Graphite boat carrier for preventing deformation and photovoltaic cell coating equipment

Abstract

The utility model discloses a kind of graphite boat carrier and photovoltaic cell coating equipment to prevent deformation, belong to solar cell production equipment technical field, graphite boat piece includes thickened outer piece at both sides and ordinary inner piece between several thickened outer piece;The long side edge of graphite boat piece is all set with the connecting hole for connecting piece and ceramic connecting ring assembly to pass through, connecting piece includes the first connecting rod of multiple parallel settings;Ceramic connecting ring assembly includes the ceramic connecting ring of multiple double-ring structure and second connecting rod, first connecting rod and two groups of second connecting rod are all set through connecting hole and mutually parallel and equidistant arrangement, ceramic connecting ring is simultaneously sleeved on the two second connecting rods of one group and is arranged side by side, two free ends of first connecting rod and second connecting rod are all locked by nut. By thickening treatment to graphite boat outer piece, and using double-ring structure ceramic connecting ring assembly to replace traditional single-ring structure, the rigidity and anti-deformation ability of overall structure are effectively enhanced.

Description

Technical Field

[0001] This utility model relates to the technical field of solar cell production equipment, specifically to a graphite boat carrier for preventing deformation and a photovoltaic cell coating equipment. Background Technology

[0002] In the production of TOPcon photovoltaic cells, plasma-enhanced chemical vapor deposition (PECVD) is a key process for forming a dielectric film on the surface of crystalline silicon solar cells. This process takes place in a coating equipment, where pulsed radio frequency excitation of heated rarefied gas generates a glow discharge, forming plasma. Multiple sets of corresponding graphite sheets are subjected to opposing alternating voltages, causing the plasma to accelerate and collide with the gas between the electrodes, ultimately reaching the silicon wafer surface to complete the coating. These corresponding graphite sheet sets arranged together constitute a graphite boat.

[0003] Graphite boats are made of high-purity graphite and are characterized by multiple rows of parallel graphite boat sheets. Each graphite boat sheet has a graphite boat locking point, which plays a crucial role in fixing and carrying silicon wafers. To enhance market competitiveness and reduce production costs, the photovoltaic industry is moving towards increasing the wafer load capacity of graphite boats, mainly reflected in two trends: one is the use of a single furnace tube with a single RF power supply and a single long graphite boat; the other is the use of a single furnace tube with dual RF power supplies and two short graphite boats. Currently, the longest single boat in the industry has reached 2348mm.

[0004] However, increasing the length of the graphite boat also presents significant technical challenges. Due to the inherent properties of graphite, excessively long graphite boats generate enormous thermal and mechanical stresses when bearing heavy loads, during transport, and during cooling after high temperatures within the furnace tubes, leading to irreversible deformation. This deformation can cause wafers to fall off or break during insertion and removal by robots in automated coating equipment, affecting production efficiency and yield; and can also result in uneven coating of solar cells, causing color differences and impacting product quality. While a dual-short-boat solution can avoid the deformation problem, it requires replacing all equipment in the corresponding coating section to accommodate dual-boat operation, resulting in substantial modification costs.

[0005] Single-piece long graphite boats are prone to deformation due to their excessive length and insufficient structural strength. This deformation can lead to quality defects such as wafer insertion / removal failures, high fragmentation rates, and product color differences. A dual-boat design, on the other hand, is prohibitively expensive. Therefore, there is an urgent need for a novel graphite boat structure that can both ensure a large wafer load per boat and effectively prevent deformation. Utility Model Content

[0006] The purpose of this invention is to solve the problem in the existing technology where single long graphite boats are prone to deformation due to excessive length and insufficient structural strength. This deformation leads to quality defects such as insert / removal failures, high breakage rates, and product color differences, as well as high costs. Specifically: A graphite boat carrier for preventing deformation includes a plurality of parallel-arranged graphite boat sheets, connectors, and ceramic connecting ring assemblies. Each graphite boat sheet includes thickened outer sheets on both sides and ordinary inner sheets located between the thickened outer sheets. The thickness of the thickened outer sheets is greater than the thickness of the ordinary inner sheets. The plurality of graphite boat sheets are connected and fixed in series by the connectors. Each graphite boat sheet has connecting holes at its long edge for the connectors and ceramic connecting ring assemblies to pass through. Each connector includes multiple parallel first connecting rods. The ceramic connecting ring assembly includes multiple double-ring ceramic connecting rings and multiple sets of two second connecting rods arranged side by side. The first connecting rod and the two sets of second connecting rods all pass through the connecting hole. The first connecting rod and the two sets of second connecting rods are parallel to each other and arranged at equal intervals. Each ceramic connecting ring is simultaneously sleeved on one set of two second connecting rods arranged side by side. Both free ends of the first connecting rod and the second connecting rod are locked with nuts.

