Auxiliary loading device and apparatus for photonic crystal generation

Abstract

The application relates to an auxiliary loading device and an equipment for photonic crystal generation. The auxiliary loading device comprises a supporting column, a clamping component arranged on the supporting column and capable of rotating relative to the supporting column, and a clamping position arranged on the clamping component and used for clamping a loading container. At least one of the clamping component and the supporting column is provided with a limiting structure which cooperates with the other one of the clamping component and the supporting column to limit the included angle between the extending direction of the clamping component and the supporting column. The loading container can be clamped and supported, the dangerous situation in the loading process is reduced, and the safety of the operating personnel is improved.

Description

Technical Field

[0001] This application relates to the field of semiconductor manufacturing auxiliary equipment technology, and in particular to an auxiliary loading device and an apparatus for photonic crystal generation. Background Technology

[0002] In the production process of compound semiconductor crystal materials, raw materials are usually loaded into quartz tubes of specific specifications and crystals are grown under high vacuum or controlled atmosphere. This can reduce impurity contamination and meet the requirements of the material's physicochemical properties.

[0003] To load the raw material into the quartz tube, it is usually necessary for one person to hold the quartz tube at a certain height and angle, while another person uses a pusher tool to push the raw material into the quartz tube from the opening. The quartz tube is quite heavy after being loaded, which can easily lead to dangerous situations. Utility Model Content

[0004] Based on this, embodiments of this application provide an auxiliary loading device and an apparatus for photonic crystal generation, which can clamp and support the loading container, reduce dangerous situations during the loading process, and improve the safety of operators.

[0005] On one hand, embodiments of this application provide an auxiliary loading device suitable for loading containers that fix compound semiconductor materials, including:

[0006] Supporting columns;

[0007] A clamping component is provided on a supporting column, and the clamping component is at least rotatable relative to the supporting column; the clamping component is provided with a clamping position for clamping a filling container;

[0008] At least one of the clamping component and the support column is provided with a limiting structure, which cooperates with the other of the clamping component and the support column to limit the angle between the extension direction of the clamping component and the support column.

[0009] In one implementation, the limiting structure includes multiple limiting structures, which are arranged at intervals around the rotation direction of the clamping component relative to the supporting column; there is a preset rotation angle between two adjacent limiting structures.

[0010] In one implementation, a first mounting seat is provided on the support column, and the first mounting seat is movably connected to the support column.

[0011] The clamping component is provided with a first rotating seat. One of the first rotating seat and the first mounting seat is provided with a first rotating shaft. The other of the first rotating seat and the first mounting seat is provided with a first shaft hole. The first rotating shaft passes through the first shaft hole and can rotate around its own axis within the first shaft hole. The axis of the first rotating shaft extends in the horizontal direction so that the clamping component can rotate in a vertical plane relative to the support column.

[0012] The limiting structure is provided in at least one of the first mounting base and the first rotating base.

[0013] In one implementation, the limiting structure includes a pin that is at least radially movable relative to the first pivot axis, the pin engaging with the first pivot axis radially to define the angle between the extension direction of the clamping member and the support column.

[0014] In one implementation, the support column is provided with a driving component, and the driving direction of the driving component is consistent with the extension direction of the support column.

[0015] The driving component is connected to the first mounting base in a transmission manner, and the driving component drives the first mounting base to move relative to the support column along the extension direction of the support column.

[0016] In one implementation, the driving component includes:

[0017] The driving component is located on the supporting column;

[0018] A transmission component is connected to a drive component. The transmission component extends along the extension direction of the support column, and the first mounting base is connected to the transmission component.

[0019] In one implementation, the transmission component includes a lead screw, and a first mounting base is provided with a lead screw nut, which is sleeved on the lead screw and threadedly connected to the lead screw.

[0020] In one implementation, the support column is provided with a second mounting base and a third mounting base, which are arranged opposite to each other along the extension direction of the support column; the driving component is provided on the second mounting base and the third mounting base.

[0021] In one implementation, the support column is provided with a guide structure, and the extension direction of the guide structure is consistent with the extension direction of the support column;

[0022] The first mounting base is slidably connected to the guide structure.

[0023] In one implementation, the clamping component includes:

[0024] A clamping base is provided, and the clamping position is located on the clamping base. The clamping base is movably connected to the supporting column.

[0025] Multiple fasteners are arranged side by side along the extension direction of the clamping base. One end of each fastener is rotatably disposed on the clamping base, and the fastener is located on the side of the clamping base where the clamping position is provided. The other end of the fastener is used to cooperate with the clamping base to fix the filling container located at the clamping position.

[0026] In one implementation, the clamping position includes a recess provided on the clamping base, and the inner wall of the recess is adapted to the outer wall of the loading container.

[0027] The inner wall of the recess is provided with anti-slip parts, which are used to abut against the outer wall of the filling container.

[0028] In one implementation, the recess extends through both ends of the clamping base along the extending direction of the clamping base;

[0029] The clamping component also includes a baffle, which is located at one end of the clamping base along the extension direction of the clamping base and is used to abut against the end of the filling container.

