Furnace body and high-temperature diffusion furnace

Abstract

The application relates to a furnace body and a high-temperature diffusion furnace, which comprise a furnace chamber and a heating element. The furnace chamber is enclosed to form a furnace cavity with one end being open, the furnace chamber comprises a first heat preservation layer, and a first heat reflection layer and a first nano heat insulation layer arranged on the opposite sides of the first heat preservation layer, and the first heat reflection layer is located in the furnace cavity. The heating element is installed in the furnace cavity. The scheme can effectively and significantly reduce the heat loss of the furnace cavity, greatly improve the heat preservation effect of the furnace chamber, reduce the problem of high energy consumption of the furnace body caused by heat loss of the furnace chamber, improve the energy-saving effect of the furnace body, and reduce the energy consumption of the furnace body.

Description

Technical Field

[0001] This application relates to the field of high-temperature treatment furnace technology, and in particular to furnace bodies and high-temperature diffusion furnaces. Background Technology

[0002] High-temperature diffusion furnaces are key equipment in the manufacturing process of semiconductor integrated circuits, power devices, and solar cells. They are used to perform diffusion, oxidation, annealing, and other processes on silicon wafers in a high-temperature environment.

[0003] High-temperature diffusion furnaces require maintaining a high-temperature environment of 800–1300°C for extended periods during operation. Their heating systems and furnace structures consume enormous amounts of energy, making them one of the most power-intensive pieces of equipment in semiconductor production lines. With the advancement of "dual-carbon" goals and increasing demands for energy conservation in manufacturing, their high energy consumption problem has become increasingly prominent, not only raising production costs but also putting pressure on companies to reduce emissions. Utility Model Content

[0004] Therefore, it is necessary to provide a furnace body and a high-temperature diffusion furnace to address the problem of high energy consumption in high-temperature diffusion furnaces.

[0005] Firstly, this application proposes a furnace body, comprising: The furnace chamber is enclosed to form a furnace cavity with one end open. The furnace chamber includes a first heat insulation layer, a first heat reflective layer and a first nano heat insulation layer disposed on opposite sides of the first heat insulation layer, and the first heat reflective layer is located in the furnace cavity. The heating element is installed inside the furnace cavity.

[0006] In some embodiments, the first insulation layer includes a plurality of insulation sub-layers overlapping each other along its wall thickness direction, the strength of each insulation sub-layer decreasing in the direction away from the first heat reflective layer, and the thermal insulation of each insulation sub-layer increasing in the direction away from the first heat reflective layer.

[0007] In some embodiments, the density of each of the heat-insulating sublayers is arranged in a decreasing manner along the direction away from the first heat-reflective layer.

[0008] In some embodiments, the first nano-insulation layer and the heat insulation sub-layer are both used as splicing layers, each splicing layer is formed by multiple splicing blocks that are joined together in a concave-convex manner, and the splicing blocks of two adjacent splicing layers are joined together in a concave-convex manner.

[0009] In some embodiments, a heat-insulating adhesive is applied to the joint between two spliced ​​blocks; and / or The joint between the splicing blocks of the same splicing layer is a first joint, and the first joints of two adjacent splicing layers are staggered; and / or, The furnace body further includes a cover, which is disposed on the outer surface of the first nano-insulation layer and covers the first joint seam of the first nano-insulation layer; and / or, The first heat-reflective layer has multiple protrusions.

[0010] In some embodiments, the thickness of the first thermal insulation layer is greater than the thickness of the first nano-insulation layer and the thickness of the first heat reflection layer; The thickness of the first nano-insulation layer and the thickness of the first heat reflection layer are 5mm to 50mm.

[0011] In some embodiments, the furnace body includes a furnace cover, the furnace cover including a second insulation layer, a second heat reflective layer and a second nano-insulation layer disposed on both sides of the second insulation layer, the furnace cover having a covering surface for covering the furnace cavity, and the second heat reflective layer being located on the covering surface.

[0012] In some embodiments, the cover surface mates with the concave and convex surfaces of the furnace chamber.

[0013] In some embodiments, the furnace is divided into multiple temperature zones along its depth direction, and multiple heating elements are arranged at intervals around a center line parallel to the depth direction in each temperature zone, and the heating elements in each temperature zone are controlled independently. A temperature sensor is installed inside the furnace corresponding to each temperature zone, and the temperature sensor extends into the furnace cavity.

