ingot furnace
Patent Information
- Application Number
- CN202522641726.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-12-12
- Publication Date
- 2026-10-30
- Estimated Expiration
- 2035-12-12
AI Technical Summary
然而,在硅料铸锭长晶过程中,铸锭炉炉壁与内部热场温度不同,导致坩埚内硅液的热场温度不均匀,使得硅料长晶时的长晶界面不均匀,例如长晶界面中间凹四周凸,硅液中的杂质不易上浮至硅液的表面,导致杂质在硅料长晶的过程中混入硅锭中,使硅锭的纯度降低、品质降低
[0003]本实用新型旨在至少解决现有技术中存在的技术问题之一。为此,本实用新型的一个目的在于提出一种铸锭炉,该铸锭炉容易保持坩埚内硅液的温度均匀,铸锭长晶过程中的长晶界面平整,制备出的硅锭品质较高。
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Figure CN224917979U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of crystalline silicon manufacturing equipment, and in particular to an ingot casting furnace. Background Technology
[0002] Ingot casting furnaces are mainly used for casting crystalline silicon ingots. They melt silicon material at high temperatures and then allow it to solidify and grow into crystals to obtain silicon ingots. When silicon material is molten at high temperatures, impurities in the molten silicon generally float on the surface. However, during the crystal growth process of silicon ingot casting, the temperature difference between the furnace wall and the internal thermal field causes uneven thermal field temperature in the molten silicon within the crucible. This results in uneven crystal growth interfaces, for example, a concave center and convex edges. Impurities in the molten silicon do not easily rise to the surface, causing them to mix into the silicon ingot during crystal growth, thus reducing the purity and quality of the ingot. Utility Model Content
[0003] The present invention aims to solve at least one of the technical problems existing in the prior art. Therefore, one objective of the present invention is to provide an ingot casting furnace that easily maintains a uniform temperature of the molten silicon in the crucible, ensures a smooth crystal growth interface during the ingot casting process, and produces high-quality silicon ingots.
[0004] A casting furnace according to an embodiment of the present invention includes: a furnace body; a crucible disposed within the furnace body; a heat insulation assembly disposed within the furnace body and covering the outside of the crucible, the heat insulation assembly including a bottom heat insulation layer disposed on the bottom surface of the crucible and including a middle heat insulation layer and an outer peripheral heat insulation layer, the outer peripheral heat insulation layer surrounding the outer peripheral side of the middle heat insulation layer; a first adjustment drive assembly connected to the middle heat insulation layer for driving the middle heat insulation layer to move in a vertical direction; and a second adjustment drive assembly connected to the outer peripheral heat insulation layer for driving the outer peripheral heat insulation layer to move in a vertical direction.
[0005] According to the ingot casting furnace of this utility model embodiment, the bottom insulation layer is divided into a middle insulation layer and an outer peripheral insulation layer. The first adjustment drive component drives the middle insulation layer to move in the vertical direction, and the second adjustment drive component drives the outer peripheral insulation layer to move in the vertical direction. This allows the middle insulation layer and the outer peripheral insulation layer to move independently. According to the temperature distribution of the thermal field in the furnace, the middle insulation layer or the outer peripheral insulation layer can be opened to dissipate heat to the center or circumferential part of the bottom of the crucible, that is, to dissipate the heat from the higher temperature position. This makes the thermal field temperature of the silicon liquid in the crucible more uniform, the crystal growth interface during the ingot casting crystal growth process is flat, and impurities in the silicon liquid are more likely to float to the surface of the silicon liquid, thereby facilitating the separation between the silicon ingot and impurities and resulting in silicon ingots with higher purity and higher quality.
[0006] According to some embodiments of the present invention, the central insulation layer includes a first central insulation board and a second central insulation board, the first central insulation board being stacked on top of the second central insulation board, and the first adjustment drive assembly including a first adjustment drive mechanism and a second adjustment drive mechanism; the first adjustment drive mechanism includes a first telescopic rod extending in the vertical direction, the top of the first telescopic rod being connected to the first central insulation board for driving the first central insulation board to move in the vertical direction; the second adjustment drive mechanism includes a second telescopic rod extending in the vertical direction, the top of the second telescopic rod being connected to the second central insulation board for driving the second central insulation board to move in the vertical direction, and the second central insulation board is provided with a first clearance hole for avoiding the first telescopic rod.
[0007] According to some embodiments of the present invention, the first central insulation board includes a first central insulation body and a first central support plate, wherein the first central support plate is a metal part and is disposed on the bottom surface of the first central insulation body; the second central insulation board includes a second central insulation body and a second central support plate, wherein the second central support plate is a metal part and is disposed on the bottom surface of the second central insulation body.
[0008] According to some embodiments of the present invention, the ratio of the thickness of the first central support plate to the thickness of the first central insulation body is in the range of 0.1 to 0.2, and the ratio of the thickness of the second central support plate to the thickness of the second central insulation body is in the range of 0.1 to 0.2; and / or, the first central support plate and the first central insulation body are connected by fasteners, and the second central support plate and the second central insulation body are connected by fasteners.
