Anticorrosion micro-pump module integrated with pressure detection function

CN224919395UActive Publication Date: 2026-10-30SUZHOU IN SITU CHIP TECH CO LTD
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Patent Information

Application Number
CN202522686601.9
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-12-18
Publication Date
2026-10-30
Estimated Expiration
2035-12-18

AI Technical Summary

Technical Problem

[0003]然而,现有的传感器通常被安装在微泵模组中流道中,这样硅凝胶的灌封层直接暴露于流道中,与流经的药液接触,长时间后,多数药液(如酸性药液、碱性药液、腐蚀性溶剂等)会与硅凝胶发生化学作用,导致硅凝胶出现溶胀、老化、开裂等问题,这样会产生很多的问题:首先,硅凝胶发生变化后会影响压力传导的稳定性,降低检测精度;其次,严重时还会导致传感器元件暴露,直接与药液接触而损坏,缩短传感器的使用寿命,增加设备维护成本与安全风险,制约了其在严苛使用环境下的应用

Benefits of technology

[0021]本实用新型的集成压力检测功能的防腐蚀微泵模组,通过设置隔离传导部来隔离药液和硅凝胶的直接接触,避免药液对硅凝胶的腐蚀,延长压力传感单元的使用寿命,降低维护频率与成本;其次,隔离传导部选用弹性好、化学稳定的材质,能在隔离的同时高效传递流体压力至压力传感单元,减少压力衰减与信号失真,确保长期压力监测的准确性与可靠性。

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Abstract

The utility model discloses an integrated anticorrosive micropump module of pressure detection function, including the pump body with the liquid inlet and the liquid outlet of intercommunication, the inside of base is equipped with the fluid channel of intercommunication with outside channel, and the fluid channel is linked together with the liquid outlet, and the one side of base is opened with the placement cavity of the passage with fluid, and the seal mounting spare is pasted on one side of base, and will place the cavity seal, and pressure sensing unit is located in the placement cavity, and is located on seal mounting spare, and the isolation conduction part is wrapped pressure sensing unit, is used for preventing the direct contact of fluid and pressure sensing unit. The utility model discloses through isolation conduction part to isolate the direct contact of drug liquid and silica gel, prolongs the service life of pressure sensing unit, can also high -efficient transmission fluid pressure to pressure sensing unit simultaneously, has guaranteed the efficiency and accuracy of pressure transmission, has improved the long -term reliability and detection precision of pressure detection function under the corrosive environment, and has the advantages such as compact structure, low maintenance cost.
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Description

Technical Field

[0001] This utility model relates to a micropump module, and more particularly to a corrosion-resistant micropump module with integrated pressure detection function. Background Technology

[0002] In the medical, pharmaceutical, and chemical industries, real-time monitoring of the pressure of liquid medicine flowing through pipelines or containers is often required to ensure the safety and stability of production or treatment processes. Currently, the mainstream solution for online pressure monitoring integrated into micropump modules is to use silicone gel-encapsulated pressure sensors. Silicone gel has excellent elasticity and pressure conductivity, enabling it to stably transmit external pressure to the sensor's sensitive element, ensuring detection accuracy.

[0003] However, existing sensors are typically installed in the flow channels of micropump modules, leaving the silicone gel encapsulation layer directly exposed to the flow channels and in contact with the flowing liquid. Over time, most liquids (such as acidic, alkaline, and corrosive solvents) will chemically react with the silicone gel, causing problems such as swelling, aging, and cracking. This leads to several issues: First, changes in the silicone gel affect the stability of pressure transmission, reducing detection accuracy. Second, in severe cases, it can expose the sensor element, causing it to be directly exposed to the liquid and damaged, shortening the sensor's lifespan, increasing equipment maintenance costs and safety risks, and limiting its application in harsh environments. Utility Model Content

[0004] The purpose of this invention is to overcome the shortcomings of the prior art by providing a corrosion-resistant micropump module with integrated pressure detection function, which has good operational stability, accurate detection, and long service life.

[0005] To achieve the above objectives, the technical solution adopted by this utility model is: a corrosion-resistant micropump module with integrated pressure detection function, comprising:

[0006] The pump body has an inlet and an outlet that are connected to each other;

[0007] The base has a fluid channel inside that communicates with an external channel and is connected to the liquid outlet. A placement cavity communicating with the fluid channel is opened on one side of the base.

