A silicon-carbon rod vacuum sintering device

Abstract

The utility model discloses a silicon carbon rod vacuum sintering device relates to silicon carbon rod production technical field, including vacuum atmosphere furnace and waste gas port, the rear side of vacuum atmosphere furnace is provided with and waste gas port fixed communication's waste heat recovery mechanism, the waste heat recovery mechanism includes check valve, connecting pipe, support plate and filter casing, one end of check valve and waste gas port fixed communication, and the other end and connecting pipe fixed communication, the bottom plate of connecting pipe and support plate fixed communication, the bottom of support plate passes through bolt and filter casing fixed connection, the top of filter casing inner chamber is provided with filter assembly. The utility model discloses through setting waste heat recovery mechanism, solved the current vacuum atmosphere furnace when using, mostly lack the function of the recovery of waste gas waste heat, the silicon carbon rod sintering, the waste gas of producing carries a large amount of waste heat, if not effectively recovered, the direct discharge of high temperature waste gas has led to the problem of energy waste.

Description

Technical Field

[0001] This utility model relates to the field of silicon carbide rod production technology, specifically a silicon carbide rod vacuum sintering device. Background Technology

[0002] Silicon carbide rods, as a high-temperature heating element, are widely used in high-temperature heating scenarios in metallurgy, ceramics, glass and other fields. In their production process, vacuum sintering is a key process that determines the product performance (such as resistivity, mechanical strength and high-temperature stability). Currently, vacuum sintering of silicon carbide rods is mostly completed by vacuum atmosphere furnaces. This equipment achieves the sintering and solidification of silicon carbide rod blanks by constructing a closed vacuum environment and precisely controlling the heating curve.

[0003] The problem with existing technologies is that most existing vacuum atmosphere furnaces lack the function of recovering waste heat from exhaust gases. When silicon carbide rods are sintered, the exhaust gases generated carry a large amount of waste heat. If this heat is not effectively recovered, the direct emission of high-temperature exhaust gases leads to energy waste. Utility Model Content

[0004] To address the problems mentioned in the background art, the purpose of this utility model is to provide a vacuum sintering device for silicon carbide rods, which has the advantage of recovering waste heat from exhaust gas. This solves the problem that most existing vacuum atmosphere furnaces lack the function of recovering waste heat from exhaust gas during use. During the sintering of silicon carbide rods, the exhaust gas generated carries a large amount of waste heat. If it is not effectively recovered, the direct emission of high-temperature exhaust gas will lead to energy waste.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a vacuum sintering device for silicon carbide rods, comprising a vacuum atmosphere furnace and a waste gas outlet, wherein a waste heat recovery mechanism fixedly connected to the waste gas outlet is provided on the rear side of the vacuum atmosphere furnace. The waste heat recovery mechanism includes a one-way valve, a connecting pipe, a support plate, and a filter housing. One end of the one-way valve is fixedly connected to the exhaust gas port, and the other end is fixedly connected to the connecting pipe. The bottom plate of the connecting pipe is fixedly connected to the support plate, and the bottom of the support plate is fixedly connected to the filter housing by bolts. A filter assembly is provided at the top of the inner cavity of the filter housing, a guide assembly is provided at the bottom of the inner cavity of the filter assembly, and a waste heat recovery assembly is provided at the bottom of the filter housing.

[0006] As a preferred embodiment of this utility model, the filter assembly includes a filter screen cylinder. The top of the filter screen cylinder is fixedly connected to a support plate by bolts. A drive shaft is provided in the inner cavity of the filter screen cylinder. The bottom of the drive shaft passes through the filter screen cylinder and extends to the outside of the filter screen cylinder. It is rotatably connected to the through-hole of the filter screen cylinder by a bearing. Scrapers are fixedly connected to both sides of the surface of the drive shaft. The side of the scraper near the filter screen cylinder contacts the inner wall of the filter screen cylinder.

