Liquid cooling system and coating apparatus

Abstract

The application relates to the technical field of semiconductors or photovoltaics, in particular to a liquid cooling system and a coating equipment, which can reduce the cost of the liquid cooling system, simplify the structure of the liquid cooling system, reduce the occupied space of the liquid cooling system and reduce the risk of leakage of the liquid cooling system. The liquid cooling system comprises a liquid inlet pipe, a liquid return pipe, a furnace mouth flange and a furnace tail flange, the liquid inlet pipe and the liquid return pipe are arranged close to the furnace mouth, the liquid inlet pipe is used for allowing cooling medium to enter; the furnace mouth flange is arranged at the furnace mouth, the furnace mouth flange is provided with a first flow channel, the inlet of the first flow channel is communicated with the liquid inlet pipe; the furnace tail flange is arranged at the furnace tail, the furnace tail flange is provided with a second flow channel, the outlet of the first flow channel is communicated with the inlet of the second flow channel, and the outlet of the second flow channel is communicated with the liquid return pipe. The whole liquid cooling system only forms one cooling loop, so that the number of monitoring components and control components of the liquid cooling system can be reduced, the cost of the liquid cooling system can be reduced, the structure of the liquid cooling system can be simplified and the occupied space of the liquid cooling system can be reduced.

Description

Technical Field

[0001] This application relates to the field of semiconductor or photovoltaic technology, and in particular to a liquid cooling system and coating equipment. Background Technology

[0002] In the photovoltaic industry, coating equipment, such as low-pressure chemical vapor deposition (LPCVD) equipment, experiences extremely high temperatures during the process, particularly in the flange sealing areas at the furnace inlet and outlet. To ensure long-term stable operation, LPCVD systems are equipped with liquid cooling systems to forcibly cool these flanges. However, liquid cooling systems are costly, structurally complex, space-consuming, and have poor operational reliability. Utility Model Content

[0003] In view of this, embodiments of this application provide a liquid cooling system and a coating equipment to reduce the cost of the liquid cooling system, simplify the structure of the liquid cooling system, reduce the space occupied by the liquid cooling system, and reduce the risk of leakage of the liquid cooling system.

[0004] In a first aspect, one embodiment of this application provides a liquid cooling system applied to a coating equipment. The coating equipment includes a furnace body, which includes a furnace opening and a furnace tail disposed opposite to each other along its length. The liquid cooling system includes: an inlet pipe and a return pipe, both of which are disposed near the furnace opening. The inlet pipe is for supplying a cooling medium. A furnace opening flange is disposed at the furnace opening, and the furnace opening flange has a first flow channel, the inlet of which is connected to the inlet pipe. A furnace tail flange is disposed at the furnace tail, and the furnace tail flange has a second flow channel, the outlet of which is connected to the inlet of which is connected to the first flow channel, and the outlet of which is connected to the return pipe.

[0005] In conjunction with the first aspect, in some implementations of the first aspect, the liquid cooling system further includes: a first connecting pipe extending along the length of the furnace body, wherein the outlet of the first flow channel is connected to the inlet of the second flow channel through the first connecting pipe; and a second connecting pipe extending along the length of the furnace body, wherein the outlet of the second flow channel is connected to the return pipe through the second connecting pipe.

[0006] In conjunction with the first aspect, in some implementations of the first aspect, the liquid cooling system further includes: a first flexible tube, the outlet of the first flow channel being connected to a first connecting tube via the first flexible tube; and / or, a second flexible tube, the first connecting tube being connected to the inlet of the second flow channel via the second flexible tube; and / or, a third flexible tube, the outlet of the second flow channel being connected to the second connecting tube via the third flexible tube.

[0007] In conjunction with the first aspect, in some implementations of the first aspect, the liquid cooling system further includes: a fourth flexible tube, through which the inlet pipe is connected to the inlet of the first flow channel; and / or, a fifth flexible tube, through which the second connecting pipe is connected to the return pipe.

[0008] In conjunction with the first aspect, in some implementations of the first aspect, a control valve is provided between the inlet pipe and the first flow channel and / or between the return pipe and the second flow channel, the control valve being used to control the on / off state of the cooling medium; and / or, a flow sensor is provided between the inlet pipe and the first flow channel and / or between the return pipe and the second flow channel, the flow sensor being used to detect the flow rate of the cooling medium.

[0009] In conjunction with the first aspect, in some implementations of the first aspect, the first connecting pipe and the second connecting pipe are arranged on the same side of the furnace opening flange in the radial direction.

[0010] In conjunction with the first aspect, in some implementations of the first aspect, the inlet pipe and the return pipe are arranged on the same side of the furnace opening flange in the radial direction; in the radial direction of the furnace opening flange, both the first connecting pipe and the second connecting pipe are arranged between the furnace opening flange and the inlet pipe, and both the first connecting pipe and the second connecting pipe are arranged between the furnace opening flange and the return pipe.

[0011] In conjunction with the first aspect, in some implementations of the first aspect, the furnace opening flange includes an inner furnace opening flange and an outer furnace opening flange; the first flow channel includes a first inner flow channel and a first outer flow channel that are interconnected; the first inner flow channel is located at the inner furnace opening flange, the first outer flow channel is located at the outer furnace opening flange; one of the first outer flow channel and the first inner flow channel is connected to the liquid inlet pipe; and the other of the first outer flow channel and the first inner flow channel is connected to the inlet of the second flow channel; and / or, the furnace opening flange includes a tail furnace inner flange and a tail furnace outer flange; the second flow channel includes a second inner flow channel and a second outer flow channel that are interconnected; the second inner flow channel is located at the tail furnace inner flange, the second outer flow channel is located at the tail furnace outer flange; one of the second outer flow channel and the second inner flow channel is connected to the first flow channel; and the other of the second outer flow channel and the second inner flow channel is connected to the liquid return pipe.