[0030] In one implementation, the auxiliary loading device further includes:

[0031] A base for supporting a workbench surface, the base being located at one end of the support column along its length, the base having at least an extension along a first direction intersecting the support column;

[0032] When the clamping component clamps the filling container, the center of gravity of the filling container is projected onto the extension of the base along the extension direction of the support column.

[0033] On the other hand, embodiments of this application provide an apparatus for generating photonic crystals, comprising:

[0034] The loading container, with a cylindrical structure, is used to contain the compound semiconductor material generated by the photonic crystal;

[0035] Supporting columns;

[0036] A clamping component is provided on the supporting column, and the clamping component can rotate relative to the supporting column; the clamping component is provided with a clamping position for clamping the filling container;

[0037] At least one of the clamping component and the supporting column is provided with a limiting structure, which cooperates with the other of the clamping component and the supporting column to achieve that the central axis of the cylindrical structure of the loading container clamped and supported on the clamping component is inclined relative to the horizontal line.

[0038] In one alternative implementation, the clamping component is a cantilever structure, and the main body of the clamping component is a semi-open U-shape.

[0039] The auxiliary loading device and the equipment for photonic crystal generation provided in this application embodiment, by providing a clamping component on the support column, the clamping component can rotate at least relative to the support column, and the clamping component is provided with a clamping position; thus, during the process of loading material into the loading container, the loading container can be clamped and fixed by the clamping position of the clamping component, and the support column can support the support component at a certain height, eliminating the need for manual lifting of the loading container at a specific height, reducing the danger in the loading process.

[0040] Furthermore, by providing a limiting structure in at least one of the clamping component and the supporting column, and by cooperating with the other of the clamping component and the supporting column, the limiting structure limits the angle between the extension direction of the clamping component and the supporting column. In this way, the clamping component can be confined at a specific angle by the limiting structure, facilitating the loading of materials into the filling container. This eliminates the need for manual maintenance of the filling container at a specific angle, reducing the risk during the loading process. Attached Figure Description

[0041] Figure 1 This is a schematic diagram of the overall structure of the auxiliary loading device provided in some embodiments of this application.

[0042] Figure 2 This is a schematic diagram of the structure of the clamping component in the auxiliary loading device provided in some embodiments of this application.

[0043] Figure 3 This is a side view of an auxiliary loading device provided in some embodiments of this application.

[0044] Figure 4 This is a schematic diagram of the structure of the auxiliary loading device provided in some embodiments of this application, showing the cooperation between the first mounting base and the first rotating base.

[0045] Figure 5 This is a schematic diagram of the structure of the drive component in the auxiliary loading device provided in some embodiments of this application.

[0046] Explanation of reference numerals in the attached figures:

[0047] 10-Support column; 20-Clamping component; 30-Drive component; 40-Base; 50-Moving mechanism; 60-Filling container;

[0048] 11-First mounting base; 12-Second mounting base; 13-Third mounting base; 14-Guide structure; 21-Clamping position; 22-First rotating seat; 23-Clamping base; 24-Fixing buckle; 25-Baffle; 31-Driver; 32-Transmission component;

[0049] 111-Pin; 211-Recessed portion. Detailed Implementation

[0050] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0051] In the description of this application, it should be understood that if terms such as "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" appear, these terms indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0052] Furthermore, where the terms "first" and "second" appear, these terms are for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined with "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, where the term "multiple" appears, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0053] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0054] In this application, unless otherwise expressly specified and limited, the use of descriptions such as "above" or "below" the second feature indicates that the first and second features are in direct contact or indirect contact via an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. Similarly, "below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0055] It should be noted that if an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. If an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. If so, the terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used in this application are for illustrative purposes only and do not represent the only possible implementation.

[0056] Figure 1 This is a schematic diagram of the overall structure of the auxiliary loading device provided in some embodiments of this application.

[0057] In some examples, refer to Figure 1 As shown, in view of the technical problems existing in the related art, this application provides an auxiliary loading device. The auxiliary loading device can be applied to a loading container 60 for fixing compound semiconductor materials. The auxiliary loading device includes a support column 10.

[0058] In some examples, the support column 10 can be supported on the ground or a workbench.

[0059] In some examples, refer to Figure 1 As shown, the auxiliary loading device may include a clamping component 20. The clamping component 20 may be mounted on the support column 10.

[0060] In some examples, the clamping member 20 may be movably mounted on the support column 10. That is, the clamping member 20 may be movable relative to the support column 10.

[0061] In some examples, the clamping component 20 can rotate at least relative to the support column 10. For example, see reference... Figure 1 As shown, the clamping component 20 can be positioned relative to the support column 10 along... Figure 1 Rotate in the direction indicated by the double-headed arrow a-a1.

[0062] Figure 2This is a schematic diagram of the structure of the clamping component in the auxiliary loading device provided in some embodiments of this application.

[0063] In some examples, refer to Figure 2 As shown, the clamping component 20 may be provided with a clamping position 21. The clamping position 21 can be used to clamp the filling container 60.

[0064] In some examples, the filling container 60 may be a quartz tube. It is understood that in some examples of embodiments of this application, the specific type of the filling container 60 is shown only as a specific example and is not intended to limit the specific type of the filling container 60.