[0007] In a preferred embodiment of this invention, the guiding assembly includes a worm gear, a connecting shaft, and an exhaust fan. The top of the worm gear is fixedly connected to the transmission shaft, and the top and bottom of the connecting shaft are fixedly connected to the worm gear and the exhaust fan, respectively.

[0008] In a preferred embodiment of this invention, a worm is engaged on the left side of the worm gear, and a rotating shaft is fixedly connected to the rear side of the worm. The rear side of the rotating shaft penetrates the filter housing and extends to the outside of the filter housing.

[0009] As a preferred embodiment of this invention, a motor is fixedly connected to the rear side of the curved surface of the filter housing, and the output end of the motor is fixedly connected to the rotating shaft.

[0010] In a preferred embodiment of this utility model, the waste heat recovery assembly includes a fixed plate, a heat exchanger, and a water tank. The rear side of the fixed plate is fixedly connected to the heat exchanger, the front side of the fixed plate is fixedly connected to the vacuum atmosphere furnace, the air inlet of the heat exchanger is fixedly connected to the bottom of the filter housing, and the water outlet of the heat exchanger is fixedly connected to the top of the front side of the water tank.

[0011] In a preferred embodiment of this utility model, a pump body is fixedly connected to the bottom of the front side of the water tank, the drain outlet of the pump body is fixedly connected to the inlet of the heat exchanger, and an inlet and a drain outlet are fixedly connected to the top and bottom of the rear side of the water tank, respectively.

[0012] Compared with the prior art, the beneficial effects of this utility model are as follows: 1. This utility model solves the problem that most existing vacuum atmosphere furnaces lack the function of recovering waste heat from exhaust gas during use by setting up a waste heat recovery mechanism. During the sintering of silicon carbide rods, the exhaust gas generated carries a large amount of waste heat. If it is not effectively recovered, the direct emission of high-temperature exhaust gas will lead to energy waste. This utility model achieves the effect of recovering and utilizing waste heat from exhaust gas, thereby improving energy utilization efficiency.

[0013] 2. By setting up a filter component, this utility model can filter dust in the exhaust gas, which facilitates the subsequent waste heat recovery by the waste heat recovery component.

[0014] 3. By setting up a guiding component, this utility model can guide the exhaust gas and accelerate its entry into the waste heat recovery component.

[0015] 4. By setting up a waste heat recovery component, this utility model can recover and utilize the heat in the waste gas, thereby improving the energy utilization rate. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the overall structure of this utility model; Figure 2This is a schematic diagram of the waste heat recovery component structure; Figure 3 This is a schematic diagram of the filter component structure; Figure 4 This is a schematic diagram of the guide component structure.

[0017] In the diagram: 1. Vacuum atmosphere furnace; 2. Exhaust gas outlet; 3. Waste heat recovery mechanism; 4. Worm gear; 5. Rotating shaft; 6. Motor; 7. Pump body; 8. Water inlet; 9. Drain outlet; 31. Check valve; 32. Connecting pipe; 33. Support plate; 34. Filter housing; 35. Filter assembly; 36. Guide assembly; 37. Waste heat recovery assembly; 351. Filter screen cylinder; 352. Drive shaft; 353. Scraper; 361. Worm gear; 362. Connecting shaft; 363. Exhaust fan; 371. Fixing plate; 372. Heat exchanger; 373. Water tank. Detailed Implementation

[0018] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings.

[0019] Many specific details are set forth in the following description in order to provide a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Those skilled in the art can make similar extensions without departing from the spirit of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0020] Secondly, the term "an embodiment" or "embodiment" as used herein refers to a specific feature, structure, or characteristic that may be included in at least one implementation of the present invention. The phrase "in one embodiment" appearing in different places in this specification does not necessarily refer to the same embodiment, nor is it a single or selective embodiment that excludes other embodiments.

