Heated valve plate assembly and vacuum valve

Abstract

The utility model discloses a kind of heating valve plate assembly and vacuum valve, it is related to vacuum valve technical field, heating valve plate assembly includes valve plate and with the detachable cooperation valve stem of the valve plate;The valve plate has installation cavity and the second cover plate sealing the installation cavity, electric heating element and the plug electrically connected with the electric heating element are provided in the installation cavity, the interface end of the plug extends to the bottom outside of the installation cavity, and the electric heating element is used to conduct heat to valve plate working surface;The end of the valve stem is provided with socket, the plug is inserted with socket, and forms passageway for the electric heating element. By the form of the valve plate and the valve stem insertion fixed, while guaranteeing that valve plate heating function is normally used, the convenience of maintenance is improved.

Description

Technical Field

[0001] This utility model relates to the field of vacuum valve technology, specifically to a heating valve plate assembly and a vacuum valve. Background Technology

[0002] In semiconductor manufacturing equipment, transfer valves, as core components connecting process chambers and transfer chambers, bear the dual responsibility of efficient wafer transfer and precise isolation of the process environment. These valves need to complete opening and closing actions with a response speed in the order of seconds, while maintaining nanoscale cleanliness and ultra-high sealing performance under complex operating conditions such as high temperature, vacuum, and corrosive gases, making them an indispensable part of modern chip manufacturing.

[0003] Process products have the characteristic that they do not easily deposit on the surface of hot objects. Therefore, in some processes, it is necessary to heat the valve plate of the transfer valve to prevent process products from depositing on the valve plate.

[0004] Current heating solutions for rectangular valves are as shown in the instruction manual. Figure 1 As shown, a heating rod fixing plate 4 with heating rods 6 arranged on it is installed on the drive rod 3. Then, the rectangular valve plate 7 is installed on this heating rod fixing plate 4 to heat the valve plate. In this structural layout, the rectangular valve plate 7 can only be fixed from the back with screws. During equipment maintenance, due to the limited structural space of the rectangular valve 5 itself, it is difficult to replace the valve plate separately. The entire rectangular valve needs to be removed from the equipment to facilitate valve plate maintenance. In addition, when maintaining the rectangular valve plate, because the conductive cable of the heating element is a long, integrated cable that passes through the inside of the valve stem, the valve stem cannot be removed separately. This makes maintenance very inconvenient, easily causes scratches on the valve plate surface, is not conducive to later maintenance, and leads to a high product failure rate.

[0005] Therefore, providing a rectangular valve plate that is easy to maintain and also has a heating function is a technical problem that urgently needs to be solved by those skilled in the art. Summary of the Invention

[0006] In view of this, the purpose of this application is to overcome the shortcomings of the prior art and to propose a heating valve plate assembly and a vacuum valve.

[0007] To solve the above-mentioned technical problems, the technical solution adopted by this utility model is as follows: On one hand, a heating valve plate assembly includes a valve plate and a valve stem detachably engaged with the valve plate; the valve plate has a mounting cavity and a second cover plate sealing the mounting cavity, an electric heating element and a plug electrically connected to the electric heating element are disposed in the mounting cavity, the interface end of the plug extends to the bottom outer side of the mounting cavity, the electric heating element is used to conduct heat energy to the working surface of the valve plate; the end of the valve stem is provided with a socket, the plug is inserted into the socket, and a passage is formed for the electric heating element.

[0008] Preferably, a fixing groove is provided below the valve plate, the interface end of the plug extends into the fixing groove, and a first cover plate is fixed on the valve stem. When the first cover plate is located in the fixing groove, the plug is inserted into the socket and a passage is formed for the electric heating element.

[0009] Preferably, the first cover plate is provided with a plurality of threaded holes, and the valve plate is provided with a plurality of screws, the plurality of screws passing through the fixing groove and extending into the corresponding threaded holes.

[0010] Preferably, the fixing groove has at least one protrusion on the side away from the working surface of the valve plate, and the upper surface of the first cover plate also has at least one recess, the protrusion being able to abut against the recess.

[0011] Preferably, the valve stem is provided with a groove, and a U-shaped clamp is snapped onto the outside of the groove; a through hole is provided at the geometric center of the first cover plate, and a limiting groove is provided on the lower surface of the first cover plate; the valve stem passes through the through hole, and the U-shaped clamp is nested in the limiting groove.

