Plug valve and vacuum apparatus

Abstract

The application relates to the fields of photovoltaic and semiconductor technologies, and particularly relates to a plug valve and a vacuum device. The plug valve comprises a valve body, a valve cavity and a channel, the channel is arranged along a first horizontal direction and is communicated with the valve cavity, one side of the valve cavity in the first horizontal direction is provided with a first sealing surface, and the first horizontal direction is the thickness direction of the valve body; a valve body upper cover is arranged above the valve body, the valve body upper cover is provided with a containing cavity, the containing cavity is communicated with the valve cavity; a valve plate frame is slidably arranged in the valve cavity and the containing cavity along a vertical direction; a valve plate guide block is arranged on the valve plate frame, and a guide groove is arranged on the valve plate guide block; a valve plate is provided with a guide piece, the guide piece is slidably clamped in the guide groove, the valve plate is slidably connected with the valve plate frame, and one side of the valve plate away from the valve plate frame is provided with a second sealing surface opposite to the first sealing surface; and a power assembly is configured to drive the valve plate frame to move along the vertical direction, so as to drive the valve plate to move between the containing cavity and the valve cavity.

Description

Technical Field

[0001] This application relates to the fields of photovoltaic and semiconductor technology, and in particular to a gate valve and vacuum device. Background Technology

[0002] During the opening and closing of a conventional slide gate valve, the valve plate and the valve body base are always in a state of contact and friction, which can easily lead to wear on the sealing surface, affecting the service life and sealing effect.

[0003] In multi-chamber series vacuum coating equipment, each chamber needs to be isolated by a valve plate during the coating process. However, sealing and isolating large-diameter chambers is currently difficult and the effect is poor. Utility Model Content

[0004] In view of this, the present application provides a slide gate valve and a vacuum device, which eliminates wear between the sealing surfaces when the slide gate valve is opened and closed, thereby extending its service life and improving the sealing effect.

[0005] According to one aspect of the inventive concept of this utility model, a gate valve is provided, comprising: a valve body, a valve body cover, a valve plate frame, a valve plate guide block, a valve plate, and a power assembly. The valve body includes a valve cavity and a channel, the channel being opened along a first horizontal direction and communicating with the valve cavity. The valve cavity has a first sealing surface on one side located in the first horizontal direction, the first horizontal direction being the thickness direction of the valve body. The valve body cover is disposed above the valve body and has a receiving cavity communicating with the valve cavity. The valve plate frame is slidably disposed vertically within the valve cavity and the receiving cavity. The valve plate guide block is disposed on the valve plate frame and has a guide groove. The valve plate has a guide member slidably fitted into the guide groove, allowing the valve plate to slide and connect with the valve plate frame. The side of the valve plate facing away from the valve plate frame has a second sealing surface opposite to the first sealing surface. A power assembly is configured to drive the valve plate frame to move vertically, thereby moving the valve plate between the receiving cavity and the valve chamber. When the valve plate reaches a preset position in the vertical direction, the valve plate guide block can drive the valve plate to move in the first horizontal direction, either bringing the second sealing surface closer to the first sealing surface to close the channel, or moving the second sealing surface away from the first sealing surface to open the channel.

[0006] According to some embodiments of the present invention, the number of valve plate guide blocks includes at least two, and at least one valve plate guide block is respectively provided on each of the opposite sides of the valve plate frame along the second horizontal direction, the second horizontal direction being perpendicular to the first horizontal direction; the guide member is a guide shaft extending along the second horizontal direction; the guide groove is a through hole penetrating the valve plate guide block, and the guide groove extends obliquely from bottom to top towards the first sealing surface.

[0007] According to some embodiments of the present invention, the slide valve further includes a first pulley, which is disposed at the bottom of the valve plate and is capable of moving along a first horizontal direction on the bottom wall of the valve cavity; or, the bottom of the valve plate is provided with a slide rail opened along the first horizontal direction, and a second pulley is fixedly disposed on the bottom wall of the valve cavity, wherein when the valve plate moves along the first horizontal direction, the second pulley slides in cooperation with the slide rail.