[0012] In conjunction with the first aspect, in some implementations of the first aspect, the liquid cooling system further includes: a sixth flexible tube, through which the first inner flow channel and the first outer flow channel are connected; and / or, a seventh flexible tube, through which the second inner flow channel and the second outer flow channel are connected.

[0013] Secondly, one embodiment of this application provides a coating apparatus, comprising: a furnace body, including a furnace opening and a furnace tail disposed opposite to each other along its length; a liquid cooling system, which is any of the above-mentioned liquid cooling systems, with a furnace opening flange disposed at the furnace opening and a furnace tail flange disposed at the furnace tail.

[0014] The liquid cooling system provided in this embodiment has a cooling medium that enters through the inlet pipe and flows into the first flow channel of the furnace opening flange, cooling the flange. The cooling medium then flows out of the first flow channel and enters the second flow channel of the furnace tail flange, cooling the tail flange as well. Finally, the cooling medium flows out through the return pipe, completing the entire liquid cooling system cycle. Thus, the entire liquid cooling system forms only one cooling loop, reducing the number of monitoring and control components. This not only lowers the cost of the liquid cooling system but also simplifies its structure and reduces its footprint. Furthermore, the reduced number of joints lowers the risk of leakage and improves the operational reliability of the liquid cooling system. Attached Figure Description

[0015] The above and other objects, features, and advantages of this application will become more apparent from the more detailed description of the embodiments of this application in conjunction with the accompanying drawings. The drawings are provided to further illustrate the embodiments of this application and form part of the specification. They are used together with the embodiments of this application to explain this application and do not constitute a limitation thereof. In the drawings, the same reference numerals generally represent the same components or steps.

[0016] Figure 1 The diagram shown is a structural schematic of a liquid cooling system provided in an embodiment of this application.

[0017] Figure 2 As shown Figure 1 A magnified view of a portion of point A in the middle.

[0018] Figure 3 As shown Figure 1 A magnified view of a section at point B.

[0019] Figure 4 As shown Figure 1 A magnified view of a section at point C.

[0020] Figure 5 As shown Figure 1 A magnified view of a section at point D.

[0021] Figure label: 10. Liquid cooling system; 1. Inlet pipe; 2. Return pipe; 3. Furnace opening flange; 31. Inner flange of furnace opening; 32. Outer flange of furnace opening; 4. Furnace tail flange; 41. Inner flange of furnace tail; 42. Outer flange of furnace tail; 5. First connecting pipe; 6. Second connecting pipe; 7. Control valve; 71. Inlet valve; 72. Return valve; 8. Flow sensor; 91. First flexible pipe; 92. Second flexible pipe; 93. Third flexible pipe; 94. Fourth flexible pipe; 95. Fifth flexible pipe; 96. Sixth flexible pipe; 97. Seventh flexible pipe; 101. First right-angle compression elbow; 102. Second right-angle compression elbow. Detailed Implementation

[0022] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of this application.

[0023] Currently, both the furnace inlet flange and the furnace tail flange of the coating equipment are equipped with flow channels. The cooling medium delivered from the external purification station reaches the furnace body and is divided into two independent branches: one branch provides cooling for each layer of flanges at the furnace inlet, and the other branch provides cooling for each layer of flanges at the furnace tail. Each layer of flanges at the furnace inlet and the furnace tail forms a cooling circuit, and multiple cooling circuits are connected in parallel. Each cooling circuit is independently equipped with a set of monitoring and control components, such as sensors and control valves.

[0024] Because each flange requires a complete set of monitoring and control components, the total number of these components and related piping in the liquid cooling system is enormous, resulting in high material costs. Furthermore, the large number of monitoring and control components located beside the flanges leads to a complex and congested piping layout within the furnace body. This not only complicates the liquid cooling system's structure and occupies a significant amount of space but also increases installation time and complicates subsequent maintenance and repair. In addition, there is a risk of cooling medium leakage at the connections of sensors, control valves, and piping. The more monitoring and control components there are, the higher the risk of leakage in the liquid cooling system, impacting the operational reliability of the coating equipment.

[0025] Figure 1 The diagram shown is a structural schematic of a liquid cooling system 10 provided in an embodiment of this application. Figure 2 As shown Figure 1 A magnified view of a portion of point A in the middle. Figure 3 As shown Figure 1 A magnified view of a section at point B.

[0026] like Figures 1 to 3 As shown, the liquid cooling system 10 is applied to the coating equipment, which includes a furnace body, a front furnace door, and a rear furnace door. The furnace body includes a furnace opening and a furnace tail opening arranged opposite each other along its length. Both the furnace opening and the furnace tail opening have openings. The front furnace door is located at the furnace opening and seals the furnace opening, while the rear furnace door is located at the furnace tail and seals the furnace tail opening. The front furnace door, the rear furnace door, and the furnace body form a process chamber for accommodating the parts to be coated. The front furnace door includes a furnace opening flange 3, and the rear furnace door includes a furnace tail flange 4. The liquid cooling system 10 is used to cool the furnace opening flange 3 and the furnace tail flange 4.

