Liquid precursor source storage and delivery system

Abstract

The application discloses a kind of storage and delivery system of liquid precursor source, including source bottle, gas inlet assembly, gas outlet assembly and liquid level detection assembly, source bottle is used to store precursor source, gas inlet and gas outlet are provided on source bottle, recess is opened in the bottom of source bottle, the area of recess is less than the cross-sectional area of source bottle, the gas inlet of source bottle is communicated with gas inlet plug-in pipe, gas inlet plug-in pipe is arranged inside source bottle, the bottom end of gas inlet plug-in pipe extends into recess, gas inlet assembly includes gas inlet pipe and the gas inlet control valve that is arranged on gas inlet pipe, the gas outlet of gas inlet pipe is communicated with the gas inlet of source bottle, gas outlet assembly includes gas outlet pipe and the gas outlet control valve that is arranged on gas outlet pipe, the gas inlet of gas outlet pipe is communicated with the gas outlet of source bottle, liquid level detection assembly includes multiple liquid level sensors, multiple liquid level sensors are arranged in source bottle and are arranged along the height direction of source bottle, the bottom of the bottommost liquid level sensor extends into recess so that the detection point of liquid level sensor is not higher than the notch of recess, reduce the waste of precursor source.

Description

Technical Field

[0001] This application relates to the field of delivery technology, and more specifically, to a storage and delivery system for a liquid precursor source. Background Technology

[0002] Atomic layer deposition (ALD) is a specialized chemical vapor deposition technique that forms a thin film by alternately pulsed gaseous precursors into a reaction chamber, where they undergo a chemical adsorption reaction on the substrate surface. As an excellent film deposition technique, ALD is widely used in semiconductors, optics, optoelectronics, solar energy, and many other fields due to its high purity, uniformity, and good retention of deposited films, as well as its ability to precisely control film thickness and composition.

[0003] The liquid precursor source needs to first enter the source bottle and then be transported to the reaction chamber by a carrier gas. The precursor source is expensive, and theoretically, the precursor source inside the source bottle should be completely consumed before replacing the source bottle. However, the current structure of the source bottle results in precursor source residue at the bottom, leading to waste of the precursor source. Utility Model Content

[0004] To address the shortcomings of existing technologies, this application innovatively provides a storage and transportation system for liquid precursor sources. By setting a groove at the bottom of the source bottle and designing the detection point of the bottom liquid level sensor to be no higher than the opening of the groove, it is possible to control that when the source bottle is replaced, the volume of the remaining precursor source is less than or equal to the volume of the groove, thereby reducing the waste of precursor sources and saving precursor sources.

[0005] To achieve the aforementioned technical objectives, this application discloses a storage and delivery system for a liquid precursor source, including a source bottle, an inlet assembly, an outlet assembly, and a liquid level detection assembly. The source bottle is used to store the precursor source. The source bottle has an air inlet and an air outlet. A groove is formed at the bottom inner part of the source bottle, the area of ​​which is smaller than the cross-sectional area of ​​the source bottle. An air inlet insertion tube is connected to the air inlet of the source bottle, and the bottom end of the air inlet insertion tube extends into the groove. The air intake assembly includes an air intake pipe and an air intake control valve disposed on the air intake pipe. The air intake control valve is used to control the opening and closing of the air intake pipe, and the air outlet of the air intake pipe is connected to the air inlet of the source bottle. The gas outlet assembly includes a gas outlet pipe and a gas outlet control valve installed on the gas outlet pipe. The gas outlet control valve is used to control the on / off state of the gas outlet pipe. The gas inlet of the gas outlet pipe is connected to the gas outlet of the source bottle. The liquid level detection assembly includes multiple liquid level sensors, which are disposed inside the source bottle and arranged along the height direction of the source bottle. The bottom of the lowest liquid level sensor extends into the groove so that the detection point of the liquid level sensor is not higher than the opening of the groove.

[0006] Furthermore, it also includes a heating assembly, which comprises a heating layer and a heat-conducting layer. The heating layer includes a heat-conducting panel and a heating wire. The heating wire is embedded in the heat-conducting panel and evenly wound. The heat-conducting layer is disposed in the inner layer of the heat-conducting panel and is attached to the inner surface of the heat-conducting panel. The heating component is provided on the outer casing of the source bottle, and the heat-conducting layer is attached to the outer wall of the source bottle. The heating assembly is fitted over the intake pipe, and the heat-conducting layer is in contact with the outer wall of the intake pipe. The heating assembly is sleeved on the valve body of the intake control valve, and the heat-conducting layer is attached to the outer wall of the valve body of the intake control valve. The heating component is fitted over the exhaust pipe, and the heat-conducting layer is in contact with the outer wall of the exhaust pipe. The heating component is provided on the outer sleeve of the valve body of the gas outlet control valve, and the heat-conducting layer is attached to the outer wall of the valve body of the gas outlet control valve.

[0007] Furthermore, it also includes a thermal insulation layer, which is fitted over the heat-conducting panel.

[0008] Furthermore, the air intake control valve includes a first pneumatic valve and a first manual valve, wherein the first manual valve is located on the side of the first pneumatic valve away from the air intake port of the source bottle.

