Damping z-axis device and coordinate measuring machine

Abstract

The application relates to the technical field of measuring equipment, and provides a damping Z-axis device and a three-coordinate measuring machine. The damping Z-axis device comprises a Z-axis fixing frame arranged along a Z-axis direction; a Z-axis mechanism movably connected with the Z-axis fixing frame, and a bottom end of the Z-axis mechanism being used for mounting a measurer; and a damping assembly comprising a first elastic member and a rigid member, the first elastic member being connected to a top end of the Z-axis fixing frame, the rigid member being arranged above the first elastic member, at least part of a bottom wall of the rigid member being connected with or abutting against the first elastic member, and the rigid member being capable of generating a damping effect under the driving of the elastic member to offset at least part of vibration of the Z-axis fixing frame. When the Z-axis fixing frame generates vibration, the damping assembly generates a damping effect to offset at least part of vibration generated by the Z-axis fixing frame, the damping Z-axis device is quickly restored to stability, vibration energy is converted into heat through elastic deformation and dissipated outward, and the measuring precision and the accuracy of the measuring result are improved.

Description

Technical Field

[0001] This application relates to the field of measuring equipment technology, specifically to a vibration damping Z-axis device and a coordinate measuring machine. Background Technology

[0002] As a high-precision measuring device, the stability of a coordinate measuring machine (CMM) during the measurement process is crucial to its measurement accuracy. Currently, common CMMs typically employ a fixed Z-axis mount and a movable Z-axis mechanism. The Z-axis mechanism drives the measuring instrument along the Z-axis to measure the object. During measurement, environmental factors, motor vibrations, or the inertia of the moving mechanism's acceleration and deceleration can cause vibrations in the Z-axis mechanism and mount, leading to instability of the measuring instrument at the bottom of the Z-axis mechanism and affecting the accuracy and precision of the measurement results. Utility Model Content

[0003] To address the problem that the Z-axis device in existing coordinate measuring machines is prone to vibration, affecting measurement accuracy and the precision of measurement results, this application provides a vibration-damping Z-axis device and a coordinate measuring machine.

[0004] An embodiment of the first aspect of the technical solution of this application provides a vibration damping Z-axis device, comprising: a Z-axis fixing frame, the Z-axis fixing frame being arranged along the Z-axis direction; a Z-axis mechanism, movably connected to the Z-axis fixing frame and capable of moving relative to the Z-axis fixing frame along the Z-axis, the bottom end of the Z-axis mechanism being used to mount a measuring instrument; and a vibration damping component, comprising a first elastic member and a rigid member, the first elastic member being connected to the top end of the Z-axis fixing frame, the rigid member being disposed above the first elastic member, and at least a portion of the bottom wall of the rigid member being connected to or maintaining abutment with the first elastic member, the rigid member being capable of generating a damping effect under the action of the elastic member to counteract at least a portion of the vibration of the Z-axis fixing frame.

[0005] In a further embodiment of this application, the first elastic member includes a plurality of first elastic blocks, all of which are connected to or maintain abutment with the rigid member; wherein, the plurality of first elastic blocks are spaced apart along the X-axis or Y-axis, or the plurality of first elastic blocks are respectively disposed corresponding to a plurality of corner points of the rigid member in the circumferential direction, so that a heat dissipation gap is formed between the plurality of first elastic blocks.

[0006] In a further embodiment of this application, the first elastic member includes a first elastic block, the first elastic block having a first heat dissipation opening extending along the X-axis direction or the Y-axis direction.

[0007] In a further embodiment of this application, the size of the first elastic block in the Z-axis direction is smaller than the size of the first elastic block in the X-axis direction and smaller than the size of the first elastic block in the Y-axis direction.

[0008] In a further embodiment of this application, the first elastic member is symmetrically arranged relative to the rigid member in the X-axis direction and / or the Y-axis direction; and / or, the vibration damping component is arranged opposite to the Z-axis mechanism in the Z-axis direction.

[0009] In a further embodiment of this application, the vibration damping assembly further includes: a second elastic member disposed at the top end of the rigid member; a cover member disposed at the top end of the second elastic member, the cover member having protrusions at both ends in the X-axis direction and / or at both ends in the Y-axis direction, the protrusions extending outward relative to the rigid member, and the protrusions having an adjustment hole extending through the Z-axis direction; and an adjustment bolt, the adjustment bolt passing through the adjustment hole and threadedly connected to the top end of the Z-axis fixing bracket, the adjustment bolt being used to adjust the degree of compression of the cover member on the first elastic member and the second elastic member.

[0010] In a further embodiment of this application, the cover member has baffle structures at both ends in the X-axis direction and / or at both ends in the Y-axis direction. The baffle structures extend along the Z-axis direction toward the top of the Z-axis fixing frame, and the baffle structures cover the sidewalls of the second elastic member and the rigid member.

[0011] In a further embodiment of this application, the second elastic member includes a plurality of second elastic blocks, which are spaced apart along the X-axis or Y-axis, or the plurality of second elastic blocks are respectively disposed corresponding to a plurality of corner points of the rigid member in the circumferential direction, so as to form a heat dissipation gap between the plurality of second elastic blocks; or, the second elastic member includes a second elastic block, which has a second heat dissipation opening extending along the X-axis or Y-axis.

[0012] In a further embodiment of this application, the size of the second elastic block in the Z-axis direction is smaller than the size of the second elastic block in the X-axis direction and smaller than the size of the second elastic block in the Y-axis direction; and / or, in the X-axis direction and / or the Y-axis direction, the cover member is symmetrically arranged with respect to the rigid member, and the second elastic member is symmetrically arranged with respect to the rigid member.