[0027] Exemplarily, the coating equipment can be any device capable of coating an object. Exemplarily, the coating equipment can include a vapor deposition device. For example, the coating equipment can include a low-pressure chemical vapor deposition (LPCVD) device, a plasma-enhanced chemical vapor deposition (PECVD) device, etc. Specifically, the coating equipment is used to coat the workpiece. The workpiece to be coated can include components or raw materials used to form photovoltaic modules. For example, the workpiece to be coated can be a silicon wafer, a solar cell, a silicon wafer, etc.

[0028] like Figures 1 to 3 As shown, the liquid cooling system 10 of this embodiment includes an inlet pipe 1, a return pipe 2, a furnace opening flange 3, and a furnace tail flange 4. Both the inlet pipe 1 and the return pipe 2 are located near the furnace opening. The inlet pipe 1 supplies the cooling medium. The furnace opening flange 3 has a first flow channel, the inlet of which is connected to the inlet pipe 1. The furnace tail flange 4 has a second flow channel, the outlet of which is connected to the inlet of the second flow channel, and the outlet of the second flow channel is connected to the return pipe 2.

[0029] When the liquid cooling system 10 of this embodiment is working, the cooling medium enters the liquid cooling system 10 through the inlet pipe 1. By setting a first flow channel in the furnace port flange 3 and connecting the inlet of the first flow channel to the inlet pipe 1, the cooling medium in the inlet pipe 1 can enter the first flow channel of the furnace port flange 3. The cooling medium in the first flow channel exchanges heat with the furnace port flange 3 to achieve cooling and heat dissipation of the furnace port flange 3. By setting a second flow channel in the furnace tail flange 4 and connecting the outlet of the second flow channel to the outlet of the first flow channel, the cooling medium in the first flow channel can flow into the second flow channel to achieve cooling and heat dissipation of the furnace tail flange 4. By connecting the outlet of the second flow channel to the return pipe 2, the cooling medium in the second flow channel can flow out through the return pipe 2 to carry away the heat of the furnace port flange 3 and the furnace tail flange 4.

[0030] In the liquid cooling system 10 of this embodiment, the cooling medium enters through the inlet pipe 1 and flows into the first flow channel of the furnace opening flange 3, thereby cooling the furnace opening flange 3. Then, the cooling medium flowing out of the first flow channel enters the second flow channel of the furnace tail flange 4, cooling the furnace tail flange 4. Finally, the cooling medium flows out through the return pipe 2, completing the entire circulation of the liquid cooling system 10. Thus, the entire liquid cooling system 10 forms only one cooling loop, thereby reducing the number of monitoring and control components in the liquid cooling system 10. This not only reduces the cost of the liquid cooling system 10 but also simplifies its structure and reduces the space it occupies. Furthermore, the reduced number of joints in the liquid cooling system 10 also reduces the risk of leakage and improves the operational reliability of the liquid cooling system 10.

[0031] Furthermore, the cooling medium is typically supplied by an external clean bench, which is usually located near the furnace opening. By placing both the inlet pipe 1 and the return pipe 2 near the furnace opening, and thus near the clean bench, the distance between the short inlet pipe 1 and the return pipe 2 and the clean bench can be reduced, shortening the connecting pipes between the inlet pipe 1 and the clean bench, and further reducing the cost of the liquid cooling system 10.

[0032] For example, the cooling medium is cooling water or the like.

[0033] For example, the furnace opening flange 3 is provided with a first cooling groove, which forms a first flow channel. The furnace tail flange 4 is provided with a second cooling groove, which forms a second flow channel. The first cooling groove can be an annular groove arranged circumferentially around the furnace opening flange 3, and the second cooling groove can be an annular groove arranged circumferentially around the furnace tail flange 4.

[0034] In some embodiments, such as Figures 1 to 3 As shown, the liquid cooling system 10 also includes a first connecting pipe 5 and a second connecting pipe 6. The first connecting pipe 5 extends along the length of the furnace body, and the outlet of the first flow channel is connected to the inlet of the second flow channel through the first connecting pipe 5. The second connecting pipe 6 extends along the length of the furnace body, and the outlet of the second flow channel is connected to the return pipe 2 through the second connecting pipe 6.

[0035] For example, such as Figure 1As shown, the length of the furnace body is aligned with the X-direction. The furnace opening flange 3 and the furnace tail flange 4 are spaced apart along the X-direction. Both the first connecting pipe 5 and the second connecting pipe 6 extend along the X-direction. The outlet of the first flow channel is connected to the end of the first connecting pipe 5 near the furnace opening flange 3, and the inlet of the second flow channel is connected to the end of the second connecting pipe 6 near the furnace tail flange 4, thus connecting the outlet of the first flow channel to the inlet of the second flow channel via the first connecting pipe 5. The outlet of the second flow channel is connected to the end of the second connecting pipe 6 near the furnace tail flange 4, and the end of the second connecting pipe 6 near the furnace opening flange 3 is connected to the return liquid pipe 2.

[0036] By setting up the first connecting pipe 5 and the second connecting pipe 6, the piping layout of the liquid cooling system 10 is clear, which facilitates the installation of the liquid cooling system 10, as well as the later maintenance and repair of the liquid cooling system 10.