[0009] Furthermore, the gas outlet control valve includes a second pneumatic valve and a second manual valve, wherein the second manual valve is located on the side of the second pneumatic valve away from the gas outlet of the source bottle.

[0010] Furthermore, it also includes a purging assembly, which includes a purging pipe and a third pneumatic valve disposed on the purging pipe. The third pneumatic valve is used to control the opening and closing of the purging pipe. The air inlet of the purging pipe is connected to the air inlet pipe, and the air outlet of the purging pipe is connected to the air outlet pipe.

[0011] Furthermore, it also includes a liquid replenishment assembly and a venting assembly. The liquid replenishment assembly includes a liquid replenishment tube and a liquid replenishment control valve installed on the liquid replenishment tube. The liquid replenishment control valve is used to control the on / off state of the liquid replenishment tube. The source bottle is provided with a liquid replenishment port, and the liquid outlet of the liquid replenishment tube is connected to the liquid replenishment port. The exhaust assembly includes an exhaust pipe and an exhaust valve disposed on the exhaust pipe. The exhaust valve is used to control the opening and closing of the exhaust pipe, and the air inlet of the exhaust pipe is connected to the liquid replenishment pipe.

[0012] Furthermore, it also includes a heating assembly, which comprises a heating layer and a heat-conducting layer. The heating layer includes a heat-conducting panel and a heating wire. The heating wire is embedded in the heat-conducting panel and evenly wound. The heat-conducting layer is disposed in the inner layer of the heat-conducting panel and is attached to the inner surface of the heat-conducting panel. The heating assembly is fitted over the fluid replenishment tube, and the heat-conducting layer is in contact with the outer wall of the fluid replenishment tube. The heating component is sleeved on the valve body of the replenishment control valve, and the heat-conducting layer is in contact with the valve body of the replenishment control valve.

[0013] Furthermore, the liquid replenishment control valve includes a fourth pneumatic valve and a third manual valve, the third manual valve being disposed on the side of the fourth pneumatic valve away from the liquid replenishment port, and the connection between the exhaust pipe and the liquid replenishment pipe being located between the fourth pneumatic valve and the third manual valve.

[0014] Furthermore, the replenishment port of the source bottle is connected to a replenishment insertion tube, which is disposed inside the source bottle, with its bottom end extending into the groove.

[0015] The beneficial effects of this application are as follows: The liquid precursor source storage and transportation system of this application, by setting a groove at the bottom of the source bottle and designing the detection point of the bottom liquid level sensor to be no higher than the groove opening, can control that when the source bottle is replaced, the volume of the remaining precursor source is less than or equal to the volume of the groove, thereby reducing the waste of precursor source and saving precursor source. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the structure of the storage and transportation system for the liquid precursor source according to an embodiment of this application.

[0017] Figure 2 This is a schematic diagram of the internal structure of the source bottle in an embodiment of this application.

[0018] Figure 3 This is a longitudinal sectional view of the heating assembly according to an embodiment of this application.

[0019] In the picture, 1. Source bottle; 11. Groove; 12. Liquid replenishment tube; 13. Air inlet tube; 2. Air inlet assembly; 21. Air inlet pipe; 22. Air inlet control valve; 221. First pneumatic valve; 222. First manual valve; 3. Air outlet assembly; 31. Air outlet pipe; 32. Air outlet control valve; 321. Second pneumatic valve; 322. Second manual valve; 4. Heating assembly; 41. Heating layer; 411. Heat-conducting panel; 412. Heating wire; 42. Heat-conducting layer; 5. Purge assembly; 51. Purge pipe; 52. Third pneumatic valve; 6. Liquid replenishment assembly; 61. Liquid replenishment pipe; 62. Liquid replenishment control valve; 621. Fourth pneumatic valve; 622. Third manual valve; 7. Exhaust assembly; 71. Exhaust pipe; 72. Exhaust valve; 8. Liquid level detection assembly; 81. Liquid level sensor; 9. Insulation layer. Detailed Implementation

[0020] The storage and delivery system for the liquid precursor source provided in this application will be explained and described in detail below with reference to the accompanying drawings.

[0021] This embodiment specifically discloses a storage and delivery system for a liquid precursor source, such as... Figure 1 As shown, it includes a source bottle 1, an air inlet assembly 2, an air outlet assembly 3, and a liquid level detection assembly 8. The source bottle 1 is used to store the precursor source. The source bottle 1 is provided with an air inlet and an air outlet, which are located at the top of the source bottle 1 to facilitate connection with the air inlet assembly 2 and the air outlet assembly 3.

[0022] like Figure 1 and 2 As shown, a groove 11 is provided at the bottom of the source bottle 1. The area of ​​the groove 11 is smaller than the cross-sectional area of ​​the source bottle 1. The air inlet of the source bottle 1 is connected to an air inlet tube 13. The air inlet tube 13 is located inside the source bottle and is used to introduce carrier gas into the source bottle 1. The bottom end of the air inlet tube 13 extends into the groove 11.