[0014] In some embodiments, a cooling channel and an atmosphere channel are provided in the first insulation layer, the cooling channel and the atmosphere channel are independent, and an atmosphere hole communicating with the atmosphere channel is provided on the inner wall of the furnace cavity. Each temperature zone is independently provided with a cooling channel, an atmosphere channel, and an atmosphere hole.

[0015] Secondly, this application proposes a high-temperature diffusion furnace, including the furnace body described in the first aspect.

[0016] The aforementioned furnace body and high-temperature diffusion furnace have a furnace chamber composed of three composite layers: a heat-reflective layer, a heat insulation layer, and a nano-insulation layer. The heat-reflective layer reduces heat radiation from the furnace chamber to the heat insulation layer, thus reducing heat absorption by the heat insulation layer. The heat insulation layer provides thermal insulation, and combined with the nano-insulation layer, it effectively and significantly reduces heat loss from the furnace chamber, greatly improving the heat insulation effect of the furnace chamber. This reduces the problem of high furnace energy consumption caused by heat loss from the furnace chamber, improves the energy efficiency of the furnace body, and lowers the energy consumption of furnace operation. Attached Figure Description

[0017] Various other advantages and benefits will become apparent to those skilled in the art upon reading the detailed description of the preferred embodiments below. The accompanying drawings are for illustrative purposes only and are not intended to limit the scope of this application. Furthermore, the same reference numerals denote the same parts throughout the drawings. In the drawings: Figure 1 These are schematic diagrams of the furnace body in some embodiments; Figure 2 This is a cross-sectional schematic diagram of the furnace body in some embodiments; Figure 3 for Figure 2 Enlarged view of point A in the middle; Figure 4 This is a schematic diagram of the furnace body in some other embodiments; Figure 5 for Figure 4 The diagram shows a cross-sectional view of the furnace body.

[0018] The reference numerals in the detailed embodiments are as follows: 100. Furnace body; F. Depth direction; 10. Furnace chamber; R. Furnace cavity; 11. First insulation layer; 11a. Insulation sub-layer; 12. First heat reflective layer; 13. First nano-insulation layer; P. Splicing layer; P1. Splicing block; f1. First joint; f2. Second joint; W. Temperature zone; s1. Cooling channel; s2. Atmosphere channel; h. Atmosphere hole; 10A. Enclosure; 10B. Furnace bottom; 20. Heating element; 30. Cover; 40. Furnace lid; 41. Second insulation layer; 42. Second heat reflective layer; 43. Second nano-insulation layer; m. Cover surface; 50. Temperature sensor. Detailed Implementation

[0019] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0020] In the description of this application, it should be understood that, where they appear, the terms “center,” “longitudinal,” “lateral,” “length,” “width,” “thickness,” “upper,” “lower,” “front,” “rear,” “left,” “right,” “vertical,” “horizontal,” “top,” “bottom,” “inner,” “outer,” “clockwise,” “counterclockwise,” “axial,” “radial,” and “circumferential” indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0021] Furthermore, where applicable, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0022] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "joining," "fixing," etc., shall be interpreted broadly. For example, they may refer to a fixed connection, a detachable connection, or an integral part; they may refer to a mechanical connection or an electrical connection; they may refer to a direct connection or an indirect connection through an intermediate medium; they may refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0023] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0024] It should be noted that, if an element is described as "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. When an element is described as "connected to" another element, it can be directly connected to the other element or there may be an intervening element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only possible implementation. To save energy consumption in high-temperature diffusion furnaces, this application proposes a furnace body. This furnace body can be applied to, but is not limited to, high-temperature diffusion furnaces, and can also be applied to other fields such as sintering furnaces.

[0025] Please refer to Figure 1 The furnace body 100 proposed in this application embodiment includes a furnace chamber 10 and a heating element 20. The furnace chamber 10 encloses a furnace cavity R with one end open. The furnace chamber 10 includes a first heat insulation layer 11, and a first heat reflective layer 12 and a first nano-insulation layer 13 disposed on opposite sides of the first heat insulation layer 11. The first heat reflective layer 12 is located in the furnace cavity R. The heating element 20 is installed inside the furnace cavity R.

[0026] The furnace chamber 10 is the core part of the furnace body 100. Generally, the furnace chamber 10 encloses a furnace cavity R with a circular or square cross-section. The furnace cavity R is used to accommodate carriers such as quartz boats and graphite boats for carrying the workpieces to be processed. The wall of the furnace chamber 10 is composed of three layers of materials with different functions from the inside out: the outermost first nano-insulation layer 13, the middle first heat insulation layer 11, and the innermost first heat reflective layer 12.

