Platform device

Abstract

The application relates to the technical field of measurement, and discloses a platform device which comprises a base, a first moving assembly and a second moving assembly. The base is provided with a first track and a second track. The first moving assembly comprises a first driving element, a first main guide rail, a first auxiliary guide rail and a fixed plate. The first main guide rail is arranged on the fixed plate and is in sliding connection with the first track. The first auxiliary guide rail is arranged on the fixed plate and is in sliding connection with the second track. The first driving element is arranged on the base and is used for driving the fixed plate to move. The second moving assembly comprises a second driving element, a second main guide rail, a second auxiliary guide rail and a bearing plate. The fixed plate is provided with a third track and a fourth track. The second main guide rail is arranged on the bearing plate and is in sliding connection with the third track. The second auxiliary guide rail is arranged on the bearing plate and is in sliding connection with the fourth track. The second driving element is arranged on the fixed plate and is used for driving the bearing plate to move. The platform device can realize rapid movement and accurate positioning.

Description

Technical Field

[0001] This application relates to the field of measurement technology, and more particularly to a platform device. Background Technology

[0002] In the field of precision measurement, the platform device is a core component of the measuring equipment. To achieve the required positioning accuracy, these devices mostly use AC servo motors, DC servo motors, or stepper motors, combined with a precision-ground ball screw transmission scheme to drive the platform device's movement.

[0003] However, traditional platform devices have obvious drawbacks. Their base and platform body are usually made of materials such as marble or cast iron, which makes the whole device heavy and not lightweight enough. Moreover, due to this huge weight, the platform device has problems such as large motion inertia and limited acceleration during movement, which makes it impossible to achieve rapid movement and precise positioning. Utility Model Content

[0004] In view of this, this application provides a platform device capable of achieving rapid mobile positioning and precise positioning.

[0005] One embodiment of this application provides a platform device. The platform device includes: a base, a first moving component, and a second moving component. The base is provided with a first track and a second track spaced apart along a first direction. The first moving component includes a first driving member, a first main guide rail, a first secondary guide rail, and a fixed plate. The first main guide rail is mounted on the fixed plate and slidably connected to the first track. The first secondary guide rail is mounted on the fixed plate and slidably connected to the second track. The first driving member is mounted on the base and located on the side close to the first main guide rail. The first driving member is used to drive the fixed plate to move along a second direction, which is perpendicular to the first direction. The second moving component includes a second driving member, a second main guide rail, a second secondary guide rail, and a support plate. Along the second direction, a third track and a fourth track are provided on the side of the fixed plate opposite to the base. The second main guide rail is mounted on the support plate and slidably connected to the third track. The second secondary guide rail is mounted on the support plate and slidably connected to the fourth track. The second driving member is mounted on the fixed plate and located on the side close to the second main guide rail. The second driving member is used to drive the support plate to move along the first direction.

[0006] This application provides a platform device. By setting a first moving component and a second moving component on a base, and mounting the first main guide rail and the first secondary guide rail on the fixed plate, and mounting the second main guide rail and the second secondary guide rail on the bearing plate, on the one hand, the rigidity of the fixed plate and the bearing plate is enhanced, effectively suppressing the bending deformation that may occur in the platform device under the action of gravity, and ensuring the stability of the platform device during movement. On the other hand, the thickness of the fixed plate and the bearing plate is reduced, resulting in a lighter weight and enabling the platform device to move quickly and be precisely positioned.

[0007] In some embodiments of this application, the first moving component further includes: a first sliding block and a second sliding block, wherein the first track and the first main guide rail are connected through the first sliding block, and the second track and the first secondary guide rail are connected through the second sliding block, and both the first sliding block and the second sliding block are used to drive the fixed plate to move.

[0008] In some embodiments of this application, the first driving member includes: a first stator, a first moving part, and a first adjusting member. The first stator is mounted on the fixed plate, and the first moving part is connected to the base through the first adjusting member. The first adjusting member is used to adjust the gap between the first stator and the first moving part.

[0009] In some embodiments of this application, the second moving component further includes a third sliding block and a fourth sliding block, wherein the third track and the second main guide rail are connected through the third sliding block, and the fourth track and the second auxiliary guide rail are connected through the fourth sliding block, and both the third sliding block and the fourth sliding block are used to drive the support plate to move.