[0013] An embodiment of the second aspect of this application provides a coordinate measuring machine, comprising: a base platform having a Y-axis slide rail arranged along the Y-axis direction; a Y-axis carriage device disposed on the base platform and slidably connected to the Y-axis slide rail, the top of the Y-axis carriage device having a slidably connected X-axis slide rail and X-axis carriage; a vibration damping Z-axis device as described in any embodiment of the first aspect, disposed above the base platform, and the Z-axis fixing frame of the vibration damping Z-axis device being connected to the X-axis carriage; and a measuring instrument connected to the bottom end of the Z-axis mechanism for measuring an object to be measured placed on the base platform.

[0014] The beneficial effects of the above-mentioned technical solution of this application are as follows: According to the technical solution in this application, by improving and optimizing the structure, a vibration damping component located at the top of the Z-axis mounting bracket is used to generate a damping effect by using an elastic element to drive a rigid element when the Z-axis mounting bracket vibrates, thereby offsetting at least part of the vibration generated by the Z-axis mounting bracket. This allows the vibration damping Z-axis device to quickly recover stability and convert the vibration energy into heat dissipation through the elastic deformation of the first elastic element, thereby reducing the adverse effects of vibration on the measuring instrument and improving the measurement accuracy and the accuracy of the measurement results. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of a vibration damping Z-axis device in one embodiment of this application.

[0016] Figure 2 This is a partial structural schematic diagram of a vibration damping Z-axis device in one embodiment of this application.

[0017] Figure 3 This is a schematic diagram of a vibration damping component in one embodiment of this application.

[0018] Figure 4 This is a schematic diagram of a vibration damping component in another embodiment of this application.

[0019] Figure 5 This is a schematic diagram of a vibration damping component in another embodiment of this application.

[0020] Figure 6 This is a schematic diagram of a vibration damping component in another embodiment of this application.

[0021] Figure 7 This is a partial structural schematic diagram of the vibration damping Z-axis device in another embodiment of this application (where the vibration damping components are in a disassembled state).

[0022] Figure 8 This is a partial structural schematic diagram of the vibration damping Z-axis device in another embodiment of this application.

[0023] Figure 9 This is a schematic diagram of a vibration damping component in another embodiment of this application.

[0024] Figure 10 This is a schematic diagram of a vibration damping component in another embodiment of this application.

[0025] Figure 11 This is a schematic diagram of a vibration damping component in another embodiment of this application.

[0026] Figure 12 This is a partial structural schematic diagram of the vibration damping Z-axis device in another embodiment of this application.

[0027] Figure 13 This is a schematic diagram of a coordinate measuring machine according to one embodiment of this application.

[0028] Explanation of reference numerals in the attached figures: 100 Vibration damping Z-axis device; 1 Z-axis fixing frame, 11 bolt holes, 2 Z-axis mechanism, 21 Z-axis body, 211 top connection structure, 22 balancing mechanism, 221 piston rod, 23 transmission belt mechanism, 231 fixed pulley, 232 transmission belt, 24 air float guide rail, 3 vibration damping component, 31 first elastic element, 311 first elastic block, 312 first heat dissipation opening, 32 rigid element, 33 second elastic element, 331 second elastic block, 332 second heat dissipation opening, 34 cover pressure element, 341 protrusion, 342 adjustment hole, 343 baffle structure, 35 adjusting bolt; 500 Coordinate Measuring Machine; 51 Base Platform; 511 Marble Platform; 512 Y-axis Slide Rail; 513 Base Body; 52 Y-axis Carriage Device; 521 Y-axis Column; 522 Crossbeam; 523 X-axis Slide Rail; 524 X-axis Carriage; 53 Measuring Instrument. Detailed Implementation

[0029] The present application will now be described in further detail with reference to the accompanying drawings and specific embodiments. Similar elements in different embodiments are referred to by related similar element reference numerals. In the following embodiments, many details are described to facilitate a better understanding of the present application. However, those skilled in the art will readily recognize that some features may be omitted in different situations, or may be replaced by other elements, materials, or methods. In some cases, certain operations related to the present application are not shown or described in the specification. This is to avoid obscuring the core parts of the present application with excessive description. For those skilled in the art, detailed description of these related operations is not necessary; they can fully understand the related operations based on the description in the specification and general technical knowledge in the art.

[0030] Furthermore, the features, operations, or characteristics described in the specification can be combined in any suitable manner to form various embodiments, and the operational steps involved in each embodiment can also be rearranged or adjusted in a manner that is obvious to those skilled in the art. Therefore, the specification and drawings are only for clearly describing a particular embodiment and do not imply that they represent the necessary components and / or order.

[0031] The serial numbers assigned to components in this document, such as "first" and "second," are used only to distinguish the described objects and have no sequential or technical meaning. The terms "connection" and "linkage" used in this application, unless otherwise specified, include both direct and indirect connections (linkages).

[0032] In common coordinate measuring machines (CMMs), a Z-axis device is usually set up to drive the measuring instrument to move up and down in the Y-axis direction. At the same time, the Z-axis device can also move along the X-axis direction under the action of the X-axis motion mechanism and along the Y-axis direction under the action of the Y-axis motion mechanism, so that the measuring instrument can move in three-dimensional space to measure the object to be measured.

[0033] It should be noted that the X-axis, Y-axis and Z-axis directions described in this application are three mutually perpendicular directions in three-dimensional space. Among them, the X-axis and Y-axis directions are directions in the horizontal plane, and the Z-axis direction is a vertical direction perpendicular to the horizontal plane. The direction descriptions in the following embodiments are the same.

