Air path structure and processing equipment

Abstract

The utility model provides a kind of gas path structure and processing equipment, it is related to photovoltaic cell piece processing technical field, gas path structure includes air inlet pipeline, the air inlet pipeline includes flow regulating pipeline and pressure regulating pipeline, the flow regulating pipeline is equipped with flow regulating valve and flow meter;The pressure regulating pipeline is connected with the flow regulating pipeline, and the pressure regulating pipeline is equipped with pressure regulating valve and pressure gauge.The utility model discloses gas path structure, by setting flow regulating pipeline and pressure regulating pipeline, and setting flow regulating valve on flow regulating pipeline, setting pressure regulating valve on pressure regulating pipeline, when the flow of process gas in gas path structure is adjusted by adjusting the opening of flow regulating valve, and the pressure of process gas is adjusted by adjusting the opening of pressure regulating valve, until the flow and precision of process gas meet the processing needs of photovoltaic cell piece, the precision of process gas into equipment is high.

Description

Technical Field

[0001] This utility model relates to the field of photovoltaic cell processing technology, and in particular to a gas path structure and processing equipment. Background Technology

[0002] Photovoltaic cell processing equipment includes a gas path structure for conveying process gases. Traditional gas path structures are equipped with flow control valves, and the flow rate of the process gases is adjusted by controlling the opening degree of the flow control valves to meet the usage requirements of photovoltaic cell processing.

[0003] However, the pressure of the process gas also changes when the flow rate is adjusted. For example, when the opening of the flow control valve increases, the flow rate in the gas path increases, but the pressure decreases. It is difficult to simultaneously meet the flow rate and pressure requirements of photovoltaic cell processing, and the precision of the process gas supplied to the equipment is limited.

[0004] In view of this, a new technical solution is needed to solve the above-mentioned technical problems. Utility Model Content

[0005] The purpose of this invention is to provide a gas path structure and processing equipment, which allows for high precision in the flow of process gas into the equipment.

[0006] To achieve the above objectives, the present invention employs the following technical means: This utility model provides a gas path structure, including: The intake pipeline includes a flow regulating pipeline and a pressure regulating pipeline. The flow regulating pipeline is equipped with a flow regulating valve and a flow meter. The pressure regulating pipeline is connected to the flow regulating pipeline and is equipped with a pressure regulating valve and a pressure gauge.

[0007] Optionally, the intake pipeline also includes a first manual valve; in the flow direction of the process gas, the pressure regulating pipeline is located upstream of the flow regulating pipeline, and the first manual valve is located upstream of the pressure regulating pipeline.

[0008] Optionally, it may include multiple intake pipes, which are connected in parallel.

[0009] Optionally, the intake line also includes an intermediate line, which is located between the flow regulating line and the pressure regulating line, and the intermediate line is equipped with a second manual valve and / or a filter.

[0010] Optionally, it also includes a pressure sensing line equipped with a diaphragm gauge; or The pressure testing pipeline is equipped with a diaphragm gauge and an electronic pressure gauge.

[0011] Optionally, it also includes a vacuum line, one end of which is connected to a pressure detection line and the other end is connected to a vacuum pump, and a main vacuum valve is provided on the vacuum line.

[0012] Optionally, the vacuuming pipeline includes a main vacuuming line and a branch vacuuming line, which are connected in parallel. A main vacuuming valve is installed on the main vacuuming line, and a pre-vacuuming valve is installed on the branch vacuuming line.

[0013] Optionally, the vacuum pipeline includes a main vacuum line, which is equipped with a butterfly valve.

[0014] Optionally, the flow regulating pipeline and the pressure regulating pipeline can be connected in series or in parallel.

[0015] A second aspect of this utility model is to provide a processing device, which includes the air passage structure of any of the above embodiments.

[0016] Compared with the prior art, this utility model brings the following technical effects: The gas path structure of this utility model includes a flow regulating pipeline and a pressure regulating pipeline. A flow regulating valve is installed on the flow regulating pipeline, and a pressure regulating valve is installed on the pressure regulating pipeline. The flow rate of the process gas in the gas path structure is regulated by adjusting the opening of the flow regulating valve, and the pressure of the process gas is regulated by adjusting the opening of the pressure regulating valve, until the flow rate and accuracy of the process gas meet the processing requirements of photovoltaic cells. The process gas introduced into the equipment has high precision. Attached Figure Description

[0017] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 The diagram shows a schematic representation of the gas path structure of some embodiments of the present invention. Figure 2 The diagram shows a schematic representation of the gas path structure of some embodiments of the present invention. Figure 3 The diagram shows a schematic representation of the gas path structure of some embodiments of the present invention. Figure 4 A schematic diagram of the gas path structure of some embodiments of the present invention is shown.

