Wafer boat lift and spin apparatus

Abstract

The utility model discloses a crystal boat lifting rotary device, lifting subassembly has the lifting output end that can along the height direction and lift, rotary subassembly is connected in lifting output end, the workpiece tray is set up on rotary subassembly, buffer pre -tension subassembly sets up between lifting output end and rotary subassembly, including with rotary subassembly fixed connection's axial guide, with lifting end fixed connection's mounting and elastic buffer piece, elastic buffer piece sets up between mounting and axial guide, wherein, when rotary tray contact process chamber bottom, lifting output end continues to move, drives mounting relative axial guide moves and compresses elastic buffer piece. Adopt above -mentioned scheme, to avoid the prior art tray to be easy and the rigid collision of furnace body, and promote sealing effect.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor diffusion equipment technology, and in particular to a crystal boat lifting and rotating device. Background Technology

[0002] Currently, low-pressure chemical vapor deposition (LPCVD) is widely used for thin film growth in semiconductor manufacturing. Vertical process furnaces are commonly used in this equipment. Their structure typically includes a furnace body and a furnace door for raising and lowering the wafer carrier. The furnace body mainly consists of vertical furnace tubes and a base. The vertical furnace tubes are mounted on the base and sealed to it to create a sealed reaction environment suitable for semiconductor processing. The furnace door is located below the furnace body and not only functions to raise and lower the wafer carrier but also provides a seal for the furnace body. To ensure a good seal between the furnace door and the base, a sealing ring is usually installed on the side of the furnace door facing the base, along with a cooling structure to maintain the reliability of the sealing ring under high-temperature conditions.

[0003] However, existing crystal boat lifting devices typically employ a rigid transmission structure, using a ball screw to drive the lifting arm for vertical movement. While this can achieve the lifting and lowering of the crystal boat, if the drive motor continues to run after the tray contacts the bottom of the furnace, it may generate a significant rigid impact, causing deformation of the furnace door and even damage to the contact area. Furthermore, because the ball screw and lifting arm are rigidly connected, it is difficult to compensate for flatness deviations caused by manufacturing errors or thermal deformation of the furnace body. This can lead to poor sealing between the furnace door and the base, affecting the vacuum maintenance of the reaction chamber and process stability.

[0004] Therefore, how to solve the problem that the tray of the existing crystal boat lifting and rotating device is prone to rigid collision with the furnace body, resulting in damage to the furnace body or furnace door and poor sealing effect, has become a key technical problem that urgently needs to be solved in the industry. Utility Model Content

[0005] The purpose of this utility model is to provide a crystal boat lifting and rotating device to solve the problem that the tray of the existing crystal boat lifting and rotating device is prone to rigid collision with the furnace body, resulting in damage to the furnace body or furnace door, and poor sealing effect.

[0006] To achieve the above objectives, the technical solution of this utility model is as follows: The crystal boat lifting and rotating device includes: The lifting assembly has a lifting output end capable of lifting along the height direction; A rotary assembly is connected to the lifting output end, and the workpiece tray is mounted on the rotary assembly; A buffer preload assembly is provided between the lifting output end and the rotary assembly, including an axial guide fixedly connected to the rotary assembly, a mounting component fixedly connected to the lifting end, and an elastic buffer component, wherein the elastic buffer component is provided between the mounting component and the axial guide component; When the workpiece tray contacts the bottom of the process chamber, the lifting output end continues to move, driving the mounting component to move relative to the axial guide component and compressing the elastic buffer component. The elastic buffer component generates elastic deformation and continuously provides a reverse force to the rotary assembly.

[0007] The beneficial effects of the crystal boat lifting and rotating device provided by this utility model are as follows: the buffer pre-tightening component is located between the lifting output end and the rotating component. The elastic buffer is pre-compressed after the tray contacts the bottom of the process chamber. It continuously absorbs the remaining motion energy of the lifting mechanism by elastic deformation and applies a reverse force upward, thereby forming a buffer effect between the tray and the furnace body, effectively reducing the impact load caused by the overshoot of the drive motor. At the same time, the initial pre-tightening force of the elastic buffer ensures the positional accuracy of the tray during normal lifting and lowering, and will not cause excessive displacement due to vibration or temperature changes. It can also quickly restore rigid positioning after the buffer stroke ends.