[0027] The first insulation layer 11 is the main body for insulating the furnace chamber 10 and forming the furnace cavity R. The first nano-insulation layer 13 and the first heat-reflective layer 12 are supported on the first insulation layer 11. As the main supporting structure of the entire furnace chamber 10, the first insulation layer 11 requires high strength. Generally, the thickness of the first insulation layer 11 is much greater than the thickness of the first nano-insulation layer 13 and the first heat-reflective layer 12 to ensure its high strength. The first insulation layer 11 can be made of materials such as ceramics and refractory bricks, which provide a certain degree of thermal insulation.

[0028] The first nano-insulation layer 13 is formed of nano-insulation materials with basic unit sizes at the nanometer level. It utilizes nanoscale porous structures and thermal barrier components to suppress heat conduction, convection, and radiation, exhibiting high insulation performance, low thermal conductivity, good chemical stability, and mechanical strength. Specifically, the nano-insulation layer can be made of nanoparticle insulation materials (such as nano-silica, nano-alumina, etc.), nanofilm insulation materials (such as nano-silica films, nano-alumina films, etc.), nanocomposite insulation materials (such as nano-silica / carbon fiber composites, nano-alumina / glass fiber composites), or nanoaerogel insulation materials (such as silica aerogel, alumina aerogel). The first nano-insulation layer 13 is disposed on the outer side of the first insulation layer 11, significantly reducing heat loss to the outside.

[0029] The first heat-reflective layer 12 is made of heat-reflective material, such as heat-resistant stainless steel, nickel-based alloy, or ceramic-metal composite material. Taking a high-temperature diffusion furnace as an example, the furnace chamber 10 maintains a high temperature of 800–1300°C during use. Heat transfer is primarily through thermal radiation. Infrared radiation emitted by the heating element 20 and the workpiece is directed towards the inner wall of the furnace chamber R. This infrared radiation heat raises the temperature of the furnace body 100 and dissipates through the furnace body 100, resulting in heat loss. In this case, a heat-reflective layer is provided on the surface of the furnace chamber R. This layer directly reflects the radiant heat back into the furnace chamber R, reducing the heat absorbed by the furnace body 100, improving heating efficiency, and reducing energy consumption. As an example, the first heat-reflective layer 12 is made of a polished aluminum plate.

[0030] The heating element 20 is disposed inside the furnace cavity R to raise the temperature inside the furnace cavity R, thereby providing a suitable reaction environment. The heating element 20 can be a resistive, infrared, or other device that generates heat when energized.

[0031] The furnace body 100 and furnace chamber 10 described above are composed of three composite layers: a heat-reflective layer, a heat-insulating layer, and a nano-insulating layer. The heat-reflective layer reduces heat radiation from the furnace chamber R to the heat-insulating layer and reduces heat absorption by the heat-insulating layer. The heat-insulating layer has a heat-insulating effect, and combined with the nano-insulating layer, it can effectively and significantly reduce heat loss from the furnace chamber R, greatly improve the heat insulation effect of the furnace chamber 10, reduce the problem of high energy consumption of the furnace body 100 caused by heat loss from the furnace chamber 10, improve the energy-saving effect of the furnace body 100, and reduce the energy consumption of the furnace body 100.

[0032] In some embodiments, please refer to Figure 2 The first insulation layer 11 includes a plurality of insulation sub-layers 11a overlapping each other along its wall thickness direction, and the strength of each insulation sub-layer 11a decreases in the direction away from the first heat reflective layer 12. The thermal insulation performance of each insulation sub-layer 11a increases in the direction away from the first heat reflective layer 12.

[0033] The overlapping direction of each insulation sub-layer 11a is the same as the arrangement direction of the first heat-reflective layer 12 and the first nano-insulation layer 13. The strength of each insulation sub-layer 11a varies. Generally, the stronger the insulation sub-layer 11a, the thicker it is. Specifically, the strongest insulation sub-layer 11a serves as the support layer of the furnace body 100. To meet the strength requirements of the furnace chamber 10, its thickness is usually relatively large, and it can be made of economical insulation materials with moderate insulation properties, such as refractory bricks or ceramic plates. The weakest insulation sub-layer 11a is mainly used for heat insulation, significantly improving the heat insulation performance of the first insulation layer 11. It rests on the strongest insulation sub-layer 11a, and its thickness is not critical. It can be made of insulation materials with moderate strength but good heat insulation effects, such as low-density ceramic fiber boards or ceramic fiber blankets.