[0034] The following describes some embodiments of the vibration damping Z-axis device and coordinate measuring machine provided in this application, with reference to the accompanying drawings.

[0035] An embodiment of the first aspect of this application provides a vibration damping Z-axis device 100, such as... Figure 1 , Figure 2As shown, the system includes a Z-axis mounting bracket 1, a Z-axis mechanism 2, and a vibration damping assembly 3. The Z-axis mounting bracket 1 is positioned along the Z-axis direction. When used in a coordinate measuring machine (CMM), the Z-axis mounting bracket 1 can be connected to an X-axis motion mechanism or a Y-axis motion mechanism. The Z-axis mechanism 2 is movably connected to the Z-axis mounting bracket 1, allowing it to move along the X-axis and Y-axis directions with the Z-axis mounting bracket 1. Simultaneously, the Z-axis mechanism 2 can move relative to the Z-axis mounting bracket 1 along the Z-axis direction. The bottom end of the Z-axis mechanism 2 in the Z-axis direction is used to mount a measuring instrument, which is then driven by the Z-axis mechanism 2 to move along the X-axis, Y-axis, and Z-axis directions to perform corresponding measurements on the object to be measured. The vibration damping component 3 is located at the top of the Z-axis mounting bracket 1 in the Z-axis direction. The vibration damping component 3 includes a first elastic element 31 and a rigid element 32. The first elastic element 31 is connected to the top of the Z-axis mounting bracket 1, and the rigid element 32 is located above the first elastic element 31. At least a portion of the bottom wall of the rigid element 32 is connected to or maintains abutment with the first elastic element 31, so that the rigid element 32 forms a flexible contact with the Z-axis mounting bracket 1 through the first elastic element 31. The rigid element 32 and the first elastic element 31 can be directly connected by means of adhesive bonding, snap-fitting, riveting, or bolting, or they can be kept in abutment by clamping or pressing with corresponding structural components. When the Z-axis mounting bracket 1 or the Z-axis mechanism 2 vibrates, the vibration can be transmitted to the rigid member 32 through the Z-axis mounting bracket 1 and the first elastic element 31, causing the rigid member 32 to also vibrate accordingly. However, since the rigid member 32 and the Z-axis mounting bracket 1 are in flexible contact, the vibration of the rigid member 32 has a hysteresis, that is, there is a phase difference between the vibration of the rigid member 32 and the vibration of the Z-axis mounting bracket 1. This causes the rigid member 32 to generate a damping effect under the action of the first elastic element 31, and this damping effect can be used to cancel at least part of the vibration of the Z-axis mounting bracket 1. That is, the kinetic energy of the rigid member 32 and the mounting bracket vibrating in opposite directions cancels each other out, thereby reducing the overall vibration energy of the Z-axis mounting bracket 1 and the Z-axis mechanism 2 and improving the stability accordingly. Among them, the first elastic element 31 can undergo elastic deformation during vibration, and at the same time absorb vibration energy and release it outward in the form of heat.

[0036] For example, when the vibration waveforms of the Z-axis mounting bracket 1 and the rigid component 32 are sinusoidal or close to sinusoidal, there is a vibration phase difference between the rigid component 32 and the Z-axis mounting bracket 1. Assuming the phase difference is half a vibration cycle, when the vibration of the Z-axis mounting bracket 1 has completed the first half cycle and is moving towards the second half cycle, the vibration of the rigid component 32 begins the first half cycle, causing the vibration direction of the rigid component 32 to be opposite to the vibration direction of the Z-axis mounting bracket 1. For example, when the vibration waveform of the Z-axis mounting bracket 1 reaches the peak, the vibration waveform of the rigid component 32 reaches the trough, causing the vibrations of the two to cancel each other out.

[0037] It should be noted that in the above example, a phase difference of half a cycle between the vibration period of the rigid component 32 and the vibration period of the Z-axis fixing frame 1 is considered optimal. When the phase difference is less than or greater than half a cycle, the damping effect of the rigid component 32 can still offset part of the vibration of the Z-axis fixing frame 1. The specific phase difference can be determined based on the material and elastic properties of the first elastic component 31, as well as the material and weight of the rigid component 32.

[0038] In addition, the vibration of the Z-axis fixing frame 1 and the Z-axis mechanism 2 in this embodiment can be vibration in the Z-axis direction, vibration in the X-axis direction, or vibration in the Y-axis direction. Of course, it can also be vibration in two or more directions at the same time.

[0039] It is understandable that in common coordinate measuring machines, environmental factors, motor vibrations, or the inertia of acceleration and deceleration of the motion mechanism can easily cause vibrations in the Z-axis mechanism and Z-axis mounting bracket connected to the measuring instrument. This can lead to a decrease in the stability of the measuring instrument, causing shaking or vibration during measurement, which affects the measurement accuracy and the stability of the measurement results.

[0040] The vibration damping Z-axis device 100 in this embodiment improves and optimizes the structure by using the vibration damping component 3 located at the top of the Z-axis fixing frame 1. When the Z-axis fixing frame 1 vibrates, the elastic element drives the rigid element 32 to generate a damping effect, thereby offsetting at least part of the vibration generated by the Z-axis fixing frame 1. This allows the vibration damping Z-axis device 100 to quickly recover stability and convert the vibration energy into heat dissipation through the elastic deformation of the first elastic element 31. This reduces the adverse effects of vibration on the measuring instrument and helps to improve the measurement accuracy and the accuracy of the measurement results.