[0008] A sealing mounting component is attached to one end face of the base and seals the placement cavity;

[0009] A pressure sensing unit is located inside the placement cavity and is disposed on the sealing mounting component to sense the pressure in the fluid channel;

[0010] An isolation conductive section is provided to enclose the pressure sensing unit and prevent direct contact between the fluid and the pressure sensing unit.

[0011] Furthermore, the fluid channel includes a base inlet; the base inlet communicates with the placement cavity through a flow inlet, and the placement cavity has a guide tube coaxially arranged with the fluid channel; the other end of the guide tube extends through the base.

[0012] Furthermore, the sealing mounting component is a PCB board, which is fixed on the base on one side opposite to the placement cavity.

[0013] Furthermore, the pressure sensing unit is a pressure sensor that is communicatively connected to the PCB board.

[0014] Furthermore, the isolation and conduction part includes a sensor housing disposed on the PCB board; the pressure sensing unit is encapsulated in the sensor housing by silicone gel; the outer surface of the silicone gel is coated with silicone oil.

[0015] Furthermore, the isolation and conduction part includes a sensor housing disposed on the PCB board; the pressure sensing unit is encapsulated in the sensor housing by silicone gel; a first silicone sheet is disposed on the silicone gel; and silicone oil is disposed between the first silicone sheet and the silicone gel.

[0016] Furthermore, the sealing installation component is a fixed pressure plate; the fixed pressure plate is located on one end face of the base and seals the placement cavity.

[0017] Furthermore, the pressure sensing unit is a resistance strain gauge; the resistance strain gauge includes a substrate, and two metal strain wires are disposed inside the substrate; the two ends of the two metal strain wires are respectively provided with connecting electrodes, and strain electrode leads extending from the substrate are extended on the connecting electrodes for leading out electrical signals.

[0018] Furthermore, the isolation and conduction part is a second silicone sheet; the cross-section of the second silicone sheet is I-shaped; after the two ends of the second silicone sheet are respectively sealed and fitted with the placement cavity and the sealing installation component, a first area and a second area are formed that are in contact with and isolated from the fluid channel, respectively, and the pressure sensing unit is disposed in the second area.

[0019] Furthermore, the metal strain wires are distributed in a grid pattern within the substrate.

[0020] Due to the application of the above technical solution, this utility model has the following advantages compared with the prior art:

[0021] This utility model's corrosion-resistant micropump module with integrated pressure detection function isolates the direct contact between the liquid and the silicone gel by setting an isolation conduction part, avoiding corrosion of the silicone gel by the liquid, extending the service life of the pressure sensing unit, and reducing maintenance frequency and cost. Secondly, the isolation conduction part is made of a material with good elasticity and chemical stability, which can efficiently transmit fluid pressure to the pressure sensing unit while isolating, reducing pressure attenuation and signal distortion, and ensuring the accuracy and reliability of long-term pressure monitoring.

[0022] In addition, the pressure sensing unit is modularly designed and can use pressure sensors or resistance strain gauges to detect the pressure of liquids. This allows for flexible configuration according to different liquid properties and detection requirements, thereby improving the application range and compatibility.

[0023] This invention eliminates the need to alter the original sensor packaging when setting up the isolation and conduction section, reducing maintenance complexity and cost. By embedding the pressure sensing unit within the cavity and sealing it with a sealing mounting component, the overall structure is compact, facilitating installation in limited spaces. It has a wide range of applications and offers excellent reliability, applicability, and economy. Attached Figure Description

[0024] The technical solution of this utility model will be further described below with reference to the accompanying drawings:

[0025] Figure 1 This is a schematic diagram of the structure of Embodiment 1 of this utility model;

[0026] Figure 2 for Figure 1 Enlarged view of part A in the image;

[0027] Figure 3 This is a schematic diagram of the structure of Embodiment 2 of this utility model;

[0028] Figure 4 for Figure 3 Enlarged view of part B in the image;

[0029] Figure 5 This is a schematic diagram of the structure of Embodiment 3 of this utility model;

[0030] Figure 6 This is a usage diagram of Embodiment 3 of this utility model;

[0031] Figure 7 This is a three-dimensional structural diagram of the pressure sensing unit in Embodiment 3 of this utility model;