[0037] For example, both the first connecting pipe 5 and the second connecting pipe 6 are 1 / 2BA pipes.

[0038] In some embodiments, such as Figure 1 and Figure 2 As shown, the liquid cooling system 10 also includes a first flexible tube 91, and the outlet of the first flow channel is connected to the first connecting tube 5 through the first flexible tube 91.

[0039] The inlet of the first flexible pipe 91 is connected to the outlet of the first flow channel, and the outlet of the first flexible pipe 91 is connected to the end of the first connecting pipe 5 near the furnace flange 3.

[0040] By connecting the outlet of the first flow channel to the first connecting pipe 5 through the first flexible pipe 91, even if there is a deviation between the relative position of the outlet of the first flow channel and the interface of the second connecting pipe and the design during the installation of the liquid cooling system 10, the first flexible pipe 91 can be deformed by bending or stretching to achieve the connection between the outlet of the first flow channel and the first connecting pipe 5, which further facilitates the installation of the liquid cooling system 10 and the subsequent maintenance of the liquid cooling system 10.

[0041] For example, the first flexible tube 91 is a corrugated tube.

[0042] In some embodiments, such as Figure 1 and Figure 3 As shown, the liquid cooling system 10 also includes a second flexible tube 92, and the first connecting tube 5 is connected to the inlet of the second flow channel through the second flexible tube 92.

[0043] The inlet of the second flexible pipe 92 is connected to the end of the first connecting pipe 5 near the furnace tail flange 4, and the outlet of the second flexible pipe 92 is connected to the inlet of the second flow channel.

[0044] By connecting the first connecting pipe 5 to the inlet of the second flow channel through the second flexible pipe 92, even if the relative position between the first connecting pipe 5 and the inlet of the second flow channel deviates from the design during the installation of the liquid cooling system 10, the second flexible pipe 92 can be bent or stretched to deform it, thereby achieving the connection between the first connecting pipe 5 and the inlet of the second flow channel. This further facilitates the installation of the liquid cooling system 10 and the subsequent maintenance of the liquid cooling system 10.

[0045] For example, the second flexible tube 92 is a corrugated tube.

[0046] For example, the second flexible tube 92 is connected to the first connecting tube 5 via a first right-angle ferrule elbow 101.

[0047] In some embodiments, such as Figure 1 and Figure 3 As shown, the liquid cooling system 10 also includes a third flexible tube 93, and the outlet of the second flow channel is connected to the second connecting tube 6 through the third flexible tube 93.

[0048] The inlet of the third flexible pipe 93 is connected to the outlet of the second flow channel, and the outlet of the third flexible pipe 93 is connected to the end of the second connecting pipe 6 near the furnace tail flange 4.

[0049] By connecting the outlet of the second flow channel to the second connecting pipe 6 through the third flexible pipe 93, even if the relative position between the outlet of the second flow channel and the second connecting pipe 6 deviates from the design during the installation of the liquid cooling system 10, the third flexible pipe 93 can be bent or stretched to deform it, thereby achieving the connection between the outlet of the second flow channel and the second connecting pipe 6. This further facilitates the installation of the liquid cooling system 10 and the subsequent maintenance of the liquid cooling system 10.

[0050] For example, the third flexible tube 93 is a corrugated tube.

[0051] In some embodiments, such as Figure 1 and Figure 2 As shown, the liquid cooling system 10 also includes a fourth flexible tube 94, through which the liquid inlet pipe 1 is connected to the inlet of the first flow channel.

[0052] The inlet of the fourth flexible tube 94 is connected to the end of the liquid inlet pipe 1 near the furnace flange 3, and the outlet of the fourth flexible tube 94 is connected to the inlet of the first flow channel.

[0053] By connecting the liquid inlet pipe 1 to the inlet of the first flow channel through the fourth flexible pipe 94, even if the relative position between the liquid inlet pipe 1 and the inlet of the first flow channel deviates from the design during the installation of the liquid cooling system 10, the fourth flexible pipe 94 can be bent or stretched to deform it, thereby achieving the connection between the liquid inlet pipe 1 and the inlet of the first flow channel. This further facilitates the installation of the liquid cooling system 10 and the subsequent maintenance of the liquid cooling system 10.

[0054] For example, the fourth flexible tube 94 is a corrugated tube.

[0055] In some embodiments, such as Figure 1 As shown, the liquid cooling system 10 also includes a fifth flexible tube 95, and the second connecting tube 6 is connected to the return tube 2 through the fifth flexible tube 95.

[0056] The inlet of the fifth flexible pipe 95 is connected to the end of the second connecting pipe 6 near the furnace tail flange 4, and the outlet of the fifth flexible pipe 95 is connected to the return liquid pipe 2.

[0057] By connecting the second connecting pipe 6 to the return pipe 2 via the fifth flexible pipe 95, even if the relative position between the second connecting pipe 6 and the return pipe 2 deviates from the design during the installation of the liquid cooling system 10, the fifth flexible pipe 95 can be bent or stretched to deform it, thereby achieving the connection between the second connecting pipe 6 and the return pipe 2. This further facilitates the installation of the liquid cooling system 10 and the subsequent maintenance of the liquid cooling system 10.

[0058] For example, the fifth flexible tube 95 is a corrugated tube.

[0059] For example, the fifth flexible tube 95 and the return tube 2 are connected by the second right-angle clamp elbow 102. Figure 4 As shown Figure 1 A magnified view of a section at point C. Figure 5 As shown Figure 1 A magnified view of a section at point D.