[0010] In some embodiments of this application, the second driving member includes: a second stator, a second moving part, and a second adjusting member. The second stator is mounted on the support plate, and the second moving part is connected to the fixed plate through the second adjusting member. The second adjusting member is used to adjust the gap between the second stator and the second moving part.

[0011] In some embodiments of this application, the platform device further includes: a support platform, wherein the support plate has a stepped groove on the side opposite to the fixed plate, the stepped groove being used to accommodate the support platform.

[0012] In some embodiments of this application, the platform device further includes: a support platform and a plurality of leveling components. The support platform has a stepped groove on the side away from the fixed plate. The stepped groove is surrounded by recesses corresponding to the plurality of leveling components. The plurality of leveling components are respectively installed in the corresponding recesses. The support platform is installed in the stepped groove and abuts against the plurality of leveling components. The leveling components are used to support the support platform.

[0013] In some embodiments of this application, the platform device further includes: a pre-tightening member, wherein the outer side of the bearing plate is provided with a through hole, the pre-tightening member passes through the through hole and extends to the stepped groove, and the pre-tightening member is used to compress the bearing platform.

[0014] In some embodiments of this application, the platform device further includes: a first position sensor, the first position sensor including a first position sensor and a first position trigger plate, the first position sensor being mounted on the side of the fixed plate near the base, the first position trigger plate being mounted on the base, and the first position sensor being used to sense the position of the fixed plate; and / or, a second position sensor, the second position sensor including a second position sensor and a second position trigger plate, the second position sensor being mounted on the side of the fixed plate away from the base, the second position trigger plate being mounted on the support plate, and the second position sensor being used to sense the position of the support plate.

[0015] In some embodiments of this application, the position sensing element includes: a first displacement detection element, installed on the side of the base near the first driving element, for detecting the distance the fixed plate moves, and / or a second displacement detection element, installed on the side of the fixed plate near the second driving element, for detecting the distance the bearing plate moves. Attached Figure Description

[0016] Figure 1 This is a perspective view of a platform device in one embodiment of this application.

[0017] Figure 2 This is a partial exploded view of the platform device in one embodiment of this application.

[0018] Figure 3 This is a partially exploded view of another location of the platform device in one embodiment of this application.

[0019] Explanation of main component symbols 100 - Platform device; 10 - Base; 11 - First track; 12 - Second track; 20 - First moving component; 21 - First driving component; 210 - First stator; 2100 - First connecting component; 211 - First moving component; 212 - First adjusting component; 22 - First main guide rail; 23 - First secondary guide rail; 24 - Fixed plate; 25 - First sliding block; 26 - Second sliding block; 30 - Second moving component; 31 - Second driving component; 310 - Second stator; 3100 - Second connecting component; 311 - Second moving component; 312 - Second adjusting component; 32- Second main guide rail; 33- Second auxiliary guide rail; 34- Bearing plate; 340- Stepped groove; 3400- Recess; 341- Through hole; 35- Third sliding block; 36- Fourth sliding block; 40- Bearing platform; 50- Leveling component; 60- Pre-tightening component; 70- First position sensing component; 71- First position sensor; 72- First position trigger plate; 80- Second position sensing component; 81- Second position sensor; 82- Second position trigger plate; 90- First displacement detection component; 130- Second displacement detection component.

[0020] The following detailed description, in conjunction with the accompanying drawings, will further illustrate this application. Detailed Implementation

[0021] The technical solutions of the embodiments of this application will be described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments.

[0022] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application.

[0023] In the field of precision measurement, platform devices are a core component of measuring equipment. For example, in image measurement and microscopic measurement, the types of items being measured are numerous and the number of items being inspected is large. This requires measuring instruments to be able to place batches of items on a platform device to achieve rapid, accurate, and stable movement and positioning, and to complete the measurement of items efficiently, thereby achieving rapid and efficient production and inspection.

[0024] Traditional measuring equipment mostly uses AC servo motors, DC servo motors or stepper motors, combined with precision ground ball screws to drive the platform device.

[0025] However, traditional platform devices have obvious drawbacks. Their base and platform body are usually made of materials such as marble or cast iron, which makes the whole device heavy and not lightweight. Moreover, due to this huge weight, the platform device has problems such as large motion inertia and limited acceleration during movement, which makes it impossible to achieve rapid movement and precise positioning.