[0008] Furthermore, the axial guide includes a disc portion and an axial guide rod that are coaxially fixedly connected, and the disc portion is fixedly connected to the rotary assembly.

[0009] Furthermore, the elastic buffer includes a spring and a spring mounting sleeve. The spring is sleeved on the spring mounting sleeve, and the spring mounting sleeve is sleeved on the axial guide rod. One end of the spring abuts against the disc portion, and the other end abuts against the spring mounting sleeve.

[0010] Furthermore, the mounting component includes a mounting base and a flanged linear bearing, the flanged linear bearing being sleeved on the outer wall of the axial guide rod and abutting against one end of the mounting base.

[0011] Furthermore, the slewing assembly includes: Rotary turntable; A rotary magnetofluid is disposed at the bottom of the rotary table to drive the workpiece tray to rotate; A rotary drive unit is installed at one end of the rotary table to drive the water-cooled magnetofluid to rotate.

[0012] Furthermore, the rotary drive includes: A drive motor is installed at the bottom of the rotary table; The first pulley is connected to the output end of the drive motor; The second pulley is connected to the first pulley for transmission, and the second pulley is connected to the water-cooled magnetohydrodynamic fluid.

[0013] Furthermore, the water-cooled magnetic fluid also includes an inlet connector and an outlet connector. The inlet connector is connected to a water supply source, and the outlet connector is connected to the inlet connector via a pipeline to form a cooling circuit.

[0014] Furthermore, the water-cooled magnetic fluid has a magnetic fluid output end, and a protective component is provided between the workpiece tray and the rotary table. The protective component is used to prevent impurities from entering the magnetic fluid output end.

[0015] Furthermore, the protective assembly includes a transition member and a protective member nested within each other. One side surface of the transition member has an annular groove, and one side surface of the protective member has an annular protrusion, which is inserted into the annular groove.

[0016] Furthermore, both the annular protrusions and the annular grooves comprise multiple sets, and the multiple sets of annular grooves and the multiple sets of annular protrusions are correspondingly inserted to form multiple interconnected sealing channels. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the overall structure of the crystal boat lifting and rotating device of this utility model; Figure 2 This is a schematic diagram of the structure of the water-cooled magnetofluid according to an embodiment of the present invention; Figure 3 This is a schematic diagram of the structure of the buffer preload assembly according to an embodiment of the present invention; Figure 4 This is a schematic diagram of the structure of the workpiece tray in an embodiment of the present invention; Figure 5 This is an explosion diagram of the protective component according to an embodiment of the present invention; Figure 6 This is a schematic diagram showing the cooperation between the transition piece and the protective piece in an embodiment of this utility model.

[0018] Reference numerals: 1. Lifting assembly; 11. Mounting base plate; 12. Lifting seat; 13. Slide rail; 14. Slider; 15. Bracket; 16. Lifting motor; 2. Rotary assembly; 21. Rotary disk; 211. Workpiece tray; 22. Water-cooled magnetic fluid; 221. Water inlet connector; 222. Water outlet connector; 223. Magnetic fluid output end; 23. Rotary drive component; 231. Drive motor; 232. First pulley; 233. Second pulley; 3. Buffer preload assembly; 31. Axial guide component; 311. Disc part; 32. Mounting component; 321. Mounting seat; 322. Flange-mounted linear bearing; 323. Gasket; 324. Screw; 33. Elastic buffer component; 4. Transition component; 41. Annular groove; 5. Protective component; 51. Annular protrusion. Detailed Implementation

[0019] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions in the embodiments of this utility model will be clearly and completely described below. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model. Unless otherwise defined, the technical or scientific terms used herein should have the ordinary meaning understood by those skilled in the art to which this utility model pertains. The terms "comprising" and similar expressions used herein mean that the element or object preceding the word covers the element or object listed following the word and its equivalents, but does not exclude other elements or objects.