[0023] The air intake assembly 2 includes an air intake pipe 21 and an air intake control valve 22 installed on the air intake pipe 21. The air intake control valve 22 is used to control the opening and closing of the air intake pipe 21. The air outlet of the air intake pipe 21 is connected to the air inlet of the source bottle 1. The air inlet of the air intake pipe 21 can be connected to a gas supply device. The gas supply device can provide carrier gas. The carrier gas enters the inside of the source bottle 1 through the air intake pipe 21 and the air intake control valve 22.

[0024] The gas outlet assembly 3 includes a gas outlet pipe 31 and a gas outlet control valve 32 installed on the gas outlet pipe 31. The gas outlet control valve 32 is used to control the opening and closing of the gas outlet pipe 31. The gas inlet of the gas outlet pipe 31 is connected to the gas outlet of the source bottle 1. The gas outlet of the gas outlet pipe 31 can be connected to the reaction chamber. The carrier gas introduced into the source bottle 1 carries the precursor source through the gas outlet pipe 31 and the gas outlet control valve 32 into the reaction chamber for reaction.

[0025] The inlet pipe 21 is connected to the inlet bottom pipe and is used to introduce carrier gas into the source bottle. The bottom end of the inlet bottom pipe 13 extends into the groove 11 so that the carrier gas can enter the liquid precursor source and generate bubbles. After the carrier gas enters the liquid precursor source, the saturated vapor pressure inside the liquid precursor source increases by bubbling. After the saturated vapor pressure increases, the mixed gas of the carrier gas and the vaporized precursor source enters the reaction chamber through the outlet of the source bottle and the outlet pipe.

[0026] The liquid level detection assembly 8 includes multiple liquid level sensors 81, which are arranged inside the source bottle 1 along its height. The bottom of the lowest liquid level sensor 81 extends into the groove 11, ensuring that its detection point is no higher than the groove opening. The multiple liquid level sensors 81 are connected to a host computer via signal lines extending from the source bottle 1. Power lines for the liquid level sensors 81 also extend from the source bottle 1 and connect to a power source. The multiple liquid level sensors 81 continuously monitor the liquid level of the liquid precursor in the source bottle 1. When the lowest liquid level sensor 81 fails to detect a liquid level, the host computer can send a signal to replenish the liquid or prompt for replacement of the source bottle. The number of liquid level sensors 81 can be set as needed; more sensors result in more accurate liquid level detection. Multiple liquid level sensors 81 can detect the liquid level in the source bottle 1 in real time, allowing staff to know the consumption of liquid precursor source in the source bottle 1 during the process. This is beneficial for calculating the amount of precursor used in the process and provides effective data for adjusting the ALD reaction process.

[0027] The liquid level sensor 81 can be an ultrasonic liquid level sensor or a fiber optic liquid level sensor.

[0028] The number of liquid level sensors 81 can be set according to the detection accuracy requirements; the more sensors there are, the more likely it is to achieve near-continuous liquid level detection.

[0029] Multiple liquid level sensors 81 can be fixed inside the source bottle 1 by a mounting bracket. Multiple liquid level sensors 81 are fixed in a row on the mounting bracket. The mounting bracket can be a bottom tube with the bottom extending into the groove and the top of the bottom tube being fixedly connected to the source bottle.

[0030] This application designs the detection point of the bottom liquid level sensor to be no higher than the groove opening, so that the detection blind zone of the bottom liquid level sensor is within the groove. When the bottom liquid level sensor cannot detect the liquid level, the source bottle is replaced. It can be controlled that when the source bottle is replaced, the volume of the remaining precursor source is less than or equal to the volume of the groove, and the area of ​​the groove 11 is less than the cross-sectional area of ​​the source bottle 1, reducing the waste of precursor source and saving precursor source.

[0031] The area of ​​the groove 11 should be as small as possible, while ensuring that the intake pipe 13 can be inserted, so that there is less remaining precursor source.

[0032] This application provides a groove 11 at the bottom of the source bottle 1, and inserts the air inlet tube 13 into the groove 11. Finally, only a portion of the precursor source remains in the groove 11, and the amount of the remaining precursor source is controlled within the volume of the groove 11. This is equivalent to reducing the area at the bottom of the source bottle 1. Compared with not providing the groove 11, this reduces the amount of the remaining precursor source and saves the precursor source to the maximum extent.

[0033] The lower the saturated vapor pressure of the precursor source, the more easily it remains in the source bottle or corresponding pipeline, making it more difficult to transport to the reaction chamber. This results in incomplete reaction or inability to participate in the reaction, leading to waste of the precursor source. Existing technologies often use heating of the source bottle, but current heating devices suffer from uneven heating, causing uneven heating of the precursor source, partial condensation of the precursor source, and unstable precursor output. This leads to abnormal film growth and affects the coating quality.