[0065] In some examples, at least one of the clamping member 20 and the support column 10 may be provided with a limiting structure. The limiting structure may cooperate with the other of the clamping member 20 and the support column 10 to limit the extension direction of the clamping member 20 (e.g., Figure 1 The angle between the direction shown by the y-axis and the supporting column 10.

[0066] In some examples, the clamping component 20 may be provided with a limiting structure. The limiting structure may cooperate with the support column 10.

[0067] In some examples, the support column 10 may be provided with a limiting structure. The limiting structure may cooperate with the clamping component 20.

[0068] In some examples, both the clamping component 20 and the support column 10 may be provided with limiting structures. The limiting structure on the clamping component 20 cooperates with the support column 10. The limiting structure on the support column 10 cooperates with the clamping component 20.

[0069] The auxiliary loading device provided in this application embodiment has a clamping component 20 on the support column 10. The clamping component 20 can rotate at least relative to the support column 10, and the clamping component 20 has a clamping position 21. In this way, during the process of loading material into the loading container 60, the loading container 60 can be clamped and fixed by the clamping position 21 of the clamping component 20, and the support component can be supported at a certain height by the support column 10. There is no need to manually lift the loading container 60 to a specific height, which reduces the danger in the loading process.

[0070] Furthermore, by providing a limiting structure in at least one of the clamping component 20 and the supporting column 10, the limiting structure cooperates with the other of the clamping component 20 and the supporting column 10 to limit the angle between the extension direction of the clamping component 20 and the supporting column 10. In this way, the clamping component 20 can be confined at a specific angle by the limiting structure, facilitating the loading of materials into the filling container 60. There is no need for manual maintenance of the filling container 60 at a specific angle, reducing the risk during the loading process.

[0071] In some examples, the limiting structure may include multiple limiting structures. The multiple limiting structures may be arranged at intervals around the rotation direction of the clamping member 20 relative to the support column 10.

[0072] In some examples, multiple limiting structures can be arranged at even intervals.

[0073] In some examples, there may be a preset rotation angle between two adjacent limiting structures.

[0074] In some examples, the preset rotation angle can be 5°, 10°, 15°, or 20°, etc. That is, when the clamping component 20 rotates relative to the support column 10, along the rotation direction, the current limiting structure can rotate to the position of the next limiting structure to limit the angle between the clamping component 20 and the support column 10.

[0075] In some examples of embodiments of this application, multiple limiting structures are provided. These limiting structures are arranged at intervals around the rotation direction of the clamping component 20 relative to the supporting column 10; and a preset rotation angle is set between adjacent limiting structures. Thus, when the clamping component 20 rotates relative to the supporting column 10, the rotation angle of the clamping component 20 relative to the supporting column 10 can be determined by the multiple limiting structures, facilitating the clamping component 20 to clamp and fix the filling container 60 at a specific angle. This allows operators to easily push material from the opening of the filling container 60 into the bottom for filling using a push rod.

[0076] Figure 3 This is a side view of an auxiliary loading device provided in some embodiments of this application. Figure 4 This is a schematic diagram of the structure of the auxiliary loading device provided in some embodiments of this application, showing the cooperation between the first mounting base and the first rotating base.

[0077] In some examples, refer to Figure 3 and Figure 4 As shown, a first mounting base 11 may be provided on the support column 10. The first mounting base 11 may be movably connected to the support column 10. For example, the first mounting base 11 may be along the extending direction of the support column 10 (e.g., along the extending direction of the support column 10). Figure 1 (In the direction shown by the z-axis) it moves relative to the support column 10.

[0078] In some examples, refer to Figure 3 and Figure 4 As shown, the clamping component 20 may be provided with a first rotating seat 22. The first rotating seat 22 may be rotatably connected to the first mounting seat 11.

[0079] In some examples, one of the first rotating seat 22 and the first mounting seat 11 may be provided with a first rotating shaft (not shown in the figure).

[0080] In some examples, the other of the first rotating seat 22 and the first mounting seat 11 may be provided with a first shaft hole. The first rotating shaft may pass through the first shaft hole and rotate about its own axis i within the first shaft hole.

[0081] In some examples, refer to Figure 3 As shown, the axis i of the first rotating shaft can be along the horizontal direction (e.g., Figure 3 (The direction shown by the x-axis) extends. It can be understood that in some examples of the embodiments of this application, the horizontal direction can refer to being parallel or approximately parallel to the horizontal direction. Those skilled in the art will understand that due to the existence of processing technology and errors, the axis i of the first rotating shaft may have a certain error with the horizontal direction, and this error can be ignored by those skilled in the art.

[0082] In some examples, the clamping member 20 can rotate in a vertical plane relative to the support column 10. For example, with Figure 1 Taking this as an example, the clamping component 20 can rotate relative to the support column 10 in the plane defined by the y-axis and z-axis.

[0083] In some examples, the limiting structure may be provided in at least one of the first mounting base 11 and the first rotating base 22.

[0084] In some examples, the limiting structure may be located on the first mounting base 11. The limiting structure may cooperate with the first rotating base 22.

[0085] In some examples, the limiting structure may be located on the first rotating seat 22. The limiting structure may cooperate with the first mounting seat 11.

[0086] In some examples, limiting structures may be provided on the first mounting base 11 and the first rotating base 22. The limiting structure provided on the first mounting base 11 may cooperate with the first rotating base 22. The limiting structure provided on the first rotating base 22 may cooperate with the first mounting base 11.