[0026] Therefore, to solve the aforementioned technical problems, embodiments of this application provide a platform device. By setting a first moving component and a second moving component on the base, and mounting the first main guide rail and the first secondary guide rail on the fixed plate, and by mounting the second main guide rail and the second secondary guide rail on the bearing plate, on the one hand, the rigidity of the fixed plate and the bearing plate is enhanced, effectively suppressing the bending deformation that may occur in the platform device under gravity, and ensuring the stability of the platform device during movement; on the other hand, the thickness of the fixed plate and the bearing plate is reduced, resulting in lighter weight and enabling rapid movement and precise positioning of the platform device.

[0027] The following detailed description of some embodiments of this application is provided in conjunction with the accompanying drawings. Unless otherwise specified, the following embodiments and features can be combined with each other.

[0028] Please also refer to Figures 1 to 3 One embodiment of this application provides a platform device 100. For example... Figure 1As shown, X represents the first direction, and Y represents the second direction. The platform device 100 includes a base 10, a first moving component 20, and a second moving component 30. The base 10 is provided with a first track 11 and a second track 12 spaced apart along the first direction. The first moving component 20 includes a first driving member 21, a first main guide rail 22, a first secondary guide rail 23, and a fixing plate 24. The first main guide rail 22 is mounted on the fixing plate 24 and is slidably connected to the first track 11. The first secondary guide rail 23 is mounted on the fixing plate 24 and is slidably connected to the second track 12. The first driving member 21 is mounted on the base 10 and located on the side closer to the first main guide rail 22. The first driving member 21 is used to drive the fixing plate 24 to move along the second direction, which is perpendicular to the first direction. The second moving component 30 includes a second driving member 31, a second main guide rail 32, a second secondary guide rail 33, and a support plate 34. Along the second direction, the side of the fixing plate 24 opposite to the base 10 is provided with a third track and a fourth track. The second main guide rail 32 is mounted on the support plate 34 and is slidably connected to the third rail. The second auxiliary guide rail 33 is mounted on the support plate 34 and is slidably connected to the fourth rail. The second driving member 31 is mounted on the fixed plate 24 and is located on the side closer to the second main guide rail 32. The second driving member 31 is used to drive the support plate 34 to move along the first direction.

[0029] In some embodiments of this application, by setting a first moving component 20 and a second moving component 30 on the base 10, and mounting the first main guide rail 22 and the first secondary guide rail 23 on the fixed plate 24, and by mounting the second main guide rail 32 and the second secondary guide rail 33 on the support plate 34, on the one hand, the rigidity of the fixed plate 24 and the support plate 34 is enhanced, effectively suppressing the bending deformation that the platform device 100 may undergo under the action of gravity, and ensuring the stability of the platform device 100 during movement; on the other hand, the thickness of the fixed plate 24 and the support plate 34 is reduced, resulting in a lighter weight and enabling the platform device 100 to move quickly and be precisely positioned.

[0030] Understandably, by mounting the first main guide rail 22 and the first secondary guide rail 23 on the fixed plate 24, the first main guide rail 22 and the first secondary guide rail 23 provide additional bending moment resistance to the fixed plate 24, thus reducing the thickness of the fixed plate 24. Similarly, by mounting the second main guide rail 32 and the second secondary guide rail 33 on the support plate 34, the second main guide rail 32 and the second secondary guide rail 33 provide additional bending moment resistance to the support plate 34, thus reducing the thickness of the support plate 34. By reducing the thickness of the fixed plate 24 and the support plate 34, the overall design of the platform device 100 can be made more compact and the weight reduced.

[0031] Further integration Figure 2 and Figure 3 As shown, the first moving component 20 further includes: a first sliding block 25 and a second sliding block 26. The first track 11 and the first main guide rail 22 are connected through the first sliding block 25, and the second track 12 and the first auxiliary guide rail 23 are connected through the second sliding block 26. Both the first sliding block 25 and the second sliding block 26 are used to drive the fixed plate 24 to move.

[0032] In some embodiments of this application, by setting a first sliding block 25 and a second sliding block 26, it can be ensured that the first moving component 20 can drive the second moving component 30 to move smoothly.

[0033] In some embodiments of this application, by setting the first sliding block 25 and the second sliding block 26 on the fixed plate 24, that is, by connecting the sliding blocks of the first main guide rail 22 and the first secondary guide rail 23 through the fixed plate 24, the linear guidance can be better improved, the anti-overturning torque of the fixed plate 24 is increased, and the stability and smoothness of the movement of the fixed plate 24 are ensured.

