A UV cavity

Abstract

The utility model provides a kind of UV cavity, including cavity, cavity wall, cavity door, first sealing assembly and second sealing assembly.Process cavity is equipped in cavity, and cavity has oppositely arranged first end surface and second end surface.Cavity wall is fixedly arranged at the first end surface of cavity, and the central position of cavity wall has first opening that is penetrated to process cavity.Cavity door is arranged at the outside of cavity wall and is connected to cavity, for opening and closing process cavity.First sealing assembly is peripherally arranged at the side of cavity wall close to cavity door.Second sealing assembly is peripherally arranged at the side of cavity door towards cavity wall, when cavity door is closed, first sealing assembly and second sealing assembly at least at respective side edge abut and occur elastic compression, so that gas molecule must continuously break through two elastic sealing barriers to occur leakage, and this double sealing design prolongs leakage path, and more through the mutual backup of two lines of defense, reduce UV cavity gas leakage risk.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment technology, and more specifically, to a UV cavity. Background Technology

[0002] The pretreatment UV cavity in the near-surface resistance measurement (QCS) equipment is a key component for oxidizing the wafer surface. The cavity operates based on a sophisticated chemical and physical process. Specifically, first, clean dry air (CDA) is introduced into the cavity. This specially treated air is free of moisture and impurities, providing a pure oxygen environment for the oxidation reaction. Then, a UV lamp is activated, emitting specific wavelengths of ultraviolet light that penetrate the CDA and reach the wafer surface. Under the excitation of the UV light, oxygen molecules in the CDA are decomposed, generating ozone (O3). Ozone, a strong oxidant, reacts with the silicon (Si) on the wafer surface to form silicon dioxide (SiO2), thus forming a dense oxide film on the wafer surface. This oxide film is crucial for subsequent wafer processing, effectively protecting the wafer from contamination and physical damage, and is also a necessary condition for subsequent semiconductor manufacturing processes.

[0003] However, the UV cavity gate, carrying a sealing ring, contacts the corresponding cavity metal surface, and the placement and shape of the sealing ring are crucial to the sealing effect. Improper placement of the sealing ring, such as misalignment, folding, or deformation due to external pressure, will lead to a poor seal and air leakage. During the oxidation process, the airtightness of the UV cavity gate directly affects the density and uniformity of the oxide film across the entire wafer surface. When air leakage occurs in the cavity gate, insufficient CDA at the edges will affect the oxidation effect at the wafer edges. Because CDA is a necessary participant in the oxidation reaction, a reduction in its flow will prevent the oxidation reaction from proceeding fully, resulting in insufficient oxide film thickness and reduced density at the wafer edges. In severe cases, insufficient overall CDA within the cavity will affect the overall density of the oxide film on the wafer surface. Air leakage in the UV cavity gate leads to abnormal uniformity and density of the surface oxide film, which directly affects the accuracy of near-surface resistance measurements. Near-surface resistance measurement is a crucial step in the semiconductor manufacturing process, providing key data on the wafer's electrical performance, which is essential for subsequent process control and product quality assessment. If the oxide film quality fails to meet standards due to sealing issues, the measured resistance value will deviate from the true value. Epitaxial engineers need to adjust equipment parameters based on the resistance measurement results when debugging the equipment. Inaccurate measurement results will lead to incorrect judgments, causing anomalies in batches of products. In large-scale production, such misjudgments caused by sealing problems can result in a large number of scrapped wafers, causing significant economic losses. Utility Model Content

[0004] In view of the problems existing in the prior art described above, this application provides a UV cavity that can reduce the risk of UV cavity leakage.

[0005] To achieve the above and other related objectives, this utility model provides a UV cavity, comprising: The cavity has a process chamber inside and has a first end face and a second end face that are arranged opposite to each other. The cavity wall is fixedly disposed on the first end face of the cavity, and the center of the cavity wall has a first opening that penetrates into the process cavity. A door, located on the outside of the cavity wall and connected to the cavity body, is used to open and close the process cavity; The first sealing assembly is disposed around the periphery of the cavity wall on the side near the cavity opening; The second sealing assembly is disposed around the periphery of the side of the cavity door facing the cavity wall. When the cavity door is closed, the first sealing assembly and the second sealing assembly abut against each other at least at their respective side edges and are elastically pressed together.