[0008] According to some embodiments of the present invention, the slide valve further includes a fixing member, which is disposed on the valve plate on the side opposite to the second sealing surface, wherein the guide member is connected to the fixing member.

[0009] According to some embodiments of the present invention, the slide gate valve further includes a first sealing ring, which is disposed on the second sealing surface of the valve plate and is configured to abut against the first sealing surface.

[0010] According to some embodiments of the present invention, the slide gate valve further includes a second sealing ring, which is disposed between the valve body cover and the valve body.

[0011] According to some embodiments of this utility model, the power assembly includes a fixed part and a free part. The fixed part is disposed on the valve body. The free part is movable relative to the fixed part in the vertical direction and is connected to the valve plate frame.

[0012] According to some embodiments of the present invention, the top of the valve plate frame is provided with a first guide wheel that can roll in a second horizontal direction and a second guide wheel that can roll in a vertical direction. The second horizontal direction is perpendicular to the first sealing surface. The first guide wheel is configured to abut against the top of the valve body, and the second guide wheel is configured to abut against the inner sidewall of the valve body cover.

[0013] According to some embodiments of the present invention, the inner side of the valve body is provided with a third guide wheel and a fourth guide wheel that can roll relative to the valve plate frame in a second horizontal direction and in a vertical direction, the second horizontal direction being perpendicular to the first sealing surface, and the third guide wheel and the fourth guide wheel being configured to abut against the valve plate frame.

[0014] According to the inventive concept of the second aspect of this utility model, a vacuum device is also provided, including a first vacuum chamber and a slide valve as described in the foregoing embodiments, wherein the slide valve is disposed on one side of the first vacuum chamber and configured to open or close the first vacuum chamber.

[0015] According to some embodiments of this utility model, the vacuum device includes a first vacuum chamber, a second vacuum chamber, and a gate valve. The number of second vacuum chambers is one or two, and the second vacuum chambers are disposed on one or both sides of the first vacuum chamber. The gate valve is disposed between the first vacuum chamber and the second vacuum chamber, and at the end of the second vacuum chamber away from the first vacuum chamber.

[0016] According to the slide gate valve and vacuum equipment of this utility model embodiment, by setting a valve plate guide block between the valve plate frame and the valve plate, and opening a guide groove on the valve plate guide block, the valve plate moves a small distance along the direction perpendicular to the first sealing surface when opening and closing by utilizing the weight of the valve plate itself and the pushing of the valve plate frame, thus eliminating wear of the valve plate in the direction perpendicular to the first sealing surface and improving the sealing effect and service life of the slide gate valve. Attached Figure Description

[0017] The above and other objects, features, and advantages of this application will become more apparent from the more detailed description of the embodiments of this application in conjunction with the accompanying drawings. The drawings are provided to further illustrate the embodiments of this application and form part of the specification. They are used together with the embodiments of this application to explain this application and do not constitute a limitation thereof. In the drawings, the same reference numerals generally represent the same components or steps.

[0018] Figure 1 The image shown is a front view of a gate valve in the closed state according to an embodiment of this application.

[0019] Figure 2 The image shown is a front view of the internal structure of a gate valve in the closed state according to an embodiment of this application.

[0020] Figure 3 The diagram shows a side view and a magnified partial view of the internal structure of a gate valve during the closing process, according to an embodiment of this application.

[0021] Figure 4 The diagram shown is a partial structural schematic of the gate valve during the closing process according to an embodiment of this application.

[0022] Figure 5 The image shown is a side view of the internal structure of a gate valve in the closed state according to an embodiment of this application.

[0023] Figure 6The image shown is a front view of a slide gate valve in the open state according to an embodiment of this application.

[0024] Figure 7 The image shown is a front view of the internal structure of a slide gate valve in the open state according to an embodiment of this application.