[0041] In further embodiments of this application, such as Figure 2 and Figure 3 In the example, the first elastic member 31 includes a plurality of first elastic blocks 311, and the plurality of first elastic blocks 311 are all connected to or maintain an abutment state with the rigid member 32, so that different positions on the bottom surface of the rigid member 32 form flexible contact with the Z-axis fixing frame 1. For example, Figure 3 and Figure 4In the example shown, multiple first elastic blocks 311 are spaced apart along the X-axis direction, so that the rigid member 32 maintains flexible contact with the Z-axis fixing frame 1 in different areas along the X-axis direction. Furthermore, the space between the first elastic blocks 311 can form a heat dissipation gap along the Y-axis direction, allowing the first elastic blocks 311 to convert vibration energy into heat energy through elastic deformation, and then accelerate heat dissipation through airflow in the heat dissipation gap. Of course, in some other examples, multiple first elastic blocks 311 can also be spaced apart along the Y-axis direction, with the space between the first elastic blocks 311 forming a heat dissipation gap along the X-axis direction. Additionally, in some examples, multiple first elastic members 31 can be spaced apart simultaneously along both the X-axis and Y-axis directions, for example… Figure 5 In the example, heat dissipation gaps are formed simultaneously along the Y-axis and X-axis directions; preferably, a plurality of first elastic blocks 311 are distributed circumferentially along the rigid member 32 at multiple corner positions of the rigid member 32, such as... Figure 5 Examples are shown in the text.

[0042] In further embodiments of this application, such as Figure 2 and Figure 6 As shown, the first elastic member 31 includes a first elastic block 311, which is connected to or maintains abutment with at least a portion of the bottom surface of the rigid member 32, thereby forming a flexible contact between the rigid member 32 and the Z-axis fixing frame 1. The first elastic block 311 has a first heat dissipation opening 312 extending along the Y-axis direction, allowing airflow through the opening 312 to accelerate the dissipation of heat generated by the first elastic block 311. Alternatively, the first heat dissipation opening 312 can also be configured to extend along the X-axis direction, depending on the specific application requirements. By connecting or maintaining abutment between the first elastic block 311 with the first heat dissipation opening 312 and the rigid member 32, the contact area between the first elastic block 311 and the rigid member 32 can be increased, resulting in higher stability after assembly and ensuring heat dissipation. The first heat dissipation opening 312 is not limited to... Figure 6 The rectangular opening shown can also be other shapes, such as circles or ovals.

[0043] In practical applications, the rigid component 32 can be a metal counterweight, and the first elastic block 311 can be an elastic block made of materials such as rubber or silicone.

[0044] It should be noted that the above are only some preferred implementations of the rigid member 32 and the first elastic member 31. In practical applications, the rigid member 32 and the first elastic member 31 are not limited to... Figures 3 to 5The rectangular block-like structure shown in can also adopt structural forms of other shapes according to usage requirements. For example, the rigid member 32 can adopt block-like structures such as a circle, an ellipse, a triangle, a polygon, etc., and the first elastic block 311 can adopt a shape adapted thereto, which will not be enumerated one by one herein.

[0045] Further, in a specific example, as shown in Figures 2 to 6 , the dimension of the first elastic block 311 in the X-axis direction is a1, the dimension in the Y-axis direction is b1, and the dimension in the Z-axis direction is c1, which satisfies c1<a1 and c1<b1. That is, among the above three dimensions, the dimension of the first elastic block 311 in the Z-axis direction is the smallest, so that the first elastic block 311 is flat in the Z-axis direction, which is beneficial to maintaining the self-stability of the first elastic block 311. It can be understood that since the first elastic block 311 needs to bear its own weight and the weight of the rigid member 32, if the dimension of the first elastic block 311 in the Z-axis direction is too large, the first elastic block 311 is prone to shake under the pressure of the rigid member 32 even in a static state, which is not conducive to maintaining the stability of the Z-axis fixing frame 1 and the Z-axis mechanism 2, and easily affects the normal damping effect of the rigid member 32, so that its ability to cancel the vibration of the Z-axis fixing frame 1 and the Z-axis mechanism 2 is weakened. Through the dimension limitation of this embodiment, the above problems can be effectively alleviated, and the self-stability of the first elastic block 311 and the rigid member 32 can be improved.

[0046] In a further embodiment of the present application, as in Figures 2 to 6 the example, the first elastic member 31 is arranged symmetrically relative to the rigid member 32 in the X-axis direction, so that when the rigid member 32 generates vibration along the X-axis direction, the vibration amplitudes in the positive and negative directions of the X-axis are consistent, so that the vibration cancellation effect on the Z-axis fixing frame 1 and the Z-axis mechanism 2 remains symmetrical. Of course, in other examples, the first elastic member 31 may also be arranged symmetrically relative to the rigid member 32 in the Y-axis direction, so that when the rigid member 32 generates vibration along the Y-axis direction, the vibration amplitudes in the positive and negative directions of the Y-axis are consistent, so that the vibration cancellation effect on the Z-axis fixing frame 1 and the Z-axis mechanism 2 remains symmetrical. Further, when the first elastic member 31 is arranged symmetrically relative to the rigid member 32 in both the X-axis direction and the Y-axis direction, as in Figure 5 the example, the first elastic member 31 can enable the rigid member 32 to keep the vibration cancellation effect on the Z-axis fixing frame 1 and the Z-axis mechanism 2 symmetrical in both the X-axis direction and the Y-axis direction, which is beneficial to further improving the vibration stability.