[0007] Furthermore, the ceramic connecting ring includes a main body, both ends of which are rounded, and the middle of the main body has two through holes for connecting two second connecting rods.

[0008] Furthermore, both the first connecting rod and the second connecting rod are provided with ceramic rings to isolate the graphite boat sheets and maintain the spacing, and the ceramic ring and the ceramic connecting ring are selectively provided between each pair of adjacent graphite boat sheets, and the ceramic ring and the ceramic connecting ring have the same thickness.

[0009] Furthermore, the thickness of the thickened outer sheet is at least 2.0 mm greater than the thickness of the ordinary inner sheet.

[0010] Furthermore, the thickness of the thickened outer sheet is 3.0~5.0 mm, and the thickness of the ordinary inner sheet is 2.0~2.5 mm.

[0011] Furthermore, the thickness of the ceramic connecting ring is 10-12 mm.

[0012] Furthermore, the total length of the graphite boat sheet is not less than 2000 mm.

[0013] This application also provides a photovoltaic cell coating apparatus, including a graphite boat carrier as described above to prevent deformation.

[0014] The beneficial effects of adopting the technical solution of this utility model are as follows: (1) By thickening the outer sheet of the graphite boat and replacing the traditional single-ring structure with a double-ring ceramic connecting ring assembly, the rigidity and deformation resistance of the overall structure are effectively enhanced. The thickened outer sheet is equivalent to setting "reinforcing ribs" on both sides of the carrier, which not only increases the moment of inertia of the carrier, but also optimizes the stress distribution, so that external forces (such as high-temperature cooling impact and mechanical stress during transportation) can be evenly dispersed, thereby reducing the risk of deformation caused by local stress concentration. In addition, the combined use of double ceramic rings and double connecting rods further improves the stability and high-temperature resistance of the structure, ensuring that the graphite boat can maintain its shape stability even under extreme temperature change conditions during the PECVD coating process, and avoids deformation caused by thermal expansion and contraction.

[0015] (2) While improving mechanical performance, its original functionality and economy were not sacrificed. The graphite boats remain parallel and the load capacity is unaffected, making them suitable for large-size and high-load production processes. The reasonable arrangement of the ceramic connecting ring and ceramic ring ensures the consistency of the boat spacing and avoids direct contact between the metal connectors and the graphite material, reducing thermal stress problems caused by material differences.

[0016] (3) By preventing deformation of the boat, the stability of the production process and the consistency of the products are directly improved, thereby increasing the yield of the final product. In addition, the structure is compatible with existing coating equipment and processes, without the need to modify furnace tubes, power supplies, cleaning equipment, etc., reducing the equipment upgrade costs and technical adaptation difficulties for enterprises. Without changing the existing working environment, process parameters, furnace tube size and power supply configuration, it achieves large-scale single-boat load-bearing, avoiding the huge equipment modification and replacement costs brought about by the "dual-boat" mode to avoid deformation, and significantly reducing production costs. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 This is a schematic diagram of the structure of a graphite boat carrier that prevents deformation according to this utility model; Figure 2 This is a schematic diagram of a graphite boat carrier graphite boat sheet for preventing deformation according to this utility model. Figure 3 This is a schematic diagram of a graphite boat carrier ceramic connecting ring for preventing deformation according to this utility model. In the diagram, 1. Graphite boat sheet; 2. Thickened outer sheet; 3. Ordinary inner sheet; 4. First connecting rod; 5. Ceramic connecting ring; 6. Second connecting rod; 7. Nut; 8. Main body; 9. Through hole; 10. Ceramic ring. Detailed Implementation

[0019] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions in the embodiments of this utility model will be clearly and completely described below in conjunction with the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this utility model, not all of them. Therefore, the following detailed description of the embodiments of this utility model provided in the accompanying drawings is not intended to limit the scope of the claimed utility model, but merely to represent selected embodiments of this utility model. All other embodiments obtained by those skilled in the art based on the embodiments of this utility model without inventive effort are within the scope of protection of this utility model.