[0006] Optionally, the first sealing assembly includes: The first groove is arranged around the periphery of the cavity wall on the side near the cavity entrance; The first sealing ring is disposed in the first groove.

[0007] Optionally, the second sealing assembly includes: The second groove surrounds the periphery of the side of the cavity opening facing the cavity wall; The second sealing ring is disposed in the second groove.

[0008] Optionally, the width of the first groove is between 3 mm and 5 mm, the width of the first sealing ring is between 3 mm and 5 mm, the width of the second groove is between 3 mm and 5 mm, and the width of the second sealing ring is between 3 mm and 5 mm.

[0009] Optionally, the cavity wall and the cavity body are integrally formed.

[0010] Optionally, the cavity door is detachably connected to the cavity.

[0011] Optionally, the cavity opening and cavity wall have the same shape and size.

[0012] Optionally, the shortest distance between the first sealing component and the outer peripheral edge of the cavity wall is between 5 mm and 10 mm, and the shortest distance between the second sealing component and the outer peripheral edge of the cavity door is between 8 mm and 13 mm.

[0013] Optionally, the cavity door is connected to the cavity via a hinge or linear guide mechanism.

[0014] As described above, the UV cavity provided by this utility model has at least the following beneficial technical effects: The UV cavity of this invention includes a cavity body, a cavity wall, a cavity door, a first sealing assembly, and a second sealing assembly. A process chamber is located within the cavity body, and the cavity body has a first end face and a second end face disposed opposite to each other. The cavity wall is fixedly disposed on the first end face of the cavity body, and has a first opening penetrating into the process chamber at its center. The cavity door is disposed on the outer side of the cavity wall and connected to the cavity body, for opening and closing the process chamber. The first sealing assembly is disposed around the periphery of the cavity wall on the side near the cavity door. The second sealing assembly is disposed around the periphery of the cavity door on the side facing the cavity wall. When the cavity door is closed, the first sealing assembly and the second sealing assembly abut against each other at least at their respective side edges and elastically press together. This UV cavity of the present invention forms two independent yet cooperative sealing defenses by providing a first sealing assembly on the cavity wall and a second sealing assembly on the cavity door. When the cavity door is closed, the two sealing assemblies abut against each other at their respective side edges and elastically press together, forcing gas molecules to continuously break through two elastic sealing barriers before leakage occurs. This dual-sealing design not only significantly extends the leakage path but also significantly reduces the risk of UV cavity leakage through the mutual backup of the two defenses. Attached Figure Description

[0015] Figure 1 The diagram shown is a structural schematic of the UV cavity provided by this utility model.

[0016] Figure 2 The diagram shows the side of the cavity wall near the cavity opening provided by this utility model.

[0017] Figure 3 The diagram shown is a schematic of the side of the cavity door near the cavity wall provided by this utility model.

[0018] Figure 4 The diagram shows the contact method between the first sealing component and the second sealing component according to an embodiment of the present invention.

[0019] Figure 5 The diagram shows the contact method between the first sealing component and the second sealing component according to another embodiment of the present invention.

[0020] Figure Labels 1. Cavity; 11. Process cavity; 12. First end face; 13. Second end face; 121. Cavity wall; 1211. First opening; 1212. First sealing assembly; 12121. First groove; 12122. First sealing ring; 14. Cavity door; 141. Second sealing assembly; 1411. Second groove; 1412. Second sealing ring. Detailed Implementation

[0021] The following specific examples illustrate the implementation of this utility model. Those skilled in the art can easily understand other advantages and effects of this utility model from the content disclosed in this specification. This utility model can also be implemented or applied through other different specific embodiments, and various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of this utility model.