[0032] Figure 8 This is a schematic diagram of the internal structure of the pressure sensing unit after omitting the strain gauge motor leads in Embodiment 3 of this utility model;

[0033] The components include: pump body 1, base 2, sealing mounting component 3, pressure sensing unit 4, isolation and conduction part 5, liquid inlet 10, liquid outlet 11, fluid channel 20, placement cavity 21, base liquid inlet 200, inlet 201, guide tube 202, sensor housing 50, silicone gel 51, first silicone sheet 52, silicone oil 53, second silicone sheet 54, substrate 40, metal strain wire 42, connecting electrode 43, and strain electrode lead wire 44. Detailed Implementation

[0034] To enable those skilled in the art to better understand the present application, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present application, and not all embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative effort should fall within the scope of protection of the present application.

[0035] This invention provides a corrosion-resistant micropump module with integrated pressure detection function to solve the problems of swelling and cracking of silicone gel caused by medicine in existing micropump modules, which damages and shortens the service life of pressure sensors, and increases maintenance costs and safety risks.

[0036] Please see Figure 1 This utility model discloses an anti-corrosion micropump module with integrated pressure detection function, comprising a pump body 1, a base 2, a sealing mounting component 3, a pressure sensing unit 4, and an isolation and conduction part 5. The pump body 1 has an inlet 10 and an outlet 11 that are interconnected. The base 2 has a fluid channel 20 connected to an external channel. The fluid channel 20 is connected to the outlet 11 and is used to receive the liquid pumped out from the outlet 11 of the pump body 1 and discharge it outward. A placement cavity 21 communicating with the fluid channel 20 is opened on one side of the base 2. The pressure sensing unit 4 is disposed in the placement cavity 21 and is fixed to the base 2 by the sealing mounting component 3, which seals the pressure sensing unit 4 in the placement cavity 21, allowing the liquid flowing out from the fluid channel 20 to enter the placement cavity 21 for the pressure sensing unit 4 to sense the pressure.

[0037] The isolation and conduction part 5 covers the pressure sensing unit 4, which serves to prevent the liquid medicine from directly contacting the pressure sensing unit and prevent the liquid medicine from corroding, swelling or aging the silicone gel and other materials; at the same time, the isolation and conduction part 5 has good elasticity and pressure transmission characteristics, which can transmit the liquid medicine pressure to the pressure sensing unit 4 without significant attenuation, ensuring the accuracy of pressure detection.

[0038] This invention avoids direct contact between the liquid medicine and the silicone gel by using the isolation and conduction part 5, which extends the service life of the pressure sensing unit 4 in corrosive liquid medicine environments, ensures the stability and accuracy of long-term pressure monitoring, and meets the needs of medical and pharmaceutical fields that require precise delivery and process monitoring of liquid medicine.

[0039] The present invention will be further described in detail below through several embodiments.

[0040] Example 1

[0041] See Figure 1 The present invention relates to a corrosion-resistant micropump module with integrated pressure detection function, comprising a pump body 1, a base 2, a sealing mounting component 3, a pressure sensing unit 4, and an isolation and transmission part 5.

[0042] The pump body 1 has an inlet 10 and an outlet 11 that are interconnected. The inlet 10 is located above the pump body 1, and the outlet 11 is located below the pump body 1. Its main function is to draw in the liquid medicine and pump it out. The pump body 1 is positioned above the base 2. The base 2 has a fluid channel 20 that extends horizontally through the base 2. The fluid channel 20 includes a base inlet 200 that communicates with the outlet 11. The base inlet 200 is vertically positioned on the base 2 and communicates with the placement cavity 21 through a flow inlet 201. The placement cavity 21 is located at the right end of the base 2. A guide tube 202 is provided inside the fluid channel 20. One end of the guide tube 202 communicates with the placement cavity 21, and the other end extends out from the side of the base 2 away from the placement cavity.

[0043] In this embodiment, the sealing mounting component 3 is a PCB board. The PCB board is mounted on the side of the base 2 with the placement cavity 21 and seals one end of the placement cavity 21. The pressure sensing unit 4 is disposed on the side of the PCB board opposite to the placement cavity 21, so that the pressure sensing unit 4 can sense the pressure of the liquid in the placement cavity 21. The function of the sealing mounting component 3 is to seal the placement cavity and provide a mounting base for the pressure sensing unit 4.