[0020] This embodiment thickens the outer sheet of the graphite boat and replaces the traditional single-ring structure with a double-ring ceramic connecting ring assembly. Without reducing the wafer load, changing the existing working environment, or replacing process equipment, structural optimization significantly improves the graphite boat's resistance to deformation, thereby reducing production costs and increasing production yield. The specific implementation method is as follows: Reference Figures 1-3 As shown, a graphite boat carrier for preventing deformation includes several parallel graphite boat sheets 1, connectors, and ceramic connecting rings 5. Each graphite boat sheet 1 includes a thickened outer sheet 2 on both sides and a regular inner sheet 3 between the thickened outer sheets 2. The thickness of the thickened outer sheet 2 is greater than the thickness of the regular inner sheet 3. The graphite boat sheets 1 are connected and fixed in series by the connectors. Each graphite boat sheet 1 has a connecting hole at its long edge for the connectors and ceramic connecting rings 5 ​​to pass through. The connectors include nine parallel first connecting rods 4. The ceramic connecting ring 5 assembly includes multiple double-ring ceramic connecting rings 5 ​​and multiple sets of two second connecting rods 6 arranged side by side. The first connecting rod 4 and the two sets of second connecting rods 6 are all installed through the connecting hole. The first connecting rod 4 and the two sets of second connecting rods 6 are parallel to each other and arranged at equal intervals. Each ceramic connecting ring 5 is simultaneously sleeved on a set of two second connecting rods 6 arranged side by side. The two free ends of the first connecting rod 4 and the second connecting rod 6 are locked by nuts 7.

[0021] Here, by setting up the structure of the thickened outer sheet 2 and the double-ring ceramic connecting ring 5, the overall structural rigidity and deformation resistance of the graphite boat are significantly enhanced. The thickened outer sheet 2 acts like a "reinforcing rib," effectively dispersing and resisting external stress, preventing deformation during high temperature, heavy load, or turnover, thereby reducing wafer shedding and fragmentation during the coating process and improving product yield and consistency.

[0022] In one preferred embodiment, the ceramic connecting ring 5 includes a main body 8, both ends of which are rounded, and two through holes 9 are provided in the middle of the main body 8 for connecting two second connecting rods 6.

[0023] Here, the rounded corners at both ends of the ceramic connecting ring 5 body 8 reduce stress concentration and extend service life; the double through hole 9 design ensures stable cooperation with the double connecting rods, further enhancing the integrity and torsional resistance of the structure.

[0024] Here, a total of 30 ceramic connecting rings 5 ​​are installed in the graphite boat sheet 1 at the 6th and 15th holes respectively in the direction from the outside to the ordinary inner sheet 3, so as to evenly distribute the force control.

[0025] In a preferred embodiment, both the first connecting rod 4 and the second connecting rod 6 are provided with ceramic rings 10 to isolate the graphite boat pieces 1 and maintain the spacing. The ceramic rings 10 and ceramic connecting rings 5 ​​are selectively provided between each pair of adjacent graphite boat pieces 1, and the ceramic rings 10 and ceramic connecting rings 5 ​​have the same thickness.

[0026] Here, the alternating arrangement of ceramic rings 10 and ceramic connecting rings 5 ​​ensures a uniform spacing between graphite boat sheets 1 and provides a multi-layered support structure, effectively suppressing local deformation caused by thermal expansion and contraction or mechanical vibration, and improving the stability and durability of the carrier.

[0027] In a preferred embodiment, the thickness of the thickened outer sheet 2 is at least 2.0 mm greater than the thickness of the ordinary inner sheet 3.

[0028] Here, the design with a thickness difference of ≥2.0mm between the outer and inner sheets enhances the load-bearing capacity of the edge structure, optimizes stress distribution, and avoids bending or twisting deformation in the middle area due to excessive length.

[0029] In a preferred embodiment, the thickness of the thickened outer sheet 2 is 3.0~5.0 mm, and the thickness of the ordinary inner sheet 3 is 2.0~2.5 mm.

[0030] Here, by specifically limiting the thickness range of the outer and inner sheets, a balance between performance and economy is achieved while ensuring structural strength and taking into account the rational use of materials and manufacturing costs.