[0034] Understandably, the preload of the first main guide rail 22 and the first auxiliary guide rail 23 are different. By setting different preloads for the first main guide rail 22 and the first auxiliary guide rail 23, the problem of deflection during the movement of the fixed plate 24 is avoided due to the same preload, which helps to improve the stability of the movement of the fixed plate 24.

[0035] For example, the guide rail and the sliding block are of the same model. By setting the width of the first main guide rail 22 to be greater than the width of the first secondary guide rail 23, the first main guide rail 22 can apply a greater preload force than the first secondary guide rail 23. In some other embodiments, if the width of the first main guide rail 22 is the same as the width of the first secondary guide rail 23, the gap between the first main guide rail 22 and the first sliding block 25 is set to be smaller than the gap between the first secondary guide rail 23 and the second sliding block 26, so that the first main guide rail 22 can apply a greater preload force than the first secondary guide rail 23.

[0036] In some embodiments of this application, by mounting the first drive member 21 on the side of the base 10 close to the first main guide rail 22, the deflection torque can be reduced, ensuring the stability of the fixed plate 24 during movement.

[0037] In some embodiments of this application, the first driving member 21 includes a first stator 210, a first mover 211, and a first adjusting member 212. The first stator 210 is mounted on the fixed plate 24. The first mover 211 is connected to the base 10 via the first adjusting member 212. The first adjusting member 212 is used to adjust the gap between the first stator 210 and the first mover 211.

[0038] In some embodiments of this application, the platform device 100 further includes a first connector 2100. The first stator 210 is detachably connected to the fixing plate 24 via the first connector 2100, which facilitates the replacement and maintenance of the first drive component 21.

[0039] In some embodiments of this application, the first drive component 21 can be a first U-shaped coreless linear direct drive motor, the first mover 211 can be a first U-shaped linear motor mover, and the first stator 210 can be a first U-shaped linear motor stator. By mounting the first U-shaped linear motor mover on the base 10 through the first adjusting member 212 and mounting the first U-shaped linear motor stator on the fixed plate 24 through the first connecting member 2100, the first adjusting member 212 can ensure that the first U-shaped linear motor mover and the first U-shaped linear motor stator maintain a gap during relative movement, without contact friction, thereby improving the service life of the first drive component 21. Furthermore, the absence of friction can greatly reduce mechanical vibration caused by contact friction, making it more suitable for high-speed and high-precision drive requirements. This ensures the smoothness of the movement of the fixed plate 24, thereby improving the accuracy of the acquired images and the measurement efficiency.

[0040] Further integration Figure 3 As shown, the second moving component 30 further includes a third sliding block 35 and a fourth sliding block 36. The third track and the second main guide rail 32 are connected through the third sliding block 35, and the fourth track and the second auxiliary guide rail 33 are connected through the fourth sliding block 36. Both the third sliding block 35 and the fourth sliding block 36 are used to drive the support plate 34 to move.

[0041] In some embodiments of this application, by providing a third sliding block 35 and a fourth sliding block 36, it can be ensured that the second moving component 30 can drive the support plate 34 to move smoothly.

[0042] In some embodiments of this application, the second driving member 31 includes: a second stator 310, a second mover 311, and a second adjusting member 312. The second stator 310 is mounted on the support plate 34, and the second mover 311 is connected to the fixed plate 24 through the second adjusting member 312. The second adjusting member 312 is used to adjust the gap between the second stator 310 and the second mover 311.

[0043] In some embodiments of this application, the platform device 100 further includes a second connector 3100. The second stator 310 is detachably connected to the support plate 34 via the second connector 3100, which facilitates the replacement and maintenance of the second drive component 31.

[0044] In some embodiments of this application, the second drive component 31 can be a second U-shaped coreless linear direct drive motor, the second mover 311 can be a second U-shaped linear motor mover, and the second stator 310 can be a second U-shaped linear motor stator. By mounting the second U-shaped linear motor mover on the fixed plate 24 through the second adjusting member 312 and mounting the second U-shaped linear motor stator on the bearing plate 34 through the second connecting member 3100, the second adjusting member 312 can ensure that the second U-shaped linear motor mover and the second U-shaped linear motor stator maintain a gap during relative movement, without contact friction, thereby improving the service life of the second drive component 31. Furthermore, the absence of friction can greatly reduce mechanical vibration caused by contact friction, making it more suitable for high-speed and high-precision drive requirements. This ensures the smooth movement of the fixed plate 24, thereby improving the accuracy of the acquired images and the measurement efficiency.