[0020] The following is in conjunction with the appendix Figure 1-6 The specific embodiments of this utility model will be further described in detail below.

[0021] like Figures 1-2 As shown, an embodiment of this utility model provides a crystal boat lifting and rotating device, which includes a lifting component 1, a rotating component 2, and a buffer pre-tightening component 3.

[0022] Reference Figure 1 In some embodiments of this utility model, the lifting assembly 1 has a lifting output end capable of lifting and lowering along the height direction. In some specific embodiments of this utility model, the lifting assembly 1 includes a mounting base plate 11, a lifting seat 12 mounted on the mounting base plate 11, a double-row slide rail 13 arranged parallel to the side of the lifting seat 12, a slider 14 capable of reciprocating linearly on the slide rail 13, a bracket 15 mounted on the top of the slider 14 and supporting the rotary assembly 2, and a lifting motor 16 coaxially connected to and fixed to the lifting seat 12 with the ball screw. The lifting output end is located on the lifting seat 12. In specific operation, the lifting motor 16 drives the ball screw to rotate through the output shaft, and the nut (not shown in the figure) is fixed to the slider 14. The rotational motion is converted into the linear lifting and lowering of the slider 14 through threaded engagement; the slider 14 drives the bracket 15 to move smoothly up and down on the slide rail 13, forming a reliable lifting output end. The mounting base plate 11 provides rigid support for the entire assembly and is connected to the machine body through reserved mounting holes; the lifting seat 12 is precisely positioned with the base plate through guide pins and positioning pins to ensure that the ball screw and the slider 14 always remain coaxial and reduce lateral forces.

[0023] Reference Figure 3 and Figure 4In some embodiments of this utility model, the rotary assembly 2 is connected to the lifting output end, and the workpiece tray 211 is disposed on the rotary assembly 2. In some specific embodiments of this utility model, the rotary assembly 2 includes a rotary disk 21, a workpiece tray 211, a water-cooled magnetic fluid 22, and a rotary drive component 23. The upper surface of the rotary disk 21 supports the workpiece tray 211, and the bottom of the rotary disk 21 is fixed with the water-cooled magnetic fluid 22. The magnetic fluid housing is connected to an external cooling water circuit through a water inlet connector 221 and a water outlet connector 222 to continuously remove heat and maintain the stability of the magnetic fluid viscosity during equipment operation. The rotary drive component 23 is installed on one side of the bottom of the rotary disk 21 and includes a drive motor 231, a first pulley 232 coaxially mounted on the output shaft of the motor, and a second pulley 233 that is driven by the first pulley 232 through a transmission belt and fixed to the magnetic fluid output end 223. After the drive motor 231 starts, the torque is transmitted to the second pulley 233 through the first pulley 232 and the transmission belt, and then the water-cooled magnetic fluid 22 transmits the power to the rotary disk 21 through fluid shearing, realizing smooth stepless speed regulation and high-precision positioning.

[0024] In some specific embodiments of this utility model, the drive motor 231 is disposed within a concave space enclosed by two bases and a motor mounting bracket, and a water-cooling circuit is formed within the bases. In some specific embodiments of this utility model, the water-cooled magnetic fluid 22 further includes an inlet connector 221 and an outlet connector 222. The inlet connector 221 is connected to a water supply source, and the outlet connector 222 is connected to the inlet connector via a pipeline to form a cooling circuit.

