Floating device for measuring equipment

Abstract

The utility model discloses a kind of floating device for measuring equipment, the floating device includes base;First direction moving assembly, be set on base, including with base through the sliding connection of first slide rail group, first floating plate is equipped with first floating assembly between first floating plate and base;Second direction moving assembly, be set on first direction moving assembly, including with the sliding connection of second slide rail group through second floating plate, second floating plate is equipped with second floating assembly between second floating plate and first floating plate, wherein, the sliding direction of first slide rail group and second slide rail group is perpendicular to each other;Third direction moving assembly, be set on the second floating plate, the third direction moving assembly further include the third floating assembly that can float along third direction, the slider for placing workpiece or jig to be measured of the third floating assembly and the slider.The utility model structure is compact, float sensitive, meet the precision micro-motion adjustment demand of X, Y, Z three directions simultaneously.

Description

Technical Field

[0001] This utility model relates to the field of precision measurement and positioning technology, and in particular to a floating device for measuring equipment. Background Technology

[0002] In fields such as precision measurement, semiconductor testing, optical alignment, and micro-component assembly, precise positioning and micro-adjustment of workpieces or probes in three-dimensional space are often required. To meet this need, existing technologies often employ a combination of multiple linear modules or precision slides to achieve XYZ three-axis motion. However, these solutions generally suffer from the following drawbacks: the series superposition of multiple independent motion units results in a large overall size and increased height of the device, making it difficult to integrate into small equipment or compact fixtures with strict installation space requirements. To achieve complete motion control in all three degrees of freedom, a separate drive and precision guiding system is often required for each direction, leading to complex structures and high manufacturing and maintenance costs. When using ordinary sliding guides or partially ball-bearing guides, significant static friction or "creeping" occurs within small displacement ranges, resulting in insufficiently sensitive and smooth floating of the device, making high-precision adaptive micro-adjustment difficult. Most precision positioning devices lack automatic center reset capability; when external forces cause positional shifts, additional sensors or manual operation are required to restore the initial state, making them unsuitable for automated applications requiring frequent and rapid resets. Therefore, there is a need for a three-dimensional precision floating device that is structurally sophisticated, has low floating resistance, can automatically reset, and is cost-controllable. Utility Model Content

[0003] To overcome the above-mentioned shortcomings, the purpose of this utility model is to overcome the deficiencies of the prior art and provide a floating device for measuring equipment that is compact in structure, sensitive to floating, and has good automatic reset capability, so as to simultaneously meet the precision micro-adjustment requirements in the X, Y, and Z directions.

[0004] This utility model discloses a floating device for measuring equipment, the floating device comprising: Base; A first directional moving component is disposed on the base, including a first floating plate that is slidably connected to the base via a first slide rail group, and a first floating component is provided between the first floating plate and the base; The second directional moving component is disposed on the first directional moving component, including a second floating plate that is slidably connected to the first floating plate through a second slide rail group. The second floating component is provided between the second floating plate and the first floating plate, wherein the sliding directions of the first slide rail group and the second slide rail group are perpendicular to each other. The third-direction moving component, disposed on the second floating plate, includes a fixed plate, a slide rail mounting plate, a vertically arranged slide rail, and a slider that slides with the slide rail. The third-direction moving component also includes a third floating component that can float along the third direction. The third floating component and the slider are used to place the workpiece or fixture to be tested.

[0005] In one or more embodiments of the present invention, the first floating component includes a first limiting block fixedly disposed on the side of the base along a first direction. The upper part of the first limiting block is provided with a through hole along the first direction. A first limiting rod is fixedly disposed in the through hole. Both ends of the first limiting rod are provided with first stops. The first stops are installed on the side of the first floating plate.

[0006] In one or more embodiments of the present invention, the second floating component includes a second limiting block fixedly disposed on the side of the second floating plate along the second direction. The upper part of the second limiting block is provided with a through hole along the second direction. A second limiting rod is fixedly disposed in the through hole. Both ends of the second limiting rod are provided with second stops. The second stops are installed on the side of the first floating plate.