[0060] In some embodiments, such as Figure 1 , Figure 4 and Figure 5 As shown, a control valve 7 is provided between the liquid inlet pipe 1 and the first flow channel and / or between the liquid return pipe 2 and the second flow channel. The control valve 7 is used to control the flow of the cooling medium.

[0061] For example, at least one of the fourth flexible tube 94 and the fifth flexible tube 95 is provided with a control valve 7.

[0062] The control valve 7 is provided between the inlet pipe 1 and the first flow channel and / or between the return pipe 2 and the second flow channel. This can be understood as follows: control valve 7 is provided between the inlet pipe 1 and the first flow channel and between the return pipe 2 and the second flow channel; or, control valve 7 is provided only between the inlet pipe 1 and the first flow channel, and no control valve 7 is provided between the return pipe 2 and the second flow channel; or, control valve 7 is provided only between the return pipe 2 and the second flow channel, and no control valve 7 is provided between the inlet pipe 1 and the first flow channel.

[0063] By providing a control valve 7 between the liquid inlet pipe 1 and the first flow channel and / or between the liquid return pipe 2 and the second flow channel, the flow rate and on / off state of the cooling medium in the liquid cooling system 10 can be easily controlled. This allows for easy adjustment of the cooling medium flow rate as needed, ensuring the cooling effect of the furnace mouth flange 3 and the furnace tail flange 4 while avoiding excessive cooling medium flow that would increase the operating cost of the coating equipment.

[0064] For example, both the fourth flexible tube 94 and the fifth flexible tube 95 are equipped with control valves 7, and the control valve 7 on the fourth flexible tube 94 is an inlet valve 71, while the control valve 7 on the fifth flexible tube 95 is a return valve 72. The inlet valve 71 is used to control the flow rate and on / off state of the cooling medium flowing from the inlet pipe 1 to the first flow channel, and the return valve 72 is used to control the flow rate and on / off state of the cooling medium flowing to the return pipe 2.

[0065] For example, control valve 7 can be a ball valve.

[0066] In some embodiments, such as Figure 1 , Figure 4 and Figure 5 As shown, a flow sensor 8 is provided between the inlet pipe 1 and the first flow channel and / or between the return pipe 2 and the second flow channel. The flow sensor 8 is used to detect the flow rate of the cooling medium.

[0067] For example, at least one of the fourth flexible tube 94 and the fifth flexible tube 95 is provided with a flow sensor 8.

[0068] In this embodiment, at least one flow sensor 8 is provided between the inlet pipe 1 and the first flow channel and / or between the return pipe 2 and the second flow channel. This can be understood as follows: a flow sensor 8 is provided between the inlet pipe 1 and the first flow channel and between the return pipe 2 and the second flow channel; or, a flow sensor 8 is provided between the inlet pipe 1 and the first flow channel, but no flow sensor 8 is provided between the return pipe 2 and the second flow channel; or, a flow sensor 8 is provided between the return pipe 2 and the second flow channel, but no flow sensor 8 is provided between the inlet pipe 1 and the first flow channel.

[0069] By installing a flow sensor 8 between the inlet pipe 1 and the first flow channel and / or between the return pipe 2 and the second flow channel, the flow rate of the cooling medium in the liquid cooling system 10 can be accurately detected, so as to control the flow rate of the cooling medium in the liquid cooling system 10 as needed.

[0070] In some embodiments, such as Figure 1 As shown, in the radial direction of the furnace opening flange 3, the first connecting pipe 5 and the second connecting pipe 6 are arranged on the same side of the furnace opening flange 3.

[0071] For example, such as Figure 1 As shown, the radial direction of the furnace flange 3 is consistent with the Y direction, and the first connecting pipe 5 and the second connecting pipe 6 are arranged on the same side of the furnace flange 3 in the Y direction.

[0072] By radially positioning the first connecting pipe 5 and the second connecting pipe 6 on the same side of the furnace opening flange 3, the first connecting pipe 5 and the second connecting pipe 6 can be connected to relevant pipelines on the same side of the furnace opening flange 3 during the installation of the liquid cooling system 10. For example, the first connecting pipe 5 can be connected to the first flexible pipe 91, and the second connecting pipe 6 can be connected to the third flexible pipe 93. This further facilitates the installation of the liquid cooling system 10 and its subsequent maintenance.

[0073] In some embodiments, such as Figure 1 As shown, in the radial direction of the furnace flange 3, the inlet pipe 1 and the return pipe 2 are located on the same side of the furnace flange 3. In the radial direction of the furnace flange 3, the first connecting pipe 5 and the second connecting pipe 6 are both located between the furnace flange 3 and the inlet pipe 1, and the first connecting pipe 5 and the second connecting pipe 6 are both located between the furnace flange 3 and the return pipe 2.

[0074] For example, such as Figure 1 As shown, the inlet pipe 1 and the return pipe 2 are located on the same side of the furnace flange 3 in the Y direction.

[0075] By radially positioning the inlet pipe 1 and return pipe 2 on the same side of the furnace opening flange 3, the inlet pipe 1 and return pipe 2 can be connected to relevant pipelines on the same side of the furnace opening flange 3 during the installation of the liquid cooling system 10. For example, the inlet pipe 1 can be connected to the first flow channel, and the second flow channel can be connected to the return pipe 2. This further facilitates the installation of the liquid cooling system 10 and its subsequent maintenance.