[0025] Figure 8 The image shown is a side view of the internal structure of a slide gate valve in the open state according to an embodiment of this application.

[0026] Figure 9 The diagram shown is a structural schematic of a vacuum device provided in an embodiment of this application.

[0027] Figure label: 1. Valve body; 101. First sealing surface; 2. Valve body cover; 3. Valve plate frame; 4. Valve plate guide block; 5. Guide groove; 6. Valve plate; 601. Second sealing surface; 7. Guide component; 8. Power assembly; 801. Fixed part; 802. Free part; 9. Pulley; 10. Fixed component; 11. First guide wheel; 12. Second guide wheel; 13. Third guide wheel; 14. Fourth guide wheel; 15. First vacuum chamber; 16. Second vacuum chamber; 100. Slide valve; C1. Channel; C2. Valve cavity; C3. Receiving cavity. Detailed Implementation

[0028] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0029] Figure 1 The image shown is a front view of a gate valve in the closed state according to an embodiment of this application. Figure 2 The image shown is a front view of the internal structure of a gate valve in the closed state according to an embodiment of this application. Figure 3 The image shows a side view and a magnified partial view of the internal structure of a gate valve during the closing process according to an embodiment of this application. Figure 4 The diagram shown is a partial structural schematic of a gate valve during the closing process according to an embodiment of this application. Figure 5 The image shown is a side view of the internal structure of a gate valve in the closed state according to an embodiment of this application. Figure 6 The image shown is a front view of a slide gate valve in the open state according to an embodiment of this application. Figure 7 The image shown is a front view of the internal structure of a slide gate valve in the open state according to an embodiment of this application. Figure 8 The image shown is a side view of the internal structure of a slide gate valve in the open state according to an embodiment of this application.

[0030] According to one aspect of the inventive concept of this utility model, such as Figures 1 to 8 As shown, a slide gate valve is provided, comprising: a valve body 1, a valve body cover 2, a valve plate frame 3, a valve plate guide block 4, a valve plate 6, and a power assembly 8. The valve body 1 includes a valve cavity C2 and a channel C1. The channel C1 is opened along a first horizontal direction and communicates with the valve cavity C2. A first sealing surface 101 is located on one side of the valve cavity C2 in the first horizontal direction, which is the thickness direction of the valve body C2. The valve body cover 2 is disposed above the valve body 1 and has a receiving cavity C3, which communicates with the valve cavity C2. The valve plate frame 3 is slidably disposed vertically within the valve cavity C2 and the receiving cavity C3. The valve plate guide block 4 is disposed on the valve plate frame 3 and has a guide groove 5. The valve plate 6 is provided with a guide 7, which is slidably embedded in the guide groove 5, allowing the valve plate 6 to slide and engage with the valve plate frame 3. The side of the valve plate 6 facing away from the valve plate frame 3 has a second sealing surface 601 opposite to the first sealing surface 101. The power assembly 8 is configured to drive the valve plate frame 3 to move vertically, thereby moving the valve plate 6 between the receiving cavity C3 and the valve cavity C2. When the valve plate 6 reaches a preset position in the vertical direction, the valve plate guide block 4 can drive the valve plate 6 to move in the first horizontal direction, so that the second sealing surface 601 approaches the first sealing surface 101 to close the channel C1, or moves the second sealing surface 601 away from the first sealing surface 101 to open the channel C1.

[0031] In this embodiment, by setting a valve plate guide block 4 between the valve plate frame 3 and the valve plate 6, and by creating a guide groove 5 on the valve plate guide block 4, the valve plate 6 moves a small distance along the direction perpendicular to the first sealing surface 101 when it is opened and closed by utilizing the weight of the valve plate 6 itself and the pushing of the valve plate frame 3. This eliminates wear between the valve plate 6 and the valve body, and improves the sealing effect and service life of the slide gate valve.