[0047] In a further embodiment of the present application, as in Figure 1 and Figure 2As shown, the vibration damping component 3 is positioned opposite to the Z-axis mechanism 2 in the Z-axis direction. The vibration damping component 3 is closer to the Z-axis mechanism 2 to reduce the deviation between the vibration damping component 3 and the Z-axis mechanism 2 in the X-axis and Y-axis directions. When the Z-axis mechanism 2 vibrates due to the inertia of acceleration and deceleration, the vibration damping component 3 can generate a more precise damping effect, thereby more quickly offsetting the vibration energy caused by the Z-axis mechanism 2. This is beneficial to further improve the overall stability of the vibration damping Z-axis device 100, thereby ensuring the measurement accuracy of the measuring instrument and the accuracy of the measurement results.

[0048] In further embodiments of this application, such as Figure 7 and Figure 8As shown, the vibration damping assembly 3 also includes a second elastic element 33, a cover element 34, and an adjusting bolt 35. The second elastic element 33 is disposed at the top of the rigid element in the Z-axis direction, and the cover element 34 is disposed at the top of the second elastic element 33 (i.e., the end of the second elastic element 33 away from the rigid element 32 in the Z-axis direction), so that a flexible contact is formed between the cover element 34 and the rigid element 32. The second elastic element 33 and the rigid element 32 can be directly connected by means of adhesive bonding, snap-fitting, riveting, or bolt connection, or the rigid element 32 and the second elastic element 33 can be kept in abutment state by clamping or pressing with corresponding structural components. The cover member 34 has protrusions 341 at both ends in the X-axis direction. The protrusions 341 extend outward relative to the rigid member 32, and the protrusions 341 have adjustment holes 342 that pass through in the Z-axis direction. The top surface of the Z-axis fixing frame 1 has bolt holes 11 corresponding to the adjustment holes 342. The adjustment bolts 35 pass through the adjustment holes 342 and form a threaded connection with the Z-axis fixing frame 1 through the bolt holes 11, so as to clamp the first elastic member 31, the rigid member 32 and the second elastic member 33 in the Z-axis direction. Since the first elastic member 31 and the second elastic member 33 can produce elastic deformation, when the pressure on the two sides of the first elastic member 31 and the second elastic member 33 in the Z-direction is different, the magnitude of the elastic deformation generated during vibration is also different, which in turn leads to different magnitudes of the damping effect of the rigid member 32 (for example, affecting the amplitude and phase of the vibration of the rigid member 32). Therefore, by tightening or loosening the adjusting bolt 35, the pressure on the first elastic element 31 and the second elastic element 33 can be changed, thereby adjusting the damping effect of the rigid element 32. This achieves an adjustable damping vibration reduction effect, allowing for corresponding adjustments based on the actual vibration conditions. This ensures that the damping effect of the rigid element 32 is as compatible as possible with the vibration of the Z-axis mounting bracket 1 and the Z-axis mechanism 2, further enhancing the vibration cancellation capability of the rigid element 32. When the Z-axis mounting bracket 1 and the Z-axis mechanism 2 vibrate, they can recover stability more quickly, further improving the stability of the vibration-damping Z-axis device 100 and correspondingly increasing the measurement accuracy and the precision of the measurement results. Since the protruding part 341 extends outward relative to the rigid element 32, it provides installation space for the adjusting bolt 35, preventing the adjusting bolt 35 from contacting the rigid element 32. This ensures that the cover pressure member 34 and the rigid element 32 maintain an indirect, flexible connection.

[0049] It should be noted that the protrusions 341 are not limited to being located at both ends of the cover pressure member 34 in the X-axis direction, but can also be located at both ends of the cover pressure member 34 in the Y-axis direction. Alternatively, protrusions 341 can be provided at both ends of the cover pressure member 34 in the X-axis direction and both ends in the Y-axis direction, and each protrusion 341 is provided with an adjustment hole 342 and an adjustment bolt 35, which can further improve the adjustment accuracy. The number of adjustment holes 342 on each protrusion 341 is not limited to the two shown in the figure, and can also be one or more other numbers. Preferably, the adjustment holes 342 are symmetrically arranged in the protrusions 341 at both ends in the same direction, which helps to reduce adjustment deviation.

[0050] Furthermore, in a specific example, such as Figure 7 and Figure 8 In the example shown, the cover member 34 has baffle structures 343 at both ends in the Y-axis direction, and the baffle structures 343 extend along the Z-axis direction toward the top of the Z-axis fixing bracket 1 (e.g. Figure 8 As shown in the diagram (extending downwards), the baffle structure 343 shields the sidewalls of the second elastic member 33 and the rigid member 32 to laterally limit their movement and prevent them from shifting or falling off along the Y-axis. Preferably, the baffle structure 343 can abut against the sidewalls of the second elastic member 33 and the rigid member 32 to clamp them on both sides in the Y-axis direction, providing better protection.

[0051] More preferably, such as Figure 7 and Figure 8 In the example, the cover 34 can be formed by bending a single plate to create an integral structure.

[0052] It should be noted that the baffle structure 343 is not limited to being set at both ends of the cover pressure member 34 in the Y-axis direction, but can also be set at both ends of the cover pressure member 34 in the X-axis direction, or baffle structure 343 can be set at both ends of the cover pressure member 34 in the X-axis direction and both ends of the cover pressure member 34 in the Y-axis direction at the same time, so as to achieve better protection.