[0022] It should be noted that the illustrations provided in this embodiment are only schematic representations of the basic concept of this utility model. Although the illustrations only show components related to this utility model and are not drawn according to the actual number, shape and size of the components, the shape, quantity, positional relationship and proportion of each component can be arbitrarily changed under the premise of realizing the technical solution of this utility model, and the layout of the components may also be more complex.

[0023] This embodiment provides a UV cavity, as shown in the reference. Figures 1 to 5 It includes a cavity 1, a cavity wall 121, a cavity door 14, a first sealing assembly 1212, and a second sealing assembly 141.

[0024] Reference Figure 1Cavity 1 is the core structural component of the UV cavity, and a process chamber 11 is located within it. The UV lamps in the process chamber 11 emit ultraviolet light that can irradiate the entire surface of the wafer placed within the cavity with a highly uniform intensity distribution. This uniform illumination is a crucial prerequisite for forming high-quality, uniformly thick oxide films (such as SiO2 films). Simultaneously, the structure of the process chamber 11 provides ample and appropriate flow space for the reaction gas—typically purified clean dry air (CDA). Proper spatial design promotes a stable and uniform flow field of the gas on the wafer surface, avoiding eddies or dead zones, thereby ensuring that CDA efficiently generates ozone (O3) under UV irradiation and undergoes a sufficient and uniform oxidation reaction with the wafer surface, ultimately resulting in a dense and uniform oxide layer. Cavity 1 has a first end face 12 and a second end face 13 arranged opposite to each other. A cavity wall 121 is fixedly disposed on the first end face 12 of cavity 1, and the center of the cavity wall 121 has a first opening 1211 penetrating into the process chamber 11. The first opening 1211 is the main channel for material exchange between the process chamber 11 and the external environment, specifically for the input and output of wafers. The size of the first opening 1211 is typically slightly larger than the diameter of the wafer being processed to ensure that the wafer can be smoothly handled by automated equipment such as robotic arms. In this embodiment, the chamber wall 121 and the chamber body 1 are integrally formed, eliminating any assembly gaps that may exist between the chamber wall 121 and the chamber body 1, fundamentally eliminating the risk of gas leakage from this point, and greatly enhancing the overall sealing performance of the process chamber 11. Furthermore, the integrated structure has higher mechanical strength and rigidity, and can better withstand temperature changes, pressure fluctuations, and vibrations caused by equipment operation during the process, thereby significantly enhancing the stability and long-term reliability of the overall UV chamber structure. The chamber door 14 is located on the outside of the chamber wall 121 and connected to the chamber body 1, used to open and close the process chamber 11. In this embodiment, the chamber door is detachably connected to the chamber body 1. In an optional embodiment of this embodiment, the chamber door 14 is connected to the chamber body 1 via a hinge or linear guide mechanism. The design of the cavity door 14 ensures the sealing of the process cavity 11 during processing, while also facilitating wafer loading and unloading by operators. In this embodiment, the cavity door 14 is detachably connected to the cavity 1 for easy maintenance and replacement. This design not only improves the operability of the UV cavity but also extends its service life.

[0025] Reference Figure 1 and Figure 2The first sealing assembly 1212 is disposed around the periphery of the cavity wall 121 on the side near the cavity door 14. The first sealing assembly 1212 includes a first groove 12121 and a first sealing ring 12122. The first groove 12121 is disposed around the periphery of the cavity wall 121 on the side near the cavity door 14. The first sealing ring 12122 is disposed in the first groove 12121. Specifically, the first groove 12121 is a continuous groove machined into the cavity wall 121 on the side near the cavity door 14. The cross-sectional shape, depth, and width of the first groove 12121 are strictly designed. The primary function of the first groove 12121 is to provide precise positioning and a stable support base for the first sealing ring 12122, preventing the first sealing ring 12122 from shifting or twisting during installation or under pressure. The first sealing ring 12122 is an elastic ring with a specific cross-sectional shape. The cross-sectional shape of the first sealing ring 12122 can be circular, rectangular, etc., and is not limited here. The first sealing ring 12122 is tightly fitted into the first groove 12121. This fitting relationship means that, in its natural state, part of the outline of the first sealing ring 12122 will slightly protrude from the opening plane of the first groove 12121, so that it can be pre-compressed when the cavity 14 is closed. The material of the first sealing ring 12122 is a high-temperature resistant and corrosion-resistant elastic material, such as fluororubber or silicone rubber. This material can maintain good elasticity in high-temperature and chemical environments, ensuring that the first sealing ring 12122 will not lose its sealing performance due to material aging during long-term use.