[0007] In one or more embodiments of the present invention, the third floating component includes a connecting block, a sliding rod, an adjusting block, a buffer, an adjusting bolt, and a fixing block, wherein the sliding rod is fixedly disposed on the second floating plate along a third direction, and the adjusting block is slidably disposed on the sliding rod; The fixing block is fixed to the slide rail mounting plate, and the adjusting bolt is arranged along the third direction, with one end connected to the fixing block and the other end connected to the connecting block; The connecting block is slidably mounted on the slide rod and is located below the adjusting block; The buffer is fitted onto the slide bar and is located between the adjusting block and the connecting block.

[0008] In one or more embodiments of this utility model, the slide rod, adjusting block, buffer and adjusting bolt are provided in two sets, respectively installed on both sides of the slide rail mounting plate.

[0009] In one or more embodiments of this utility model, the first slide rail group and the second slide rail group are each provided with at least two sets, and the first slide rail group and the second slide rail group are cross roller slide rails of model E-CRV3075.

[0010] In one or more embodiments of this utility model, springs are provided at both ends of the first limiting rod, and the springs can abut against the first blocks on both sides.

[0011] In one or more embodiments of this utility model, springs are provided on both sides of the second limiting rod, and the springs can abut against the second blocks on both sides.

[0012] In one or more embodiments of the present invention, the first direction moving component slides along a first direction, the second direction moving component slides along a second direction perpendicular to the first direction, and the third direction moving component slides along a third direction perpendicular to the first and second directions.

[0013] The beneficial effects of this utility model are as follows: This utility model integrates an XYZ three-way floating mechanism through a stacked design, which greatly saves installation space and is especially suitable for small equipment; the XY direction adopts a cross roller slide rail with an extremely low coefficient of friction, which responds quickly, moves smoothly, and has no crawling phenomenon, making it suitable for high-precision micro-adjustment; the cross roller slide rail provides high rigidity, and the third direction Z is guided by the slide rail and a symmetrical buffer mechanism to ensure the stability and straightness of the floating process.

[0014] In this invention, each of the three movement directions is equipped with an independent spring reset mechanism. After the external force is removed, the device can automatically return to the initial central position, making operation simple. The initial height of the third direction Z can be finely adjusted via an adjusting bolt, and additional elastic floating and buffering are provided by the third floating component, making it more adaptable. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the structure of the floating device in one embodiment of the present invention; Figure 2 This is a front view of the floating device in one embodiment of the present invention; Figure 3 This is a side view of the floating device in one embodiment of the present invention; Figure 4 This is a rear view of the floating device in one embodiment of the present invention; Figure 5 This is a schematic diagram of the structure of the limiting block and the limiting rod in one embodiment of the present invention; Figure 6 This is a schematic diagram of the cross roller slide rail in one embodiment of the present invention.

[0016] In the figure: base 100, first direction moving component 200, first floating plate 201, first slide rail group 202, first limiting block 203, first limiting rod 204, first stop block 205, guide hole 2051, second direction moving component 300, second floating plate 301, second slide rail group 302, second limiting block 303, second limiting rod 304, second stop block 305, third direction moving component 400, fixing plate 401, slide rail mounting plate 402, slide rail 403, slider 404, connecting block 405, slide rod 406, adjusting block 407, buffer 408, adjusting bolt 409, fixing block 410, first direction X, second direction Y, third direction Z. Detailed Implementation

[0017] To enable those skilled in the art to better understand the technical solutions of this utility model, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort should fall within the protection scope of this utility model.

[0018] In the description of this utility model, it should be understood that the terms "vertical", "horizontal", "top", "bottom", "upper", "lower", "front", "rear", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0019] It should be noted that, unless otherwise defined, all technical and scientific terms used in this invention have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used in this specification is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention.

[0020] like Figures 1-4 As shown, the floating device for measuring equipment described in this utility model has a compact structure of three stacked layers. The floating device includes a base 100, a first direction moving component 200, a second direction moving component 300, and a third direction moving component 400.

[0021] The base 100 may have mounting holes at its bottom for fixing to the worktable or frame of the measuring equipment.