[0044] To prevent corrosion of the pressure sensing unit 4 and its reduced service life, an isolation and conduction section 5 is provided to protect the pressure sensing unit 4. Specifically, the isolation and conduction section 5 includes a sensor housing 50 arranged laterally within the placement cavity 21. The right end of the sensor housing 50 is fixed to the PCB board and encloses the pressure sensing unit 4, while the left end is open. The PCB board is fixed to the right end face of the base 2, thereby sealing the placement cavity 21. Then, the pressure sensing unit 4 is encapsulated inside the sensor housing 50 using silicone gel 51.

[0045] A layer of silicone oil 53 is directly coated on the outer surface of the potting layer of the silicone gel 51. The silicone oil 53 is selected from methyl silicone oil or phenyl silicone oil, which have good compatibility with silicone material and high chemical stability. During the coating process, it is ensured that the silicone oil 53 evenly covers all exposed areas of the potting layer of the silicone gel 51, without defects such as missed coating or bubbles. In this way, the silicone gel 51 and the sensor housing 50 work together to achieve physical isolation of the pressure sensing unit 4. The potting layer of the silicone gel 51 refers to the part of the silicone gel 51 exposed on the sensor housing 50. In this embodiment, the silicone oil 53 achieves the dual functions of isolation and pressure transmission.

[0046] In this embodiment, the pressure sensing unit 4 directly uses a pressure sensor, which is low in cost. The pressure sensor is connected to the PCB board to transmit the sensed pressure information to the PCB board for subsequent display.

[0047] The working process is as follows: the liquid medicine is drawn in by the inlet 10 of the pump body 1 and pumped out from the outlet 11 of the pump body 1. Then it enters the fluid channel 20 of the base 2 through the inlet 200 of the base. After passing through the pressure sensor, the liquid medicine finally flows out from the guide tube 202 on the left side.

[0048] During the flow of the liquid, silicone oil 53 directly blocks the contact between the liquid and the silicone gel 51. At the same time, due to the good fluidity and pressure conductivity of silicone oil 53, the pressure of the liquid can be efficiently transmitted to the potting layer of silicone gel 51 through silicone oil 53, and then to the pressure sensor, which can then detect the pressure.

[0049] This embodiment does not require changes to the original structure of the sensor, making construction convenient and enabling rapid upgrades to existing equipment. The silicone oil 53 combines isolation and conduction functions, eliminating pressure loss due to the absence of additional structural components. It has low maintenance costs; when the silicone oil layer is worn out due to long-term use, it can be directly replenished with silicone oil to restore performance, effectively extending the lifespan of the pressure sensor. It also offers high detection accuracy. All silicone oils are chemically resistant materials, suitable for various acid and alkali solutions, further enhancing the lifespan of the pressure sensor.

[0050] Example 2

[0051] See Figure 3 and Figure 4 The difference between Embodiment 2 and Embodiment 1 is that the structure of the isolation and conduction part 5 is different.

[0052] Specifically, in this embodiment, the isolation and conduction part 5 includes a sensor housing 50 horizontally disposed within the placement cavity 21. The right end of the sensor housing 50 is fixed to the PCB board and encloses the pressure sensing unit 4. After the PCB board is fixed to the right end face of the base 2, the placement cavity 21 is sealed. The pressure sensing unit 4 is encapsulated inside the sensor housing 50 by silicone gel 51. Then, a circular first silicone sheet 52 is attached to the outer surface of the encapsulation layer of the silicone gel 51. The material of the first silicone sheet 52 is selected as medical-grade or industrial-grade silicone that is resistant to chemical corrosion, such as polydimethylsiloxane (PDM). Its diameter is not less than the exposed area of ​​the encapsulation layer of the silicone gel 51, ensuring complete coverage of the encapsulation layer of the silicone gel 51, that is, completely covering the exposed part of the silicone gel 51. After cooperating with the sensor housing 50, physical isolation between the drug solution and the silicone gel 51 is achieved.