[0034] Based on this, such as Figure 1 and 2 As shown, the liquid precursor source storage and delivery system of this application also includes a heating component 4, such as... Figure 2 As shown, the heating assembly 4 includes a heating layer 41 and a heat-conducting layer 42. The heating layer 41 includes a heat-conducting panel 411 and a heating wire 412. The heating wire 412 is embedded in the heat-conducting panel 411 and evenly wound to provide uniform heat. The heat-conducting layer 42 is disposed in the inner layer of the heat-conducting panel 411 and is attached to the inner surface of the heat-conducting panel 411, transferring heat to the object being heated. Both the heat-conducting layer 42 and the heat-conducting panel 411 are made of materials with high thermal conductivity, such as metal. The heat-conducting panel 411 may be made of a heat-conducting material with high hardness to ensure the structural strength of the heating assembly 4. The heat-conducting layer 42 may be made of a heat-conducting material with lower hardness to adhere to the surface of the object being heated and to evenly transfer heat to the object.

[0035] The source bottle 1 is fitted with a heating component 4. A heat-conducting layer 42 is attached to the outer wall of the source bottle 1. The shape of the heat-conducting layer 42 can be consistent with the shape of the source bottle 1 to ensure a tight fit with the outer surface of the source bottle 1, and to evenly transfer heat to the source bottle 1 and the precursor source and carrier gas inside the source bottle 1. The heat-conducting layer 42 can be interference-fitted with the source bottle 1 to fit the outer surface of the source bottle 1. The shape of the heat-conducting panel 411 is roughly the same as the shape of the source bottle 1 to ensure that the distance between the heating wire and the source bottle 1 is basically the same.

[0036] Multiple temperature measuring points can be set on the outer surface of the source bottle 1, and each temperature measuring point is equipped with a temperature sensor. The heating wire 412 in the heat conduction panel 411 can be divided into multiple independent areas. Each heating wire 412 in each area is connected to a power supply. The temperature sensor transmits the detected temperature of its area to the host computer. The host computer can control the heating temperature of the heating wire 412 in each area according to the measured temperature difference to ensure the overall temperature consistency of the source bottle 1.

[0037] The heating component 4 outside the source bottle 1 can be a single cylindrical unit, directly fitted onto the source bottle 1; or it can be divided into multiple sections, which are connected together by screws or welding and wrapped around the source bottle 1. The specific form of the heating component 4 can be flexibly adjusted according to the difficulty of installation.

[0038] Because the heating wire 412 is wound evenly, all the heating wires 412 can be heated at the same temperature, and the temperature error can be controlled to be very small, which can meet the temperature uniformity requirements of the process.

[0039] A heating element 4 is fitted over the intake pipe 21. A heat-conducting layer 42 is attached to the outer wall of the intake pipe 21. The shape of the heat-conducting layer 42 can be consistent with the shape of the intake pipe 21 to ensure a tight fit with the outer surface of the intake pipe 21, thus evenly transferring heat to the intake pipe 21 and the carrier gas inside it. The heat-conducting layer 42 can be interference-fitted with the intake pipe 21 to ensure a tight fit with the outer surface of the intake pipe 21. The shape of the heat-conducting panel 411 is generally the same as the shape of the intake pipe 21.

[0040] A heating element 4 is fitted over the valve body of the intake control valve 22. A heat-conducting layer 42 is attached to the outer wall of the valve body of the intake control valve 22. The shape of the heat-conducting layer 42 can be consistent with the shape of the valve body of the intake control valve 22 to ensure a tight fit with the outer surface of the valve body, thus uniformly transferring heat to the valve body and the carrier gas within it. The heat-conducting layer 42 can be interference-fitted with the valve body of the intake control valve 22 to ensure a tight fit with the outer surface of the valve body. The shape of the heat-conducting panel 411 is substantially the same as the shape of the valve body of the intake control valve 22.

[0041] A heating assembly 4 is fitted over the exhaust pipe 31. A heat-conducting layer 42 is attached to the outer wall of the exhaust pipe 31. The shape of the heat-conducting layer 42 can be consistent with the shape of the exhaust pipe 31 to ensure a tight fit with the outer surface of the exhaust pipe 31, thereby uniformly transferring heat to the exhaust pipe 31 and the precursor source and carrier gas inside the exhaust pipe 31. The heat-conducting layer 42 can be interference-fitted with the exhaust pipe 31 to ensure a tight fit with the outer surface of the exhaust pipe 31. The shape of the heat-conducting panel 411 is generally the same as the shape of the exhaust pipe 31.

[0042] A heating component 4 is fitted over the valve body of the exhaust control valve 32, and a heat-conducting layer 42 is attached to the outer wall of the valve body. The shape of the heat-conducting layer 42 can be consistent with the shape of the valve body of the exhaust control valve 32 to ensure a tight fit with the outer surface of the valve body, uniformly transferring heat to the valve body and the precursor gas and carrier gas within the valve body. The heat-conducting layer 42 can be interference-fitted with the valve body of the exhaust control valve 32 to ensure a tight fit with the outer surface of the valve body. The shape of the heat-conducting panel 411 is substantially the same as the shape of the valve body of the exhaust control valve 32.