[0021] Secondly, this utility model is described in detail with reference to the schematic diagrams. When describing the embodiments of this utility model, for ease of explanation, the cross-sectional views illustrating the device structure may be partially enlarged, not adhering to the usual scale. Furthermore, the schematic diagrams are merely examples and should not limit the scope of protection of this utility model. In addition, actual manufacturing should include the three-dimensional spatial dimensions of length, width, and depth.

[0022] Example 1 Reference Figure 1-4 This is the first embodiment of the present invention, which provides a vacuum sintering device for silicon carbide rods, including a vacuum atmosphere furnace 1 and a waste gas outlet 2. A waste heat recovery mechanism 3, which is fixedly connected to the waste gas outlet 2, is provided on the rear side of the vacuum atmosphere furnace 1. The waste heat recovery mechanism 3 includes a one-way valve 31, a connecting pipe 32, a support plate 33, and a filter housing 34. One end of the one-way valve 31 is fixedly connected to the exhaust port 2, and the other end is fixedly connected to the connecting pipe 32. The bottom plate of the connecting pipe 32 is fixedly connected to the support plate 33, and the bottom of the support plate 33 is fixedly connected to the filter housing 34 by bolts. A filter assembly 35 is provided at the top of the inner cavity of the filter housing 34, a guide assembly 36 is provided at the bottom of the inner cavity of the filter assembly 35, and a waste heat recovery assembly 37 is provided at the bottom of the filter housing 34.

[0023] Specifically, by setting up the filter component 35, dust in the exhaust gas can be filtered, which facilitates the subsequent waste heat recovery by the waste heat recovery component 37. By setting the guide component 36, the exhaust gas can be guided and accelerated to enter the waste heat recovery component 37. By setting up the waste heat recovery component 37, the heat in the exhaust gas can be recovered and utilized, thereby improving the energy utilization rate. By setting a one-way valve 31, the gas and liquid in the filter housing 34 or the waste heat recovery assembly 37 can be prevented from flowing back into the vacuum atmosphere furnace 1, thus ensuring the stability of the vacuum environment in the furnace and preventing the sintering quality from being affected. By setting up the connection pipe 32 and the support plate 33, a stable channel is provided for the transmission of exhaust gas from the vacuum atmosphere furnace 1 to the filter housing 34. At the same time, the support plate 33 is connected to the filter housing 34 by bolts, which facilitates the subsequent disassembly of the filter housing 34 for internal component maintenance.

[0024] Furthermore, after the silicon carbide rod is sintered in the vacuum atmosphere furnace 1, the waste gas containing residual heat is discharged through the waste gas port 2. It first enters the connecting pipe 32 through the one-way valve 31. During this process, the one-way valve 31 blocks the reverse airflow. Then, the waste gas is transmitted to the support plate 33 through the connecting pipe 32, and then enters the filter housing 34 connected to the support plate 33. It passes through the filter assembly 35, the guide assembly 36 and the waste heat recovery assembly 37 in sequence to complete the waste gas purification and waste heat recovery treatment.

[0025] Example 2 In the second embodiment of this utility model, the filter assembly 35 includes a filter cylinder 351. The top of the filter cylinder 351 is fixedly connected to the support plate 33 by bolts. A drive shaft 352 is provided in the inner cavity of the filter cylinder 351. The bottom of the drive shaft 352 passes through the filter cylinder 351 and extends to the outside of the filter cylinder 351. It is rotatably connected to the through-hole of the filter cylinder 351 by a bearing. Scrapers 353 are fixedly connected to both sides of the surface of the drive shaft 352. The side of the scraper 353 near the filter cylinder 351 contacts the inner wall of the filter cylinder 351.

