A vacuum angle valve structure

Abstract

The utility model provides a kind of vacuum angle valve structure, it is related to valve body structure technical field. Including: the valve body with first connecting port and second connecting port, the bellows assembly being arranged in the valve body, and the cylinder assembly being connected on the valve body, further include pressure sensor;Wherein, the cylinder assembly has piston rod that is inserted into the valve body interior and connects valve plate to control the communication and closure of first connecting port and second connecting port;Monitoring cavity is formed in the bellows assembly, the pressure sensor is connected to the monitoring cavity to monitor the periodic pressure change in the monitoring cavity, and according to the signal fed back by pressure change to determine vacuum failure position. By the present scheme, the failure state and failure position of valve body can be accurately identified.

Description

Technical Field

[0001] This utility model relates to the field of valve body structure technology, and more specifically, to a vacuum angle valve structure. Background Technology

[0002] Vacuum valves, as key components for controlling vacuum environments, play a crucial role in precision manufacturing fields such as semiconductors. Traditional vacuum angle valves suffer from three main technical drawbacks: First, their airtightness is limited to the chamber structure formed by the bellows and valve body, with the rest directly exposed to the atmosphere. External leakage can render all ongoing process materials unusable, resulting in significant economic losses. Second, the service life of existing vacuum angle valves can only be predicted based on empirical values. This prediction method is unreliable, potentially leading to premature replacement and wasted resources, or inaccurate predictions that could cause sudden malfunctions. In particular, fatigue failure of the bellows structure during long-term reciprocating motion becomes a critical factor affecting the stability of equipment processes. Third, traditional structures lack effective monitoring methods for cylinder assembly sealing failures. When compressed air leaks between the piston rod and the cylinder housing, they are difficult to detect in a timely manner, resulting in energy waste and increased difficulty in troubleshooting. These problems severely restrict the reliability of vacuum angle valves in precision manufacturing applications. Utility Model Content

[0003] The purpose of this application is to provide a vacuum angle valve structure and its monitoring method, which has the advantages of real-time monitoring of the bellows and cylinder sealing status, accurate determination of failure location, and avoidance of process interruption and material scrap.

[0004] The present invention adopts the following solution: A vacuum angle valve structure includes a valve body, a bellows assembly disposed within the valve body, and a cylinder assembly connected to the valve body, and further includes a pressure sensor; wherein, the cylinder assembly has a piston rod extending into the valve body and connected to a valve plate to control the opening and closing of the valve body; a monitoring cavity is formed within the bellows assembly, and the pressure sensor is connected to the monitoring cavity to monitor pressure changes within the monitoring cavity.

[0005] Furthermore, the cylinder assembly is connected to the valve body via a mounting plate, and sealing rings connecting the cylinder assembly and the valve body are respectively provided on the upper and lower sides of the mounting plate.

[0006] Furthermore, the cylinder assembly is connected to the valve body via a mounting plate, and sealing rings connecting the cylinder assembly and the valve body are respectively provided on the upper and lower sides of the mounting plate.

[0007] Furthermore, a ventilation cavity is formed on the mounting plate, the ventilation cavity is connected to the monitoring cavity, and the pressure sensor is connected to the ventilation cavity to monitor the air pressure in the monitoring cavity.

[0008] Furthermore, the piston rod of the cylinder assembly is provided with vent holes at the top and bottom respectively.

[0009] Furthermore, the valve plate is disposed below the bellows assembly and together with the bellows assembly, the mounting plate, and the housing of the cylinder assembly, forms a sealed monitoring cavity.

[0010] Furthermore, the valve plate is provided with a seal to ensure the closure of the valve body in the closed state.

[0011] Beneficial effects: This application provides a vacuum angle valve structure and its monitoring method. By setting up a monitoring chamber containing a pressure sensor to detect pressure changes in real time, it accurately identifies the sealing failure state of the bellows assembly or cylinder assembly. This effectively solves the technical problems of traditional vacuum angle valves, such as the inability to detect leaks in a timely manner and the difficulty in determining the location of failure. It has the advantages of avoiding process interruptions and material waste, and improving equipment operational reliability. Through this solution: 1) It can monitor the failure of bellows and cylinder sealing structures.

[0012] 2) There is no need to replace the angle valve in advance, which greatly improves the utilization rate of the theoretical service life of the angle valve.