[0045] In some embodiments of this application, by mounting both the first U-shaped linear motor stator and the second U-shaped linear motor mover on the fixed plate 24, and then mounting the first U-shaped linear motor stator on the fixed plate 24 through the first connector 2100, and mounting the second U-shaped linear motor stator on the support plate 34 through the second connector 3100, the entire layout structure is compact, reducing the area occupied by the platform device 100.

[0046] In some embodiments of this application, the platform device 100 further includes a support platform 40. The support plate 34 has a stepped groove 340 on the side opposite to the fixed plate 24. The stepped groove 340 is used to accommodate the support platform 40.

[0047] In some embodiments of this application, the stepped groove 340 helps to better limit the position of the support platform 40, ensuring the stability of the position of the support platform 40.

[0048] In some embodiments of this application, the platform device 100 further includes: a support platform 40 and a plurality of leveling components 50. The support plate 34 has a stepped groove 340 on the side away from the fixed plate 24. The stepped groove 340 is provided with recesses 3400 corresponding to the plurality of leveling components 50 around its perimeter. The plurality of leveling components 50 are respectively installed in the corresponding recesses 3400. The support platform 40 is installed in the stepped groove 340 and abuts against the plurality of leveling components 50. The leveling components 50 are used to support the support platform 40.

[0049] In some embodiments of this application, the bearing platform 40 is supported by the leveling component 50. If the bearing platform 40 is not parallel to the bearing plate 34, adjusting the leveling component 50 can ensure that the bearing surface of the bearing platform 40 is parallel to the moving plane, which helps to ensure the stability of the position of the workpiece to be measured, thereby improving the accuracy of the acquired image and the measurement efficiency.

[0050] In some embodiments of this application, the motion plane is used to represent a surface in which a first direction and a second direction are parallel.

[0051] In some embodiments of this application, the platform device 100 further includes a pre-tightening member 60, wherein the outer side of the bearing plate 34 is provided with a through hole 341, the pre-tightening member 60 passes through the through hole 341 and extends to the stepped groove 340, and the pre-tightening member 60 is used to press the bearing platform 40.

[0052] In some embodiments of this application, when the support platform 40 is installed on the stepped groove 340 of the support plate 34, there may be a gap between the support platform 40 and the stepped groove 340, which may cause the support platform 40 to be unstable. In this embodiment, the support platform 40 is squeezed by the pre-tightening member 60 to ensure the stability of the position of the support platform 40.

[0053] In some embodiments of this application, the platform device 100 further includes: a first position sensor 70, which includes a first position sensor 71 and a first position trigger plate 72. The first position sensor 71 is mounted on the side of the fixed plate 24 near the base 10, and the first position trigger plate 72 is mounted on the base 10. The first position sensor 70 is used to sense the position of the fixed plate 24; and / or, a second position sensor 80, which includes a second position sensor 81 and a second position trigger plate 82. The second position sensor 81 is mounted on the side of the fixed plate 24 away from the base 10, and the second position trigger plate 82 is mounted on the support plate 34. The second position sensor 80 is used to sense the position of the support plate 34.

[0054] In some embodiments of this application, the first position sensor 70 is used to sense whether the fixed plate 24 has moved to the limit position, and the second position sensor 80 is used to sense whether the support plate 34 has moved to the limit position. The movement of the first moving component 20 and the second moving component 30 can be better controlled by the first position sensor 70 and the second position sensor.

[0055] In some embodiments of this application, the platform device 100 further includes: a first displacement detection element 90, installed on the side of the base 10 near the first driving element 21, for detecting the distance the fixed plate 24 moves, and / or a second displacement detection element 130, installed on the side of the fixed plate 24 near the second driving element 31, for detecting the distance the bearing plate 34 moves.

[0056] In some embodiments of this application, by mounting the first displacement detection element 90 on the side of the base 10 close to the first driving element 21, it is beneficial to detect the distance moved by the fixed plate 24 in a timely manner. For example, if the first displacement detection element 90 is a first grating ruler, the side of the first grating ruler close to the first driving element 21 greatly reduces the difference between the driving, guiding, and feedback (obtaining position values ​​from the measuring mechanism), improves the positioning accuracy of the measured motion, and thus ensures the accuracy of the movement of the platform device 100.