[0032] According to some embodiments of the present invention, the number of valve plate guide blocks 4 is one, and the valve plate guide blocks 4 are arranged on the valve plate guide blocks 4 extending along two horizontal directions.

[0033] According to some alternative embodiments of this utility model, the number of valve plate guide blocks 4 is at least two, with at least one valve plate guide block 4 provided on each of the opposite sides of the valve plate frame 3 along the second horizontal direction, which is perpendicular to the first horizontal direction; the guide member 7 is a guide shaft extending along the second horizontal direction. The guide groove 5 is a through hole penetrating the valve plate guide block 4, and the guide groove 5 extends obliquely from bottom to top towards the first sealing surface 101. By obliquely extending the guide groove 5, when the valve plate guide block 4 rises, the valve plate 6 can be moved a short distance away from the first sealing surface 101 by its own weight. When the valve plate guide block 4 falls (after the bottom of the valve plate 6 has contacted the bottom surface of the valve body), the valve plate 6 can be moved a short distance towards the first sealing surface 101, so that the valve plate 6 fits and seals the first sealing surface.

[0034] According to some embodiments of this utility model, such as Figures 1-3 as well as Figures 5-8 As shown, the slide gate valve consists of two parts, upper and lower. The lower part is the main structure of the slide gate valve, valve body 1. Figure 3 Taking the direction shown as an example, the valve body 1 has three openings: the left end, the right end, and the top end. The openings at the left and right ends are used to connect to a pipe (or a vacuum chamber), or the end facing the second sealing surface is connected to a pipe (or a vacuum chamber) and the other end is connected to the external environment. The opening at the top end is connected to the valve body cover 2. The valve plate 6 is located inside the valve body 1 and can close the opening at the left or right end, and can move vertically upward into the valve body cover 2 to open the openings at the left and right ends.

[0035] According to some embodiments of this utility model, such as Figure 2 and Figure 3 As shown, the side of the valve body 1 that is in contact with and sealed against the valve plate 6 is the first sealing surface 101, and the side of the valve plate 6 opposite to the first sealing surface 101 is the second sealing surface 601. When the first sealing surface 101 and the second sealing surface 601 are in contact, the slide gate valve is closed; when the first sealing surface 101 and the second sealing surface 601 are out of contact and the valve plate 6 rises, the slide gate valves are opened at the left and right ends of the valve body 1. A fixing member 10 is provided on the side of the valve plate 6 opposite to the second sealing surface 601. The fixing member 10 is connected to the guide member 7, and the two ends of the guide member 7 extend beyond the edges of the valve plate 6 on both sides.

[0036] According to some optional embodiments of this utility model, the guide member 7 can be a single, continuous rod-like structure, with the entire guide member 7 fixed to the valve plate 6 at intervals by multiple fixing members 10. Alternatively, the guide member 7 can be multiple shorter rod-like structures, each fixed to the edge of the valve plate 6 at intervals by one or more fixing members 10. Alternatively, the guide member 7 can be a protruding spherical structure, and the guide groove 5 is a cylindrical groove matching the structure of the valve plate, with the groove opening width of the guide groove 5 being less than the maximum width within 5. Alternatively, the guide member 7 can be a rod-ball combined structure, wherein the rod portion is connected to the valve plate 6, and the ball portion extends beyond the valve plate 6 and is embedded in the guide groove 5.

[0037] According to some embodiments of the present invention, the valve plate frame 3 is disposed inside the valve body 1, serving as a support component for the valve plate 6 and a force-bearing component for the power component 8, and driving the valve plate 6 to move in the vertical direction. That is, the valve plate frame 3 plays the role of transmitting kinetic energy between the power component 8 and the valve plate 6, ensuring that the valve plate is subjected to uniform force, avoiding deformation, and ensuring the sealing effect.

[0038] Optionally, the valve plate frame 3 includes columns on both sides, a top beam located at the top of the columns, and multiple structural components such as diagonal braces and reinforcing ribs for reinforcement, which will not be described in detail here.