[0026] Specifically, by setting up a filter cylinder 351, which is made of high-density metal filter material, it can efficiently intercept solid impurities such as carbon particles and dust in the exhaust gas, and prevent impurities from entering the subsequent waste heat recovery component 37 and causing blockage or affecting heat exchange efficiency. By setting the drive shaft 352 and scraper 353 to work together, the drive shaft 352 can drive the scraper 353 to rotate synchronously when it rotates. The contact design between the scraper 353 and the inner wall of the filter screen cylinder 351 can remove impurities attached to the filter screen in real time, prevent the filter screen from clogging, and ensure the efficiency of exhaust gas flow. Furthermore, the bearing connection at the point where the drive shaft 352 passes through the filter cylinder 351 reduces the frictional resistance when the drive shaft 352 rotates, thus reducing component wear. The filter cylinder 351 is connected to the support plate 33 by bolts, which facilitates the later disassembly and replacement of the filter screen and improves maintenance convenience.

[0027] Furthermore, when the exhaust gas enters the filter housing 34, it first enters the filter cylinder 351, where the filter cylinder 351 intercepts and filters solid impurities in the exhaust gas. At the same time, the external power drives the transmission shaft 352 to rotate around the bearing. The transmission shaft 352 drives the scrapers 353 on both sides to rotate along the inner wall of the filter cylinder 351, scraping off the impurities accumulated on the filter screen to prevent impurities from clogging the filter screen pores. The filtered exhaust gas then enters the lower part of the filter housing 34 through the mesh of the filter cylinder 351 and flows to the guide assembly 36.

[0028] Example 3 In the third embodiment of this utility model, the guide component 36 includes a worm gear 361, a connecting shaft 362, and an exhaust fan 363. The top of the worm gear 361 is fixedly connected to the transmission shaft 352, and the top and bottom of the connecting shaft 362 are fixedly connected to the worm gear 361 and the exhaust fan 363, respectively.

[0029] The left side of the worm gear 361 is engaged with a worm 4, and the rear side of the worm 4 is fixedly connected to a rotating shaft 5. The rear side of the rotating shaft 5 passes through the filter housing 34 and extends to the outside of the filter housing 34.

[0030] A motor 6 is fixedly connected to the rear side of the curved surface of the filter housing 34, and the output end of the motor 6 is fixedly connected to the rotating shaft 5.

[0031] Specifically, by setting up motor 6, which serves as a power source, the output end drives the rotating shaft 5 to rotate, providing power to the guide component 36 and the scraper 353 of the filter component 35, thus realizing the coordinated work of multiple components driven by a single power source. By setting the meshing transmission between the worm 4 and the worm wheel 361, the horizontal rotation of the rotating shaft 5 can be converted into the vertical rotation of the worm wheel 361, thereby driving the transmission shaft 352. By setting a connecting shaft 362, which connects the worm gear 361 and the exhaust fan 363, it is ensured that the worm gear 361 rotates synchronously and drives the exhaust fan 363 to rotate. The airflow suction generated by the rotation of the exhaust fan 363 can accelerate the flow of the filtered exhaust gas to the waste heat recovery component 37, shorten the residence time of the exhaust gas in the filter housing 34, and improve the overall treatment efficiency. By setting a rotating shaft 5 that passes through the filter housing 34, the motor 6 can be installed outside the housing, avoiding direct contact between the motor 6 and the high-temperature exhaust gas, ensuring the operational stability of the motor 6, and extending the service life of the motor 6.

[0032] Furthermore, the motor 6 is started, and the output end of the motor 6 drives the rotating shaft 5 to rotate. The rotating shaft 5 drives the worm 4 to rotate synchronously. The worm 4 drives the worm wheel 361 to rotate through meshing transmission. The worm wheel 361 drives the top transmission shaft 352 to rotate, providing power to the scraper 353 of the filter assembly 35. On the other hand, it drives the bottom exhaust fan 363 to rotate through the connecting shaft 362. The rotation of the exhaust fan 363 generates a downward airflow, forming a negative pressure suction force, which quickly sucks in the exhaust gas treated by the filter assembly 35 and guides it downward, pushing the exhaust gas into the waste heat recovery assembly 37 efficiently.