[0087] In some examples of embodiments of this application, a first mounting base 11 is provided on the support column 10, and a first rotating base 22 is provided on the clamping component 20. One of the first rotating base 22 and the first mounting base 11 has a first rotation, and the other of the first rotating base 22 and the first mounting base 11 has a first shaft hole. A first rotating shaft passes through the first shaft hole and can rotate around its own axis within the first shaft hole. This facilitates the rotatable connection between the clamping component 20 and the support column 10 via the first mounting base 11 and the first rotating base 22, improving the ease of installation and rotation of the clamping component 20 on the support column 10. By setting the axis of the first rotating shaft to extend horizontally, the clamping component 20 can rotate relative to the support column 10 in a vertical plane, facilitating the adjustment of the angle of the filling container 60 by the clamping component 20, and improving the ease of angle adjustment of the filling container 60.

[0088] In addition, the first mounting base 11 is movably connected to the support column 10. This facilitates the adjustment of the height of the first rotating base 22 and the clamping component 20 via the first mounting base 11, making it easier to adapt to different sizes of filling containers 60 and expanding the applicability of the auxiliary filling device.

[0089] In some examples, refer to Figure 4 As shown, the limiting structure may include a pin 111. The pin 111 is movable relative to the first rotating shaft at least radially along the first rotating shaft.

[0090] In some examples, the pin 111 can engage with the first pivot radially, thereby defining the angle between the extension direction of the clamping member 20 and the support column 10.

[0091] In some examples, the shaft hole is located in the first mounting base 11 and the first rotating shaft is located in the first rotating seat 22. Along the radial direction of the first rotating shaft, the first mounting base 11 may have a through hole extending to the shaft hole; the peripheral wall of the first rotating shaft may have a limiting groove. The pin 111 may pass through the through hole and be inserted into the limiting groove along the radial direction of the first rotating shaft, thereby limiting the relative position of the first rotating shaft and the first mounting base 11.

[0092] In some examples, pin 111 may include a screw. The screw may be threaded into a through hole. That is, the through hole may have internal threads, and the external threads of the screw may mate with the internal threads.

[0093] In some examples of embodiments of this application, the limiting structure is set as a pin 111, which is at least radially movable relative to the first rotating shaft and engages with the first rotating shaft radially. This facilitates operation of the limiting structure, allows the clamping member 20 to rotate relative to the supporting column 10, and confines the clamping member 20 and the column at a specific angle.

[0094] In some examples, refer to Figure 1 and Figure 3 As shown, the support column 10 may be equipped with a driving component 30. The driving direction of the driving component 30 may be the same as the extension direction of the support column 10 (e.g., Figure 1 and Figure 3 (The direction shown by the y-axis) is consistent.

[0095] In some examples, the driving direction of the drive component 30 may be the same as, parallel to or approximately parallel to the extension direction of the support column 10.

[0096] In some examples, the drive component 30 may be drively connected to the first mounting base 11. The drive component 30 may drive the first mounting base 11 to move relative to the support column 10 along the extension direction of the support column 10.

[0097] In some examples of embodiments of this application, a driving component 30 is provided on the support column 10, and the driving component 30 is pultrusively connected to the first mounting base 11. Thus, the driving component 30 can drive the first mounting base 11 to move relative to the support column 10 along its extension direction. This facilitates adjustment of the height position of the clamping component 20 via the first mounting base 11, thereby adapting to different sized filling containers 60. This expands the applicability of the auxiliary filling device.

[0098] Figure 5 This is a schematic diagram of the structure of the drive component in the auxiliary loading device provided in some embodiments of this application.

[0099] In some examples, refer to Figure 5 As shown, the driving component 30 may include a driving element 31. The driving element 31 may be disposed on the supporting column 10.

[0100] In some examples, the drive element 31 may include a drive motor capable of both forward and reverse rotation. For example, the drive element 31 may include any one of a servo motor, a stepper motor, or a synchronous motor.

[0101] In some examples, the drive element 31 may include a handwheel. The handwheel may be rotatably mounted on the support column 10.

[0102] In some examples, the drive component 30 may include a transmission component 32. The transmission component 32 may be connected to the drive component 31. The transmission component 32 may extend along the extension direction of the support column 10.

[0103] In some examples, the transmission element 32 may include a chain, belt, or timing belt. The chain, belt, or timing belt may be taut along the extension direction of the support column 10. For example, a drive pulley may be provided at the top of the support column 10, and a driven pulley may be provided at the bottom of the support column 10. The chain, belt, or timing belt may be taut on the drive pulley and the timing pulley. When the drive element 31 drives the drive pulley to rotate, the drive pulley may drive the chain, belt, or timing belt to move along the extension direction of the support column 10.

[0104] In some examples, the first mounting base 11 can be connected to the transmission element 32. When the transmission element 32 is a chain, belt, or timing belt, the first mounting base 11 can be connected to one side of the chain, belt, or timing belt.