[0009] According to some embodiments of the present invention, the first adjustment drive mechanism is a linear cylinder, the cylinder body of the first adjustment drive mechanism is a first cylinder body, the first cylinder body is located below the furnace body, and the first telescopic rod passes through the bottom of the furnace body; the second adjustment drive mechanism is a linear cylinder, the cylinder body of the second adjustment drive mechanism is a second cylinder body, the second cylinder body is located below the furnace body, and the second telescopic rod passes through the bottom of the furnace body; and / or, a first guide sleeve is provided inside the furnace body, the first guide sleeve is located below the bottom insulation layer and spaced apart from the bottom insulation layer in the vertical direction, the lower end of the first guide sleeve is fixed to the bottom of the furnace body, and the first telescopic rod passes through the first guide sleeve in the vertical direction; a second guide sleeve is provided inside the furnace body, the second guide sleeve is located below the bottom insulation layer and spaced apart from the bottom insulation layer in the vertical direction, the lower end of the second guide sleeve is fixed to the bottom of the furnace body, and the second telescopic rod passes through the second guide sleeve in the vertical direction.
[0010] According to some embodiments of the present invention, the outer peripheral insulation layer includes a first outer peripheral insulation plate and a second outer peripheral insulation plate, the first outer peripheral insulation plate being stacked on top of the second outer peripheral insulation plate, and the second adjustment drive assembly including a third adjustment drive mechanism and a fourth adjustment drive mechanism; the third adjustment drive mechanism includes a third telescopic rod extending in the vertical direction, the top of the third telescopic rod being connected to the first outer peripheral insulation plate to drive the first outer peripheral insulation plate to move in the vertical direction; the fourth adjustment drive mechanism includes a fourth telescopic rod extending in the vertical direction, the top of the fourth telescopic rod being connected to the second outer peripheral insulation plate to drive the second outer peripheral insulation plate to move in the vertical direction, and the second outer peripheral insulation plate is provided with a third avoidance hole for avoiding the third telescopic rod.
[0011] According to some embodiments of the present invention, the first peripheral insulation board includes a first peripheral insulation body and a first peripheral support plate, wherein the first peripheral support plate is a metal part and is disposed on the bottom surface of the first peripheral insulation body; the second peripheral insulation board includes a second peripheral insulation body and a second peripheral support plate, wherein the second peripheral support plate is a metal part and is disposed on the bottom surface of the second peripheral insulation body.
[0012] According to some embodiments of the present invention, the ratio of the thickness of the first outer peripheral support plate to the thickness of the first outer peripheral insulation body is in the range of 0.1 to 0.2, and the ratio of the thickness of the second outer peripheral support plate to the thickness of the second outer peripheral insulation body is in the range of 0.1 to 0.2; and / or, the first outer peripheral support plate and the first outer peripheral insulation body are connected by fasteners, and the second outer peripheral support plate and the second outer peripheral insulation body are connected by fasteners.
[0013] According to some embodiments of the present invention, the third adjustment drive mechanism is a linear cylinder, the cylinder body of the third adjustment drive mechanism is a third cylinder body, the third cylinder body is located below the furnace body, and the third telescopic rod passes through the bottom of the furnace body; the fourth adjustment drive mechanism is a linear cylinder, the cylinder body of the fourth adjustment drive mechanism is a fourth cylinder body, the fourth cylinder body is located below the furnace body, and the fourth telescopic rod passes through the bottom of the furnace body; and / or, a third guide sleeve is provided inside the furnace body, the third guide sleeve is located below the bottom insulation layer and spaced apart from the bottom insulation layer in the vertical direction, the lower end of the third guide sleeve is fixed to the bottom of the furnace body, and the third telescopic rod passes through the third guide sleeve in the vertical direction; a fourth guide sleeve is provided inside the furnace body, the fourth guide sleeve is located below the bottom insulation layer and spaced apart from the bottom insulation layer in the vertical direction, the lower end of the fourth guide sleeve is fixed to the bottom of the furnace body, and the fourth telescopic rod passes through the fourth guide sleeve in the vertical direction.
[0014] According to some embodiments of the present invention, the central insulation layer includes a first central insulation board and a second central insulation board, with the first central insulation board stacked on top of the second central insulation board; the outer peripheral insulation layer includes a first outer peripheral insulation board and a second outer peripheral insulation board, with the first outer peripheral insulation board stacked on top of the second outer peripheral insulation board; wherein, the mating gap between the first central insulation board and the first outer peripheral insulation board is a first mating gap, and the mating gap between the second central insulation board and the second outer peripheral insulation board is a second mating gap, and the second mating gap is staggered from the first mating gap.
[0015] Additional aspects and advantages of this invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description
[0016] The above and / or additional aspects and advantages of this utility model will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, in which: Figure 1 This is a schematic diagram of a casting furnace according to some embodiments of the present utility model; Figure 2 This is a schematic diagram of a thermal insulation component according to some embodiments of the present invention; Figure 3 yes Figure 2 A partial schematic diagram of the thermal insulation component; Figure 4 yes Figure 2 Exploded view of the central insulation layer; Figure 5 yes Figure 2 Exploded view of the outer and middle insulation layers.
[0017] Figure label: 100. Ingot casting furnace; 10. Furnace body; 11. First guide sleeve; 12. Third guide sleeve; 20. Crucible; 30. Thermal insulation component; 31. Bottom thermal insulation layer; 32. Middle thermal insulation layer; 321. First middle thermal insulation board; 322. Second middle thermal insulation board; 323. First middle thermal insulation body; 324. First middle support plate; 325. First clearance hole; 326. Second middle thermal insulation body; 327. Second middle support plate; 33. Outer perimeter thermal insulation layer; 331. First outer perimeter thermal insulation board; 332. Second outer perimeter thermal insulation board; 333. First outer perimeter thermal insulation body; 334. First outer perimeter support plate; 335. Third clearance hole; 326. Second outer perimeter thermal insulation body; 327. Second outer perimeter support plate; 34. First mating gap; 35. Second mating gap; 40. First adjustment drive assembly; 41. First adjustment drive mechanism; 411. First telescopic rod; 412. First cylinder; 50. Second adjustment drive assembly; 51. Third adjustment drive mechanism; 511. Third telescopic rod; 512. Third cylinder; 60. Heat sink; 61. Support rod. Detailed Implementation
[0018] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.