[0012] Preferably, the mounting cavity is further provided with a temperature sensor and an over-temperature protection switch. The temperature sensor is used to detect the temperature of the working surface of the valve plate, and the over-temperature protection switch is electrically connected to the electric heating element and is used to control the opening and closing of the electric heating element according to the detection value of the temperature sensor.

[0013] Preferably, a sealing gasket is provided at the opening of the mounting cavity, and a second cover plate is provided on the outside of the sealing gasket, which closes the mounting cavity.

[0014] Preferably, the valve stem has a plurality of wires inside, one end of which is electrically connected to the socket and the other end is connected to a power source.

[0015] On the other hand, a vacuum valve has a heating valve plate assembly as described in any one of the above-mentioned methods.

[0016] The beneficial effects of this utility model achieved by adopting the above technical solution are as follows: Because the valve plate and valve stem adopt a detachable mating structure, when the valve plate malfunctions or requires maintenance, simply disconnecting the plug and socket and removing the valve plate from the valve stem allows for quick disassembly of the valve plate. Unlike traditional structures where the entire rectangular valve must be removed from the equipment, this greatly improves the convenience and efficiency of maintenance. Simultaneously, the structure where the electric heating element is located inside the valve plate ensures that the valve plate maintains a suitable temperature during operation, effectively preventing the deposition of process products on the valve plate and ensuring the normal operation of the valve and the stability of the process environment. The combined use of a temperature sensor and an over-temperature protection switch allows for real-time monitoring of the valve plate's working surface temperature and automatic power cut-off of the electric heating element when the temperature is too high, preventing damage to the valve plate due to overheating and further improving the safety and reliability of the equipment. Furthermore, the sealing gasket and second cover plate effectively prevent contamination and damage to components such as the electric heating element and temperature sensor within the mounting cavity from the external environment, extending the service life of the equipment. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the overall structure of the heating structure of an existing rectangular valve, including the front view and the left sectional view. Figure 2 This is an exploded view of the overall structure of a heating valve plate assembly according to the present invention; Figure 3 This is an exploded view of a heating valve plate assembly according to the present invention. Figure 4 This is a schematic diagram of the overall structure of the valve plate of a heating valve plate assembly according to the present invention; Figure 5 This is a structural schematic diagram of the front view of a heating valve plate assembly according to the present invention.

[0018] The attached diagram lists the components represented by each number as follows: 1. Valve plate; 11. Mounting cavity; 111. Electric heating element; 112. Plug; 113. Temperature sensor; 114. Over-temperature protection switch; 115. Sealing gasket; 116. Second cover plate; 12. Fixing groove; 121. Protrusion; 13. Screw; 2. Valve stem; 21. First cover plate; 211. Threaded hole; 212. Screw sleeve; 213. Recess; 214. Through hole; 215. Limiting groove; 22. Socket; 23. Slot; 24. U-shaped clamp; 25. Wire; 3. Drive rod; 4. Heating rod fixing plate; 5. Rectangular valve; 6. Heating rod; 7. Rectangular valve plate. Detailed Implementation

[0019] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0020] The present invention will be described in detail with the following embodiments: Example

[0021] refer to Figure 1-5 A heating valve plate assembly, such as Figure 2 , 3 As shown in Figure 4, the device includes a valve plate 1 and a valve stem 2 detachably fitted to the valve plate 1. The valve plate 1 has a mounting cavity 11 and a fixing groove 12. An electric heating element 111 and a plug 112 electrically connected to the electric heating element 111 are disposed in the mounting cavity 11. The wiring end of the plug 112 is located in the mounting cavity 11, and the interface end of the plug 112 extends into the fixing groove 12. The electric heating element 111 is used to conduct heat energy to the working surface of the valve plate 1. A first cover plate 21 is fixed on the valve stem 2. The valve stem 2 is provided with a socket 22 at its end. When the first cover plate 21 is located in the fixing groove 12, the plug 112 is inserted into the socket 22, forming a passage for the electric heating element 111. The electric heating element 111 is a heating rod. The outer shell of the heating rod can be made of stainless steel, and the internal heating wire can be made of nickel-chromium heat-resistant alloy wire. The nickel-chromium heat-resistant alloy wire is wound on a ceramic core with excellent high-temperature characteristics and insulated with magnesium oxide. When current passes through the heating element, electrical energy is converted into heat energy due to the existence of resistance.