[0105] In some examples of embodiments of this application, a driving member 31 is provided on the support column 10, and a transmission member 32 is provided along the extending direction of the support column 10, with the transmission member 32 connected to the driving member 31. The first mounting base 11 is connected to the transmission member 32. In this way, the driving member 31 can drive the transmission member 32, causing the transmission member 32 to move the first mounting base 11 along the extending direction of the support column 10, which facilitates the adjustment of the height position of the supporting component.

[0106] In some examples, refer to Figure 5 As shown, the transmission component 32 may include a lead screw. The first mounting base 11 may be provided with a lead screw nut. The lead screw nut may be sleeved on the lead screw and connected to the lead screw threads. Thus, when the drive component 31 drives the lead screw to rotate, the lead screw can drive the lead screw nut to move along the extension direction of the support column 10 through the threads.

[0107] In some examples, refer to Figure 1 and Figure 5 As shown, the support column 10 may be provided with a second mounting base 12. The second mounting base 12 may be fixedly connected to the support column 10.

[0108] In some examples, refer to Figure 1 and Figure 5 As shown, the support column 10 may be provided with a third mounting base 13. The third mounting base 13 may be fixedly connected to the support column 10. The third mounting base 13 may be arranged opposite to the second mounting base 12 along the extension direction of the support column 10.

[0109] In some examples, the drive component 30 may be located on the second mounting base 12 and the third mounting base 13. For example, see reference... Figure 5 As shown, the lead screw can be rotatably connected to the second mounting base 12 and the third mounting base 13.

[0110] In some examples of embodiments of this application, the transmission component 32 is set as a lead screw, and a lead screw nut is provided on the first mounting base 11. The lead screw nut is sleeved on the lead screw and connected to the lead screw thread. In this way, the lead screw nut can be driven by the lead screw, thereby driving the first mounting base 11 to move along the extension direction of the support column 10, which facilitates the adjustment of the height position of the clamping component 20. In addition, the relatively stiff lead screw can be used to resist the gravitational torque of the clamping component 20 and the loading container 60, which can ensure that the clamping component clamps the loading container 60 at a specific angle, which is convenient for loading.

[0111] By providing a second mounting base 12 and a third mounting base 13 on the support column 10, the second mounting base 12 and the third mounting base 13 are arranged opposite to each other along the extending direction of the support column 10. This facilitates the placement of the drive component 30 on the second mounting base 12 and the third mounting base 13, and facilitates the arrangement of the drive component 30 along the extending direction of the support column 10.

[0112] In some examples, refer to Figure 5 As shown, a guide structure 14 may be provided on the support column 10. The extension direction of the guide structure 14 may be consistent with the extension direction of the support column 10.

[0113] In some examples, the first mounting base 11 may be slidably connected to the guide structure 14.

[0114] In some examples, the guide structure 14 may include a guide post. The guide post may be positioned between the second mounting base 12 and the third mounting base 13 along the extension direction of the support column 10.

[0115] In some examples, the first mounting base 11 may be provided with a guide groove. The guide groove can cooperate with a guide post to guide the first mounting base 11.

[0116] In some examples, the guide structure 14 may be a slide rail located between the second mounting base 12 and the third mounting base 13, and the first mounting base 11 may be provided with a slider that can be slidably connected to the slide rail.

[0117] In some examples, the guide structure 14 may be a groove provided on the support column 10. The first mounting base 11 may be provided with a slider that can slide within the groove.

[0118] In some examples of embodiments of this application, a guide structure 14 is provided on the support column 10, and the extension direction of the guide structure 14 is consistent with the extension direction of the support column 10. The first mounting base 11 is slidably connected to the guide structure 14. Thus, the guide structure 14 can guide the movement of the first mounting base 11 along the extension direction of the support column 10, improving the stability of the movement of the first mounting base 11, which in turn improves the stability of the height adjustment of the clamping component 20. Furthermore, the guide structure 14 can resist the gravitational torque of the clamping component 20 and the loading container 60, facilitating the clamping component 20 to hold the loading container 60 at a specific angle.

[0119] In some examples, refer to Figure 2 As shown, the clamping component 20 may include a clamping base 23. The clamping base 23 may be movably connected to the support column 10. The clamping base 23 may be fixedly connected to the first rotating seat 22, thereby being movably connected to the support column 10 through the first rotating seat 22. A clamping position 21 may be provided on the clamping base 23.

[0120] In some examples, refer to Figure 2 As shown, the clamping component 20 may include a retaining buckle 24. One end of the retaining buckle 24 may be rotatably disposed on the clamping base 23. The retaining buckle 24 may be located on the side of the clamping base 23 where the clamping position 21 is provided.

[0121] In some examples, the other end of the fastening buckle 24 can engage with the clamping base 23 to secure the filling container 60 located at the clamping position 21.

[0122] In some examples, the retaining latch 24 may be located on the open side of the clamping position 21. The rotating end of the retaining latch 24 may be rotatably connected to the clamping base 23. For example, see reference... Figure 2 As shown, the fastening buckle 24 can be along Figure 2 The direction indicated by the middle arrow b-b1 is rotated relative to the clamping base 23, so that the fixing buckle 24 can open the opening of the clamping position 21.

[0123] In some examples, refer to Figure 2 As shown, when the fixed buckle 24 rotates relative to the clamping base 23 to Figure 2 In the state shown, the free end of the fixing buckle 24 can be fixedly connected to the clamping base 23 by bolts, screws or threaded rods, thereby fixing the loading container 60 located in the clamping position 21.