[0031] In a preferred embodiment, the ceramic connecting ring 5 has a thickness of 10-12 mm.

[0032] Here, the thickness of the ceramic connecting ring 5 is controlled at 10~12mm, which ensures sufficient mechanical strength and thermal insulation performance, while avoiding the increase in weight or inconvenience of installation due to excessive thickness, making it suitable for high-temperature and high-frequency industrial environments.

[0033] In a preferred embodiment, the total length of the graphite boat 1 is not less than 2000 mm.

[0034] Here, the design is particularly suitable for large graphite boats with a length of ≥2000mm, solving the deformation problem of long boats under high temperature cooling, handling and radio frequency electric field, expanding the upper limit of the number of wafers carried by a single boat and reducing the unit production cost.

[0035] This embodiment also provides a photovoltaic cell coating device, including the graphite boat carrier as described above for preventing deformation.

[0036] Here, integrating the aforementioned anti-deformation graphite boat carrier into the coating equipment can significantly improve the stability of equipment operation and the uniformity of the coating process, reduce process abnormalities caused by boat deformation, improve production efficiency and cell yield, and at the same time avoid the high equipment modification costs caused by replacing the dual-boat system.

[0037] The present invention has been further described above with reference to specific embodiments. However, it should be understood that the specific description herein should not be construed as limiting the substance and scope of the present invention. Various modifications made by those skilled in the art to the above embodiments after reading this specification are all within the scope of protection of the present invention.

Claims

1. A graphite boat carrier designed to prevent deformation, characterized in that, The assembly includes several parallel-arranged graphite boat sheets (1), connectors, and ceramic connecting rings (5). Each graphite boat sheet (1) includes a thickened outer sheet (2) on both sides and a regular inner sheet (3) between the thickened outer sheets (2). The thickness of the thickened outer sheet (2) is greater than the thickness of the regular inner sheet (3). The graphite boat sheets (1) are connected and fixed in series by the connectors. Each graphite boat sheet (1) has a connecting hole at its long edge for the connectors and ceramic connecting rings (5) to pass through. The connectors include multiple parallel first connecting rods (4). The ceramic connecting ring (5) assembly includes multiple double-ring ceramic connecting rings (5) and multiple sets of two second connecting rods (6) arranged side by side. The first connecting rod (4) and the two sets of second connecting rods (6) are all arranged through the connecting hole. The first connecting rod (4) and the two sets of second connecting rods (6) are parallel to each other and arranged at equal intervals. Each ceramic connecting ring (5) is simultaneously sleeved on a set of two second connecting rods (6) arranged side by side. The two free ends of the first connecting rod (4) and the second connecting rod (6) are locked by nuts (7).

2. The graphite boat carrier for preventing deformation according to claim 1, characterized in that, The ceramic connecting ring (5) includes a main body (8), both ends of which are rounded. The main body (8) has two through holes (9) in the middle for connecting two second connecting rods (6).

3. The graphite boat carrier for preventing deformation according to claim 1, characterized in that, Both the first connecting rod (4) and the second connecting rod (6) are provided with ceramic rings (10) to isolate the graphite boat sheets (1) and maintain the spacing. The ceramic rings (10) and ceramic connecting rings (5) are selected to be provided between each pair of adjacent graphite boat sheets (1). The ceramic rings (10) and ceramic connecting rings (5) have the same thickness.

4. The graphite boat carrier for preventing deformation according to claim 1, characterized in that, The thickness of the thickened outer sheet (2) is at least 2.0 mm greater than the thickness of the ordinary inner sheet (3).

5. The graphite boat carrier for preventing deformation according to claim 1 or 4, characterized in that, The thickness of the thickened outer sheet (2) is 3.0~5.0 mm, and the thickness of the ordinary inner sheet (3) is 2.0~2.5 mm.

6. The graphite boat carrier for preventing deformation as described in claim 1, characterized in that, The thickness of the ceramic connecting ring (5) is 10~12 mm.

7. The graphite boat carrier for preventing deformation according to claim 1, characterized in that, The total length of the graphite boat (1) is not less than 2000 mm.

8. A photovoltaic cell coating equipment, characterized in that, Including the graphite boat carrier for preventing deformation as described in any one of claims 1-7.

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