[0019] The following is for reference. Figures 1-5 Description of a casting furnace 100 according to an embodiment of the present utility model.
[0020] refer to Figure 1 According to an embodiment of the present invention, the ingot casting furnace 100 includes: a furnace body 10, a crucible 20, a heat preservation component 30, a first adjustment drive component 40, and a second adjustment drive component 50.
[0021] The crucible 20 is disposed inside the furnace body 10, and the heat insulation component 30 is disposed inside the furnace body 10 and covers the outside of the crucible 20. The heat insulation component 30 includes a bottom heat insulation layer 31, which is disposed on the bottom surface of the crucible 20. The bottom heat insulation layer 31 includes a middle heat insulation layer 32 and an outer peripheral heat insulation layer 33. The outer peripheral heat insulation layer 33 surrounds the outer periphery of the middle heat insulation layer 32. The first adjustment drive component 40 is connected to the middle heat insulation layer 32 to drive the middle heat insulation layer 32 to move in the up and down direction. The second adjustment drive component 50 is connected to the outer peripheral heat insulation layer 33 to drive the outer peripheral heat insulation layer 33 to move in the up and down direction.
[0022] For example, when the ingot furnace 100 is used for casting crystalline silicon ingots, and the temperature of the center part of the crucible 20 is higher than that of the circumferential part, the first adjustment drive component 40 can drive the central insulation layer 32 downward to dissipate heat from the center part of the bottom of the crucible 20; when the temperature of the circumferential part of the crucible 20 is higher than that of the center part, the second adjustment drive component 50 can drive the outer circumferential insulation layer 33 downward to dissipate heat from the circumferential part of the bottom of the crucible 20; when crystalline silicon condenses and grows crystals, the first adjustment drive component 40 and the second adjustment drive component 50 can drive the bottom insulation layer 31 downward to quickly dissipate heat from the crucible 20.
[0023] For example, the ingot casting furnace 100 also includes a heat dissipation block 60 and multiple support rods 61. The heat dissipation block 60 is located on the bottom surface of the crucible 20, between the bottom insulation layer 31 and the bottom surface of the crucible 20. The multiple support rods 61 are spaced apart in the horizontal direction, each support rod 61 passing through the bottom insulation layer 31. The lower end of each support rod 61 is fixed to the bottom of the furnace body 10, and the upper end of each support rod 61 is connected to the heat dissipation block 60. When crystalline silicon condenses and grows crystals, the bottom insulation layer 31 moves downward, and the heat dissipation block 60 can accelerate the heat dissipation of the crucible 20.
[0024] For example, when the ingot furnace 100 is used for polycrystalline silicon ingot casting, the polycrystalline silicon starts to crystallize from the bottom of the crucible 20 and gradually crystallizes from bottom to top. During the ingot crystal growth process, if the temperature of the silicon liquid is uneven, the crystal growth rate will be different at different locations, the crystal growth interface will be undulating, and impurities will more easily flow to the area with a slower crystallization rate, making it easier for impurities to mix into the silicon ingot. By dissipating heat to the center or circumferential part of the bottom of the crucible 20, the temperature of the silicon liquid in the crucible 20 will be more uniform. During the ingot crystal growth process, impurities will more easily float to the surface of the silicon liquid. After the crystalline silicon has solidified, the top layer of crystalline silicon can be removed, leaving a silicon ingot with higher purity.
[0025] According to the ingot casting furnace 100 of this utility model embodiment, by dividing the bottom insulation layer 31 into a middle insulation layer 32 and an outer peripheral insulation layer 33, and by having the first adjustment drive component 40 drive the middle insulation layer 32 to move in the up-down direction and the second adjustment drive component 50 drive the outer peripheral insulation layer 33 to move in the up-down direction, the middle insulation layer 32 and the outer peripheral insulation layer 33 can move independently relative to each other. Thus, according to the temperature distribution of the thermal field inside the furnace, the middle insulation layer 32 or the outer peripheral insulation layer 33 can be opened to dissipate heat to the central or circumferential part of the bottom of the crucible 20, that is, to dissipate the heat from the higher temperature position, making the thermal field temperature of the silicon liquid inside the crucible 20 more uniform, the crystal growth interface during the ingot casting crystal growth process more flat, and the impurities in the silicon liquid more easily float to the surface of the silicon liquid, thereby facilitating the separation between the silicon ingot and the impurities, and making the prepared silicon ingot have higher purity and higher quality.
[0026] refer to Figure 1 According to some embodiments of the present invention, the middle insulation layer 32 includes a first middle insulation board 321 and a second middle insulation board 322, with the first middle insulation board 321 stacked on top of the second middle insulation board 322, and the first adjustment drive assembly 40 includes a first adjustment drive mechanism 41 and a second adjustment drive mechanism.
[0027] The first adjustment drive mechanism 41 includes a first telescopic rod 411 extending in the vertical direction. The top of the first telescopic rod 411 is connected to the first middle insulation plate 321 to drive the first middle insulation plate 321 to move in the vertical direction. The second adjustment drive mechanism includes a second telescopic rod extending in the vertical direction. The top of the second telescopic rod is connected to the second middle insulation plate 322 to drive the second middle insulation plate 322 to move in the vertical direction. The second middle insulation plate 322 is provided with a first clearance hole 325 for avoiding the first telescopic rod 411.