[0034] Preferably, the insulation sublayer 11a is provided in two layers. The inner insulation sublayer 11a is made of insulation material with good heat resistance and high strength, while the outer insulation sublayer 11a is made of insulation material with good heat insulation but average strength. This can take into account both the strength and heat insulation requirements of the insulation layer, as well as economy.

[0035] In a specific embodiment, the density of each heat-insulating sub-layer 11a is arranged alternately along the direction away from the first heat-reflective layer 12.

[0036] The materials of each insulation sublayer 11a can be the same; for example, all insulation sublayers 11a can be made of ceramic fiber. By changing the density of each insulation sublayer 11a, their strengths and thermal insulation effects can be made different. The insulation sublayer 11a with a lower sealing density has higher porosity and better thermal insulation performance. Of course, the materials of each insulation sublayer 11a can also be different; for example, the insulation sublayer 11a with a high sealing density can be a solid ceramic fiber board, while the insulation sublayer 11a with a low sealing density can be a vacuum board.

[0037] This combination of "high internal density and low external density" insulation ensures the reliability of the overall structure when facing thermal and mechanical stresses, while minimizing the overall thermal conductivity, resulting in superior performance compared to using materials with a single density.

[0038] Understandably, please refer to Figure 4 The furnace chamber 10 includes an enclosing portion 10A and a furnace bottom 10B. The enclosing portion 10A is arranged in a ring around the center line of the depth direction F parallel to the furnace cavity R. The furnace bottom 10B is closed at one end of the enclosing portion 10A, and the two together enclose the furnace cavity R. The other end of the enclosing portion 10A serves as the open end of the furnace cavity R. To improve the heat preservation effect of the furnace chamber 10, preferably, both the enclosing portion 10A and the furnace bottom 10B are composed of a first nano-insulation layer 13, a first heat preservation layer 11, and a first heat reflective layer 12, which are sequentially overlapped. Since the enclosing portion 10A forms the main space of the furnace chamber 10, it is composed of at least these three layers.

[0039] Optionally, the furnace bottom 10B is separately connected to the enclosure 10A. The layers of the enclosure 10A are arranged in a circle around the aforementioned centerline, while the layers of the furnace bottom 10B can be designed as planar. To ensure good connection between the layers of the furnace chamber 10, a groove is formed on the inner side of the first insulation layer 11 of the furnace bottom 10B, the first heat reflective layer 12 of the furnace bottom 10B is located in the groove, and the outer side of the first insulation layer 11 of the furnace bottom 10B is covered with a first nano-insulation layer 13.

[0040] It is worth noting that the first heat reflective layer 12 can be fixed to the first insulation layer 11 by means of bonding, snapping, coating, etc.

[0041] In some embodiments, please refer to Figure 2 and Figure 3 The first nano-insulation layer 13 and the heat insulation sub-layer 11a are both used as splicing layers P. Each splicing layer P is composed of multiple splicing blocks P1 spliced ​​together with concave and convex joints, and the splicing blocks P1 of two adjacent splicing layers P are matched with concave and convex joints.

[0042] Specifically, the first nano-insulation layer 13 and the heat-insulating sub-layer 11a located in the enclosure 10A are splicing layers P, and multiple splicing blocks P1 of each splicing layer P are sequentially spliced ​​and connected around the aforementioned center line. The first nano-insulation layer 13 and the heat-insulating sub-layer 11a located in the furnace bottom 10B can be, but are not limited to, a whole plate structure. Optionally, regardless of whether two adjacent splicing blocks P1 belong to the same splicing layer P, they can be joined together with concave and convex parts. Of the two splicing blocks P1, one has a concave and convex part, and the other has another concave and convex part that matches it. The concave and convex parts here can include grooves, protrusions, or both.

[0043] At this point, the first nano-insulation layer 13 and each insulation sub-layer 11a are assembled from multiple pieces, which reduces the processing difficulty of the large-volume furnace body 100. Adjacent insulation sub-layers 11a are also spliced ​​together, as are adjacent insulation sub-layers 11a and the first nano-insulation layer 13, ensuring reliable connection between the layers of the furnace chamber 10 and improving the overall strength of the furnace chamber 10.

[0044] In one example, the splicing layer P of the enclosure 10A is formed by splicing multiple splicing blocks P1 around the center line, and each splicing block P1 extends parallel to the center line as a strip-shaped plate.