[0013] 3) This utility model can still ensure that the equipment can continue to complete the production task under the above-mentioned failure conditions a and b, which greatly reduces the production scrap loss caused by the fatigue failure of the angle valve bellows. Attached Figure Description

[0014] Figure 1 This is a cross-sectional schematic diagram of a vacuum angle valve structure according to an embodiment of the present invention; Figure 2 This is an overall schematic diagram of a vacuum angle valve structure according to an embodiment of the present invention; Figure label: Valve body 1, first connection port 11, second connection port 12, third connection port 13, bellows assembly 2, monitoring chamber 21, cylinder assembly 3, piston rod 31, vent hole 32, housing 33, mounting plate 4, vent chamber 41, valve plate 5, pressure sensor 6, sealing ring 7, seal 8. Detailed Implementation

[0015] Combination Figures 1 to 2As shown, this embodiment provides a vacuum angle valve structure, including a valve body 1 with a first connection port 11 and a second connection port 12, a bellows assembly 2 disposed within the valve body 1, and a cylinder assembly 3 connected to the valve body 1, and also includes a pressure sensor 6; wherein, the cylinder assembly 3 has a piston rod 31 extending into the valve body 1 and connected to a valve plate 5 to control the connection and closure of the first connection port 11 and the second connection port 12; a monitoring chamber 21 is formed within the bellows assembly, and the pressure sensor 6 is connected to the monitoring chamber 21 to monitor the periodic pressure changes within the monitoring chamber 21, and to determine the vacuum failure location based on the signal fed back from the pressure changes.

[0016] The pressure sensor 6 can be implemented using a piezoresistive or piezoelectric sensor to capture pressure fluctuations within the monitoring chamber 21 in real time. The monitoring chamber 21 refers to the sealed space inside the bellows assembly 2, which is formed by the bellows assembly 2, valve plate 5, and cylinder housing 33. Specifically, it can be implemented by forming an independent chamber through the bellows' own structure. Its function is to isolate the process medium from the external environment and provide the physical space for pressure monitoring. Periodic pressure changes refer to the regular changes in the volume of the monitoring chamber 21 caused by the movement of the piston rod 31 during the opening and closing of the angle valve. This is specifically manifested as the waveform characteristics of the pressure curve, and its function is to establish a benchmark for pressure changes under normal operating conditions.

[0017] When the angle valve opens and closes, the piston rod 31 moves the valve plate 5, causing a change in the volume of the monitoring chamber 21. The pressure sensor 6 continuously records the pressure data within the chamber. Under normal operating conditions, the pressure change exhibits a periodic waveform with a specific amplitude and frequency. When the bellows ruptures or leaks, the monitoring chamber 21 connects to the vacuum environment, causing the pressure to drop sharply to the low pressure of the vacuum environment, typically within the range of 1-10 Pa absolute pressure. At this time, the pressure sensor 6 outputs a gauge pressure signal of -101.3 kPa. If the cylinder seal fails, compressed air (typically 0.2-0.4 MPa positive pressure) enters the monitoring chamber 21, exceeding the initial maximum pressure threshold of the monitoring chamber 21. When atypical pressure characteristics occur, the system identifies a combined fault and triggers shutdown protection.

[0018] This embodiment achieves accurate identification of failure modes by establishing a correspondence between pressure characteristics and fault types. In existing technologies, cylinder leakage cannot be effectively detected, while this design extends the monitoring chamber 21 to the cylinder sealing area, allowing simultaneous monitoring of the piston rod 31's sealing status. Compared to experience-based maintenance methods, this solution significantly improves maintenance efficiency through data-driven decision-making.

[0019] Through the above technical solution, this application can identify three failure modes in real time: bellows rupture, cylinder leakage, and combined failures, and issue tiered alarms in a timely manner while maintaining process continuity. When a single failure is detected and valve body 1 does not leak, the current production cycle can be completed to avoid sudden material scrap. For combined failures that may cause valve body 1 to leak, the machine must be shut down immediately. At the same time, by accurately distinguishing the failure type, the downtime for equipment maintenance is significantly shortened, and unnecessary losses are reduced.

[0020] In this embodiment, the vacuum angle valve structure is adapted to determine the vacuum failure location based on the signal fed back from pressure changes, and to perform the following actions: a. When pressure sensor 6 detects that the pressure inside monitoring chamber 21 is lower than the low pressure of the vacuum environment, the pressure sensor 6 displays a feedback signal indicating an abnormality in the angle valve. This indicates that bellows assembly 2 has failed or is leaking. In this case, there is no external leakage in valve body 1, allowing the equipment in the process to continue production and complete the current production task. b. When pressure sensor 6 detects positive pressure that is greater than the initial maximum pressure, it is determined that the positive pressure compressed air in cylinder assembly 3 is leaking into monitoring chamber 21 due to the failure of the cylinder assembly 3's seal. In this case, bellows assembly 2 has not failed, valve body 1 has no external leakage, and the equipment in the process to continue production and complete the current production task. c. When pressure sensor 6 detects that the pressure in monitoring chamber 21 does not match the pressure change caused by the change in the angle valve's movement state under normal conditions, and is different from the pressure states in a and b above, it is determined that the seals of both bellows assembly 2 and cylinder assembly 3 have failed. In this case, there is an external leakage in the equipment, and the production task is immediately stopped.