[0033] Example 4 In the fourth embodiment of this utility model, the waste heat recovery assembly 37 includes a fixing plate 371, a heat exchanger 372, and a water tank 373. The rear side of the fixing plate 371 is fixedly connected to the heat exchanger 372, the front side of the fixing plate 371 is fixedly connected to the vacuum atmosphere furnace 1, the air inlet of the heat exchanger 372 is fixedly connected to the bottom of the filter housing 34, and the water outlet of the heat exchanger 372 is fixedly connected to the top of the front side of the water tank 373.

[0034] The bottom front of the water tank 373 is fixedly connected to the pump body 7, and the drain port 9 of the pump body 7 is fixedly connected to the inlet of the heat exchanger 372. The top and bottom rear of the water tank 373 are respectively fixedly connected to the water inlet 8 and the drain port 9.

[0035] Specifically, by setting a fixing plate 371, the heat exchanger 372 is fixedly connected to the vacuum atmosphere furnace 1, providing stable support for the heat exchanger 372; By setting up heat exchanger 372, which adopts a shell-and-tube heat exchange structure, the contact area between the exhaust gas and the heat exchange medium is increased, ensuring that the heat in the exhaust gas is efficiently transferred to the heat exchange medium. By setting up a water tank 373 and a pump body 7, the water tank 373 serves as a storage container for the heat exchange medium. The pump body 7 enables the circulation of the heat exchange medium between the water tank 373 and the heat exchanger 372. The pump body 7 provides power for the medium circulation, ensuring continuous heat exchange. The design of connecting the outlet of the heat exchanger 372 to the top of the water tank 373 and connecting the bottom of the water tank 373 to the inlet of the heat exchanger 372 forms a medium circulation path with bottom inlet and top outlet, ensuring that the medium in the water tank 373 can fully participate in heat exchange and avoiding local medium stagnation that affects the heat exchange effect. By setting the inlet 8 and outlet 9 of the water tank 373, it is convenient to add new heat exchange medium or discharge the used medium. For example, the heated hot water can be used for workshop heating, equipment cleaning, etc., to realize the recovery and utilization of waste heat.

[0036] Furthermore, the high-temperature exhaust gas conveyed by the guide component 36 enters the interior of the heat exchanger 372 through the air inlet of the heat exchanger 372. At the same time, the pump body 7 is started, and the pump body 7 draws out the low-temperature heat exchange medium at the bottom of the water tank 373 and delivers it to the inlet of the heat exchanger 372. The low-temperature medium exchanges heat with the high-temperature exhaust gas in the heat exchanger 372. After absorbing the heat in the exhaust gas, the temperature rises and it becomes a high-temperature medium. The high-temperature medium flows back to the top of the water tank 373 for storage through the outlet of the heat exchanger 372. The low-temperature exhaust gas that has completed heat exchange is discharged through the exhaust port of heat exchanger 372. The high-temperature medium stored in water tank 373 can be discharged through drain port 9 for use in other production or living scenarios. When the medium in water tank 373 is insufficient, new low-temperature medium can be added through water inlet 8 to realize waste heat recovery and recycling.