[0026] Reference Figures 1 to 3 The second sealing assembly 141 is disposed around the periphery of the side of the cavity 14 facing the cavity wall 121. The second sealing assembly 141 includes a second groove 1411 and a second sealing ring 1412. The second groove 1411 is disposed around the periphery of the side of the cavity 14 facing the cavity wall 121. The second sealing ring 1412 is disposed in the second groove 1411. Specifically, the second groove 1411 is a continuous groove machined around the side of the cavity 14 facing the cavity wall 121, and the design of the second groove 1411 corresponds to the first groove 12121. The second sealing ring 1412 is embedded in the second groove 1411. To ensure cooperative operation and compatible lifespan, the material of the second sealing ring 1412 is also selected as a high-temperature resistant and corrosion-resistant elastic material, such as fluororubber or silicone rubber with the same or similar performance as the first sealing ring 12122. This material matching ensures that the two sealing rings age synchronously under the same operating conditions, maintaining similar compressive deformation capacity and sealing performance, thus preventing the entire sealing system from failing due to the rapid performance degradation of one side.

[0027] Reference Figure 4 and Figure 5When the cavity 14 is closed, the first sealing assembly 1212 and the second sealing assembly 141 abut against each other at least at their respective side edges and are elastically pressed together. In an optional embodiment of this example, referring to... Figure 4 When the cavity door 14 performs the closing action and finally locks, the first sealing assembly 1212 disposed on the cavity wall 121 and the second sealing assembly 141 disposed on the cavity door 14 make spatial alignment contact. At this time, the first sealing ring 12122 protruding from their respective mounting grooves and the second sealing ring 1412 contact at their opposite side edges and undergo elastic deformation due to pressure. The first sealing ring 12122 of the first sealing assembly 1212 and the second sealing ring 1412 of the second sealing assembly 141, at any point along their respective circumferential paths, their respective side edges are in continuous elastic compression contact. Preferably, in another optional embodiment of this embodiment, referring to Figure 5 The first sealing ring 12122 and the second sealing ring 1412, which protrude from their respective mounting grooves, are completely overlapped and pressed together. This completely overlapping pressing mode can form a wider sealing band with a larger contact area, thereby significantly improving the sealing performance.

[0028] In this embodiment, refer to Figures 1 to 5The widths of the first groove 12121, the first sealing ring 12122, the second groove 1411, and the second sealing ring 1412 are all between 3 mm and 5 mm. This dimensional range has been verified through multiple experiments, ensuring stable installation of both the first and second sealing rings 12122 and 1412 while accommodating certain manufacturing errors. In this embodiment, the widths of the first sealing ring 12122 and the first groove 12121 are matched to ensure a tight fit and effective seal within the first groove 12121. Similarly, the widths of the second sealing ring 1412 and the second groove 1411 are matched to ensure a tight fit and effective seal within the second groove 1411. Preferably, in an optional embodiment of this example, the width of the first groove 12121 is 4 mm, the width of the first sealing ring 12122 is 4 mm, the width of the second groove 1411 is 4 mm, and the width of the second sealing ring 1412 is 4 mm. In this embodiment, the cavity door 14 and the cavity wall 121 have the same shape and size, which allows the cavity door 14 to fit tightly against the cavity wall 121 when closed, forming a complete sealing surface. Besides the dimensions of the first sealing assembly 1212 and the second sealing assembly 141 themselves, the macroscopic layout of the first sealing assembly 1212 and the second sealing assembly 141 on the cavity wall 121 and the cavity door 14 is also crucial. In this embodiment, the shortest distance between the outer peripheral edge of the first sealing assembly 1212 and the cavity wall 121 is between 5 mm and 10 mm, and the shortest distance between the outer peripheral edge of the second sealing assembly 141 and the cavity door 14 is between 8 mm and 13 mm. In an optional embodiment of this example, the shortest distance between the first sealing assembly 1212 and the outer peripheral edge of the cavity wall 121 is 6 mm, and the shortest distance between the second sealing assembly 141 and the outer peripheral edge of the cavity door 14 is 9 mm. This ensures that when the cavity door 14 is closed, the first sealing assembly 1212 and the second sealing assembly 141 abut against each other at their respective side edges and elastically press together, thereby achieving the best sealing effect.