[0021] Vacuum failure location refers to the specific area in the bellows assembly 2 or cylinder assembly 3 where gas leakage occurs. For example, a sudden pressure drop or abnormal pressure rise corresponds to different leakage sources. Here, "bottom pressure" refers to the lowest absolute pressure range during vacuum operation, such as 1~10 Pa, which can be maintained by a vacuum pump. Positive pressure compressed air leakage refers to the compressed air inside cylinder assembly 3 used to drive the piston rod 31 entering the monitoring chamber 21 due to seal failure. For example, the pressure range of positive pressure compressed air can be 0.2~0.4 MPa, exceeding the upper limit of pressure fluctuation in monitoring chamber 21 during normal angle valve operation. Pressure change mismatch refers to a significant deviation between the pressure curve of monitoring chamber 21 and the standard pressure curve of the angle valve opening and closing action. This can be achieved by comparing real-time data with a preset model using a logic controller, such as abnormal pressure rise rate or missing pressure peaks.

[0022] Pressure sensor 6 continuously collects pressure data within monitoring chamber 21 and distinguishes three failure modes through preset logic. When the detected pressure is lower than the bottom pressure, it indicates that the bellows seal has ruptured, causing leakage and connecting the environment inside valve body 1 with monitoring chamber 21. In this case, only an anomaly needs to be marked, but the equipment can continue the current process. Maintenance can be performed after the process is completed to avoid material waste. When the detected positive pressure exceeds the initial maximum pressure, it indicates that the cylinder seal has failed, allowing compressed air to enter monitoring chamber 21. Production can be maintained in this case, and maintenance can be performed after the process is completed to avoid material waste. When the pressure change does not conform to the characteristics of vacuum leakage or positive pressure leakage, and also does not conform to the pressure curve change under normal operating conditions, it is judged as a composite failure, and there may be leakage in valve body 1. In this case, normal production cannot be carried out, and the machine must be stopped immediately to prevent external leakage. Through pressure change pattern recognition, the leak location can be accurately located without interrupting production, while avoiding unnecessary shutdowns due to misjudgment. This solves the problem that traditional vacuum angle valves cannot distinguish between bellows failure and cylinder seal failure in real time.

[0023] Continue to combine Figure 1 As shown, in this embodiment, the cylinder assembly 3 is connected to the third connection port 13 of the valve body 1 via a mounting plate 4. Sealing rings 7 connecting the cylinder assembly 3 and the valve body 1 are respectively provided on the upper and lower sides of the mounting plate 4. The third connection port 13 refers to the interface on the valve body 1 used to install the cylinder assembly 3, which can be designed as a flange structure or a threaded interface to achieve an airtight connection. The sealing ring 7 is an annular elastic element provided on the contact surface between the mounting plate 4 and the valve body 1 and the cylinder assembly 3, and can be made of fluororubber or silicone to block gas leakage paths. This effectively solves the problem of gas leakage easily occurring at the connection between the cylinder assembly 3 and the valve body 1, prevents energy waste caused by compressed air leakage, and avoids abnormal pressure in the vacuum environment due to leakage.

[0024] In this embodiment, a venting cavity 41 is formed on the mounting plate 4, which is connected to the monitoring cavity 21. A pressure sensor 6 is connected to the venting cavity 41 to monitor the air pressure in the monitoring cavity 21. Here, the venting cavity 41 refers to the gas flow space located inside the mounting plate. Specifically, it can be implemented by machining a through channel or groove structure inside the mounting plate. Its function is to transmit the gas pressure change between the monitoring cavity 21 and the pressure sensor 6. The mounting plate 4 is connected to the valve body 1 and the cylinder assembly 3 through a sealing ring 7. The venting cavity 41 is machined inside the mounting plate. One end of the venting cavity 41 is connected to the monitoring cavity 21 formed by the bellows assembly 2 through a pipe or channel, and the other end is connected to the pressure sensor 6. When pressure fluctuation occurs inside the monitoring cavity 21 due to the failure of the bellows or cylinder seal, the gas is transmitted to the pressure sensor 6 through the venting cavity 41. The pressure sensor 6 converts the pressure change into an electrical signal and outputs it to an external control system or displays it through a pressure gauge. Because the pressure sensor 6 is not directly installed inside the monitoring chamber 21, but indirectly connected through the vent chamber 41, it can be installed outside the valve body 1, facilitating installation and connection. The integrated vent chamber 41 structure on the mounting plate 4 allows the pressure sensor 6 to be positioned outside the valve body 1 in an easily maintainable location, while reducing the probability of contact between the sensor and high-temperature or corrosive media, thus improving detection reliability.