[0037] Working principle: During operation, after the silicon carbide rod completes the sintering process in the vacuum atmosphere furnace 1, the waste gas containing solid impurities, VOCs and a large amount of residual heat is discharged through the waste gas port 2 at the rear of the vacuum atmosphere furnace 1. It first enters the one-way valve 31 connected to the waste gas port 2. The one-way valve 31 prevents the gas from flowing back and ensures the vacuum environment inside the furnace. Then the waste gas is transmitted to the support plate 33 through the connecting pipe 32 and enters the filter housing 34 bolted to the support plate 33. After the exhaust gas enters the filter housing 34, it first flows into the top filter cylinder 351. The filter cylinder 351 intercepts solid impurities such as carbon particles and dust in the exhaust gas. At the same time, the motor 6 starts, and its output end drives the rotating shaft 5 and the worm 4 to rotate. The worm 4 meshes and drives the worm wheel 361 to rotate. The worm wheel 361 drives the top drive shaft 352 to rotate around the bearing. The scrapers 353 on both sides of the drive shaft 352 rotate synchronously along the inner wall of the filter cylinder 351 to scrape off the impurities attached to the filter screen in real time, so as to avoid the filter screen from clogging. The filtered clean exhaust gas enters the lower part of the filter housing 34 through the mesh of the filter cylinder 351. When the worm gear 361 rotates, it drives the exhaust fan 363 to rotate synchronously through the connecting shaft 362 at the bottom. The rotation of the exhaust fan 363 generates a downward negative pressure suction force, which quickly guides the filtered clean exhaust gas downward and accelerates the flow of exhaust gas to the waste heat recovery component 37 at the bottom of the filter housing 34. Clean, high-temperature exhaust gas enters heat exchanger 372 through the air inlet of heat exchanger 372. At this time, pump 7 starts and extracts the low-temperature heat exchange medium from the bottom of water tank 373 and delivers it to the inlet of heat exchanger 372. The low-temperature medium fully contacts and exchanges heat with the high-temperature exhaust gas in heat exchanger 372. After absorbing the heat in the exhaust gas, the temperature rises and then flows back to water tank 373 for storage through the outlet of heat exchanger 372. The low-temperature exhaust gas that has completed heat exchange is discharged from the exhaust port of heat exchanger 372. The high-temperature medium in water tank 373 can be discharged through drain port 9 for use in workshop heating, equipment cleaning and other scenarios to realize waste heat reuse. When the medium in water tank 373 is insufficient, the low-temperature medium is added through water inlet 8 to ensure the continuous operation of waste heat recovery.

[0038] In summary, by setting up the waste heat recovery mechanism 3, the waste heat of the exhaust gas is recovered and utilized, thereby improving the energy utilization rate.

[0039] It should be noted that the motor and worm gear are existing devices or equipment, or devices or equipment that can be implemented by existing technology. The power supply, connection method, usage method, power source, fixing method, installation method, control method, etc. of the equipment, as well as the materials of each accessory and the selection of various parameters, are all common knowledge to those skilled in the art, and therefore will not be elaborated on in this application document.

[0040] It is important to note that the constructions and arrangements of this application shown in several different exemplary embodiments are merely illustrative. Although only a few embodiments are described in detail in this disclosure, those who consult this disclosure will readily understand that many modifications are possible (e.g., changes in the size, dimensions, structure, shape and proportion of various elements, as well as parameter values ​​(e.g., temperature, pressure, etc.), mounting arrangements, use of materials, color, orientation, etc.) without substantially departing from the novel teachings and advantages of the subject matter described in this application). For example, an element shown as integrally formed may be composed of multiple parts or elements, the position of elements may be inverted or otherwise altered, and the nature or number or position of discrete elements may be changed or altered. Therefore, all such modifications are intended to be included within the scope of this utility model. The order or sequence of any process or method steps may be changed or reordered according to alternative embodiments. In the claims, any "device plus function" clause is intended to cover the structure described herein that performs the function, and not only structural equivalents but also equivalent structures. Without departing from the scope of this invention, other substitutions, modifications, alterations, and omissions may be made in the design, operation, and arrangement of the exemplary embodiments. Therefore, this invention is not limited to the specific embodiments, but extends to various modifications that still fall within the scope of the appended claims.

[0041] Furthermore, in order to provide a concise description of exemplary embodiments, not all features of actual embodiments (i.e., those features that are not relevant to the best mode of carrying out the present invention as currently considered, or those features that are not relevant to implementing the present invention) may be omitted.

[0042] It should be understood that numerous specific implementation decisions can be made during the development of any practical implementation, such as in any engineering or design project. Such development efforts may be complex and time-consuming, but for those skilled in the art who benefit from this disclosure, the development effort will be a routine work of design, manufacturing, and production without requiring much experimentation.