[0028] For example, when the heat in the center of the crucible 20 is high, the first telescopic rod 411 can move the first central insulation plate 321 downwards, and the second telescopic rod can move the second central insulation plate 322 downwards, so that the central insulation layer 32 opens to quickly dissipate heat from the center of the bottom of the crucible 20. Alternatively, the second telescopic rod can move the second central insulation plate 322 downwards, while the first central insulation plate 321 remains stationary, thereby reducing the thickness of the central insulation layer 32 and slowly dissipating heat from the center of the bottom of the crucible 20.
[0029] By including a first central insulation plate 321 and a second central insulation plate 322 in the central insulation layer 32, and by enabling the first adjustment drive mechanism 41 and the second adjustment drive mechanism to drive the first central insulation plate 321 and the second central insulation plate 322 respectively, the first central insulation plate 321 and the second central insulation plate 322 can be raised and lowered according to the heat dissipation requirements of the central part of the crucible 20, so as to dissipate heat from the central part of the bottom of the crucible 20. This makes the heat dissipation adjustment of the crucible 20 more precise, reduces the heat difference between the central part and the circumferential part of the crucible 20, makes the temperature of the thermal field inside the crucible 20 more uniform, makes the crystal growth interface during the ingot casting crystal growth process smoother, and makes it easier for impurities in the silicon liquid to float to the surface of the silicon liquid, thereby facilitating the separation between the silicon ingot and the impurities, and making the prepared silicon ingot have higher purity and higher quality.
[0030] refer to Figures 2-4 According to some embodiments of the present invention, the first central insulation plate 321 includes a first central insulation body 323 and a first central support plate 324. The first central support plate 324 is a metal part and is disposed on the bottom surface of the first central insulation body 323.
[0031] For example, the first central insulation body 323 can be a foam component or a resin component.
[0032] For example, the top of the first telescopic rod 411 can be connected to the bottom of the first central support plate 324.
[0033] By placing the first central support plate 324 on the bottom surface of the first central insulation body 323, the first central support plate 324 can support the first central insulation body 323 and increase the force-bearing area of the first central insulation body 323, thus preventing the first telescopic rod 411 from damaging the first central insulation body 323. By making the first central support plate 324 a metal part, the first central support plate 324 can have high structural strength and is not easily damaged by force.
[0034] refer to Figures 2-4 According to some embodiments of the present invention, the second central insulation plate 322 includes a second central insulation body 326 and a second central support plate 327. The second central support plate 327 is a metal part and is disposed on the bottom surface of the second central insulation body 326.
[0035] For example, the second central insulation body 326 can be a foam component or a resin component.
[0036] For example, the top of the second telescopic rod can be connected to the bottom of the second central support plate 327.
[0037] By placing the second central support plate 327 on the bottom surface of the second central insulation body 326, the second central support plate 327 can support the second central insulation body 326 and increase the stress-bearing area of the second central insulation body 326, thus preventing the second telescopic rod from damaging the second central insulation body 326. By making the second central support plate 327 a metal part, the second central support plate 327 can have high structural strength and is not easily damaged by stress.
[0038] According to some embodiments of the present invention, the ratio of the thickness of the first central support plate 324 to the thickness of the first central insulation body 323 is in the range of 0.1 to 0.2.
[0039] For example, the ratio of the thickness of the first central support plate 324 to the thickness of the first central insulation body 323 can be in the range of 0.1, 0.12, 0.14, 0.16, 0.18, 0.2, etc. If the ratio is too large, the thickness of the first central insulation body 323 will be too thin, and the insulation performance of the first central insulation plate 321 will be too low, making it easier for the crucible 20 to lose heat; if the ratio is too small, the thickness of the first central support plate 324 will be too thin, and the structural strength of the first central support plate 324 will be low, making it easier for the first central support plate 324 to be damaged.
[0040] By setting the ratio of the thickness of the first central support plate 324 to the thickness of the first central insulation body 323 to be in the range of 0.1 to 0.2, the first central support plate 324 can have high structural strength while maintaining good thermal insulation performance of the first central insulation plate 321.
[0041] According to some embodiments of the present invention, the ratio of the thickness of the second central support plate 327 to the thickness of the second central insulation body 326 is in the range of 0.1 to 0.2.
[0042] For example, the ratio of the thickness of the second central support plate 327 to the thickness of the second central insulation body 326 can be in the range of 0.1, 0.12, 0.14, 0.16, 0.18, 0.2, etc. If the ratio is too large, the thickness of the second central insulation body 326 will be too thin, and the insulation performance of the second central insulation plate 322 will be too low, making it easier for the crucible 20 to lose heat; if the ratio is too small, the thickness of the second central support plate 327 will be too thin, and the structural strength of the second central support plate 327 will be low, making it easier for the second central support plate 327 to be damaged.
[0043] By setting the ratio of the thickness of the second central support plate 327 to the thickness of the second central insulation body 326 to be in the range of 0.1 to 0.2, the second central support plate 327 can have high structural strength while maintaining good thermal insulation performance of the second central insulation plate 322.
[0044] According to some embodiments of the present invention, the first central support plate 324 is connected to the first central insulation body 323 by fasteners, and the second central support plate 327 is connected to the second central insulation body 326 by fasteners.