[0076] Furthermore, in the radial direction of the furnace flange 3, by placing both the first connecting pipe 5 and the second connecting pipe 6 between the furnace flange 3 and the liquid inlet pipe 1, and placing both the first connecting pipe 5 and the second connecting pipe 6 between the furnace flange 3 and the liquid return pipe 2, the overall layout of the liquid cooling system 10 is compact, which is beneficial to further reduce the space occupied by the liquid cooling system 10 and reduce the cost of the liquid cooling system 10.

[0077] In some embodiments, such as Figure 1 and Figure 2As shown, the furnace opening flange 3 includes an inner furnace opening flange 31 and an outer furnace opening flange 32. The first flow channel includes a first inner flow channel and a first outer flow channel that are interconnected. The first inner flow channel is located on the inner furnace opening flange 31, and the first outer flow channel is located on the outer furnace opening flange 32. One of the first outer flow channel and the first inner flow channel is connected to the liquid inlet pipe 1, and the other of the first outer flow channel and the first inner flow channel is connected to the inlet of the second flow channel.

[0078] Among them, the inner flange 31 of the furnace opening is located closer to the furnace body than the outer flange 32 of the furnace opening, for example, Figure 1 As shown, in the X direction, the inner flange 31 of the furnace opening is positioned closer to the tail flange 4 than the outer flange 32 of the furnace opening.

[0079] For example, the inlet of the first outer flow channel is connected to the liquid inlet pipe 1, the outlet of the first outer flow channel is connected to the inlet of the first inner flow channel, and the outlet of the first inner flow channel is connected to the end of the first connecting pipe 5 near the furnace flange 3. Alternatively, the inlet of the first inner flow channel is connected to the liquid inlet pipe 1, the outlet of the first inner flow channel is connected to the inlet of the first outer flow channel, and the outlet of the first outer flow channel is connected to the end of the first connecting pipe 5 near the furnace flange 3.

[0080] By connecting the first outer flow channel and the first inner flow channel as described above, the cooling medium in the inlet pipe 1 first enters one of the first inner flow channel of the inner flange 31 and the first outer flow channel of the outer flange 32, and then enters the other of the first inner flow channel of the inner flange 31 and the first outer flow channel of the outer flange 32, thus connecting the cooling circuits of the inner flange 31 and the outer flange 32 in series. This further reduces the number of monitoring and control components in the liquid cooling system 10, further reduces the cost of the liquid cooling system 10, simplifies the structure of the liquid cooling system 10, reduces the space occupied by the liquid cooling system 10, and improves the operational reliability of the liquid cooling system 10.

[0081] In some embodiments, such as Figure 1 and Figure 3 As shown, the furnace mouth flange 3 includes an inner furnace tail flange 41 and an outer furnace tail flange 42. The second flow channel includes a second inner flow channel and a second outer flow channel that are interconnected. The second inner flow channel is located at the inner furnace tail flange 41, and the second outer flow channel is located at the outer furnace tail flange 42. One of the second outer flow channel and the second inner flow channel is connected to the first flow channel, and the other of the second outer flow channel and the second inner flow channel is connected to the return liquid pipe 2.

[0082] Among them, the inner flange 41 at the furnace tail is positioned closer to the furnace body than the outer flange 42 at the furnace tail, for example, Figure 1 As shown, in the X direction, the inner flange 41 at the furnace tail is positioned closer to the furnace mouth flange 3 than the outer flange 42 at the furnace tail.

[0083] For example, the inlet of the second outer flow channel is connected to the end of the first connecting pipe 5 near the furnace opening flange 3, the outlet of the second outer flow channel is connected to the inlet of the second inner flow channel, and the outlet of the second inner flow channel is connected to the end of the second connecting pipe 6 near the furnace tail flange 4. Alternatively, the end of the first connecting pipe 5 of the second inner flow channel near the furnace opening flange 3 is connected, the outlet of the second inner flow channel is connected to the inlet of the second outer flow channel, and the outlet of the second outer flow channel is connected to the end of the second connecting pipe 6 near the furnace tail flange 4.

[0084] By connecting the second outer flow channel and the second inner flow channel as described above, the cooling medium first enters one of the second inner flow channel of the furnace tail inner flange 41 and the second outer flow channel of the furnace tail outer flange 42, and then enters the other of the second inner flow channel of the furnace tail inner flange 41 and the second outer flow channel of the furnace tail outer flange 42, thus connecting the cooling circuits of the furnace tail inner flange 41 and the furnace tail outer flange 42 in series. This further reduces the number of monitoring and control components in the liquid cooling system 10, further reduces the cost of the liquid cooling system 10, simplifies the structure of the liquid cooling system 10, reduces the space occupied by the liquid cooling system 10, and improves the operational reliability of the liquid cooling system 10.

[0085] In some embodiments, such as Figure 1 and Figure 2 As shown, the liquid cooling system 10 also includes a sixth flexible tube 96, through which the first inner flow channel and the first outer flow channel are connected.

[0086] The inlet of the sixth flexible tube 96 is connected to the outlet of the first inner flow channel, and the outlet of the sixth flexible tube 96 is connected to the inlet of the first outer flow channel.

