Those skilled in the art can make various modifications or additions to the specific embodiments described or use similar methods to replace them, as long as they do not deviate from the scope defined by the structure of this utility model, they should all fall within the protection scope of this utility model.

Claims

1. A CVD coating fixture suitable for thin sheet products, comprising a venting plate (1), wherein the venting plate (1) is provided with a plurality of venting holes (11), and a support assembly (2) is provided on the venting plate (1), wherein the support assembly (2) includes at least two sets of support columns (21), and the lower end of the support column (21) is provided with a locking pin (24), wherein the locking pin (24) is inserted into the venting holes (11) on the venting plate (1), characterized in that, The support column (21) is provided with a plurality of insertion holes (22), the insertion holes (22) include a first insertion hole and a second insertion hole, the first insertion hole and the second insertion hole are arranged vertically on the support column (21), and the first insertion hole and the second insertion hole are arranged alternately at axial intervals on the support column (21). It also includes a crossbar assembly (3), which includes a crossbar body (31). The crossbar body (31) has two ends fixedly connected to plug posts (32), and the plug posts (32) are detachably inserted into the plug holes (22). The crossbar body (31) has several arms (33) on both sides, and each arm (33) has at least one top rod (34) at its end. The end of the top rod (34) is a pointed tip, which is used to support the back of the sheet product (5).

2. The CVD coating fixture for thin-film products according to claim 1, characterized in that, The top rod (34) is threadedly connected to the support arm (33).

3. The CVD coating fixture for thin-film products according to claim 1, characterized in that, The upper and lower ends of the air vent (11) are both chamfered (12).

4. The CVD coating fixture for thin-film products according to claim 1, characterized in that, Both the insertion hole (22) and the insertion post (32) are provided with rounded corners (23).

5. The CVD coating fixture for thin-film products according to claim 1, characterized in that, The locking post (24) has an external thread on its exterior, and its lower end passes through the vent hole (11) and is threadedly connected to a connecting block (25).

6. The CVD coating fixture for thin-film products according to claim 1, characterized in that, The crossbar body (31) is provided with a plurality of sleeves (35), the support arm (33) is inserted into the sleeves (35), and a fastening bolt is provided on one side of the sleeve (35) for locking the support arm (33).

7. A CVD coating fixture suitable for thin-film products according to claim 6, characterized in that, The crossbar body (31) is provided with guide grooves (36) on both sides, and the sleeve (35) is provided with a slider (37) at one end, which is slidably installed in the guide groove (36); the sleeve (35) is provided with a retaining plate (38) on both sides, and a locking bolt (39) is threaded on the retaining plate (38) for locking the sleeve (35) and the crossbar body (31).

8. A CVD coating fixture suitable for sheet products according to any one of claims 1-7, characterized in that, It also includes an anti-slip component (4), which has the same structure as the crossbar component (3). The anti-slip component (4) is located at the lower part of the crossbar component (3), and the top rod (34) of the anti-slip component (4) abuts against the front of the sheet product (5).

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