[0045] For example, the first central support plate 324 and the first central insulation body 323 can be connected by screws, and the second central support plate 327 and the second central insulation body 326 can be connected by screws.
[0046] By connecting the first central support plate 324 to the first central insulation body 323 with fasteners, and connecting the second central support plate 327 to the second central insulation body 326 with fasteners, it is convenient to disassemble the first central support plate 324 to the first central insulation body 323 and the second central support plate 327 to the second central insulation body 326, thereby facilitating maintenance and replacement.
[0047] refer to Figure 1 According to some embodiments of the present invention, the first adjustment drive mechanism 41 is a linear cylinder, the cylinder body of the first adjustment drive mechanism 41 is a first cylinder body 412, the first cylinder body 412 is located below the furnace body 10, and the first telescopic rod 411 passes through the bottom of the furnace body 10. The second adjustment drive mechanism is a linear cylinder, the cylinder body of the second adjustment drive mechanism is a second cylinder, the second cylinder is located below the furnace body 10, and the second telescopic rod passes through the bottom of the furnace body 10.
[0048] By making the first adjustment drive mechanism 41 and the second adjustment drive mechanism linear cylinders, it is easy to drive the first telescopic rod 411 and the second telescopic rod. The driving process is relatively simple, and the installation and maintenance are relatively convenient. Furthermore, by making the first cylinder 412 and the second cylinder both located below the furnace body 10, and the first telescopic rod 411 and the second telescopic rod passing through the bottom of the furnace body 10, the space occupied by the first cylinder 412 and the second cylinder within the furnace body 10 can be reduced.
[0049] refer to Figure 1 According to some embodiments of the present invention, a first guide sleeve 11 is provided inside the furnace body 10. The first guide sleeve 11 is located below the bottom insulation layer 31, and the first guide sleeve 11 and the bottom insulation layer 31 are spaced apart in the vertical direction. The lower end of the first guide sleeve 11 is fixed to the bottom of the furnace body 10. A first telescopic rod 411 passes through the first guide sleeve 11 in the vertical direction. A second guide sleeve is provided inside the furnace body 10. The second guide sleeve is located below the bottom insulation layer 31, and the second guide sleeve and the bottom insulation layer 31 are spaced apart in the vertical direction. The lower end of the second guide sleeve is fixed to the bottom of the furnace body 10. A second telescopic rod passes through the second guide sleeve in the vertical direction.
[0050] By providing a first guide sleeve 11 and a second guide sleeve, and having the first telescopic rod 411 pass through the first guide sleeve 11 in the vertical direction and the second telescopic rod pass through the second guide sleeve in the vertical direction, the first telescopic rod 411 and the second telescopic rod can guide each other when they move up and down, so that the first telescopic rod 411 and the second telescopic rod can move along the first guide sleeve 11 and the second guide sleeve when they move up and down, so that the bottom insulation layer 31 can be accurately positioned after opening to dissipate heat and then returning to its original position.
[0051] refer to Figure 1 According to some embodiments of the present invention, the outer peripheral insulation layer 33 includes a first outer peripheral insulation plate 331 and a second outer peripheral insulation plate 332. The first outer peripheral insulation plate 331 is stacked on top of the second outer peripheral insulation plate 332. The second adjustment drive assembly 50 includes a third adjustment drive mechanism 51 and a fourth adjustment drive mechanism. The third adjustment drive mechanism 51 includes a third telescopic rod 511 extending in the vertical direction. The top of the third telescopic rod 511 is connected to the first outer peripheral insulation plate 331 to drive the first outer peripheral insulation plate 331 to move in the vertical direction. The fourth adjustment drive mechanism includes a fourth telescopic rod extending in the vertical direction. The top of the fourth telescopic rod is connected to the second outer peripheral insulation plate 332 to drive the second outer peripheral insulation plate 332 to move in the vertical direction. The second outer peripheral insulation plate 332 is provided with a third avoidance hole 335 for avoiding the third telescopic rod 511.
[0052] For example, when the heat in the circumferential part of the crucible 20 is high, the third telescopic rod 511 can drive the first outer circumferential insulation plate 331 to move downwards, and the fourth telescopic rod can drive the second outer circumferential insulation plate 332 to move downwards, so that the outer circumferential insulation layer 33 opens to quickly dissipate heat from the circumferential part of the bottom of the crucible 20. Alternatively, the fourth telescopic rod can drive the second outer circumferential insulation plate 332 to move downwards, while the first outer circumferential insulation plate 331 does not move, thereby reducing the thickness of the outer circumferential insulation layer 33 and slowly dissipating heat from the circumferential part of the bottom of the crucible 20.
[0053] By making the outer peripheral insulation layer 33 include a first outer peripheral insulation plate 331 and a second outer peripheral insulation plate 332, and by enabling the third adjustment drive mechanism 51 and the fourth adjustment drive mechanism to drive the first outer peripheral insulation plate 331 and the second outer peripheral insulation plate 332 respectively, the first outer peripheral insulation plate 331 and the second outer peripheral insulation plate 332 can be raised and lowered according to the heat dissipation requirements of the circumferential part of the crucible 20, so as to dissipate heat from the circumferential part at the bottom of the crucible 20. This makes the heat dissipation adjustment of the crucible 20 more precise, reduces the heat difference between the center and the circumferential part of the crucible 20, makes the temperature of the thermal field inside the crucible 20 more uniform, makes the crystal growth interface during the ingot casting crystal growth process smoother, and makes it easier for impurities in the silicon liquid to float to the surface of the silicon liquid, thereby facilitating the separation between the silicon ingot and the impurities, and making the prepared silicon ingot have higher purity and higher quality.