[0019] Explanation of key component symbols: 100 - Gas path structure; 10 - Inlet pipe; 11 - Pressure regulating pipe; 111 - Pressure regulating valve; 112 - Pressure gauge; 12 - Flow regulating pipe; 121 - Flow regulating valve; 122 - Flow meter; 13 - First manual valve; 14 - Intermediate pipe; 141 - Filter; 142 - Second manual valve; 20 - Pressure testing line; 21 - Diaphragm gauge; 22 - Electronic pressure gauge 30 - Vacuum pumping line; 31 - Main evacuation valve; 32 - Vacuum pump; 33 - Pre-evacuation valve; 34 - Butterfly valve; 200 - Process Chamber. Detailed Implementation

[0020] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0021] Furthermore, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other. The embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout.

[0022] Please see Figures 1-4 This utility model provides an air passage structure 100, including an air inlet pipe 10, a pressure detection pipe 20, and a vacuum pipe 30.

[0023] The inlet pipe 10 is used to introduce process gas at its input end and is connected to the process chamber 200 at its output end. The pressure detection pipe 20 is connected to the process chamber 200 at its input end and to the diaphragm gauge 21 at its output end, or it can be connected to both the diaphragm gauge 21 and the electronic pressure gauge 22.

[0024] Please see Figure 1 The intake pipe 10 includes a flow regulating pipe 12 and a pressure regulating pipe 11. The flow regulating pipe 12 is connected to the pressure regulating pipe 11. The flow regulating pipe 12 is equipped with a flow regulating valve 121 and a flow meter 122. The pressure regulating pipe 11 is equipped with a pressure regulating valve 111 and a pressure meter 112.

[0025] The gas path structure 100 of this utility model is configured with a flow regulating pipe 12 and a pressure regulating pipe 11. A flow regulating valve is installed on the flow regulating pipe 12, and a pressure regulating valve 111 is installed on the pressure regulating pipe 11. The flow rate of the process gas in the gas path structure 100 is adjusted by adjusting the opening of the flow regulating valve 121, and the pressure of the process gas is adjusted by adjusting the opening of the pressure regulating valve 111, until the flow rate and accuracy of the process gas meet the processing requirements of photovoltaic cells. The process gas introduced into the equipment has high precision.

[0026] The flow regulating valve 121 is used to regulate the flow rate of the process gas in the intake pipeline 10. The flow meter 122 is used to visually display the flow rate in the intake pipeline 10 in real time. The pressure regulating valve 111 is used to regulate the pressure in the intake pipe of the intake pipeline 10, and the pressure gauge 112 is used to display the pressure in the intake pipe in real time.

[0027] The flow rate of the process gas in the intake pipe 10 is adjusted by controlling the opening of the flow regulating valve 121. Specifically, when the opening of the flow regulating valve 121 is increased, the flow rate of the process gas in the intake pipe increases. When the opening of the flow regulating valve 121 is decreased, the flow rate of the process gas in the intake pipe decreases.

[0028] The pressure of the process gas in the intake pipe 10 is adjusted by controlling the opening degree of the pressure regulating valve 111. Specifically, when the opening degree of the pressure regulating valve 111 is increased, the pressure of the process gas in the intake pipe decreases. When the opening degree of the pressure regulating valve 111 is decreased, the pressure of the process gas in the intake pipe increases.

[0029] For example, when the process gas flow rate is low, the user needs to increase the opening of the flow regulating valve 121 and decrease the opening of the pressure regulating valve 111. This ensures that when the process gas flow rate increases, the process gas pressure remains unchanged, and both the process gas flow rate and pressure meet the usage requirements.

[0030] In one specific embodiment, the intake pipe 10 and the pressure regulating pipe 11 are connected in series or in parallel.

[0031] The intake pipe 10 and the pressure regulating pipe 11 are connected in series so that they are on the same pipeline. In this way, the intake pipe 10 has a simple and compact structure, and has an interlocking function, which enhances its safety.