[0045] In a further embodiment, a heat-insulating adhesive is applied to the joint between the two splicing blocks P1. The heat-insulating adhesive can be a high-temperature resistant adhesive such as a silicate-based adhesive or a phosphate-based adhesive. The joint between the two splicing blocks P1 refers to the linear structure formed after the splicing interface of the two blocks is joined. This joint includes a first joint f1 between two splicing blocks P1 of the same splicing layer P, and a second joint f2 between two splicing blocks P1 of different splicing layers P. A heat-insulating adhesive is applied between the first joint f1 and / or the second joint f2.

[0046] The application of the heat-insulating adhesive serves two purposes: firstly, it bonds the two splicing blocks P1 together, increasing their connection strength and thus enhancing the overall strength of the furnace body 100; secondly, it prevents heat from diffusing outward from the joint, reducing heat loss and further improving the heat insulation effect of the furnace body 100.

[0047] In practical applications, after the splicing blocks P1 of each splicing layer P are assembled, thermal insulation adhesive can be squeezed and filled into the first joint f1 between the splicing blocks P1. Before assembling the next splicing layer P, thermal insulation adhesive can be applied to the surface of the splicing blocks P1 of the previous splicing layer P to place thermal insulation adhesive in the second joint f2 between adjacent splicing blocks P1 of different splicing layers P. Understandably, the thermal insulation adhesive can absorb the processing errors between each splicing block P1 and reduce the processing precision of the splicing block P1.

[0048] In some embodiments, please refer to Figure 2 and Figure 3 The joint between splicing blocks P1 of the same splicing layer P is the first joint f1, and the first joint f1 of two adjacent splicing layers P are staggered.

[0049] The first joints f1 of each splicing layer P can be staggered, or only the first joints f1 of any two adjacent splicing layers P can be staggered. Understandably, the number of first joints f1 of each splicing layer P is determined by the number and size of the splicing blocks P1 of each splicing layer P.

[0050] As mentioned above, the first joints f1 of every two adjacent splicing layers P are staggered, i.e., misaligned. If the first joints f1 of each splicing layer P were aligned, the aligned first joints f1 would form a low thermal resistance path, i.e., a "thermal bridge," through which heat would preferably dissipate quickly, reducing the insulation performance of the furnace body 100. In this case, the first joints f1 of the inner splicing layer P are blocked by the splicing blocks P1 of the outer splicing layer P, the "thermal bridge" is cut off, and heat cannot be quickly transferred between the splicing layers P through the first joints f1, increasing the thermal resistance of the furnace 10 and improving the insulation performance of the furnace 10.

[0051] In some embodiments, please refer to Figure 2 and Figure 3 The furnace body 100 also includes a cover 30, which is disposed on the outer surface of the first nano-insulation layer 13 and covers the first joint seam f1 of the first nano-insulation layer 13.

[0052] The covering 30 can be a high-temperature resistant tape, metal sheet, etc., which covers the first joint seam f1 of the first nano heat insulation layer 13. It can prevent heat from being dissipated to the outside from these first joint seams f1, reduce the heat loss of the furnace body 100, improve the heat insulation effect of the furnace body 100, and make the furnace body 100 more energy-saving and power-saving.

[0053] If the cover 30 is a high-temperature resistant tape (such as aluminum foil tape), it can fix the splicing block P1 of the first nano-insulation layer 13, thereby improving the overall strength of the furnace body 100. If the cover 30 is a metal sheet (such as a stainless steel sheet), it can reduce the degree of high-temperature deformation and warping at the first joint f1 of the first nano-insulation layer 13, ensuring the structural integrity of the furnace body 100. Specifically, a clamping mechanism can be provided on the furnace body 100 to press the cover 30 onto the first nano-insulation layer 13. For example, the clamping mechanism includes a clamping ring fastened to the enclosure 10A, which presses the metal sheet onto the first nano-insulation layer 13.

[0054] Furthermore, if the enclosure 10A and the furnace bottom 10B are connected separately, a cover 30 is provided on the outer surface of the connection between the two to prevent heat loss from the connection between the two and to increase the thermal resistance of the furnace body 100.

[0055] In some embodiments, the first heat-reflective layer 12 is provided with a plurality of bumps (not shown). The bumps can increase the reflective area and diffuse reflection effect, avoiding hot spots that may be caused by specular reflection.