[0054] refer to Figures 2-5 According to some embodiments of the present invention, the first outer peripheral insulation plate 331 includes a first outer peripheral insulation body 333 and a first outer peripheral support plate 334. The first outer peripheral support plate 334 is a metal part and is disposed on the bottom surface of the first outer peripheral insulation body 333.
[0055] For example, the first outer peripheral insulation body 333 can be a foam component or a resin component.
[0056] For example, the top of the third telescopic rod 511 can be connected to the bottom of the first outer peripheral support plate 334.
[0057] By placing the first outer peripheral support plate 334 on the bottom surface of the first outer peripheral insulation body 333, the first outer peripheral support plate 334 can support the first outer peripheral insulation body 333 and increase the force-bearing area of the first outer peripheral insulation body 333, thus preventing the third telescopic rod 511 from damaging the first outer peripheral insulation body 333. By making the first outer peripheral support plate 334 a metal part, the first outer peripheral support plate 334 can have high structural strength and is not easily damaged by force.
[0058] refer to Figures 2-5According to some embodiments of the present invention, the second outer peripheral insulation plate 332 includes a second outer peripheral insulation body 326 and a second outer peripheral support plate 327. The second outer peripheral support plate 327 is a metal part and is disposed on the bottom surface of the second outer peripheral insulation body 326.
[0059] For example, the second outer peripheral insulation body 326 can be a foam component or a resin component.
[0060] For example, the top of the fourth telescopic rod can be connected to the bottom of the second peripheral support plate 327.
[0061] By placing the second outer peripheral support plate 327 on the bottom surface of the second outer peripheral insulation body 326, the second outer peripheral support plate 327 can support the second outer peripheral insulation body 326 and increase the force-bearing area of the second outer peripheral insulation body 326, thus preventing the fourth telescopic rod from damaging the second outer peripheral insulation body 326. By making the second outer peripheral support plate 327 a metal part, the second outer peripheral support plate 327 can have high structural strength and is not easily damaged by force.
[0062] According to some embodiments of the present invention, the ratio of the thickness of the first outer peripheral support plate 334 to the thickness of the first outer peripheral insulation body 333 is in the range of 0.1 to 0.2.
[0063] For example, the ratio of the thickness of the first outer peripheral support plate 334 to the thickness of the first outer peripheral insulation body 333 can be in the range of 0.1, 0.12, 0.14, 0.16, 0.18, 0.2, etc. If the ratio is too large, the thickness of the first outer peripheral insulation body 333 will be too thin, and the insulation performance of the first outer peripheral insulation plate 331 will be too low, making it easier for the crucible 20 to lose heat; if the ratio is too small, the thickness of the first outer peripheral support plate 334 will be too thin, and the structural strength of the first outer peripheral support plate 334 will be low, making it easier for the first outer peripheral support plate 334 to be damaged.
[0064] By setting the ratio of the thickness of the first outer peripheral support plate 334 to the thickness of the first outer peripheral insulation body 333 to be in the range of 0.1 to 0.2, the first outer peripheral insulation plate 331 can have good thermal insulation performance while the first outer peripheral support plate 334 has high structural strength.
[0065] According to some embodiments of the present invention, the ratio of the thickness of the second outer peripheral support plate 327 to the thickness of the second outer peripheral insulation body 326 is in the range of 0.1 to 0.2.
[0066] For example, the ratio of the thickness of the second outer peripheral support plate 327 to the thickness of the second outer peripheral insulation body 326 can be in the range of 0.1, 0.12, 0.14, 0.16, 0.18, 0.2, etc. If the ratio is too large, the thickness of the second outer peripheral insulation body 326 will be too thin, and the insulation performance of the second outer peripheral insulation plate 332 will be too low, making it easier for the crucible 20 to lose heat; if the ratio is too small, the thickness of the second outer peripheral support plate 327 will be too thin, and the structural strength of the second outer peripheral support plate 327 will be low, making it easier for the second outer peripheral support plate 327 to be damaged.
[0067] By setting the ratio of the thickness of the second outer peripheral support plate 327 to the thickness of the second outer peripheral insulation body 326 to be in the range of 0.1 to 0.2, the second outer peripheral insulation plate 332 can have good thermal insulation performance while the second outer peripheral support plate 327 has high structural strength.
[0068] According to some embodiments of the present invention, the first outer peripheral support plate 334 is connected to the first outer peripheral insulation body 333 by fasteners, and the second outer peripheral support plate 327 is connected to the second outer peripheral insulation body 326 by fasteners.
[0069] For example, the first outer peripheral support plate 334 and the first outer peripheral insulation body 333 can be connected by screws, and the second outer peripheral support plate 327 and the second outer peripheral insulation body 326 can be connected by screws.
[0070] By connecting the first outer peripheral support plate 334 to the first outer peripheral insulation body 333 with fasteners, and connecting the second outer peripheral support plate 327 to the second outer peripheral insulation body 326 with fasteners, it is easy to disassemble the first outer peripheral support plate 334 to the first outer peripheral insulation body 333 and the second outer peripheral support plate 327 to the second outer peripheral insulation body 326, thereby facilitating maintenance and replacement.