[0022] In a further embodiment, the first-direction moving component 200 constitutes a first-direction X-floating platform, and the first floating plate 201 is connected to the base 100 via two sets of parallel-installed first slide rails 202, allowing it to slide along the first direction X. Figure 6 As shown, the first slide rail assembly 202 is preferably a cross roller slide rail to achieve extremely low rolling friction. A limiting and resetting mechanism, serving as the first floating component, is symmetrically arranged between the first floating plate 201 and the base 100. Figure 5 As shown, the mechanism includes a first limiting block 203 fixed to the side of the base 100 along the first direction X. The first limiting block 203 has a through hole along the first direction X, through which a first limiting rod 204 is inserted. The two ends of the first limiting rod 204 abut against the first stop block 205 disposed on the side of the first floating plate 201. The first stop block 205 is installed on the side of the first floating plate 201 by fasteners such as nuts. A compression spring is sleeved on the first limiting rod 204, and the two ends of the spring abut against the first stop block 205 on both sides. The first stop block 205 has a guide hole 2051 at the position corresponding to the first limiting rod 204. This structure not only limits the maximum stroke of the first floating plate 201 in the first direction X, but also provides a restoring force for it to automatically return to the center position through the spring.

[0023] In a further embodiment, the second-direction moving component 300 constitutes a second-direction Y-shaped floating platform, stacked on top of the first-direction X-shaped platform. The second floating plate 301 is connected to the first floating plate 201 via two sets of parallel-installed second slide rails 302, and can slide along the second direction Y, which is perpendicular to the X direction. The second slide rails 302 are preferably cross roller slide rails. A second floating component is symmetrically arranged between the second floating plate 301 and the first floating plate 201. The second floating component includes a second limiting block 303 fixed along the second direction Y to the side of the first floating plate 201. A second limiting rod 304 passes through the through hole of the second limiting block 303 along the second direction Y. Second stops 305 are provided at both ends of the second limiting rod 304, and the second stops 305 are fixed to the side of the second floating plate 301. A return spring is also sleeved on the second limiting rod 304.

[0024] In a further embodiment, the third-direction moving component 400 constitutes a third-direction Z-floating and adjusting mechanism. A fixed plate 401 is fixed to the upper surface of the second floating plate 301. A slide rail mounting plate 402 is disposed opposite to the fixed plate 401, with a vertical linear slide rail 403 mounted on one side. A slider 404 slides in cooperation with the slide rail 403. A third floating component is mounted on the other side of the slide rail mounting plate 402. The third floating component mainly includes: two slide rods 406 vertically fixed to the second floating plate 301; an adjusting block 407 and a connecting block 405 slidably fitted onto each slide rod 406, with the adjusting block 407 located above and the connecting block 405 below; a buffer 408 (such as a spring) fitted onto the slide rod 406 and located between the adjusting block 407 and the connecting block 405; and an adjusting bolt 409 and a fixing block 410. The fixing block 410 is fixed to the slide rail mounting plate 402. One end of the adjusting bolt 409 is connected to the fixing block 410 (e.g., via threaded connection), and the other end is connected to the connecting block 405. By rotating the adjusting bolt 409, the connecting block 405 can be driven to move up and down along the slide rod 406, thereby pre-tightening or adjusting the buffer 408 to set the initial floating state or reset force in the third direction Z. The slider 404 and / or the adjusting block 407 are provided with connecting parts for mounting the workpiece or fixture to be tested.

[0025] By rotating the adjusting bolt 409, the initial height of the connecting blocks 405, slide rod 406, adjusting block 407, and buffer 408 on both sides can be precisely adjusted, that is, the preset "zero point" position of the Z-axis. The slider 404 and / or adjusting block 407 can be provided with a connecting part for mounting the workpiece or fixture to be tested. When the slider 404 moves in the Z-axis, it will drive the upper adjusting block 405 to move through the slide rod 406, thereby compressing or releasing the buffer 408 and providing a stable restoring force.

[0026] Working process: When the workpiece mounted on the slider 404 and / or adjusting block 407 is subjected to an external force, if subjected to a force in the X direction, the entire second-direction moving assembly 300 and the third-direction moving assembly 400 will act as a single unit, sliding relative to the base 100 via the first slide rail group 202, compressing the spring in the first floating assembly. If subjected to a force in the Y direction, the third-direction moving assembly 400, together with the second floating plate 301, will slide relative to the first floating plate 201 via the second slide rail group 302, compressing the spring in the second floating assembly. If subjected to a force in the Z direction, the slider 404 will move along the slide rail 403, simultaneously driving the adjusting block 407 to move, thereby compressing or releasing the buffer 408 in the third floating assembly.