[0022] Specifically, in the rectangular transmission valve, the valve stem 2 can move up and down under the drive of a cylinder (not shown in the figure), and drive the valve plate 1 to open and close the valve of the rectangular transmission valve. The valve stem 2 is a hollow structure. The heating cable and socket 22 for the electric heating element 111 are set inside the hollow structure of the valve stem 2, and the socket 22 is set facing the plug 112.

[0023] By connecting the plug 112 and the socket 22, power is supplied to the electric heating element 111, and the plug also serves to connect the valve plate 1 and the valve stem 2. Figure 1 In this application, the electric heating element 111 is integrated into the valve plate 1, which improves the efficiency of heat conduction. At the same time, the plug-in structure of the valve plate 1 and the valve stem 2 makes it easy to quickly remove the valve plate 1 from the valve stem 2, which facilitates replacement and maintenance.

[0024] like Figure 2 , 3As shown in Figure 4, to ensure the stability of the connection between the valve plate 1 and the valve stem 2, the first cover plate 21 is provided with a plurality of threaded holes 211, and each of the plurality of threaded holes 211 is provided with a screw steel sleeve 212; the valve plate 1 is provided with a plurality of screws 13, which pass through the fixing groove 12 and extend into the corresponding threaded hole 211. The length of the screw 13 is longer than the length of the plug 112. The screw steel sleeve 212 distributes the force on the threaded hole 211, thereby improving tensile strength and wear resistance.

[0025] The valve stem 2 is provided with a groove 23, which is an annular groove, and a U-shaped clamp 24 is attached to the outside of the groove 23; a through hole 214 is provided at the geometric center of the first cover plate 21, and a limiting groove 215 is provided on the lower surface of the first cover plate 21. The valve stem 2 passes through the through hole 214, and the U-shaped clamp 24 is nested in the limiting groove 215.

[0026] In the above structure, the U-shaped clamp 24 is first inserted into the groove 23, and then the U-shaped clamp 24 is fixed in the limiting groove 215 with screws. At this time, the valve stem 2 and the first cover plate 21 form a whole. Then, the first cover plate 21 is embedded into the fixing groove 12, and the plug 112 and the socket 22 are connected. At this time, several screws 13 are inserted into the corresponding threaded holes 211 from above the valve plate 1 and tightened to form a shape as shown in the figure. Figure 5 The stable structure is shown. During disassembly, rotate screw 13 in the opposite direction to separate screw 13 from threaded hole 211, thereby separating valve plate 1 and valve stem 2.

[0027] like Figure 2 , 3 As shown, further, in order to prevent the valve plate 1 from lateral displacement during operation, the fixing groove 12 is provided with two protrusions 121 on the side away from the working surface of the valve plate 1, and the upper surface of the first cover plate 21 is also provided with two recesses 213, and the two protrusions 121 can abut against the corresponding recesses 213.

[0028] like Figure 4 As shown, a temperature sensor 113 and an over-temperature protection switch 114 are also provided in the mounting cavity 11. The temperature sensor 113 is used to detect the temperature of the working surface of the valve plate 1. The over-temperature protection switch 114 is electrically connected to the electric heating element 111 and is used to control the opening and closing of the electric heating element 111 according to the detection value of the temperature sensor 113, so as to improve the accuracy of temperature control.

[0029] Specifically, the temperature sensor 113 monitors the temperature of the electric heating element 111 in real time and feeds back the detected temperature signal to the over-temperature protection switch 114. The over-temperature protection switch 114 compares the current temperature value with the set temperature value (e.g., 280℃). When the current temperature is lower than the set temperature, the electric heating element 111 continues to heat; when the temperature rises to the set temperature, the over-temperature protection switch 114 disconnects the circuit, thereby achieving precise control of the heating temperature and preventing overheating and thermal damage.

[0030] like Figure 3 As shown, a sealing gasket 115 is provided at the opening of the mounting cavity 11. A second cover plate 116 is provided on the outside of the sealing gasket 115, which seals the mounting cavity 11. The sealing gasket 115 is made of high-temperature resistant and corrosion-resistant rubber material, which can effectively prevent heat loss from the mounting cavity 11 and prevent external dust and impurities from entering the mounting cavity 11, thus protecting components such as the electric heating element 111, temperature sensor 113, and over-temperature protection switch 114. The second cover plate 116 is fixed to the valve plate 1 with screws or other fasteners, and it fits tightly with the sealing gasket 115, further enhancing the sealing performance of the mounting cavity 11.