[0087] By connecting the first inner flow channel and the first outer flow channel through the sixth flexible tube 96, even if the relative positions between the inlet of the first inner flow channel and the outlet of the first outer flow channel, or between the outlet of the first inner flow channel and the inlet of the first outer flow channel, deviate from the design during the installation of the liquid cooling system 10, the sixth flexible tube 96 can be bent or stretched to deform it, thereby achieving the connection between the first inner flow channel and the first outer flow channel. This further facilitates the installation of the liquid cooling system 10 and the subsequent maintenance of the liquid cooling system 10.

[0088] For example, the sixth flexible tube 96 is a corrugated tube.

[0089] In some embodiments, such as Figure 1 and Figure 3 As shown, the liquid cooling system 10 also includes a seventh flexible tube 97, through which the second inner flow channel and the second outer flow channel are connected.

[0090] The inlet of the seventh flexible tube 97 is connected to the outlet of the second inner flow channel, and the outlet of the seventh flexible tube 97 is connected to the inlet of the second outer flow channel.

[0091] By connecting the second inner flow channel and the second outer flow channel through the seventh flexible tube 97, even if there is a deviation between the relative positions of the inlet of the second inner flow channel and the outlet of the second outer flow channel, or the outlet of the second inner flow channel and the inlet of the second outer flow channel, during the installation of the liquid cooling system 10, the seventh flexible tube 97 can be bent or stretched to deform it, thereby achieving the connection between the second inner flow channel and the second outer flow channel. This further facilitates the installation of the liquid cooling system 10 and the subsequent maintenance of the liquid cooling system 10.

[0092] For example, the seventh flexible tube 97 is a corrugated tube.

[0093] refer to Figures 1 to 5 The working process of the liquid cooling system 10 in the embodiments of this application is described in detail below: The cooling medium enters the cooling system through the inlet pipe 1, flows through the inlet valve 71 and the fourth flexible pipe 94, and then enters the first outer flow channel of the furnace mouth outer flange 32. After flowing out of the first outer flow channel, the cooling medium enters the first inner flow channel of the furnace mouth inner flange 31 through the sixth corrugated pipe. Afterwards, the cooling medium flows out of the first inner flow channel, enters the first connecting pipe 5 through the first flexible pipe 91, and flows towards the furnace tail. At the furnace tail, the cooling medium flows through the first right-angle compression elbow 101 and the second flexible pipe 92, and then enters the second outer flow channel of the furnace tail outer flange 42. After circulating in the second outer flow channel, the cooling medium flows out, and then enters the second inner flow channel of the furnace tail inner flange 41 through the seventh flexible pipe 97. After circulating in the second inner flow channel, the cooling medium flows out, enters the second connecting pipe 6, and flows towards the furnace mouth. At the furnace mouth, the cooling medium passes through the second right-angle compression elbow 102 and the fifth flexible pipe 95, and then sequentially passes through the return valve 72 and the flow sensor 8, finally converging into the main return pipe 2, completing the entire cooling cycle.

[0094] The liquid cooling system 10 embodiments of this application have been described in detail above. The coating equipment embodiments of this application are described in detail below. It should be understood that the descriptions of the liquid cooling system 10 embodiments correspond to the descriptions of the coating equipment embodiments; therefore, any parts not described in detail can be referred to the preceding liquid cooling system 10 embodiments.

[0095] The coating equipment includes a furnace body and a liquid cooling system 10. The furnace body includes a furnace opening and a furnace tail arranged opposite to each other along its length. The liquid cooling system 10 is the liquid cooling system 10 of any of the above embodiments. The furnace opening flange 3 is located at the furnace opening, and the furnace tail flange 4 is located at the furnace tail.

[0096] Since the entire liquid cooling system 10 of the coating equipment forms only one cooling loop, the number of monitoring and control components in the liquid cooling system 10 can be reduced. This not only lowers the cost of the liquid cooling system 10 but also simplifies its structure and reduces its footprint. The reduced number of joints in the liquid cooling system 10 also reduces the risk of leakage and improves its operational reliability. Therefore, the coating equipment is characterized by lower cost, smaller footprint, and higher operational reliability.

[0097] The liquid cooling system 10 of this application embodiment merges the originally separate cooling circuits of the furnace opening flange 3 and the furnace tail flange 4 into a single cooling circuit, eliminating the flow sensor 8 and control valve 7 of the furnace tail flange 4. It simply connects the tail flange 4 in series with the furnace opening flange 3's cooling circuit via a simple pipe. This directly eliminates a large number of expensive flow sensors 8 and control valves 7, reducing the material and assembly costs of the liquid cooling system 10. It greatly simplifies the furnace's piping layout, making the coating equipment structure more compact and clear, improving the aesthetics and maintainability of the liquid cooling system 10. Due to the reduction in the number of control valves 7 and joints, the potential leakage points of the entire liquid cooling system 10 are also significantly reduced, thereby improving the overall reliability and safety of the liquid cooling system 10. Through reasonable pipe diameter selection and series design, while simplifying the cooling system, it ensures that the flow rate and pressure of the cooling medium flowing through the furnace tail flange 4 still meet its heat dissipation requirements, and the cooling efficiency of the coating equipment is not affected.

[0098] The basic principles of this application have been described above with reference to specific embodiments. However, it should be noted that the advantages, benefits, and effects mentioned in this application are merely examples and not limitations, and should not be considered as essential features of each embodiment of this application. Furthermore, the specific details disclosed above are for illustrative and facilitative purposes only, and are not limitations. These details do not limit the application to the necessity of employing the aforementioned specific details for implementation.