[0071] refer to Figure 1 According to some embodiments of the present invention, the third adjustment drive mechanism 51 is a linear cylinder, the cylinder body of the third adjustment drive mechanism 51 is the third cylinder body 512, the third cylinder body 512 is located below the furnace body 10, and the third telescopic rod 511 passes through the bottom of the furnace body 10. The fourth adjustment drive mechanism is a linear cylinder, the cylinder body of the fourth adjustment drive mechanism is the fourth cylinder body, the fourth cylinder body is located below the furnace body 10, and the fourth telescopic rod passes through the bottom of the furnace body 10.
[0072] By making the third adjustment drive mechanism 51 and the fourth adjustment drive mechanism linear cylinders, it is easy to drive the third telescopic rod 511 and the fourth telescopic rod. The driving process is relatively simple, and the installation and maintenance are relatively convenient. Furthermore, by making the third cylinder 512 and the fourth cylinder both located below the furnace body 10, and the third telescopic rod 511 and the fourth telescopic rod passing through the bottom of the furnace body 10, the space occupied by the third cylinder 512 and the fourth cylinder within the furnace body 10 can be reduced.
[0073] refer to Figure 1 According to some embodiments of the present invention, a third guide sleeve 12 is provided inside the furnace body 10. The third guide sleeve 12 is located below the bottom insulation layer 31 and is spaced apart from the bottom insulation layer 31 in the vertical direction. The lower end of the third guide sleeve 12 is fixed to the bottom of the furnace body 10. A third telescopic rod 511 passes through the third guide sleeve 12 in the vertical direction. A fourth guide sleeve is provided inside the furnace body 10. The fourth guide sleeve is located below the bottom insulation layer 31 and is spaced apart from the bottom insulation layer 31 in the vertical direction. The lower end of the fourth guide sleeve is fixed to the bottom of the furnace body 10. A fourth telescopic rod passes through the fourth guide sleeve in the vertical direction.
[0074] By providing a third guide sleeve 12 and a fourth guide sleeve, and having the third telescopic rod 511 pass through the third guide sleeve 12 in the vertical direction and the fourth telescopic rod pass through the fourth guide sleeve in the vertical direction, the third telescopic rod 511 and the fourth telescopic rod can guide each other when they move up and down. This allows the third telescopic rod 511 and the fourth telescopic rod to move along the third guide sleeve 12 and the fourth guide sleeve when they move up and down, ensuring that the outer peripheral insulation layer 33 is accurately positioned after opening for heat dissipation and then resetting.
[0075] refer to Figure 3 According to some embodiments of the present invention, the middle insulation layer 32 includes a first middle insulation board 321 and a second middle insulation board 322, with the first middle insulation board 321 stacked on top of the second middle insulation board 322. The outer peripheral insulation layer 33 includes a first outer peripheral insulation board 331 and a second outer peripheral insulation board 332, with the first outer peripheral insulation board 331 stacked on top of the second outer peripheral insulation board 332. The fitting gap between the first middle insulation board 321 and the first outer peripheral insulation board 331 is a first fitting gap 34, and the fitting gap between the second middle insulation board 322 and the second outer peripheral insulation board 332 is a second fitting gap 35. The second fitting gap 35 is staggered from the first fitting gap 34.
[0076] For example, the width of the first mating gap 34 can be 1~2cm, and the width of the second mating gap 35 can be 1~2cm.
[0077] By staggering the first fitting gap 34 and the second fitting gap 35, heat can be prevented from flowing out and dissipating from the gaps during the insulation process of the middle insulation layer 32 and the outer peripheral insulation layer 33 on the crucible 20, thus improving the insulation effect of the insulation component 30.
[0078] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.
[0079] In the description of this utility model, "first feature" and "second feature" may include one or more of the features.
[0080] In the description of this utility model, "multiple" means two or more.
[0081] In the description of this utility model, the first feature being "above" or "below" the second feature may include the first and second features being in direct contact, or it may include the first and second features not being in direct contact but being in contact through another feature between them.
[0082] In the description of this utility model, the terms "above", "over" and "on top" for the first feature and the second feature include the first feature being directly above or diagonally above the second feature, or simply indicate that the first feature is at a higher horizontal level than the second feature.
[0083] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.
[0084] Although embodiments of the present invention have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the claims and their equivalents.
Claims
1. A casting furnace, characterized in that, include: Furnace body; A crucible, wherein the crucible is disposed within the furnace body; A heat insulation component is disposed inside the furnace body and covers the outside of the crucible. The heat insulation component includes a bottom heat insulation layer, which is disposed on the bottom surface of the crucible and includes a middle heat insulation layer and an outer peripheral heat insulation layer. The outer peripheral heat insulation layer surrounds the outer peripheral side of the middle heat insulation layer. A first adjustment drive assembly is connected to the middle insulation layer to drive the middle insulation layer to move in the vertical direction. The second adjustment drive component is connected to the outer peripheral insulation layer to drive the outer peripheral insulation layer to move in the vertical direction.
2. The ingot casting furnace according to claim 1, characterized in that, The central insulation layer includes a first central insulation board and a second central insulation board, with the first central insulation board stacked on top of the second central insulation board. The first adjustment drive assembly includes a first adjustment drive mechanism and a second adjustment drive mechanism. The first adjustment drive mechanism includes a first telescopic rod extending in the vertical direction, the top of the first telescopic rod being connected to the first central insulation plate for driving the first central insulation plate to move in the vertical direction; The second adjustment drive mechanism includes a second telescopic rod extending in the vertical direction. The top of the second telescopic rod is connected to the second central insulation plate to drive the second central insulation plate to move in the vertical direction. The second central insulation plate is provided with a first avoidance hole for avoiding the first telescopic rod.