[0124] In some examples of embodiments of this application, a clamping base 23 is provided, which is movably connected to the support column 10, and a clamping position 21 is provided on the clamping base 23. A fixing buckle 24 is provided on the side of the clamping base 23 where the clamping position 21 is provided. The fixing buckle 24 is rotatably connected to the clamping base 23, and the other end of the clamping base 23 cooperates with the clamping base 23 to fix the filling container 60 at the clamping position 21. In this way, when it is necessary to replace the filling container 60 from the clamping component 20, the opening of the clamping position 21 can be opened by separating the other end of the fixing buckle 24 and rotating the fixing buckle 24, which facilitates the replacement of the filling container 60 and is easy to adapt to different types of filling containers 60, thereby improving the applicability of the auxiliary filling device.

[0125] In some examples, refer to Figure 2 As shown, the fastening buckles 24 may include multiple fastening buckles. The multiple fastening buckles 24 may be arranged side by side along the extension direction of the clamping base 23.

[0126] In some examples, multiple fasteners 24 may be arranged at intervals along the extension direction of the clamping base 23.

[0127] In some examples, refer to Figure 2 As shown, the fastening buckle 24 may include two.

[0128] In some examples of embodiments of this application, multiple fasteners 24 are provided, arranged side-by-side along the extending direction of the clamping base 23. This increases the contact area between the fasteners 24 and the filling container 60 when securing the container 60, thereby improving the stability of the container 60 and enhancing the safety of the filling operation.

[0129] In some examples, refer to Figure 2 As shown, the clamping position 21 may include a recess 211 provided on the clamping base 23. The inner wall of the recess 211 may be adapted to the outer wall of the filling container 60. That is, the shape of the inner wall of the recess 211 may be set according to the shape of the filling container 60. For example, the inner wall of the recess 211 may be an arc-shaped inner wall.

[0130] In some examples, the inner wall of the recess 211 may be provided with an anti-slip element (not shown in the figure). The anti-slip element can be used to abut against the outer wall of the filling container 60.

[0131] In some examples of embodiments of this application, a clamping position 21 is formed by providing a recess 211 in the clamping base 23, and the inner wall of the recess 211 is configured to fit the outer wall of the filling container 60. This facilitates the fixation of the filling container 60 by the clamping position 21. An anti-slip member is provided on the inner wall of the recess 211, which abuts against the outer wall of the filling container 60. This increases the frictional force provided by the clamping base 23 on the filling container 60 through the contact between the anti-slip member and the outer wall of the filling container 60, thereby improving the stability of the clamping member 20 in clamping the filling container 60 and enhancing the safety of the filling operation.

[0132] In some examples, refer to Figure 2 As shown, the recess 211 can extend through both ends of the clamping base 23 along its extending direction. This facilitates the forming of the recess 211 and saves on the manufacturing cost of the clamping base 23.

[0133] In some examples, refer to Figure 2 As shown, the clamping component 20 may include a baffle 25. The baffle 25 may be disposed at one end of the clamping base 23 along its extending direction. That is, the baffle 25 can block one end of the recess 211. The baffle 25 can be used to abut against the end of the filling container 60. Thus, the baffle 25 can block and limit the filling container 60 along the extending direction of the clamping base 23, improving the stability of the filling container 60 clamped by the clamping component 20 and enhancing the safety of the filling operation.

[0134] In some examples, refer to Figure 1 As shown, the auxiliary loading device may include a base 40. The base 40 may be supported on a workbench surface. For example, the base 40 may be supported on the ground.

[0135] In some examples, the base 40 can be positioned along the length of the support column 10 (e.g., Figure 1 One end of the z-axis (in the direction shown by the z-axis).

[0136] In some examples, the base 40 and the support column 10 can be fixedly connected.

[0137] In some examples, the base 40 may have at least one orientation along a first direction (e.g., Figure 1 The extension (in the direction shown by the y-axis) extends. The first direction may intersect with the length direction of the support column 10.

[0138] In some examples, refer to Figure 1 As shown, when the clamping member 20 clamps the filling container 60, the projection of the center of gravity of the filling container 60 onto the base 40 along the extending direction of the support column 10 can be located at the extension.

[0139] In some examples, the first dimension of the base 40 along the first direction can be 500mm-700mm.

[0140] In some examples, the first dimension of the base 40 along the first direction can be 600 mm.

[0141] In some examples, the base 40 is along the second direction (e.g.) Figure 1 The second dimension (in the direction shown by the x-axis) can be 300mm-500mm.

[0142] In some examples, the base 40 may have a dimension of 400 mm along the second direction.

[0143] In some examples of embodiments of this application, a base 40 is provided at one end of the support column 10 along its length. The base 40 has at least an extension along a first direction, which intersects the length direction of the support column 10. When the clamping member 20 clamps the filling container 60, the projection of the center of gravity of the filling container 60 onto the base 40 along the extension direction of the support column 10 can be located at the extension. In this way, the extension of the base 40 can counteract the gravitational torque of the clamping member 20 and the filling container 60 on the support column 10, thereby improving the stability of the clamping and support of the filling container 60 and enhancing the safety of the filling operation.