[0039] Optionally, valve plate guide blocks 4 are provided on the columns on both sides of the valve plate frame 3. The valve plate guide blocks 4 on the two columns are recessed inward on two opposite sides perpendicular to the valve plate 6 to form guide grooves 5. The guide grooves 5 extend obliquely from bottom to top, that is, the distance between the lower end of the guide groove 5 and the first sealing surface 101 is greater than the distance between the upper end of the guide groove 5 and the first sealing surface 101. The guide members 7 extending beyond both sides of the valve plate 6 are slidably embedded in the guide grooves 5, and the guide members 7 and the guide grooves 5 form a groove fit.

[0040] In this embodiment, the valve plate frame 3 rises or falls under the drive of the power component 8, thereby causing the valve plate 6 to rise or fall. For example... Figure 4 As shown in the left-middle figure, during the descent of the valve plate frame 3, after the valve plate 6 descends to the bottom of the valve body 1, the valve plate frame 3 continues to descend. Based on the cooperation between the oblique guide groove 5 and the guide member 7, the valve plate guide block 4 presses against the guide member 7, causing the guide member 7 to slide upward within the guide groove 5, and driving the valve plate 6 to translate and approach the first sealing surface 101, until the first sealing surface 101 and the second sealing surface 601 are in contact with each other, completing the closure of the slide gate valve (as shown in the figure). Figure 4(As shown in the middle right figure). The valve plate frame 3 rises in the opposite way to the previous process. The valve plate frame 3 moves upward. Based on the cooperation between the inclined guide groove 5 and the guide member 7 and the self-weight of the valve plate 6, the guide member 7 slides downward in the guide groove 5 and drives the valve plate 6 to move horizontally away from the first sealing surface 101. After the guide member 7 moves to the bottom of the guide groove 5, it drives the valve plate 6 to move upward. At this time, the second sealing surface 601 of the valve plate 6 has been released from contact with the first sealing surface 101, thereby eliminating the risk of wear caused by relative displacement sliding friction.

[0041] According to some embodiments of this utility model, the slide gate valve further includes a first pulley 9, which is disposed at the bottom of the valve plate 6 and is movable along the first horizontal direction on the bottom wall of the valve cavity. Alternatively, the bottom of the valve plate 6 is provided with a slide rail extending along the first horizontal direction, and a second pulley is fixedly disposed on the bottom wall of the valve cavity C2. When the valve plate 6 moves along the first horizontal direction, the second pulley slides in cooperation with the slide rail.

[0042] In this embodiment, by providing a first pulley 9 at the bottom of the valve plate 6, the sliding friction between the bottom of the valve plate 6 and the bottom surface inside the valve body 1 is changed to rolling friction as the second sealing surface 601 of the valve plate 6 approaches or moves away from the first sealing surface 101, thereby reducing the wear on the bottom of the valve plate 6 and improving the service life of the valve plate 6.

[0043] According to some embodiments of the present invention, the slide gate valve further includes a fixing member 10, which is disposed on the valve plate 6 on the other side opposite to the second sealing surface 601, wherein the guide member 7 is connected to the fixing member 10.

[0044] In this embodiment, the connection between the fixing member 10 and the guide member 7 can be in various ways. For example, they can be connected by welding; or, the fixing member 10 can have a through hole parallel to the valve plate 6, and the guide member 7 can pass through the through hole and be fixed and limited by screws, pins, etc.; or, the fixing member 10 can be provided with a snap-fit ​​structure, which can be used to clamp the guide member 7, and bolts can be used to make the snap-fit ​​structure clamp the guide member 7; and other fixing structures, which will not be listed here, and all of them are within the protection scope of this application.

[0045] According to some embodiments of the present invention, the slide gate valve further includes a first sealing ring, which is disposed on the second sealing surface 601 of the valve plate 6 and is configured to abut against the first sealing surface 101.