3. The ingot casting furnace according to claim 2, characterized in that, The first central insulation board includes a first central insulation body and a first central support plate, wherein the first central support plate is a metal part and is disposed on the bottom surface of the first central insulation body; the second central insulation board includes a second central insulation body and a second central support plate, wherein the second central support plate is a metal part and is disposed on the bottom surface of the second central insulation body.
4. The ingot casting furnace according to claim 3, characterized in that, The ratio of the thickness of the first central support plate to the thickness of the first central insulation body is in the range of 0.1 to 0.2, and the ratio of the thickness of the second central support plate to the thickness of the second central insulation body is in the range of 0.1 to 0.
2. And / or, the first central support plate is connected to the first central insulation body by fasteners, and the second central support plate is connected to the second central insulation body by fasteners.
5. The ingot casting furnace according to claim 2, characterized in that, The first adjustment drive mechanism is a linear cylinder, the cylinder body of the first adjustment drive mechanism is a first cylinder body, the first cylinder body is located below the furnace body, and the first telescopic rod passes through the bottom of the furnace body; the second adjustment drive mechanism is a linear cylinder, the cylinder body of the second adjustment drive mechanism is a second cylinder body, the second cylinder body is located below the furnace body, and the second telescopic rod passes through the bottom of the furnace body. And / or, the furnace body is provided with a first guide sleeve, the first guide sleeve is located below the bottom insulation layer and is spaced apart from the bottom insulation layer in the vertical direction, the lower end of the first guide sleeve is fixed to the bottom of the furnace body, and the first telescopic rod passes through the first guide sleeve in the vertical direction. The furnace body is provided with a second guide sleeve, the second guide sleeve is located below the bottom insulation layer and is spaced apart from the bottom insulation layer in the vertical direction, the lower end of the second guide sleeve is fixed to the bottom of the furnace body, and the second telescopic rod passes through the second guide sleeve in the vertical direction.
6. The ingot casting furnace according to any one of claims 1-5, characterized in that, The outer peripheral insulation layer includes a first outer peripheral insulation board and a second outer peripheral insulation board, with the first outer peripheral insulation board stacked on top of the second outer peripheral insulation board. The second adjustment drive assembly includes a third adjustment drive mechanism and a fourth adjustment drive mechanism. The third adjustment drive mechanism includes a third telescopic rod extending in the vertical direction. The top of the third telescopic rod is connected to the first outer peripheral insulation plate to drive the first outer peripheral insulation plate to move in the vertical direction. The fourth adjustment drive mechanism includes a fourth telescopic rod extending in the vertical direction. The top of the fourth telescopic rod is connected to the second outer peripheral insulation plate to drive the second outer peripheral insulation plate to move in the vertical direction. The second outer peripheral insulation plate is provided with a third avoidance hole for avoiding the third telescopic rod.
7. The ingot casting furnace according to claim 6, characterized in that, The first peripheral insulation board includes a first peripheral insulation body and a first peripheral support plate, wherein the first peripheral support plate is a metal part and is disposed on the bottom surface of the first peripheral insulation body; the second peripheral insulation board includes a second peripheral insulation body and a second peripheral support plate, wherein the second peripheral support plate is a metal part and is disposed on the bottom surface of the second peripheral insulation body.
8. The ingot casting furnace according to claim 7, characterized in that, The ratio of the thickness of the first outer peripheral support plate to the thickness of the first outer peripheral insulation body is in the range of 0.1 to 0.2, and the ratio of the thickness of the second outer peripheral support plate to the thickness of the second outer peripheral insulation body is in the range of 0.1 to 0.
2. And / or, the first peripheral support plate is connected to the first peripheral insulation body by fasteners, and the second peripheral support plate is connected to the second peripheral insulation body by fasteners.
9. The ingot casting furnace according to claim 6, characterized in that, The third adjustment drive mechanism is a linear cylinder, the cylinder body of the third adjustment drive mechanism is a third cylinder body, the third cylinder body is located below the furnace body, and the third telescopic rod passes through the bottom of the furnace body; the fourth adjustment drive mechanism is a linear cylinder, the cylinder body of the fourth adjustment drive mechanism is a fourth cylinder body, the fourth cylinder body is located below the furnace body, and the fourth telescopic rod passes through the bottom of the furnace body. And / or, the furnace body is provided with a third guide sleeve, the third guide sleeve is located below the bottom insulation layer and is spaced apart from the bottom insulation layer in the vertical direction, the lower end of the third guide sleeve is fixed to the bottom of the furnace body, and the third telescopic rod passes through the third guide sleeve in the vertical direction. The furnace body is provided with a fourth guide sleeve, the fourth guide sleeve is located below the bottom insulation layer and is spaced apart from the bottom insulation layer in the vertical direction, the lower end of the fourth guide sleeve is fixed to the bottom of the furnace body, and the fourth telescopic rod passes through the fourth guide sleeve in the vertical direction.
10. The ingot casting furnace according to claim 1, characterized in that, The central insulation layer includes a first central insulation board and a second central insulation board, with the first central insulation board stacked on top of the second central insulation board. The outer peripheral insulation layer includes a first outer peripheral insulation board and a second outer peripheral insulation board, with the first outer peripheral insulation board stacked on top of the second outer peripheral insulation board. The first mating gap between the first central insulation board and the first outer perimeter insulation board is the first mating gap, and the second mating gap between the second central insulation board and the second outer perimeter insulation board is the second mating gap. The second mating gap is staggered from the first mating gap.