[0043] When the heating component 4 is fitted onto the inlet pipe 21, outlet pipe 31, the valve body of the inlet control valve 22, and the valve body of the outlet control valve 32, multiple temperature measuring points can be set to detect the temperature. The heating component 4 is correspondingly divided into multiple heating zones, and the heating temperature is controlled by the detected temperature to ensure that the temperature of each heating zone remains consistent. When the heating component 4 is fitted onto the inlet pipe 21 and outlet pipe 31, it can be a single cylindrical unit, directly fitted onto the inlet pipe 21 and outlet pipe 31. When the heating component 4 is fitted onto the valve body of the inlet control valve 22 and the valve body of the outlet control valve 32, it can be divided into multiple plates, which are connected together by screws or welding and wrapped around the valve bodies of the inlet control valve 22 and the outlet control valve 32. The specific form of the heating component 4 can be flexibly adjusted according to the shape of the object being heated and the difficulty of installation.

[0044] Optionally, the heat-conducting layer 42 can be made of a low-hardness aluminum alloy, such as tin foil or an aluminum alloy with added tin. The heat-conducting layer 42 forms a soft covering layer, covering the surface of the object being heated and adhering to the surface of the object being heated. The heat-conducting panel 411 has a higher hardness than the heat-conducting layer 42, and the material of the heat-conducting panel 411 can be selected according to actual needs. For example, the heat-conducting panel 411 can be made of stainless steel. The heat-conducting panel 411 can be welded to the heat-conducting layer 42.

[0045] Existing fabric-covered heating structures suffer from inconsistencies in coverage due to human intervention, resulting in gaps between the heating structure and the heated object. These gaps can provide insulation, leading to significant temperature differences on the surface of the heated object. In contrast, the heating component 4 of this application is completely fitted to the surface of the heated object, eliminating gaps and ensuring uniform heat transfer, thus improving the uniformity of heating the precursor source.

[0046] This application provides heating components 4 around the source bottle 1, the inlet component 2, and the outlet component 3 to further improve the uniformity of the precursor source temperature, improve the temperature consistency of the precursor source at the outlet of the source bottle 1, and improve the source stability. This lays the foundation for the film growth rate and film thickness consistency of the ALD process in the reaction chamber, thereby improving the coating quality.

[0047] Actual testing and verification showed that, with the heating component 4, the temperature difference between the surface of the source bottle 1, the surface of the inlet pipe 21, the surface of the outlet pipe 31, the surface of the valve body of the inlet control valve 22, and the surface of the valve body of the outlet control valve 32 is ≤1℃.

[0048] In some alternative embodiments, such as Figure 1 As shown, the liquid precursor source storage and delivery system of this application also includes a heat insulation layer 9, which is sleeved on the outside of the heat-conducting panel 411 to reduce heat transfer to the outside of the heating component 4, reduce heat loss, and thus improve heating effect and temperature uniformity.

[0049] Optionally, the insulation layer 9 can be made of rubber or silicone, and the insulation layer 9 can be bonded and fixed to the heat-conducting panel 411 with thermally conductive adhesive.

[0050] In some alternative embodiments, both the intake control valve 22 and the exhaust control valve 32 may be provided as one, for example, both as a pneumatic valve, for controlling the opening and closing of the corresponding pipeline.

[0051] In some alternative embodiments, such as Figure 1 As shown, the air intake control valve 22 includes a first pneumatic valve 221 and a first manual valve 222. The first manual valve 222 is located on the side of the first pneumatic valve 221 away from the air inlet of the source bottle 1. Heating components 4 are fitted onto the valve bodies of both the first pneumatic valve 221 and the first manual valve 222. The first manual valve 222 and the first pneumatic valve 221 are closed during transportation. The first manual valve 222 is used to isolate the portion of the air intake pipe 21 between the first manual valve 222 and the air inlet of the source bottle 1 from the external environment during transportation. The first manual valve 222 and the first pneumatic valve 221 achieve dual isolation between the source bottle 1 and the external environment, ensuring transportation safety. The first pneumatic valve 221 is used to control the opening and closing of the air intake pipe 21 during the reaction process. After transportation to the destination, the first manual valve 222 can be opened, and the first pneumatic valve 221 is closed; during air intake, the first pneumatic valve 221 is open.

[0052] In some alternative embodiments, such as Figure 1 As shown, the gas outlet control valve 32 includes a second pneumatic valve 321 and a second manual valve 322. The second manual valve 322 is located on the side of the second pneumatic valve 321 away from the gas outlet of the source bottle 1. Heating components 4 are fitted onto the valve bodies of both the second pneumatic valve 321 and the second manual valve 322. The second manual valve 322 and the second pneumatic valve 321 are closed during transportation. The second manual valve 322 is used to isolate the portion of the gas outlet pipe 31 between itself and the gas outlet of the source bottle 1 from the external environment during transportation. The second manual valve 322 and the second pneumatic valve 321 achieve dual isolation between the source bottle 1 and the external environment, ensuring transportation safety. The second pneumatic valve 321 is used to control the opening and closing of the gas outlet pipe 31 during the reaction process. After transportation to the destination, the second manual valve 322 can be opened, and the second pneumatic valve 321 is closed; when gas is being discharged, the second pneumatic valve 321 is open.