[0046] In this embodiment, by providing a sealing ring on the valve plate 6, the sealing effect of the valve plate 6 is further improved, and the valve plate 6 and the valve body 1 are in soft contact, which improves the service life and the sealing performance.

[0047] According to some embodiments of the present invention, the slide gate valve further includes a second sealing ring, which is disposed between the valve body cover 2 and the valve body 1.

[0048] In this embodiment, by providing a second sealing ring between the valve body cover 2 and the valve body 1, the sealing connection between the valve body cover 2 and the valve body 1 can be guaranteed.

[0049] According to some embodiments of the present invention, the power assembly 8 includes a fixed part 801 and a free part 802. The fixed part 801 is disposed on the valve body 1. The free part 802 is movable relative to the fixed part 801 in the vertical direction and is connected to the valve plate frame 3.

[0050] In this embodiment, as Figure 2 and Figure 6 As shown, optionally, the fixing part 801 of the power assembly 8 is provided on the outside of the valve body 1, and the free part 802 can slide and seal through the valve body cover 2 and enter the interior of the valve body cover 2. After the free part 802 enters the valve body cover 2, it is connected to the valve plate frame 3 and drives the valve plate frame 3 to move up and down.

[0051] Optionally, the power assembly 8 can be an electric cylinder, a pneumatic cylinder, a hydraulic cylinder, or other similar structures.

[0052] According to some embodiments of the present invention, the top of the valve plate frame 3 is provided with a first guide wheel 11 that can roll in a second horizontal direction and a second guide wheel 12 that can roll in a vertical direction. The second horizontal direction is perpendicular to the first sealing surface 101. The first guide wheel 11 is configured to abut against the top of the valve body 1, and the second guide wheel 12 is configured to abut against the inner sidewall of the valve body cover 2.

[0053] In this embodiment, as Figure 2 , Figure 3 , Figure 7 and Figure 8 As shown, by setting a first guide wheel 11 with a rolling direction perpendicular to the first sealing surface 101 and a second guide wheel 12 with a rolling direction vertical on the valve plate frame 3, the valve plate frame 3 can be guided when it moves in the valve body cover 2, ensuring the smooth operation of the valve plate frame 3, reducing wear between the two and improving service life.

[0054] According to some embodiments of the present invention, a third guide wheel 13 and a fourth guide wheel 14 that can roll relative to the valve plate frame 3 in a second horizontal direction are provided on the inner side of the valve body 1. The second horizontal direction is perpendicular to the first sealing surface 101. The third guide wheel 13 and the fourth guide wheel 14 are configured to abut against the valve plate frame 3.

[0055] In this embodiment, by providing a third guide wheel 13 with a rolling direction in the second horizontal direction and a fourth guide wheel 14 with a rolling direction in the vertical direction on the inner side of the valve body 1, the valve plate frame 3 can be guided when it moves inside the valve body 1, ensuring the smooth operation of the valve plate frame 3, and reducing wear between the two, thus improving service life.

[0056] According to the inventive concept of the second aspect of this utility model, a vacuum device is also provided, including a first vacuum chamber and a slide valve as described in the foregoing embodiments, wherein the slide valve is disposed on one side of the first vacuum chamber and is configured to open or close the first vacuum chamber.

[0057] Figure 9 The diagram shown is a structural schematic of a vacuum device provided in an embodiment of this application.

[0058] According to some embodiments of this utility model, such as Figure 9 As shown, the vacuum device includes a first vacuum chamber 15, a second vacuum chamber 16, and a gate valve 100. The number of second vacuum chambers 16 is one or two, and the second vacuum chambers 16 are located on one or both sides of the first vacuum chamber 15. The gate valve 100 is located between the first vacuum chamber 15 and the second vacuum chamber 16, and at the end of the second vacuum chamber 16 away from the first vacuum chamber 15.