[0025] In some embodiments of this utility model, the buffer pre-tightening assembly 3 is disposed between the lifting output end and the rotary assembly 2, and includes an axial guide 31 fixedly connected to the rotary assembly 2, a mounting member 32 fixedly connected to the lifting end, and an elastic buffer 33. The elastic buffer 33 is disposed between the mounting member 32 and the axial guide 31. When the workpiece tray 211 contacts the bottom of the process chamber, the lifting output end continues to move, driving the mounting member 32 to move relative to the axial guide 31 and compress the elastic buffer 33. The elastic buffer 33 generates elastic deformation and continuously provides a reverse force to the rotary assembly 2. The buffer pre-tightening component 3 is located between the lifting output end and the rotary component 2. The elastic buffer 33 is pre-compressed after the pallet contacts the bottom of the process chamber. It uses elastic deformation to continuously absorb the remaining motion energy of the lifting mechanism and apply a reverse force upward, thereby forming a buffer effect between the pallet and the furnace body, effectively reducing the impact load caused by the overshoot of the drive motor 231. At the same time, the initial pre-tightening force of the elastic buffer 33 ensures the positional accuracy of the pallet during normal lifting and lowering, and will not cause excessive displacement due to vibration or temperature changes. With the relative sliding of the axial guide 31 and the mounting component 32, the entire device can compensate for the flatness deviation caused by manufacturing tolerances or thermal expansion, and can quickly restore rigid positioning after the buffer stroke ends.

[0026] In some specific embodiments of this utility model, the axial guide member 31 includes a disc portion 311 and an axial guide rod coaxially fixedly connected, the disc portion 311 being fixedly connected to the rotary assembly 2. The elastic buffer member 33 includes a spring and a spring mounting sleeve, the spring being sleeved on the spring mounting sleeve, the spring mounting sleeve being sleeved on the axial guide rod, one end of the spring abutting against the disc portion 311, and the other end abutting against the spring mounting sleeve. The mounting member 32 includes a mounting base 321 and a flanged linear bearing 322, the flanged linear bearing 322 being sleeved on the outer wall of the axial guide rod and abutting against one end of the mounting base 321. In some specific embodiments of this utility model, a gasket 323 is provided at the bottom of the flanged linear bearing 322 and is fixed to the flanged linear bearing 322 by screws 324.

[0027] The axial guide 31 and the flanged linear bearing 322 together form a dual axial and radial guiding system. When the workpiece pallet 211 rises with the lifting output end until it touches the bottom of the process chamber, the continued driving force is smoothly absorbed by the spring: one end of the spring abuts against the disc part 311, and the other end presses against the spring mounting sleeve fitted on the axial guide rod. As the lifting output end rises, the spring is compressed and deformed, converting the kinetic energy of the remaining stroke into elastic potential energy, thus creating a buffer between the pallet and the bottom. Furthermore, the bearing portion of the flanged linear bearing, due to its height limitation, can limit the compression length of the spring, preventing excessive spring compression that could damage the furnace door.

[0028] In some embodiments of this utility model, the water-cooled magnetic fluid 22 has a magnetic fluid output end 223 on its housing side or bottom, which is used to transmit torque to the rotary table 21 by fluid shearing. To prevent dust, particulate impurities or processing residues generated between the workpiece tray 211 and the rotary table 21 during rotation from entering the magnetic fluid output end 223 and thus affecting the sealing performance and torque output stability of the coupling, a protective component is specially provided between the two.

[0029] Reference Figure 5 and Figure 6 In some specific embodiments of this utility model, the protective component consists of a pair of nested transition members 4 and protective members 5, which are coaxially engaged and form a first barrier around the magnetohydrodynamic output end 223 through geometric interlocking. The inner surface of the transition member 4 is circumferentially machined with continuous annular grooves 41, while the outer surface of the protective member 5 is correspondingly provided with multiple sets of annular protrusions 51. When the protective member 5 is inserted into the transition member 4, the annular protrusions 51 are spirally or linearly aligned and inserted into the annular grooves 41, achieving preliminary mechanical engagement and dustproof isolation.

[0030] Furthermore, the annular groove 41 on the transition piece 4 and the annular protrusion 51 on the protective piece 5 are both divided into several concentric and spaced multiple sets of structures. After each set of annular grooves 41 and the corresponding annular protrusions 51 are interlocked, multiple connected sealing channels are formed between the nested parts, which further improves the isolation effect on fine particles and ensures the long-term stable operation of the magnetofluid output terminal 223.