[0053] Furthermore, in a specific example, such as Figure 7 , Figure 8 and Figure 9 As shown, the second elastic member 33 includes a plurality of second elastic blocks 331, and all the plurality of second elastic blocks 331 are connected to or maintain an abutment state with the rigid member 32, so that different positions on the top surface of the rigid member 32 form flexible contact with the cover member 34. Wherein, as Figure 7 and Figure 9In the example shown, multiple second elastic blocks 331 are spaced apart along the X-axis, allowing the rigid member 32 to maintain a flexible connection with the cover member 34 in different regions along the X-axis. Furthermore, the space between the second elastic blocks 331 forms a heat dissipation gap along the Y-axis, enabling the second elastic blocks 331 to convert vibrational energy into heat energy through elastic deformation, which is then accelerated by airflow within the heat dissipation gap. In some other examples, multiple second elastic blocks 331 may also be spaced apart along the Y-axis, forming a heat dissipation gap along the X-axis. Additionally, in some examples, multiple second elastic members 33 may be spaced apart simultaneously along both the X-axis and Y-axis, for example… Figure 10 In the example, heat dissipation gaps are formed simultaneously along the Y-axis and X-axis directions; preferably, a plurality of second elastic blocks 331 are distributed circumferentially along the rigid member 32 at multiple corner positions of the rigid member 32, such as... Figure 10 Examples are shown in the text.

[0054] Furthermore, in a specific example, such as Figure 8 and Figure 11 As shown, the second elastic member 33 includes a second elastic block 331, which is connected to or maintains abutment with at least a portion of the top surface of the rigid member 32, thereby indirectly forming a flexible connection between the rigid member 32 and the cover member 34. The second elastic block 331 has a second heat dissipation opening 332 extending along the Y-axis, allowing airflow through the opening to accelerate heat dissipation. Alternatively, the second heat dissipation opening 332 can also extend along the X-axis, depending on the application requirements. By connecting or abutting the second elastic block 331 with the rigid member 32, the contact area between them is increased, resulting in higher stability after assembly and ensuring heat dissipation. The second heat dissipation opening 332 is not limited to... Figure 11 The rectangular opening shown can also be other shapes, such as circles or ovals.

[0055] In practical applications, the cover pressure member 34 can be a metal plate, and the second elastic block 331 can be an elastic block made of materials such as rubber and silicone.

[0056] It should be noted that the above are only some preferred implementations of the second elastic element 33. In practical applications, the first elastic element 31 is not limited to... Figures 9 to 11 The rectangular block structure shown can also adopt other shapes as needed. For example, the second elastic block 331 can adopt circular, elliptical, triangular, polygonal, and other block structures, which will not be listed here.

[0057] Further, in a specific example, as Figures 9 to 11 shown, the dimension of the second elastic block 331 in the X-axis direction is a2, the dimension in the Y-axis direction is b2, and the dimension in the Z-axis direction is c2, which satisfies c2<a2 and c2<b2. That is, among the above three dimensions, the dimension of the second elastic block 331 in the Z-axis direction is the smallest, so that the second elastic block 331 is in a flat shape in the Z-axis direction, which is beneficial to maintaining the self-stability of the second elastic block 331. It can be understood that, since the second elastic block 331 needs to bear its own weight and the weight of the pressing member 34, if the dimension of the second elastic block 331 in the Z-axis direction is too large, the lateral stability will be poor. Even in a static state, the second elastic block 331 is prone to shaking under the pressure of the pressing member 34, which is not conducive to maintaining the stability of the vibration damping assembly 3, the Z-axis fixing frame 1 and the Z-axis mechanism 2, and is likely to affect the normal damping effect of the rigid member 32, so that its ability to counteract the vibration of the Z-axis fixing frame 1 and the Z-axis mechanism 2 is weakened. Through the dimension limitation of this embodiment, the above problem can be further alleviated, and the self-stability of the second elastic block 331 and the pressing member 34 can be improved.

[0058] In a further embodiment of the present application, as Figures 7 to 11 in the example, the pressing members 34 are arranged symmetrically relative to the rigid member 32 in the X-axis direction, and the second elastic members 33 are arranged symmetrically relative to the rigid member 32 in the X-axis direction, so that when the rigid member 32 generates vibration along the X-axis direction, the influence of the pressing members 34 and the second elastic members 33 on the vibration of the rigid member 32 is consistent along the positive and negative directions of the X-axis, so that the vibration amplitude of the rigid member 32 remains consistent, and further the vibration counteracting effect on the Z-axis fixing frame 1 and the Z-axis mechanism 2 remains symmetrical. In other examples, the pressing members 34 are arranged symmetrically relative to the rigid member 32 in the Y-axis direction, and the second elastic members 33 are arranged symmetrically relative to the rigid member 32 in the Y-axis direction, so that when the rigid member 32 generates vibration along the Y-axis direction, the influence of the pressing members 34 and the second elastic members 33 on the rigid member 32 is consistent along the positive and negative directions of the Y-axis, so that the vibration amplitude of the rigid member 32 remains consistent, and further the vibration counteracting effect on the Z-axis fixing frame 1 and the Z-axis mechanism 2 remains symmetrical. Further, the pressing members 34 are arranged symmetrically relative to the rigid member 32 in both the X-axis direction and the Y-axis direction, and the second elastic members 33 are arranged symmetrically relative to the rigid member 32 in both the X-axis direction and the Y-axis direction. The rigid member 32 keeps the vibration counteracting effect on the Z-axis fixing frame 1 and the Z-axis mechanism 2 symmetrical in both the X-axis direction and the Y-axis direction, which is beneficial to further improving the stability.