[0144] In some examples, refer to Figure 1 As shown, the area of ​​the base 40 can be larger than the cross-sectional area of ​​the supporting column 10. This improves the overall stability of the auxiliary loading device and enhances the safety of the loading operation.

[0145] In some examples, refer to Figure 1 As shown, the base 40 may be equipped with a moving mechanism 50. The moving mechanism 50 may be located on the side of the base 40 away from the supporting column 10.

[0146] In some examples, the moving mechanism 50 may include wheels. Multiple wheels may be provided.

[0147] In some examples, each corner of the base 40 may be equipped with a wheel.

[0148] In some examples of embodiments of this application, a moving mechanism 50 is provided on the base 40. This facilitates the movement of the filling container 60 after loading is completed, thereby improving the ease of moving the filling container 60.

[0149] In some examples, embodiments of this application provide an apparatus for photonic crystal generation. The apparatus for photonic crystal generation may include a loading container 60. The loading container 60 may have a cylindrical structure.

[0150] In some examples, the loading container 60 can be used to contain the compound semiconductor material generated by the photonic crystal. That is, the compound semiconductor material generated by the photonic crystal can be contained within the loading container 60.

[0151] In some examples, photonic crystals can be used in photon-counting CT systems. Types of photonic crystals include cadmium telluride (CdTe), cadmium zinc telluride (CZT), and deep silicon (Si).

[0152] In some examples, the compound can be an n-type doped layer, such as an n-type aluminum gallium arsenide (AlGaAs), an n-type gallium arsenide (GaAs), or an n-type gallium nitride (GaN).

[0153] In some examples, the compound semiconductor material can be a p-type separate confinement heterostructure (SCH) of p-type aluminum gallium arsenide (AlGaAs), p-type gallium nitride (GaN), p-type aluminum gallium nitride (AlGaN), or p-type InGaAsP (indium gallium arsenide phosphide).

[0154] In some examples, the device for generating photonic crystals may include a support column 10. It is understood that in some examples of the embodiments of this application, the support column 10 may be the same as, similar to, or analogous to the support column 10 in the foregoing embodiments of this application. For details, please refer to the detailed description of the foregoing embodiments of this application; further details will not be repeated in the embodiments of this application.

[0155] In some examples, the apparatus for photonic crystal generation may include a clamping member 20. The clamping member 20 may be disposed on the support column 10.

[0156] In some examples, the clamping member 20 is rotatable relative to the supporting column 10; the clamping member 20 may be provided with a clamping position 21, which can be used to clamp the filling container 60. That is, in some examples of the embodiments of this application, the filling container 60 may be disposed in the clamping position 21, thereby connecting with the clamping member 20.

[0157] In some examples, at least one of the clamping component 20 and the supporting column 10 is provided with a limiting structure. It is understood that in some examples of the embodiments of this application, the limiting structure may be set in the same, similar or similar way as in the foregoing embodiments of this application. For details, please refer to the detailed description of the foregoing embodiments of this application. The embodiments of this application will not repeat the details here.

[0158] In some examples, the clamping component 20 may be provided with a limiting structure.

[0159] In some examples, the limiting structure can cooperate with the other of the clamping component 20 and the support stand (10).

[0160] In some examples, the central axis of the cylindrical structure of the loading container 60 held and supported by the clamping member 20 can be set at an angle relative to the horizontal line under the clamping support of the clamping member 20.

[0161] It is understood that some examples of the photonic crystal generation devices provided in the embodiments of this application have the same or corresponding technical features as the auxiliary loading devices provided in the foregoing embodiments of this application; therefore, the photonic crystal generation devices provided in the embodiments of this application can have the same, corresponding, or similar technical effects as the auxiliary loading devices provided in the foregoing embodiments of this application. For details, please refer to the detailed description of the foregoing embodiments of this application, which will not be repeated in the embodiments of this application.

[0162] In some examples, the clamping component 20 can be a cantilever structure. The extension direction of the cantilever structure can intersect with the extension direction of the support column. For example, the support column can extend vertically, while the cantilever structure can extend horizontally. This increases the contact area between the clamping component 20 and the filling container 60, thereby improving the stability of the clamping component 20 in holding the filling container 60.

[0163] In some examples, the main body of the clamping component 20 can be a semi-open U-shaped structure. The semi-open U-shaped structure can be recessed into the top of the clamping component 20. In this way, when the filling container 60 is installed and clamped to the clamping component 20, it can be assembled from the opening of the semi-open U-shaped structure, which facilitates the installation of the filling container 60 and improves the assembly and clamping efficiency of the filling container 60.

[0164] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0165] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. An auxiliary loading device suitable for a loading container (60) for fixing compound semiconductor materials, characterized in that, include: Support column (10); A clamping component (20) is provided on the support column (10), and the clamping component (20) is at least rotatable relative to the support column (10); the clamping component (20) is provided with a clamping position (21), the clamping position (21) being used to clamp the filling container (60); At least one of the clamping component (20) and the supporting column (10) is provided with a limiting structure, which cooperates with the other of the clamping component (20) and the supporting column (10) to limit the angle between the extension direction of the clamping component (20) and the supporting column (10).