[0053] In some alternative embodiments, such as Figure 1As shown, the liquid precursor source storage and delivery system of this application also includes a purging assembly 5. The purging assembly 5 includes a purging pipe 51 and a third pneumatic valve 52 installed on the purging pipe 51. The third pneumatic valve 52 is used to control the opening and closing of the purging pipe 51. The air inlet of the purging pipe 51 is connected to the air inlet pipe 21, and the air outlet of the purging pipe 51 is connected to the air outlet pipe 31. Before introducing carrier gas into the air inlet pipe 21, the third pneumatic valve 52 can be opened to introduce inert gas from the end of the air inlet pipe 21. Inert gas is introduced into the portion of the air inlet pipe 21 connected to the purging pipe 51 and the portion of the purging pipe 51 connected to the purging pipe 51 and the portion of the air outlet pipe 3 ...31 and the portion of the air outlet pipe 31 connected to the purging pipe 31 and the portion of the air outlet pipe 31 connected to the purging pipe 31 and the portion of the air outlet pipe 31 connected to the purging pipe 31 and the portion of the air outlet pipe 31 connected to the purging pipe 31 connected to the purging pipe 31 connected to the purging pipe 31 connected to the purging pipe 3

[0054] Optionally, the connection between the purge pipe 51 and the air inlet pipe 21 is located between the first manual valve 222 and the first pneumatic valve 221, and the connection between the purge pipe 51 and the air outlet pipe 31 is located between the second manual valve 322 and the second pneumatic valve 321, so as to purge the air in the part of the pipeline connected to the external environment.

[0055] Preferably, the connection between the purge pipe 51 and the inlet pipe 21 is located between the inlet of the source bottle 1 and the first pneumatic valve 221, and the connection between the purge pipe 51 and the outlet pipe 31 is located between the outlet of the source bottle 1 and the second pneumatic valve 321, thereby increasing the range of the purge pipeline and ensuring the cleanliness of the carrier gas.

[0056] Heating devices are fitted externally to the first manual valve 222, the first pneumatic valve 221, the second manual valve 322, and the second pneumatic valve 321 to further improve the temperature uniformity of the precursor source. The heating devices on the first manual valve 222 and the first pneumatic valve 221 prevent the temperature of the precursor source inside the source cylinder 1 from dropping due to a lower temperature of the incoming carrier gas, thus avoiding temperature unevenness. The heating devices on the second manual valve 322 and the second pneumatic valve 321 maintain the temperature of the carrier gas and the precursor source.

[0057] In some alternative embodiments, such as Figure 1As shown, the liquid precursor source storage and delivery system of this application also includes a replenishment component 6 and an exhaust component 7. The replenishment component 6 includes a replenishment pipe 61 and a replenishment control valve 62 installed on the replenishment pipe 61. The replenishment control valve 62 is used to control the opening and closing of the replenishment pipe 61. The source bottle 1 is provided with a replenishment port, and the outlet of the replenishment pipe 61 is connected to the replenishment port. When the liquid level sensor at the bottom of the liquid level detection component cannot detect the liquid level, it indicates that the precursor source in the source bottle 1 is about to run out. At this time, the replenishment component 6 can replenish the precursor source, accurately controlling the timing and amount of replenishment to ensure the continuity of the process and improve production efficiency. Moreover, there is no need to replace the source bottle to replenish the precursor source, thus improving production efficiency. The timing of stopping the replenishment can be controlled by the liquid level sensor at the top of the liquid level detection component. When the liquid level sensor at the top detects the liquid level, the replenishment is stopped.

[0058] The exhaust assembly 7 includes an exhaust pipe 71 and an exhaust valve 72 installed on the exhaust pipe 71. The exhaust valve 72 is used to control the opening and closing of the exhaust pipe 71. The air inlet of the exhaust pipe 71 is connected to the liquid replenishment pipe 61, and the air outlet of the exhaust pipe 71 can be connected to the tail exhaust treatment device. During liquid replenishment, the exhaust valve 72 is opened, and at the same time, some of the gas in the source bottle 1 is discharged to ensure the pressure balance inside and outside the source bottle 1, so that the liquid precursor source can smoothly enter the source bottle 1.

[0059] The exhaust valve 72 can be a pneumatic valve.

[0060] A heating assembly 4 is fitted over the replenishment tube 61, with a heat-conducting layer 42 adhering to the outer wall of the replenishment tube 61. Similarly, a heating assembly 4 is fitted over the valve body of the replenishment control valve 62, with the heat-conducting layer 42 adhering to the valve body of the replenishment control valve 62. This heats the replenished precursor source to maintain temperature consistency between the source bottle 1 and the newly replenished precursor source. When the heating assembly 4 is fitted over the replenishment tube 61, it can be a single cylindrical component directly fitted onto the replenishment tube 61. When the heating assembly 4 is fitted over the valve body of the replenishment control valve 62, it can be divided into multiple sections, which are connected together by screws or welding and enclosed within the valve body of the replenishment control valve 62.

[0061] The liquid replenishment component 6 and the venting component 7 are designed to replenish the liquid in a timely manner, avoiding insufficient precursor source during the reaction process, reducing the time delay caused by the need to replace the source bottle 1 and the safety risks caused by the replacement process.