[0059] In a further embodiment of the present application, as Figure 12 and Figure 13As shown, the Z-axis mechanism 2 includes a Z-axis body 21, a balancing mechanism 22, a transmission belt mechanism 23, and an air-bearing guide rail 24. The transmission belt mechanism 23 includes two fixed pulleys 231 and a transmission belt 232; one fixed pulley 231 is connected to the top of the Z-axis fixing frame 1, and the other fixed pulley 231 is connected to the top of the air-bearing guide rail 24. The transmission belt 232 is wound around the two fixed pulleys 231. The top of the Z-axis body 21 has a top connecting structure 211, which is connected to the transmission belt 232. The fixed pulleys 231 are driven to rotate by a corresponding drive mechanism, and the movement of the transmission belt 232 drives the Z-axis body 21 to move up and down, so that the transmission belt mechanism 23 supports and drives the Z-axis body 21. The balancing mechanism 22 includes a piston rod 221 and a cylinder (not shown in the figure) arranged in the Z-axis fixed frame 1 along the Z-axis direction. The top end of the piston rod 221 is connected to the top plate of the Z-axis fixed frame 1, and the bottom end of the piston rod 221 is connected to the top end of the Z-axis body 21. The piston rod 221 can extend and retract along the Z-axis direction under the drive of the cylinder to adapt to the lifting and lowering movement of the Z-axis body 21 along the Z-axis direction. Thus, by controlling the air pressure, the cylinder is used to balance the weight of the Z-axis mechanism 2, thereby improving the overall stability of the Z-axis body 21 during movement. There are two air-bearing guide rails 24, which are spaced apart along the Z-axis direction. Both air-bearing guide rails 24 have an air-bearing channel that runs through the Z-axis direction. The Z-axis body 21 passes through the air-bearing channel. The X-axis slide 524 is connected between the two air-bearing guide rails 24, and the X-axis slide 524 and the air-bearing guide rails 24 are connected to the Z-axis fixed frame 1.

[0060] It should be noted that the above is only one of the specific implementation methods of the Z-axis mechanism 2. In practical applications, other methods can also be used to drive the Z-axis body 21 to perform lifting and lowering movements. For example, the Z-axis body 21 can be driven to perform lifting and lowering movements by a cylinder-driven telescopic rod; or, a screw mechanism threadedly connected to the Z-axis body 21 can be set in the Z-axis direction, and the Z-axis mechanism can be driven to perform lifting and lowering movements by driving the screw mechanism to rotate.

[0061] An embodiment of the second aspect of this application provides a coordinate measuring machine 500, such as Figure 12 and Figure 13As shown, the coordinate measuring machine 500 includes a base platform 51, a Y-axis slide assembly 52, a vibration-damping Z-axis assembly 100 as described in any of the embodiments of the first aspect, and a measuring instrument 53. The base platform 51 serves as a mounting base and a support platform for the object to be measured. The base platform 51 has a Y-axis slide rail 512 arranged along the Y-axis. The Y-axis slide assembly 52 is mounted on the base platform 51 and is slidably connected to the Y-axis slide rail 512 on the base platform 51, allowing the Y-axis slide assembly 52 to slide relative to the base platform 51 along the Y-axis. The top of the Y-axis slide assembly 52 has an X-axis slide rail 523 and an X-axis slide 524. The X-axis slide rail 523 extends along the X-axis direction, and the X-axis slide 524 is slidably connected to the X-axis slide rail 523. The vibration damping Z-axis device 100 is positioned above the base platform 51 and on one side of the X-axis slide rail 523 in the Y-axis direction. The Z-axis fixing frame 1 of the vibration damping Z-axis device 100 is connected to the X-axis slide 524, allowing the vibration damping Z-axis device 100 to slide relative to the X-axis slide rail 523 along with the X-axis slide 524. The measuring device 53 is connected to the bottom end of the Z-axis mechanism 2 and can move accordingly with the Z-axis mechanism 2 to measure the object to be measured placed on the base platform 51. The measuring device 53 can move along the Z-axis direction under the drive of the Z-axis mechanism 2, and can also slide along the X-axis with the vibration damping Z-axis device 100 and the X-axis slide 524. Furthermore, it can slide along the Y-axis direction as a whole with the vibration damping Z-axis device 100 and the Y-axis slide 524 to adjust the position of the measuring device 53 in the X-axis and Y-axis directions.

[0062] During the measurement process, when the Z-axis mounting bracket 1 or the Z-axis mechanism 2 vibrates, the vibration can be transmitted through the Z-axis mounting bracket 1 to the rigid member 32 of the vibration damping component 3, causing the rigid member 32 to also vibrate accordingly. Under the action of the first elastic member 31, the rigid member 32 generates a damping effect and cancels at least part of the vibration of the Z-axis mounting bracket 1, thereby reducing the overall vibration energy of the Z-axis mounting bracket 1 and the Z-axis mechanism 2. The vibration damping Z-axis device 100 quickly maintains stability, thereby reducing the adverse effects on the measurement operation of the measuring instrument 53 and improving the measurement accuracy and the accuracy of the measurement results.

[0063] Furthermore, such as Figure 12 and Figure 13 In the example, the base platform 51 includes a base body 513, a marble platform 511 on the top surface of the base body 513, and a Y-axis slide rail 512, for supporting the object to be measured via the marble platform 511; the bottom of the base body 513 may also be provided with a corresponding support structure. The Y-axis slide rail 512 may be a slide rail structure with an air buoyancy mechanism.