[0032] The intake pipe 10 and the pressure regulating pipe 11 are connected in parallel so that the intake pipe 10 and the pressure regulating pipe 11 can be controlled independently, and the flow regulation and pressure regulation of the intake pipe 10 are relatively stable.

[0033] In one specific embodiment, the intake pipe 10 is further provided with a first manual valve 13. In the process gas flow direction, the pressure regulating pipe 11 is located upstream of the flow regulating pipe 12, and the first manual valve 13 is located upstream of the pressure regulating pipe 11. Thus, the first manual valve 13 is used to control the opening and closing of the intake pipe. When the first manual valve 13 is open, the process gas sequentially enters the process chamber 200 through the flow regulating pipe and the pressure regulating pipe 11. When the first manual valve 13 is closed, the process gas cannot enter the intake pipe 10.

[0034] Furthermore, the flow regulating valve 121 includes a pneumatic valve, which opens or closes based on gas, exhibiting high sensitivity and suitable for scenarios involving gas flow regulation. The pneumatic valve's position prevents process gases reacting within the furnace from returning to the inlet pipe 10, thus preventing corrosion and damage to the pipe. The pressure regulating valve 111 regulates the pressure of the process gas by altering the resistance of the process gas within the valve body.

[0035] Please see Figure 4 In one specific embodiment, the air passage structure 100 includes multiple air intake pipes 10, which are arranged in parallel with each other.

[0036] Each intake pipe is equipped with a pressure regulating pipe 11 and a flow regulating pipe 12. The pressure regulating pipe 11 is equipped with a pressure regulating valve 111 and a pressure gauge 112, while the flow regulating pipe 12 is equipped with a flow regulating valve 121 and a flow meter 122. In this way, each intake pipe 10 can be supplied with different process gases. These different process gases undergo pressure and flow regulation before being introduced into the process chamber 200. This avoids the problem of different process gases reacting with each other and causing contamination before entering the process chamber 200, further improving the accuracy of the process gas supplied into the process chamber 200.

[0037] Please see Figure 2 In one specific embodiment, the intake pipe 10 further includes an intermediate pipe 14, which is located between the flow regulating pipe 12 and the pressure regulating pipe 11, and is provided with a second manual valve 142 and a filter 141.

[0038] The second manual valve 142 functions similarly to the first manual valve 13. By controlling the opening and closing of the second manual valve 142, the opening and closing of the intake pipe 10 can be controlled. Unlike the first manual valve 13, the second manual valve 142 can isolate the connection and disconnection of the preceding and following pipes, facilitating maintenance of the pipes before and after the second manual valve 142. For example, during troubleshooting for leaks in the intake pipe 10, the second manual valve 142 can quickly pinpoint whether the leak is in the flow regulating pipe 12 or the pressure regulating pipe 11.

[0039] Filter 141 can filter process gases to improve their purity and prevent contamination.

[0040] Of course, only a filter 141 may be installed on the intermediate pipeline 14, or only a second manual valve 142 may be installed on the intermediate pipeline 14. The first manual valve 13 and the second manual valve 142 may also be replaced by solenoid valves, and are not limited to the specific embodiments.

[0041] Please see Figure 2 In one specific embodiment, the pressure sensing line 20 includes a diaphragm gauge 21, or, see [link to relevant documentation]. Figure 3 The pressure-side piping includes a diaphragm gauge 21 and an electronic pressure gauge 22.

[0042] Understandably, when the pressure sensing line 20 is a thin film gauge 21, it can be used in diffusion equipment (such as phosphorus diffusion); when the pressure sensing line 20 is a thin film gauge 21 and an electronic pressure gauge 22, it can be used in equipment such as PECVD and LPCVD, making the application range of the pressure sensing line 20 wider.

[0043] Thin-film gauge 21 is a high-precision sensor that uses physical deformation (thin-film deflection) to measure absolute pressure. Electronic pressure gauge 22 is a vacuum gauge that converts pressure signals into electrical signals for measurement and display.

[0044] The pressure detection line 20 is used to detect the pressure output from the process chamber 200. By setting the diaphragm gauge 21, or by using the diaphragm gauge 21 and the electronic pressure gauge 22 together, the pressure of the process gas can be obtained more accurately.

[0045] Please refer to it again. Figure 1 In one specific embodiment, one end of the vacuuming pipeline 30 is connected to the pressure detection pipeline 20, and the other end is connected to the vacuum pump 32. The vacuuming pipeline 30 is equipped with a main pumping valve 31.