[0062] Optionally, the replenishment control valve 62 includes a fourth pneumatic valve 621 and a third hand valve 622. The third hand valve 622 is located on the side of the fourth pneumatic valve 621 away from the replenishment port. The connection between the exhaust pipe 71 and the replenishment pipe 61 is located between the fourth pneumatic valve 621 and the third hand valve 622. Heating components 4 are fitted onto the valve bodies of both the fourth pneumatic valve 621 and the third hand valve 622. The third hand valve 622 and the fourth pneumatic valve 621 are closed during transportation. The third hand valve 622 is used to isolate the portion of the replenishment pipe 61 between itself and the replenishment port from the external environment during transportation. The third hand valve 622 and the fourth pneumatic valve 621 achieve dual isolation between the source bottle 1 and the external environment, ensuring transportation safety. The fourth pneumatic valve 621 is used to control the opening and closing of the replenishment pipe 61 during the replenishment process. After transportation to the destination, the third manual valve 622 can be opened and the fourth pneumatic valve 621 can be closed; when replenishing liquid, the exhaust valve 72 and the fourth pneumatic valve 621 are opened.

[0063] In some optional embodiments, the replenishment port of the source bottle 1 is connected to a replenishment insertion tube 12, which is disposed inside the source bottle. The replenishment insertion tube 12 is connected to the replenishment tube and is used to replenish liquid into the source bottle 1. The bottom end of the replenishment insertion tube 12 extends into the groove 11 so that the replenished liquid precursor source can be directly replenished into the liquid precursor source inside the source bottle 1. The area of ​​the groove 11 should be as small as possible, provided that the air inlet insertion tube 13 and the replenishment insertion tube 12 can be inserted.

[0064] The method of using the liquid precursor source storage and delivery system of this application is as follows: When source bottle 1 is first connected to the gas cabinet of the ALD machine, open the first manual valve 222 on the inlet pipe 21, the second manual valve 322 on the outlet pipe 31, and the third pneumatic valve 52 on the purge pipe 51. High-purity inert gas enters part of the inlet pipe 21, part of the purge pipe 51, and part of the outlet pipe 31 through the inlet port of the inlet pipe 21, and is discharged through the outlet port of the outlet pipe 31 to purge the pipeline and remove the air in the pipeline. Once the first manual valve 222 on the inlet pipe 21 and the second manual valve 322 on the outlet pipe 31 are opened, they will not be closed again unless source bottle 1 or the components of the gas circuit containing source bottle 1 are replaced.

[0065] During the ALD reaction, the first pneumatic valve 221 on the inlet pipe 21 and the second pneumatic valve 321 on the outlet pipe 31 are opened, and the third pneumatic valve 52 on the purge pipe 51 is closed. The carrier gas (specifically, an inert gas) enters the inlet insertion pipe 13 inside the source bottle 1 from the inlet port of the source bottle 1. At the same time, the heating component 4 precisely heats up, increasing the internal gas pressure of the source bottle 1. Part of the liquid precursor source is converted into a gaseous source and precipitated. Together with the carrier gas (inert gas), it enters the outlet port of the source bottle 1 and the outlet pipe 31 behind the outlet port of the source bottle 1 and enters the reaction chamber for reaction.

[0066] During the reaction, the liquid level sensor 81 monitors the liquid level inside the source bottle 1 in real time. This serves two purposes: firstly, it provides a reference for the replenishment component 6, and secondly, it provides data on the consumption of precursor sources during the process. When insufficient precursor sources are detected in the source bottle 1, the third manual valve 622, the fourth pneumatic valve 621, and the exhaust valve 72 are opened to replenish the liquid. Opening the exhaust valve 72 helps to balance the pressure inside the source bottle 1 during the replenishment process. A replenishment insertion tube 12 is added inside the source bottle 1, and the inlet of the replenishment tube 61 is connected to the replenishment system to replenish the precursor sources in the source bottle 1.

[0067] The liquid precursor source storage and transportation system of this application has good heating uniformity, which can effectively reduce temperature difference and increase the stability of the precursor source; the addition of liquid level detection component 8 can monitor the liquid level in real time, provide data for process debugging, and also provide a basis for liquid replenishment; the addition of liquid replenishment component 6 can shorten the time compared to manual replacement of source bottle 1 and reduce safety risks; manual valves and air valves are set on the air inlet pipe 21, air outlet pipe 31 and liquid replenishment pipe 61 as a double protection device to increase the safety factor of source bottle 1 during transportation; a groove 11 is opened at the bottom of source bottle 1 into which the air inlet insertion pipe 13 and the liquid replenishment insertion pipe 12 can be inserted, maximizing the conservation of source and controlling the remaining source amount within the volume of the groove 11.

[0068] In the description of this application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0069] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0070] In the description of this specification, the references to terms such as "this embodiment," "an embodiment," "some embodiments," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in a suitable manner in any at least one embodiment or example. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0071] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0072] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Any modifications, equivalent substitutions, and simple improvements made to the substantive content of this application should be included within the protection scope of this application.