[0043] It should be noted that the above embodiments are only used to illustrate the technical solution of this utility model and are not intended to limit it. Although this utility model has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solution of this utility model without departing from the spirit and scope of the technical solution of this utility model, and all such modifications or substitutions should be covered within the scope of the claims of this utility model.

Claims

1. A vacuum sintering apparatus for silicon carbide rods, comprising a vacuum atmosphere furnace (1) and a waste gas outlet (2), characterized in that: The vacuum atmosphere furnace (1) is provided with a waste heat recovery mechanism (3) that is fixedly connected to the exhaust gas port (2) on the rear side. The waste heat recovery mechanism (3) includes a one-way valve (31), a connecting pipe (32), a support plate (33) and a filter housing (34). One end of the one-way valve (31) is fixedly connected to the exhaust port (2), and the other end is fixedly connected to the connecting pipe (32). The bottom plate of the connecting pipe (32) is fixedly connected to the support plate (33). The bottom of the support plate (33) is fixedly connected to the filter housing (34) by bolts. A filter assembly (35) is provided at the top of the inner cavity of the filter housing (34), a guide assembly (36) is provided at the bottom of the inner cavity of the filter assembly (35), and a waste heat recovery assembly (37) is provided at the bottom of the filter housing (34).

2. The vacuum sintering apparatus for silicon carbide rods according to claim 1, characterized in that: The filter assembly (35) includes a filter cylinder (351). The top of the filter cylinder (351) is fixedly connected to the support plate (33) by bolts. The inner cavity of the filter cylinder (351) is provided with a drive shaft (352). The bottom of the drive shaft (352) passes through the filter cylinder (351) and extends to the outside of the filter cylinder (351). It is rotatably connected to the through-hole of the filter cylinder (351) by a bearing. Scrapers (353) are fixedly connected to both sides of the surface of the drive shaft (352). The side of the scraper (353) near the filter cylinder (351) contacts the inner wall of the filter cylinder (351).

3. The vacuum sintering apparatus for silicon carbide rods according to claim 1, characterized in that: The guide assembly (36) includes a worm gear (361), a connecting shaft (362) and an exhaust fan (363). The top of the worm gear (361) is fixedly connected to the drive shaft (352), and the top and bottom of the connecting shaft (362) are fixedly connected to the worm gear (361) and the exhaust fan (363) respectively.

4. The vacuum sintering apparatus for silicon carbide rods according to claim 3, characterized in that: The worm gear (361) is engaged with a worm (4) on its left side. A rotating shaft (5) is fixedly connected to the rear side of the worm (4). The rear side of the rotating shaft (5) passes through the filter housing (34) and extends to the outside of the filter housing (34).

5. The vacuum sintering apparatus for silicon carbide rods according to claim 4, characterized in that: A motor (6) is fixedly connected to the rear side of the curved surface of the filter housing (34), and the output end of the motor (6) is fixedly connected to the rotating shaft (5).

6. The vacuum sintering apparatus for silicon carbide rods according to claim 1, characterized in that: The waste heat recovery assembly (37) includes a fixed plate (371), a heat exchanger (372), and a water tank (373). The rear side of the fixed plate (371) is fixedly connected to the heat exchanger (372), the front side of the fixed plate (371) is fixedly connected to the vacuum atmosphere furnace (1), the air inlet of the heat exchanger (372) is fixedly connected to the bottom of the filter housing (34), and the water outlet of the heat exchanger (372) is fixedly connected to the top of the front side of the water tank (373).

7. The vacuum sintering apparatus for silicon carbide rods according to claim 6, characterized in that: The bottom of the front side of the water tank (373) is fixedly connected to the pump body (7), the drain outlet (9) of the pump body (7) is fixedly connected to the inlet of the heat exchanger (372), and the top and bottom of the rear side of the water tank (373) are fixedly connected to the water inlet (8) and the drain outlet (9), respectively.

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