[0046] Vacuum pump 32 provides the power source for vacuuming, and main pump valve 31 can be opened or closed to control the opening or closing of vacuum line 30. Vacuum line 30 via main pump valve 31 and vacuum pump 32 can be used in diffusion equipment (such as phosphorus diffusion).

[0047] Please see Figure 2 Based on the above embodiments, the vacuum pipeline 30 includes a main vacuum pipeline and a branch vacuum pipeline. The main vacuum pipeline and the branch vacuum pipeline are connected in parallel. A main vacuum valve 31 is provided on the main vacuum pipeline, and a pre-vacuum valve 33 is provided on the branch vacuum pipeline.

[0048] The connection and function of the main extraction valve 31 are the same as in the above embodiment, and will not be repeated here. The pre-extraction valve 33 can control the opening or closing of the bypass to provide initial working pressure for the vacuum line 30.

[0049] Please see Figure 2 and Figure 3 In one specific embodiment, the vacuum pipeline 30 includes a main vacuum pipeline, on which a butterfly valve 34 is provided.

[0050] Based on the main extraction valve 31, the addition of a butterfly valve 34 can be applied to equipment such as PECVD and LPCVD, thereby expanding the applicable scenarios of the vacuum pipeline 30.

[0051] Please refer to 1~ Figure 4 In a second aspect, this utility model provides a processing device, including the air passage structure of any of the above embodiments.

[0052] This is a utility model of processing equipment. By adopting the gas path structure of any of the above embodiments, by setting up a flow regulating pipe 12 and a pressure regulating pipe 11, and setting a flow regulating valve on the flow regulating pipe 12 and a pressure regulating valve 111 on the pressure regulating pipe 11, the flow rate of the process gas in the gas path structure 100 is adjusted by adjusting the opening of the flow regulating valve 121, and the pressure of the process gas is adjusted by adjusting the opening of the pressure regulating valve 111, until the flow rate and accuracy of the process gas meet the processing requirements of photovoltaic cells. The accuracy of the process gas introduced into the equipment is high, and the stability of the processing equipment is strong.

[0053] Obviously, the above embodiments are merely illustrative examples for clear explanation and are not intended to limit the implementation. Those skilled in the art will recognize that other variations or modifications can be made based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. However, obvious variations or modifications derived therefrom still fall within the protection scope of this invention.

Claims

1. A gas path structure, characterized in that, include: The intake pipeline includes a flow regulating pipeline and a pressure regulating pipeline. The flow regulating pipeline is equipped with a flow regulating valve and a flow meter. The pressure regulating pipeline is connected to the flow regulating pipeline and is equipped with a pressure regulating valve and a pressure gauge.

2. The gas path structure according to claim 1, characterized in that, The intake pipeline also includes a first manual valve; in the flow direction of the process gas, the pressure regulating pipeline is located upstream of the flow regulating pipeline, and the first manual valve is located upstream of the pressure regulating pipeline.

3. The gas path structure according to claim 1, characterized in that, It includes multiple intake pipes, which are connected in parallel.

4. The gas path structure according to claim 1, characterized in that, The intake pipeline also includes an intermediate pipeline, which is located between the flow regulating pipeline and the pressure regulating pipeline, and the intermediate pipeline is equipped with a second manual valve and / or a filter.

5. The gas path structure according to claim 1, characterized in that, It also includes a pressure detection line, on which a diaphragm gauge is provided; or The pressure detection pipeline is equipped with a diaphragm gauge and an electronic pressure gauge.

6. The gas path structure according to claim 5, characterized in that, It also includes a vacuum pumping line, one end of which is connected to the pressure detection line and the other end is connected to a vacuum pump. The vacuum pumping line is equipped with a main pumping valve.

7. The gas path structure according to claim 6, characterized in that, The vacuuming pipeline includes a main vacuuming line and a branch vacuuming line. The main vacuuming line and the branch vacuuming line are connected in parallel. A main vacuuming valve is provided on the main vacuuming line, and a pre-vacuuming valve is provided on the branch vacuuming line.

8. The gas path structure according to claim 6, characterized in that, The vacuum pipeline includes a main vacuum line, and a butterfly valve is installed on the main vacuum line.

9. The gas path structure according to claim 1, characterized in that, The flow regulating pipeline is connected in series or in parallel with the pressure regulating pipeline.

10. A processing device, characterized in that, Includes the gas path structure described in any one of claims 1 to 9.

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