[0053] Meanwhile, a layer of silicone oil 53 is coated on the bonding surface between the first silicone sheet 52 and the silicone gel 51. The silicone oil 53 is also selected from methyl silicone oil or phenyl silicone oil, which have good compatibility with silicone material and high chemical stability. The function of silicone oil 53 is to fill the tiny gaps on the surface of the first silicone sheet 52 and the silicone gel 51, reduce energy loss during pressure transmission, and reduce friction between the first silicone sheet 52 and the silicone gel 51, so as to avoid wear caused by relative displacement during pressure changes. This makes pressure detection more accurate and can also further improve service life.

[0054] In addition, the pressure sensing unit in this embodiment is also a pressure sensor, which is connected to the PCB board to transmit the sensed pressure information to the PCB board for subsequent display.

[0055] The workflow is as follows:

[0056] When the micro-pump module is working, the liquid medicine is drawn in by the inlet 10 of the pump body 1 and pumped out from the outlet 11 of the pump body 1. Then it enters the fluid channel 20 of the base 2 through the inlet 200 of the base. After passing through the pressure sensor, the liquid medicine finally flows out from the guide tube 202.

[0057] When the liquid medicine flows through the pressure sensor, the pressure is applied to the surface of the first silicone sheet 52. The first silicone sheet 52 transmits the pressure evenly to the potting layer of the silicone gel 51 through the silicone oil 53. The silicone gel 51 then transmits the pressure to the pressure sensor to achieve pressure detection. At the same time, the first silicone sheet 52 blocks the direct contact between the liquid medicine and the silicone gel 51, making the silicone gel 51 less susceptible to corrosion and damage, ensuring the normal use of the pressure sensor. The silicone oil 53 ensures the continuity and stability of pressure transmission.

[0058] The micropump module in this embodiment has low overall modification cost and strong compatibility; the first silicone sheet 52 provides reliable physical isolation, and the silicone oil layer 53 ensures smooth pressure transmission and minimal loss of detection accuracy; in addition, both the first silicone sheet 52 and the silicone oil 53 are chemically resistant materials, suitable for various acid and alkali liquid environments, which extends the service life of the pressure sensor.

[0059] Example 3

[0060] See Figures 5 to 6 The difference between Embodiment 3 and Embodiment 1 is that the structures of the sealing mounting component 3, the pressure sensing unit 4, and the isolation and conduction part 5 are different.

[0061] In this embodiment, the sealing installation component 3 is a fixed pressure plate, which is installed on the right end face of the base 2 and seals the placement cavity 21.

[0062] In this embodiment, the pressure sensing unit 4 is a resistance strain gauge. A resistance strain gauge is a sensor that can convert mechanical strain into resistance change. The resistance strain gauge adopts a metal foil or semiconductor structure, and its resistance value changes linearly with its own deformation, thus having high detection accuracy and response speed.

[0063] See Figure 7 and Figure 8 In this embodiment, the resistance strain gauge includes a substrate 40; two metal strain wires 42 are symmetrically arranged vertically inside the substrate, and the two metal strain wires 42 are distributed in a grid pattern. Connecting electrodes 44 are respectively provided at both ends of the two metal strain wires 42, and connecting electrodes 43 corresponding to the two ends of the two metal strain wires 42 are provided on the upper surface of the substrate 40; strain electrode leads 44 extend from the base onto the connecting electrodes 43 for leading out electrical signals.

[0064] The principle of resistance strain gauge pressure detection is as follows: When the resistance strain gauge is subjected to external force, its shape and size change, causing the metal strain wire 42 to be stretched or compressed. Since the metal strain wire 42 is made of conductive material, when it is subjected to strain, the orientation of the resistance will also change, resulting in a change in resistance. The pressure value is calculated by the calibration formula after the change in resistance is amplified and converted by Wheatstone bridge.

[0065] After the two ends of the second silicone sheet 54 are sealed and fitted with the placement cavity and the sealing mounting member 3 respectively, a first region and a second region are formed that are in contact with and isolated from the fluid channel 220 respectively. The pressure sensing unit 4 is disposed in the second region. That is, the second region formed by the structure of the second silicone sheet 54 essentially constitutes the wrapping and isolation of the pressure sensing unit 4.

[0066] In addition, the material of the second silicone sheet 54 is the same as that of the first silicone sheet. Both are made of chemically resistant medical or industrial grade silicone, such as polydimethylsiloxane (PDM), which can ensure complete coverage of the resistance strain gauge and achieve physical isolation between the drug solution and the resistance strain gauge.