[0059] In this embodiment, with Figure 9 Taking the example of two second vacuum chambers 16, the overall connection sequence of the equipment (from left to right) is as follows: slide gate valve 100 (left 1) - second vacuum chamber 16 (left) - slide gate valve 100 (left 2) - first vacuum chamber 15 - slide gate valve 100 (right 1) - second vacuum chamber 16 (right) - slide gate valve 100 (right 2). The flange faces on both sides of the slide gate valve 100 are sealed with the vacuum chambers. The second sealing surface 601 of the slide gate valve 100 (left 1) faces the second vacuum chamber (left), the second sealing surface 601 of the slide gate valve (right 2) faces the second vacuum chamber (right), and the second sealing surfaces 601 of both the slide gate valve (left 2) and the slide gate valve (right 1) face the first vacuum chamber 15.

[0060] During use (for example, when the first vacuum chamber 15 needs to be evacuated), first close the slide gate valve 100 (left 2) and slide gate valve 100 (right 1), and then evacuate the first vacuum chamber 15 to a vacuum state. At this time, both second vacuum chambers 16 are in atmospheric condition. As the vacuum degree in the first vacuum chamber 15 gradually increases, the pressure difference between the slide gate valve 100 (left 2) and slide gate valve 100 (right 1) gradually increases. Atmospheric pressure exerts pressure on the slide gate valve 100 (left 2) and slide gate valve 100 (right 1), pressing the valve plate tightly, thereby improving the sealing effect. Subsequently, the second vacuum chamber 16 (left) and the second vacuum chamber 16 (right) are evacuated to a vacuum state. As the vacuum level in the second vacuum chamber 16 (left) and the second vacuum chamber 16 (right) gradually increases, the pressure difference between the two sides of the valve plates of the slide gate valve 100 (left 1) and the slide gate valve 100 (right 2) gradually increases. The atmosphere exerts pressure on the valve plates of the slide gate valve 100 (left 1) and the slide gate valve 100 (right 2), pressing the valve plates together and thus improving the sealing effect.

[0061] In the embodiments of this disclosure, unless otherwise specified, the connection can be a detachable connection using bolts, nuts, screws, clips, magnets, etc. In some connections where there is no particular requirement for a detachable fit, a non-detachable connection can be achieved through welding, bonding, etc.

[0062] The basic principles of this application have been described above with reference to specific embodiments. However, it should be noted that the advantages, benefits, and effects mentioned in this application are merely examples and not limitations, and should not be considered as essential features of each embodiment of this application. Furthermore, the specific details disclosed above are for illustrative and facilitative purposes only, and are not limitations. These details do not limit the application to the necessity of employing the aforementioned specific details for implementation.

[0063] The block diagrams of devices, apparatuses, devices, and systems involved in this application are merely illustrative examples and are not intended to require or imply that they must be connected, arranged, or configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, devices, and systems can be connected, arranged, and configured in any manner. Words such as “comprising,” “including,” “having,” etc., are open-ended terms meaning “including but not limited to,” and are used interchangeably with them. The terms “or” and “and” as used herein refer to the terms “and / or,” and are used interchangeably with them unless the context clearly indicates otherwise. The term “such as” as used herein refers to the phrase “such as but not limited to,” and is used interchangeably with it.

[0064] It should also be noted that in the apparatus, equipment, and methods of this application, the components or steps can be disassembled and / or recombined. These disassemblies and / or recombinations should be considered as equivalent solutions of this application.

[0065] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use this application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein can be applied to other aspects without departing from the scope of this application. Therefore, this application is not intended to be limited to the aspects shown herein, but rather to be accorded the widest scope consistent with the principles and novel features disclosed herein.

[0066] The above description has been given for purposes of illustration and description. Furthermore, this description is not intended to limit the embodiments of this application to the forms disclosed herein. Although numerous exemplary aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and sub-combinations thereof.