[0064] Furthermore, such as Figure 12 and Figure 13In the example shown, the Y-axis carriage device 52 includes a Y-axis column 521 and a crossbeam 522; the Y-axis column 521 is slidably connected to the Y-axis slide rail 512, and the crossbeam 522 is connected to the top of the Y-axis column 521 and extends along the X-axis direction; an X-axis slide rail 523 and an X-axis carriage 524 slidably connected to the X-axis slide rail 523 are provided on the crossbeam 522. The vibration damping Z-axis device 100 is connected to the X-axis carriage 524. The Y-axis column 521 can be configured as follows... Figure 13 The two shown can be replaced with one or more other quantities. Additionally, the X-axis slide rail 523 can employ a slide rail structure with an air-bearing mechanism.

[0065] Furthermore, the coordinate measuring machine 500 in this application possesses all the beneficial effects of the vibration-damping Z-axis device 100 in any of the above embodiments, which will not be elaborated further here. Besides the aforementioned moving bridge type coordinate measuring machine 500, the vibration-damping Z-axis device of this application can also be used in other types of coordinate measuring machines, such as fixed bridge type coordinate measuring machines, gantry type coordinate measuring machines, etc., which will not be elaborated further here.

[0066] The above-described specific examples are for illustrative purposes only and are not intended to limit the scope of this invention. Those skilled in the art to which this invention pertains can make various simple deductions, modifications, or substitutions based on the concept of this invention.

Claims

1. A vibration damping Z-axis device, characterized in that, include: Z-axis mounting bracket, wherein the Z-axis mounting bracket is arranged along the Z-axis direction; The Z-axis mechanism is movably connected to the Z-axis mounting bracket and can move along the Z-axis relative to the Z-axis mounting bracket. The bottom end of the Z-axis mechanism is used to mount a measuring instrument. The vibration damping component includes a first elastic element and a rigid element. The first elastic element is connected to the top of the Z-axis mounting bracket, and the rigid element is disposed above the first elastic element. At least a portion of the bottom wall of the rigid element is connected to or maintains contact with the first elastic element. The rigid element can generate a damping effect under the action of the elastic element to counteract at least a portion of the vibration of the Z-axis mounting bracket.

2. The vibration damping Z-axis device according to claim 1, characterized in that, The first elastic element includes a plurality of first elastic blocks, all of which are connected to or maintain abutment with the rigid element; The plurality of first elastic blocks are spaced apart along the X-axis or Y-axis, or the plurality of first elastic blocks are respectively arranged corresponding to the multiple corner points of the rigid member in the circumferential direction, so as to form a heat dissipation gap between the plurality of first elastic blocks.

3. The vibration damping Z-axis device according to claim 1, characterized in that, The first elastic element includes a first elastic block, which has a first heat dissipation opening extending along the X-axis or Y-axis.

4. The vibration damping Z-axis device according to claim 2 or 3, characterized in that, The size of the first elastic block in the Z-axis direction is smaller than the size of the first elastic block in the X-axis direction, and smaller than the size of the first elastic block in the Y-axis direction.

5. The vibration damping Z-axis device according to any one of claims 1 to 3, characterized in that, In the X-axis direction and / or the Y-axis direction, the first elastic element is symmetrically arranged with respect to the rigid element; and / or, The vibration damping component is disposed opposite to the Z-axis mechanism in the Z-axis direction.

6. The vibration damping Z-axis device according to any one of claims 1 to 3, characterized in that, The vibration damping component also includes: The second elastic element is disposed at the top of the rigid element; A cover member is disposed at the top end of the second elastic member. The cover member has protrusions at both ends in the X-axis direction and / or at both ends in the Y-axis direction. The protrusions extend outward relative to the rigid member, and the protrusions have adjustment holes that pass through the Z-axis direction. And an adjusting bolt, which passes through the adjusting hole and is threaded to the top of the Z-axis fixing bracket. The adjusting bolt is used to adjust the degree of compression of the cover pressure member on the first elastic member and the second elastic member.

7. The vibration damping Z-axis device according to claim 6, characterized in that, The cover member has baffle structures at both ends in the X-axis direction and / or at both ends in the Y-axis direction, the baffle structures extending toward the top of the Z-axis fixing frame along the Z-axis direction, and the baffle structures shielding the sidewalls of the second elastic member and the rigid member.

8. The vibration damping Z-axis device according to claim 6, characterized in that, The second elastic element includes a plurality of second elastic blocks, which are spaced apart along the X-axis or Y-axis, or the plurality of second elastic blocks are respectively arranged corresponding to a plurality of corner points of the rigid element in the circumferential direction, so as to form a heat dissipation gap between the plurality of second elastic blocks; or, The second elastic element includes a second elastic block, which has a second heat dissipation opening extending along the X-axis or Y-axis direction.

9. The vibration damping Z-axis device according to claim 8, characterized in that, The dimension of the second elastic block in the Z-axis direction is smaller than the dimension of the second elastic block in the X-axis direction, and smaller than the dimension of the second elastic block in the Y-axis direction; And / or, In the X-axis direction and / or Y-axis direction, the cover member is symmetrically arranged with respect to the rigid member, and the second elastic member is symmetrically arranged with respect to the rigid member.

10. A coordinate measuring machine, characterized in that, include: A base platform, wherein the base platform has a Y-axis slide rail arranged along the Y-axis direction; The Y-axis slide assembly is mounted on the base platform and slidably connected to the Y-axis slide rail. The top of the Y-axis slide assembly has a slidably connected X-axis slide rail and X-axis slide. The vibration damping Z-axis device as described in any one of claims 1 to 9 is disposed above the base platform, and the Z-axis fixing frame of the vibration damping Z-axis device is connected to the X-axis slide. And a measuring device, which is connected to the bottom end of the Z-axis mechanism and is used to measure the object to be measured placed on the base platform.

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