[0067] The workflow is as follows:

[0068] The flow of the liquid medicine is the same as in Example 1. When the pressure of the liquid medicine acts on the left side of the second silicone sheet 54, it causes the second silicone sheet 54 to undergo a slight deformation. The deformation of the second silicone sheet 54 causes the resistance strain gauge attached to its surface to deform synchronously, resulting in a change in the resistance value of the resistance strain gauge. The external signal acquisition circuit detects the amount of change in resistance value and converts it into a corresponding pressure signal, thereby realizing the direct detection of the liquid medicine pressure.

[0069] In this embodiment, the pressure sensing unit 4 and the sealing mounting component 3 are highly integrated, eliminating the complex structure of traditional silicone gel potting sensors, resulting in a smaller size and easier installation; the resistance strain gauge is directly combined with the second silicone sheet, resulting in a faster response speed; the second silicone sheet simultaneously achieves isolation and load-bearing functions, with no intermediate conduction loss, higher detection accuracy, and a significantly lower overall manufacturing cost compared to traditional solutions.

[0070] The above-described embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this application.

Claims

1. A corrosion-resistant micropump module with integrated pressure detection function, characterized in that, include: The pump body has an inlet and an outlet that are connected to each other; The base has a fluid channel inside that communicates with an external channel and is connected to the liquid outlet. A placement cavity communicating with the fluid channel is opened on one side of the base. A sealing mounting component is attached to one end face of the base and seals the placement cavity; A pressure sensing unit is located inside the placement cavity and is disposed on the sealing mounting component to sense the pressure in the fluid channel; An isolation conductive section is provided to enclose the pressure sensing unit and prevent direct contact between the fluid and the pressure sensing unit.

2. The corrosion-resistant micropump module with integrated pressure detection function as described in claim 1, characterized in that: The fluid channel includes a base inlet; the base inlet communicates with the placement cavity through a flow inlet, and the placement cavity has a guide tube coaxially arranged with the fluid channel; the other end of the guide tube extends out from the base.

3. The corrosion-resistant micropump module with integrated pressure detection function as described in claim 1, characterized in that: The sealing mounting component is a PCB board, which is fixed on the base on one side opposite to the placement cavity.

4. The corrosion-resistant micropump module with integrated pressure detection function as described in claim 3, characterized in that: The pressure sensing unit is a pressure sensor that is communicatively connected to the PCB board.

5. The corrosion-resistant micropump module with integrated pressure detection function as described in claim 4, characterized in that: The isolation and conduction part includes a sensor housing disposed on the PCB board; the pressure sensing unit is encapsulated in the sensor housing by silicone gel; the outer surface of the silicone gel is coated with silicone oil.

6. The corrosion-resistant micropump module with integrated pressure detection function as described in claim 4, characterized in that: The isolation and conduction part includes a sensor housing disposed on the PCB board; the pressure sensing unit is encapsulated in the sensor housing by silicone gel; a first silicone sheet is disposed on the silicone gel; and silicone oil is disposed between the first silicone sheet and the silicone gel.

7. The corrosion-resistant micropump module with integrated pressure detection function as described in claim 1, characterized in that: The sealing installation component is a fixed pressure plate; the fixed pressure plate is located on one end face of the base and seals the placement cavity.

8. The corrosion-resistant micropump module with integrated pressure detection function as described in claim 7, characterized in that: The pressure sensing unit is a resistance strain gauge; the resistance strain gauge includes a substrate, and two metal strain wires are disposed inside the substrate; the two ends of the two metal strain wires are respectively provided with connecting electrodes, and strain electrode leads extending from the substrate are extended from the connecting electrodes for leading out electrical signals.

9. The corrosion-resistant micropump module with integrated pressure detection function as described in claim 8, characterized in that: The isolation and conduction part is a second silicone sheet; the cross-section of the second silicone sheet is I-shaped; after the two ends of the second silicone sheet are respectively sealed and fitted with the placement cavity and the sealing installation part, a first area and a second area are respectively in contact with and isolated from the fluid channel, and the pressure sensing unit is disposed in the second area.

10. The corrosion-resistant micropump module with integrated pressure detection function as described in claim 8, characterized in that: The metal strain wires are distributed in a grid pattern within the substrate.