[0025] Vent holes 32 are provided at the top and bottom of the piston rod 31 of the cylinder assembly 3. Vent holes 32 are channel structures provided at the top and bottom of the movement path of the piston rod 31. Positive pressure compressed air is input through vent holes 32 to drive the piston rod 31 to move up and down, thereby controlling the opening and closing of the first connection port 11 and the second connection port 12.

[0026] In this embodiment, the valve plate 5 is located below the bellows assembly 2, and together with the bellows assembly 2, the mounting plate 4, and the housing 33 of the cylinder assembly 3, forms a sealed monitoring chamber 21. The valve plate 5 is a plate-like structure used to block or open fluid channels, and its lifting and lowering motion is achieved by the piston rod 31. The valve plate 5 is arranged in the bottom region of the bellows assembly 2. When the piston rod 31 drives the valve plate 5 to perform opening and closing actions, the bellows assembly 2 extends and retracts synchronously with the valve plate 5. The mounting plate 4 and the cylinder housing 33 are fixedly connected by a sealing ring 7, and together with the bellows assembly 2, they form the boundary of the monitoring chamber 21. When the angle valve is working normally, the monitoring chamber 21 is in a sealed state, and its internal pressure changes are only caused by the bellows' expansion and contraction deformation or sealing failure. When the bellows ruptures, a vacuum environment will enter the monitoring chamber 21 through the crack; when the cylinder seal fails, compressed air will leak into the monitoring chamber 21. The pressure sensor 6 continuously collects pressure data within the monitoring chamber 21, and the specific failure mode can be determined by analyzing the pressure fluctuation characteristics.

[0027] This embodiment constructs a sealed cavity specifically for failure detection through the coordinated operation of valve plate 5 and multiple components. This structural innovation allows pressure sensor 6 to directly sense the dual sealing state of the bellows and cylinder, overcoming the shortcomings of traditional structures that cannot distinguish the failure source. The physical isolation design of monitoring cavity 21 also avoids cross-contamination between process media and the detection system. Furthermore, a sealing element 8 is provided on the side of valve plate 5 facing the second connection port 12 to ensure the disconnection between the first connection port 11 and the second connection port 12 in the closed state. The sealing element 8 refers to an elastic sealing structure installed on the contact surface between valve plate 5 and the second connection port 12. Specifically, it can be implemented using an annular sealing ring 7 made of rubber, silicone, or polytetrafluoroethylene material. Its function is to fill the gap of the contact surface through pressure deformation when valve plate 5 is closed, blocking the passage of media and forming a seal.

[0028] Through the above embodiment, the pressure sensor 6 monitors the pressure change in the monitoring chamber 21, thereby logically determining whether the angle valve is abnormal and inferring the abnormal point to assist the equipment in issuing an alarm signal, which can effectively avoid material waste.

[0029] It should be understood that the above are only preferred embodiments of the present utility model, and the protection scope of the present utility model is not limited to the above embodiments. All technical solutions that fall within the scope of the present utility model are protected by the present utility model.

[0030] The accompanying drawings used in the above description of the embodiments only show some embodiments of the present invention and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained from these drawings without creative effort.

Claims

1. A vacuum angle valve structure, comprising a valve body, a bellows assembly disposed within the valve body, and a cylinder assembly connected to the valve body, characterized in that, It also includes a pressure sensor; wherein the cylinder assembly has a piston rod that extends into the valve body and is connected to a valve plate to control the opening and closing of the valve body; a monitoring chamber is formed within the bellows assembly, and the pressure sensor is connected to the monitoring chamber to monitor pressure changes within the monitoring chamber.

2. The vacuum angle valve structure according to claim 1, characterized in that, The cylinder assembly is connected to the valve body via a mounting plate, and sealing rings connecting the cylinder assembly and the valve body are respectively provided on the upper and lower sides of the mounting plate.

3. The vacuum angle valve structure according to claim 2, characterized in that, A ventilation cavity is formed on the mounting plate, which is connected to the monitoring cavity. The pressure sensor is connected to the ventilation cavity to monitor the air pressure in the monitoring cavity.

4. The vacuum angle valve structure according to claim 1, characterized in that, The piston rod of the cylinder assembly is provided with vent holes at the top and bottom.

5. The vacuum angle valve structure according to claim 3, characterized in that, The valve plate is located below the bellows assembly and together with the bellows assembly, the mounting plate, and the housing of the cylinder assembly, forms a sealed monitoring cavity.

6. The vacuum angle valve structure according to claim 1, characterized in that, The valve plate is provided with a seal to ensure the closure of the valve body when it is closed.

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