[0057] In some embodiments of this application, by mounting the fixed plate 24 on the side near the second driving member 31, it is beneficial to detect the distance the bearing plate 34 has moved in a timely manner. For example, if the second displacement detection member 130 is a second grating ruler, the side of the second grating ruler near the second driving member 31 greatly reduces the difference between the driving, guiding, and feedback (obtaining position values ​​from the measuring mechanism), improves the positioning accuracy of the measured motion, and thus ensures the accuracy of the movement of the platform device 100.

[0058] The above embodiments are only used to illustrate the technical solutions of this application and are not intended to limit it. Although this application has been described with reference to the embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solutions of this application without departing from the spirit and substance of the technical solutions of this application.

Claims

1. A platform device, characterized in that, The platform device includes: A base, wherein a first track and a second track are spaced apart along a first direction; The first moving component includes a first driving member, a first main guide rail, a first secondary guide rail, and a fixed plate. The first main guide rail is mounted on the fixed plate and slidably connected to the first track. The first secondary guide rail is mounted on the fixed plate and slidably connected to the second track. The first driving member is mounted on the base and located on the side close to the first main guide rail. The first driving member is used to drive the fixed plate to move along a second direction, which is perpendicular to the first direction. The second moving component includes a second driving member, a second main guide rail, a second secondary guide rail, and a support plate. Along the second direction, the fixed plate has a third rail and a fourth rail on the side opposite to the base. The second main guide rail is mounted on the support plate and slidably connected to the third rail. The second secondary guide rail is mounted on the support plate and slidably connected to the fourth rail. The second driving member is mounted on the fixed plate and located on the side close to the second main guide rail. The second driving member is used to drive the support plate to move along the first direction.

2. The platform device according to claim 1, characterized in that, The first moving component also includes: The first sliding block and the second sliding block are connected by the first sliding block to the first track and the first main guide rail, and the second track and the first auxiliary guide rail are connected by the second sliding block. Both the first sliding block and the second sliding block are used to drive the fixed plate to move.

3. The platform device according to claim 2, characterized in that, The first driving element includes: The system comprises a first stator, a first mover, and a first adjusting member. The first stator is mounted on the fixed plate, and the first mover is connected to the base via the first adjusting member. The first adjusting member is used to adjust the gap between the first stator and the first mover.

4. The platform apparatus according to any one of claims 1 to 3, characterized in that, The second moving component also includes: The third and fourth sliding blocks are used to drive the support plate to move. The third track and the second main guide rail are connected by the third sliding block, and the fourth track and the second auxiliary guide rail are connected by the fourth sliding block.

5. The platform device according to claim 4, characterized in that, The second driving element includes: The system comprises a second stator, a second mover, and a second adjusting member. The second stator is mounted on the support plate, and the second mover is connected to the fixed plate via the second adjusting member. The second adjusting member is used to adjust the gap between the second stator and the second mover.

6. The platform device according to claim 1, characterized in that, The platform device further includes: The support platform has a stepped groove on the side of the support plate opposite to the fixed plate, and the stepped groove is used to accommodate the support platform.

7. The platform device according to claim 1, characterized in that, The platform device further includes: The support platform and several leveling components are provided. The support plate has a stepped groove on the side away from the fixed plate. The stepped groove is surrounded by recesses corresponding to the several leveling components. The several leveling components are respectively installed in the corresponding recesses. The support platform is installed in the stepped groove and abuts against the several leveling components. The leveling components are used to support the support platform.

8. The platform device according to claim 6 or 7, characterized in that, The platform device further includes: The pre-tightening member has a through hole on the outer side of the bearing plate, passes through the through hole and extends to the stepped groove, and is used to compress the bearing platform.

9. The platform device according to claim 1, characterized in that, The platform device further includes: A first position sensor, comprising a first position sensor and a first position trigger plate, wherein the first position sensor is mounted on the side of the fixed plate near the base, and the first position trigger plate is mounted on the base, and the first position sensor is used to sense the position of the fixed plate; and / or a second position sensor, comprising a second position sensor and a second position trigger plate, wherein the second position sensor is mounted on the side of the fixed plate away from the base, and the second position trigger plate is mounted on the support plate, and the second position sensor is used to sense the position of the support plate.

10. The platform device according to claim 1, characterized in that, The platform device further includes: A first displacement detection element is installed on the side of the base near the first driving element to detect the distance the fixed plate moves, and / or a second displacement detection element is installed on the side of the fixed plate near the second driving element to detect the distance the bearing plate moves.

Images