[0099] The block diagrams of devices, apparatuses, devices, and systems involved in this application are merely illustrative examples and are not intended to require or imply that they must be connected, arranged, or configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, devices, and systems can be connected, arranged, and configured in any manner. Words such as “comprising,” “including,” “featuring,” “having,” etc., are open-ended terms meaning “including but not limited to,” and are used interchangeably with them. The terms “or” and “and” as used herein refer to the terms “and / or,” and are used interchangeably with them unless the context clearly indicates otherwise. The term “such as” as used herein refers to the phrase “such as but not limited to,” and is used interchangeably with it.

[0100] It should also be noted that in the apparatus, equipment, and methods of this application, the components or steps can be disassembled and / or recombined. These disassemblies and / or recombinations should be considered as equivalent solutions of this application.

[0101] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use this application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein can be applied to other aspects without departing from the scope of this application. Therefore, this application is not intended to be limited to the aspects shown herein, but rather to be accorded the widest scope consistent with the principles and novel features disclosed herein.

[0102] The above description has been given for illustrative and descriptive purposes. Furthermore, this description is not intended to limit the embodiments of this application to the forms disclosed herein. Although numerous exemplary aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and sub-combinations thereof.

Claims

1. A liquid cooling system, characterized in that, The coating equipment is applied to a coating system, which includes a furnace body comprising a furnace opening and a furnace tail arranged opposite to each other along its length; the liquid cooling system includes: The liquid inlet pipe and the liquid return pipe are both located near the furnace opening, and the liquid inlet pipe is for the cooling medium to enter; A furnace opening flange is provided at the furnace opening, and the furnace opening flange is provided with a first flow channel, the inlet of the first flow channel being connected to the liquid inlet pipe; A tail flange is provided at the tail of the furnace. The tail flange is provided with a second flow channel. The outlet of the first flow channel is connected to the inlet of the second flow channel, and the outlet of the second flow channel is connected to the return liquid pipe.

2. The liquid cooling system according to claim 1, characterized in that, Also includes: The first connecting pipe extends along the length of the furnace body, and the outlet of the first flow channel is connected to the inlet of the second flow channel through the first connecting pipe; The second connecting pipe extends along the length of the furnace body, and the outlet of the second flow channel is connected to the return pipe through the second connecting pipe.

3. The liquid cooling system according to claim 2, characterized in that, Also includes: The first flexible tube connects the outlet of the first flow channel to the first connecting tube. And / or, A second flexible tube, wherein the first connecting tube is connected to the inlet of the second flow channel through the second flexible tube; and / or, The third flexible tube connects the outlet of the second flow channel to the second connecting tube.

4. The liquid cooling system according to claim 3, characterized in that, Also includes: The fourth flexible tube connects the inlet pipe to the inlet of the first flow channel. And / or, The fifth flexible tube connects the second connecting tube to the return tube.

5. The liquid cooling system according to claim 1, characterized in that, A control valve is provided between the inlet pipe and the first flow channel and / or between the return pipe and the second flow channel, the control valve being used to control the flow of the cooling medium; and / or, A flow sensor is provided between the inlet pipe and the first flow channel and / or between the return pipe and the second flow channel. The flow sensor is used to detect the flow rate of the cooling medium.

6. The liquid cooling system according to claim 2, characterized in that, In the radial direction of the furnace opening flange, the first connecting pipe and the second connecting pipe are located on the same side of the furnace opening flange.

7. The liquid cooling system according to claim 6, characterized in that, In the radial direction of the furnace opening flange, the inlet pipe and the return pipe are located on the same side of the furnace opening flange; In the radial direction of the furnace opening flange, both the first connecting pipe and the second connecting pipe are disposed between the furnace opening flange and the liquid inlet pipe, and both the first connecting pipe and the second connecting pipe are disposed between the furnace opening flange and the liquid return pipe.

8. The liquid cooling system according to any one of claims 1-7, characterized in that, The furnace opening flange includes an inner furnace opening flange and an outer furnace opening flange. The first flow channel includes a first inner flow channel and a first outer flow channel that are interconnected. The first inner flow channel is located on the inner furnace opening flange, and the first outer flow channel is located on the outer furnace opening flange. One of the first outer flow channel and the first inner flow channel is connected to the liquid inlet pipe, and the other of the first outer flow channel and the first inner flow channel is connected to the inlet of the second flow channel; and / or, The furnace mouth flange includes an inner furnace tail flange and an outer furnace tail flange. The second flow channel includes a second inner flow channel and a second outer flow channel that are interconnected. The second inner flow channel is located at the inner furnace tail flange, and the second outer flow channel is located at the outer furnace tail flange. One of the second outer flow channel and the second inner flow channel is connected to the first flow channel, and the other of the second outer flow channel and the second inner flow channel is connected to the return liquid pipe.

9. The liquid cooling system according to claim 8, characterized in that, Also includes: The sixth flexible tube connects the first inner flow channel and the first outer flow channel. And / or, The seventh flexible tube connects the second inner flow channel and the second outer flow channel.

10. A coating apparatus, characterized in that, include: The furnace body includes the furnace opening and furnace tail, which are arranged opposite each other along its length. The liquid cooling system is the liquid cooling system according to any one of claims 1-9, wherein the furnace mouth flange is disposed at the furnace mouth and the furnace tail flange is disposed at the furnace tail.

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