2. The auxiliary loading device according to claim 1, characterized in that, The limiting structure includes multiple structures, which are arranged at intervals around the rotation direction of the clamping component (20) relative to the supporting column (10); there is a preset rotation angle between two adjacent limiting structures.

3. The auxiliary loading device according to claim 2, characterized in that, The support column (10) is provided with a first mounting seat (11), and the first mounting seat (11) is movably connected to the support column (10); The clamping component (20) is provided with a first rotating seat (22). One of the first rotating seat (22) and the first mounting seat (11) is provided with a first rotating shaft. The other of the first rotating seat (22) and the first mounting seat (11) is provided with a first shaft hole. The first rotating shaft passes through the first shaft hole and can rotate around its own axis in the first shaft hole. The axis of the first rotating shaft extends in the horizontal direction so that the clamping component (20) can rotate in the vertical plane relative to the support column (10). The limiting structure is provided in at least one of the first mounting base (11) and the first rotating base (22).

4. The auxiliary loading device according to claim 3, characterized in that, The limiting structure includes a pin (111) that is at least radially movable relative to the first rotating shaft along the first rotating shaft. The pin (111) engages with the first rotating shaft along the first rotating shaft in the radial direction to define the angle between the extension direction of the clamping member (20) and the support column (10).

5. The auxiliary loading device according to claim 3, characterized in that, The support column (10) is provided with a driving component (30), and the driving direction of the driving component (30) is consistent with the extension direction of the support column (10); The driving component (30) is connected to the first mounting base (11) in a transmission manner, and the driving component (30) drives the first mounting base (11) to move relative to the support column (10) along the extension direction of the support column (10).

6. The auxiliary loading device according to claim 5, characterized in that, The drive component (30) includes: A driving component (31) is provided on the supporting column (10); A transmission component (32) is connected to the drive component (31). The transmission component (32) extends along the extension direction of the support column (10). The first mounting base (11) is connected to the transmission component (32).

7. The auxiliary loading device according to claim 6, characterized in that, The transmission component (32) includes a lead screw, and the first mounting base (11) is provided with a lead screw nut. The lead screw nut is sleeved on the lead screw and connected to the lead screw by a thread.

8. The auxiliary loading device according to claim 6, characterized in that, The support column (10) is provided with a second mounting base (12) and a third mounting base (13), the second mounting base (12) and the third mounting base (13) being arranged opposite to each other along the extension direction of the support column (10); the driving component (30) is provided on the second mounting base (12) and the third mounting base (13).

9. The auxiliary loading device according to claim 5, characterized in that, The supporting column (10) is provided with a guide structure (14), and the extension direction of the guide structure (14) is consistent with the extension direction of the supporting column (10). The first mounting base (11) is slidably connected to the guide structure (14).

10. The auxiliary loading device according to any one of claims 1-9, characterized in that, The clamping component (20) includes: A clamping base (23) is provided on the clamping base (23), and the clamping position (21) is movably connected to the supporting column (10); Multiple fasteners (24) are arranged side by side along the extension direction of the clamping base (23). One end of each fastener (24) is rotatably disposed on the clamping base (23), and the fastener (24) is located on the side of the clamping base (23) where the clamping position (21) is provided. The other end of the fastener (24) is used to cooperate with the clamping base (23) to fix the filling container (60) located at the clamping position (21).

11. The auxiliary loading device according to claim 10, characterized in that, The clamping position (21) includes a recess (211) provided on the clamping base (23), and the inner wall of the recess (211) is adapted to the outer wall of the loading container (60); The inner wall of the recess (211) is provided with an anti-slip member, which is used to abut against the outer wall of the loading container (60).

12. The auxiliary loading device according to claim 11, characterized in that, Along the extending direction of the clamping base (23), the recess (211) extends through both ends of the clamping base (23); The clamping component (20) further includes a baffle (25) along the extending direction of the clamping base (23). The baffle (25) is disposed at one end of the clamping base (23) and is used to abut against the end of the loading container (60).

13. The auxiliary loading device according to any one of claims 1-9, characterized in that, The auxiliary loading device also includes: A base (40) is used to support the workbench surface. The base (40) is located at one end of the support column (10) along its length. The base (40) has at least an extension along a first direction, which intersects with the support column (10). When the clamping member (20) clamps the filling container (60), the projection of the center of gravity of the filling container (60) along the extension direction of the support column (10) onto the base (40) is located at the extension.

14. An apparatus for generating photonic crystals, characterized in that, include: The loading container (60) has a cylindrical structure and is used to contain the compound semiconductor material generated by the photonic crystal; Support column (10); A clamping component (20) is provided on the support column (10), and the clamping component (20) is rotatable relative to the support column (10); the clamping component (20) is provided with a clamping position (21), which is used to clamp the filling container (60); At least one of the clamping component (20) and the supporting column (10) is provided with a limiting structure, which cooperates with the other of the clamping component (20) and the supporting column (10) to achieve that the central axis of the cylindrical structure of the loading container (60) clamped and supported on the clamping component (20) is inclined relative to the horizontal line.

15. The device according to claim 14, characterized in that, The clamping component (20) is a cantilever structure, and the main body of the clamping component (20) is a semi-open U-shape.

Images