Claims

1. A storage and delivery system for a liquid precursor source, characterized in that, This includes the source bottle, air inlet assembly, air outlet assembly, and liquid level detection assembly. The source bottle is used to store the precursor source. The source bottle has an air inlet and an air outlet. A groove is formed at the bottom inner part of the source bottle, the area of ​​which is smaller than the cross-sectional area of ​​the source bottle. An air inlet insertion tube is connected to the air inlet of the source bottle, and the bottom end of the air inlet insertion tube extends into the groove. The air intake assembly includes an air intake pipe and an air intake control valve disposed on the air intake pipe. The air intake control valve is used to control the opening and closing of the air intake pipe, and the air outlet of the air intake pipe is connected to the air inlet of the source bottle. The gas outlet assembly includes a gas outlet pipe and a gas outlet control valve installed on the gas outlet pipe. The gas outlet control valve is used to control the on / off state of the gas outlet pipe. The gas inlet of the gas outlet pipe is connected to the gas outlet of the source bottle. The liquid level detection assembly includes multiple liquid level sensors, which are disposed inside the source bottle and arranged along the height direction of the source bottle. The bottom of the lowest liquid level sensor extends into the groove so that the detection point of the liquid level sensor is not higher than the opening of the groove.

2. The storage and transportation system for the liquid precursor source according to claim 1, characterized in that, It also includes a heating assembly, which comprises a heating layer and a heat-conducting layer. The heating layer includes a heat-conducting panel and a heating wire. The heating wire is embedded in the heat-conducting panel and evenly wound. The heat-conducting layer is disposed in the inner layer of the heat-conducting panel and is attached to the inner surface of the heat-conducting panel. The heating component is provided on the outer casing of the source bottle, and the heat-conducting layer is attached to the outer wall of the source bottle. The heating assembly is fitted over the intake pipe, and the heat-conducting layer is in contact with the outer wall of the intake pipe. The heating assembly is sleeved on the valve body of the intake control valve, and the heat-conducting layer is attached to the outer wall of the valve body of the intake control valve. The heating component is fitted over the exhaust pipe, and the heat-conducting layer is in contact with the outer wall of the exhaust pipe. The heating component is provided on the outer sleeve of the valve body of the gas outlet control valve, and the heat-conducting layer is attached to the outer wall of the valve body of the gas outlet control valve.

3. The storage and transportation system for the liquid precursor source according to claim 2, characterized in that, It also includes a thermal insulation layer, which is fitted over the heat-conducting panel.

4. The storage and transport system for the liquid precursor source according to claim 1, characterized in that, The air intake control valve includes a first pneumatic valve and a first manual valve, wherein the first manual valve is located on the side of the first pneumatic valve away from the air intake port of the source bottle.

5. The storage and transport system for the liquid precursor source according to claim 1, characterized in that, The gas outlet control valve includes a second pneumatic valve and a second manual valve, wherein the second manual valve is located on the side of the second pneumatic valve away from the gas outlet of the source bottle.

6. The storage and delivery system for the liquid precursor source according to any one of claims 1-5, characterized in that, It also includes a purging assembly, which includes a purging pipe and a third pneumatic valve disposed on the purging pipe. The third pneumatic valve is used to control the opening and closing of the purging pipe. The air inlet of the purging pipe is connected to the air inlet pipe, and the air outlet of the purging pipe is connected to the air outlet pipe.

7. The storage and transport system for the liquid precursor source according to claim 1, characterized in that, It also includes a liquid replenishment assembly and a venting assembly. The liquid replenishment assembly includes a liquid replenishment tube and a liquid replenishment control valve installed on the liquid replenishment tube. The liquid replenishment control valve is used to control the on / off state of the liquid replenishment tube. The source bottle is provided with a liquid replenishment port, and the liquid outlet of the liquid replenishment tube is connected to the liquid replenishment port. The exhaust assembly includes an exhaust pipe and an exhaust valve disposed on the exhaust pipe. The exhaust valve is used to control the opening and closing of the exhaust pipe, and the air inlet of the exhaust pipe is connected to the liquid replenishment pipe.

8. The storage and transport system for the liquid precursor source according to claim 7, characterized in that, It also includes a heating assembly, which comprises a heating layer and a heat-conducting layer. The heating layer includes a heat-conducting panel and a heating wire. The heating wire is embedded in the heat-conducting panel and evenly wound. The heat-conducting layer is disposed in the inner layer of the heat-conducting panel and is attached to the inner surface of the heat-conducting panel. The heating assembly is fitted over the fluid replenishment tube, and the heat-conducting layer is in contact with the outer wall of the fluid replenishment tube. The heating component is sleeved on the valve body of the replenishment control valve, and the heat-conducting layer is in contact with the valve body of the replenishment control valve.

9. The storage and delivery system for the liquid precursor source according to claim 7 or 8, characterized in that, The replenishment control valve includes a fourth pneumatic valve and a third manual valve. The third manual valve is located on the side of the fourth pneumatic valve away from the replenishment port. The connection between the exhaust pipe and the replenishment pipe is located between the fourth pneumatic valve and the third manual valve.

10. The storage and transport system for the liquid precursor source according to claim 7, characterized in that, The source bottle has a replenishment port connected to a replenishment insertion tube, which is located inside the source bottle and extends into the groove.

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