Claims

1. A slide gate valve, characterized in that, include: The valve body includes a valve cavity and a channel, the channel being opened along a first horizontal direction and communicating with the valve cavity, the valve cavity having a first sealing surface on one side located in the first horizontal direction, the first horizontal direction being the thickness direction of the valve body; A valve body cover is disposed above the valve body, and the valve body cover has a receiving cavity that communicates with the valve cavity; The valve plate frame is slidably disposed vertically within the valve cavity and the receiving cavity; A valve plate guide block is disposed on the valve plate frame, and a guide groove is provided on the valve plate guide block; The valve plate is provided with a guide member, which is slidably embedded in the guide groove, so that the valve plate is slidably connected to the valve plate frame. The side of the valve plate opposite to the valve plate frame has a second sealing surface opposite to the first sealing surface. A power unit is configured to drive the valve plate frame to move vertically, thereby moving the valve plate between the receiving cavity and the valve cavity; When the valve plate reaches a preset position in the vertical direction, the valve plate guide block can drive the valve plate to move along the first horizontal direction, so that the second sealing surface is close to the first sealing surface to close the channel, or so that the second sealing surface is away from the first sealing surface to open the channel.

2. The slide gate valve according to claim 1, characterized in that, The number of valve plate guide blocks includes at least two, with at least one valve plate guide block respectively provided on each of the opposite sides of the valve plate frame along the second horizontal direction, and the second horizontal direction being perpendicular to the first horizontal direction; The guide component is a guide shaft extending along the second horizontal direction; The guide groove is a through hole that passes through the valve plate guide block, and the guide groove extends obliquely from bottom to top towards the first sealing surface.

3. The slide gate valve according to claim 1, characterized in that, The slide gate valve further includes a first pulley, which is disposed at the bottom of the valve plate and is movable along a first horizontal direction on the bottom wall of the valve cavity; or The bottom of the valve plate is provided with a slide rail that is opened along the first horizontal direction, and the bottom wall of the valve cavity is fixedly provided with a second pulley. When the valve plate moves along the first horizontal direction, the second pulley slides in cooperation with the slide rail.

4. The slide gate valve according to claim 1, characterized in that, The slide gate valve also includes: A fixing member is disposed on the other side of the valve plate opposite to the second sealing surface, wherein the guide member is connected to the fixing member.

5. The slide gate valve according to claim 1, characterized in that, The slide gate valve also includes: A first sealing ring is disposed on the second sealing surface of the valve plate, and the first sealing ring is configured to abut against the first sealing surface. The second sealing ring is disposed between the valve body cover and the valve body.

6. The slide gate valve according to claim 1, characterized in that, The power assembly includes: A fixing part is provided on the valve body; The free part is movable relative to the fixed part in the vertical direction, and the free part is connected to the valve plate frame.

7. The slide gate valve according to claim 1, characterized in that, The top of the valve plate frame is provided with a first guide wheel that can roll in a second horizontal direction and a second guide wheel that can roll in a vertical direction. The second horizontal direction is perpendicular to the first sealing surface. The first guide wheel is configured to abut against the top of the valve body, and the second guide wheel is configured to abut against the inner sidewall of the valve body cover.

8. The slide gate valve according to claim 1, characterized in that, The inner side of the valve body is provided with a third guide wheel that can roll relative to the valve plate frame in a second horizontal direction and a fourth guide wheel that can roll in a vertical direction. The second horizontal direction is perpendicular to the first sealing surface. The third guide wheel and the fourth guide wheel are configured to abut against the valve plate frame.

9. A vacuum device, characterized in that, include: First vacuum chamber, The slide gate valve as described in any one of claims 1 to 8, wherein the slide gate valve is disposed on one side of the first vacuum chamber and is configured to open or close the first vacuum chamber.

10. The vacuum device according to claim 9, characterized in that, include: First vacuum chamber; One or two second vacuum chambers are disposed on one or both sides of the first vacuum chamber; The slide valve is disposed between the first vacuum chamber and the second vacuum chamber, and at the end of the second vacuum chamber away from the first vacuum chamber.

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