[0029] Reference Figures 1 to 5In this embodiment, the UV cavity utilizes a first sealing assembly 1212 fixed to the cavity wall 121 and a second sealing assembly 141 fixed to the cavity door 14. When the cavity door 14 is closed, the first sealing assembly 1212 and the second sealing assembly 141 abut against each other at least at their respective side edges and elastically press together. The first sealing assembly 1212 fixed to the cavity wall 121 and the second sealing assembly 141 fixed to the cavity door 14 form two independent yet cooperative sealing lines. When the cavity door 14 is closed, the two sealing assemblies abut against each other and elastically press together at their respective side edges. This design forces gas molecules to continuously break through two elastic sealing barriers before leakage occurs, greatly extending the leakage path and significantly improving the overall reliability of the sealing system.

[0030] The above embodiments are merely illustrative of the principles and effects of this utility model and are not intended to limit the scope of this utility model. Any person skilled in the art can modify or alter the above embodiments without departing from the spirit and scope of this utility model. Therefore, all equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in this utility model should still be covered by the claims of this utility model.

Claims

1. A UV cavity, characterized in that, include: A cavity, wherein a process chamber is provided inside the cavity, and the cavity has a first end face and a second end face disposed opposite to each other; A cavity wall is fixedly disposed on the first end face of the cavity, and the center of the cavity wall has a first opening that penetrates into the process cavity; A door is located on the outside of the cavity wall and connected to the cavity body, used to open and close the process cavity; A first sealing assembly is disposed around the periphery of the cavity wall on the side near the cavity opening; The second sealing assembly is disposed around the periphery of the side of the cavity door facing the cavity wall. When the cavity door is closed, the first sealing assembly and the second sealing assembly abut against each other at least at their respective side edges and are elastically pressed together.

2. The UV cavity according to claim 1, characterized in that, The first sealing assembly includes: The first groove is disposed around the periphery of the cavity wall on the side near the cavity opening; The first sealing ring is disposed in the first groove.

3. The UV cavity according to claim 2, characterized in that, The second sealing assembly includes: The second groove is disposed around the periphery of the side of the cavity opening facing the cavity wall; The second sealing ring is disposed in the second groove.

4. The UV cavity according to claim 3, characterized in that, The width of the first groove is between 3 mm and 5 mm, the width of the first sealing ring is between 3 mm and 5 mm, the width of the second groove is between 3 mm and 5 mm, and the width of the second sealing ring is between 3 mm and 5 mm.

5. The UV cavity according to claim 1, characterized in that, The cavity wall and the cavity body are integrally formed.

6. The UV cavity according to claim 1, characterized in that, The cavity door is detachably connected to the cavity.

7. The UV cavity according to claim 1, characterized in that, The cavity door and the cavity wall have the same shape and size.

8. The UV cavity according to claim 7, characterized in that, The shortest distance between the first sealing component and the outer peripheral edge of the cavity wall is between 5 mm and 10 mm, and the shortest distance between the second sealing component and the outer peripheral edge of the cavity door is between 8 mm and 13 mm.

9. The UV cavity according to claim 1, characterized in that, The cavity door is connected to the cavity via a hinge or linear guide mechanism.

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