[0031] Although the embodiments of this utility model have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations fall within the scope and spirit of this utility model as described in the claims. Moreover, the utility model described herein may have other embodiments and can be implemented or realized in various ways.

Claims

1. A crystal boat lifting and rotating device for driving the workpiece tray (211) to rotate and lift, characterized in that, include: The lifting assembly (1) has a lifting output end that can be lifted and lowered along the height direction; A rotary assembly (2) is connected to the lifting output end, and the workpiece tray (211) is mounted on the rotary assembly (2); The buffer preload assembly (3) is set between the lifting output end and the rotary assembly (2), including an axial guide (31) fixedly connected to the rotary assembly (2), an installation part (32) fixedly connected to the lifting output end, and an elastic buffer (33), wherein the elastic buffer (33) is set between the installation part (32) and the axial guide (31). When the workpiece tray (211) contacts the bottom of the process chamber, the lifting output end continues to move, driving the mounting part (32) to move relative to the axial guide (31) and compress the elastic buffer (33). The elastic buffer (33) generates elastic deformation and continuously provides a reverse force to the rotary assembly (2).

2. The crystal boat lifting and rotating device according to claim 1, characterized in that, The axial guide (31) includes a disc portion (311) and an axial guide rod that are coaxially fixedly connected, and the disc portion (311) is fixedly connected to the rotary assembly (2).

3. The crystal boat lifting and rotating device according to claim 2, characterized in that, The elastic buffer (33) includes a spring and a spring mounting sleeve. The spring is sleeved on the spring mounting sleeve, and the spring mounting sleeve is sleeved on the axial guide rod. One end of the spring abuts against the disc portion (311), and the other end abuts against the spring mounting sleeve.

4. The crystal boat lifting and rotating device according to claim 3, characterized in that, The mounting component (32) includes a mounting base (321) and a flanged linear bearing (322), which is sleeved on the outer wall of the axial guide rod and abuts against one end of the mounting base (321).

5. The crystal boat lifting and rotating device according to claim 1, characterized in that, The slewing assembly (2) includes: Rotary turntable (21); A water-cooled magnetic fluid (22) is disposed at the bottom of the rotary table (21) to drive the workpiece tray (211) to rotate; A rotary drive (23) is installed at one end of the rotary disk (21) to drive the water-cooled magnetic fluid (22) to rotate.

6. The crystal boat lifting and rotating device according to claim 5, characterized in that, The rotary drive (23) includes: A drive motor (231) is mounted on the bottom of the rotary table (21); The first pulley (232) is connected to the output end of the drive motor (231); The second pulley (233) is connected to the first pulley (232) for transmission, and the second pulley (233) is connected to the water-cooled magnetic fluid (22).

7. The crystal boat lifting and rotating device according to claim 5, characterized in that, The water-cooled magnetic fluid (22) also includes an inlet connector (221) and an outlet connector (222). The inlet connector (221) is connected to a water supply source, and the outlet connector (222) is connected to the inlet connector (221) through a pipeline to form a cooling circuit.

8. The crystal boat lifting and rotating device according to claim 5, characterized in that, The water-cooled magnetic fluid (22) has a magnetic fluid output end (223), and a protective component is provided between the workpiece tray (211) and the rotary table (21). The protective component is used to prevent impurities from entering the magnetic fluid output end (223).

9. The crystal boat lifting and rotating device according to claim 8, characterized in that, The protective assembly includes a transition piece (4) and a protective piece (5) nested together. One side surface of the transition piece (4) is provided with an annular groove (41), and one side surface of the protective piece (5) is provided with an annular protrusion (51). The annular protrusion (51) is inserted into the annular groove (41).

10. The crystal boat lifting and rotating device according to claim 9, characterized in that, The annular protrusion (51) and the annular groove (41) each include multiple sets, and the multiple sets of the annular groove (41) and the multiple sets of the annular protrusion (51) are correspondingly inserted to form multiple interconnected sealed channels.

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