[0027] Once the external force is removed, the restoring force provided by the springs and buffers in all directions will cause the components of the device to automatically return to their initial equilibrium positions.

[0028] The above embodiments are only for illustrating the technical concept and features of this utility model. Their purpose is to enable those skilled in the art to understand the content of this utility model and implement it. They cannot be used to limit the protection scope of this utility model. All equivalent changes or modifications made in accordance with the spirit and essence of this utility model should be covered within the protection scope of this utility model.

Claims

1. A floating device for measuring equipment, characterized in that, include: Base (100); A first directional moving component (200) is disposed on the base (100) and includes a first floating plate (201) slidably connected to the base (100) via a first slide rail group (202). The first floating component is provided between the first floating plate (201) and the base (100). The second directional moving component (300) is disposed on the first directional moving component (200), including a second floating plate (301) slidably connected to the first floating plate (201) via a second slide rail group (302), and a second floating component is provided between the second floating plate (301) and the first floating plate (201), wherein the sliding directions of the first slide rail group (202) and the second slide rail group (302) are perpendicular to each other; The third-direction moving component (400) is disposed on the second floating plate (301) and includes a fixed plate (401), a slide rail mounting plate (402), a vertically arranged slide rail (403), and a slider (404) that slides with the slide rail (403). The third-direction moving component (400) also includes a third floating component that can float along the third direction. The third floating component and the slider (404) are used to place the workpiece or fixture to be tested.

2. The floating device for measuring equipment according to claim 1, characterized in that, The first floating component includes a first limiting block (203) fixedly disposed on the side of the base (100) along a first direction. The upper part of the first limiting block (203) is provided with a through hole along the first direction. A first limiting rod (204) is fixedly disposed in the through hole. Both ends of the first limiting rod (204) are provided with first stops (205). The first stops (205) are installed on the side of the first floating plate (201).

3. The floating device for measuring equipment according to claim 1, characterized in that, The second floating component includes a second limiting block (303) fixedly disposed on the side of the second floating plate (301) along the second direction. The upper part of the second limiting block (303) is provided with a through hole along the second direction. A second limiting rod (304) is fixedly disposed in the through hole. Both ends of the second limiting rod (304) are provided with second stops (305). The second stops (305) are installed on the side of the first floating plate (201).

4. The floating device for measuring equipment according to claim 1, characterized in that, The third floating component includes a connecting block (405), a sliding rod (406), an adjusting block (407), a buffer (408), an adjusting bolt (409), and a fixing block (410). The sliding rod (406) is fixedly mounted on the second floating plate (301) along a third direction, and the adjusting block (407) is slidably mounted on the sliding rod (406). The fixing block (410) is fixed on the slide rail mounting plate (402), and the adjusting bolt (409) is arranged along the third direction, with one end connected to the fixing block (410) and the other end connected to the connecting block (405); The connecting block (405) is slidably disposed on the slide rod (406) and located below the adjusting block (407); The buffer (408) is sleeved on the slide rod (406) and located between the adjusting block (407) and the connecting block (405).

5. The floating device for measuring equipment according to claim 4, characterized in that, The slide bar (406), adjusting block (407), buffer (408) and adjusting bolt (409) are each provided in two sets, and are respectively installed on both sides of the slide rail mounting plate (402).

6. The floating device for measuring equipment according to claim 4, characterized in that, The first slide rail group (202) and the second slide rail group (302) are each provided with at least two sets. The first slide rail group (202) and the second slide rail group (302) are cross roller slide rails with model number E-CRV3075.

7. The floating device for measuring equipment according to claim 2, characterized in that, The first limiting rod (204) is provided with springs at both ends, and the springs can abut against the first stops (205) on both sides.

8. The floating device for measuring equipment according to claim 3, characterized in that, The second limiting rod (304) is provided with springs on both sides, and the springs can abut against the second stops (305) on both sides.

9. The floating device for a measuring apparatus according to any one of claims 1 to 8, characterized in that, The first directional moving component (200) slides along the first direction (X), the second directional moving component (300) slides along the second direction (Y) perpendicular to the first direction (X), and the third directional moving component (400) slides along the third direction (Z) perpendicular to the first direction (X) and the second direction (Y).

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