[0031] In the above structure, such as Figure 4 As shown, several screws 13 also pass through the second cover plate 116.

[0032] The hollow structure of the valve stem 2 contains several wires 25. One end of each wire 25 is electrically connected to the socket 22, and the other end is connected to a power source to provide power to the entire heating valve plate assembly.

[0033] In actual use, when the valve plate 1 needs to be heated, the power supply is provided to the electric heating element 111 through the wire 25, socket 22, and plug 112. The electric heating element 111 generates heat and conducts the heat energy to the working surface of the valve plate 1, keeping the working surface of the valve plate 1 at a suitable temperature. At the same time, the temperature sensor 113 detects the temperature of the working surface of the valve plate 1 in real time and transmits the detected value to the over-temperature protection switch 114. When the temperature is too high, the over-temperature protection switch 114 automatically cuts off the power supply to the electric heating element 111 to prevent the valve plate 1 from being damaged due to overheating. When the valve plate 1 malfunctions or needs maintenance, simply disconnect the plug 112 from the socket 22 and remove the valve plate 1 from the valve stem 2 to achieve quick disassembly of the valve plate 1. This eliminates the need to remove the entire rectangular valve from the equipment, greatly improving the convenience and efficiency of maintenance.

[0034] Example 1 Based on the above embodiments, a vacuum valve has the above-described heating valve plate assembly.

[0035] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0036] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A heating valve plate assembly, characterized in that, The device includes a valve plate (1) and a valve stem (2) detachably fitted to the valve plate (1); the valve plate (1) has a mounting cavity (11) and a second cover plate (116) that seals the mounting cavity (11); an electric heating element (111) and a plug (112) electrically connected to the electric heating element (111) are provided in the mounting cavity (11); the interface end of the plug (112) extends to the bottom outside of the mounting cavity (11); the electric heating element (111) is used to conduct heat energy to the working surface of the valve plate (1); a socket (22) is provided at the end of the valve stem (2); the plug (112) is inserted into the socket (22) and forms a passage for the electric heating element (111).

2. The heating valve plate assembly according to claim 1, characterized in that, A fixing groove (12) is also provided below the valve plate (1). The interface end of the plug (112) extends into the fixing groove (12). A first cover plate (21) is fixed on the valve stem (2). When the first cover plate (21) is located in the fixing groove (12), the plug (112) is plugged into the socket (22) and forms a passage for the electric heating element (111).

3. The heating valve plate assembly according to claim 2, characterized in that, The first cover plate (21) is provided with a plurality of threaded holes (211), and the valve plate (1) is provided with a plurality of screws (13). The plurality of screws (13) pass through the fixing groove (12) and extend into the corresponding threaded holes (211).

4. The heating valve plate assembly according to claim 2, characterized in that, The fixing groove (12) is provided with at least one protrusion (121) on the side away from the working surface of the valve plate (1), and the upper surface of the first cover plate (21) is also provided with at least one recess (213), and the protrusion (121) can abut against the recess (213).

5. The heating valve plate assembly according to claim 2, characterized in that, The valve stem (2) is provided with a slot (23), and a U-shaped clamp (24) is attached to the outside of the slot (23); a through hole (214) is provided at the geometric center of the first cover plate (21), and a limiting groove (215) is provided on the lower surface of the first cover plate (21). The valve stem (2) passes through the through hole (214) and the U-shaped clamp (24) is nested in the limiting groove (215).

6. The heating valve plate assembly according to claim 1, characterized in that, The mounting cavity (11) is also equipped with a temperature sensor (113) and an over-temperature protection switch (114). The temperature sensor (113) is used to detect the temperature of the working surface of the valve plate (1). The over-temperature protection switch (114) is electrically connected to the electric heating element (111) and is used to control the opening and closing of the electric heating element (111) according to the detection value of the temperature sensor (113).

7. The heating valve plate assembly according to claim 1, characterized in that, A sealing gasket (115) is provided at the opening of the mounting cavity (11), and a second cover plate (116) is provided on the outside of the sealing gasket (115), which closes the mounting cavity (11).

8. The heating valve plate assembly according to claim 1, characterized in that, The valve stem (2) is provided with several wires (25) inside. One end of the wires (25) is electrically connected to the socket (22), and the other end is connected to a power source.

9. A vacuum valve, characterized in that, The vacuum valve has a heating valve plate assembly as described in any one of claims 1-8.

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