[0056] In some embodiments, the thickness of the first insulation layer 11 is greater than the thickness of the first nano-insulation layer 13 and the first heat-reflective layer 12. As described above, the first insulation layer 11 primarily provides support, and its greater thickness enhances the strength of the furnace body 100. The first nano-insulation layer 13 and the first heat-reflective layer 12 achieve their effects with smaller thicknesses; reducing their thickness can lower costs.

[0057] Specifically, in this embodiment, the thickness of the first nano-insulation layer 13 and the thickness of the first heat-reflective layer 12 are 5mm to 20mm. Specifically, the thicknesses of the first nano-insulation layer 13 and the first heat-reflective layer 12 can be selected as 5mm, 10mm, 20mm, 30mm, 40mm, 50mm, or any value between adjacent values. When the thicknesses of the first nano-insulation layer 13 and the first heat-reflective layer 12 are within the above ranges, the furnace body 100 not only has good heat preservation and energy-saving effects but also reasonable manufacturing costs.

[0058] Can the thickness of the first insulation layer 11 at the enclosure 10A be 400mm to 550mm.

[0059] In some embodiments, please refer to Figure 4 and Figure 5 The furnace body 100 includes a furnace cover 40, which includes a second insulation layer 41, a second heat reflective layer 42 and a second nano heat insulation layer 43 disposed on both sides of the second insulation layer 41. The furnace cover 40 has a covering surface m for covering the furnace cavity R, and the second heat reflective layer 42 is located on the covering surface m.

[0060] The selection of materials for the second insulation layer 41, the second heat reflective layer 42, and the second nano-insulation layer 43 can refer to the selection of materials for the first insulation layer 11, the first heat reflective layer 12, and the first nano-insulation layer 13 mentioned above.

[0061] At this time, the furnace cover 40 can also reflect heat and prevent heat loss, which can further improve the energy-saving and heat-preserving effect of the furnace body 100.

[0062] In a specific embodiment, the cover surface m is in a concave-convex fit with the furnace chamber 10. Specifically, the cover surface m is in a concave-convex fit with the open end face of the furnace chamber 10. The concave-convex fit interface increases the thermal resistance of heat dissipation through the fit point, further improving the heat preservation and energy-saving effect of the furnace body 100.

[0063] In some embodiments, please refer to Figure 5 The furnace chamber 10 is divided into multiple temperature zones W along its depth direction F. Each temperature zone W is provided with multiple heating elements 20 spaced apart around a center line set parallel to the depth direction F. The heating elements 20 in each temperature zone W are independently controlled.

[0064] Specifically, an embedding hole is provided on the inner wall of the furnace cavity R corresponding to each temperature zone W, and the heating element 20 is embedded in the embedding hole. The heating element 20 is generally strip-shaped along the depth direction F.

[0065] At this point, the internal space of the furnace cavity R is divided into multiple temperature zones W, and the heating element 20 of each temperature zone W is independently controlled. When the temperatures of each temperature zone W are different, the temperature of each temperature zone W can be independently adjusted, making the temperature adjustment of the furnace body 100 more flexible and precise. Moreover, multiple heating elements 20 are evenly distributed in each temperature zone W, making the temperature more uniform throughout the temperature zone W and improving the temperature uniformity of the furnace cavity R.

[0066] In some embodiments, please refer to Figure 5 A temperature sensor 50 is installed in each temperature zone W inside the furnace chamber 10, and the temperature sensor 50 extends into the furnace cavity R. In actual application, the heating element 20 of each temperature zone W is controlled according to the temperature detected by the temperature sensor 50 of each temperature zone W, so that the temperature of each temperature zone W tends to be consistent and the temperature uniformity of the furnace cavity R is improved.

[0067] In some embodiments, please refer to Figure 5 The first insulation layer 11 is provided with a cooling channel s1 and an atmosphere channel s2. The cooling channel s1 and the atmosphere channel s2 are independent, and an atmosphere hole h connected to the atmosphere channel s2 is opened on the inner wall of the furnace cavity R. Each temperature zone W is provided with an independent cooling channel s1, an atmosphere channel s2, and an atmosphere hole h.

[0068] The cooling channel s1 is used to circulate the cooling medium. Each part of the furnace 10 corresponding to each temperature zone W is provided with an independent cooling channel s1. The cooling medium flowing in the cooling channel s1 counteracts the heat generated by the heating element 20, thereby achieving independent and precise temperature control of each temperature zone W and improving the temperature control accuracy of the furnace body 100.

[0069] Atmosphere channel s2 is used to flow process gas. Generally, multiple atmosphere holes h are evenly arranged on the inner wall of the furnace cavity R of each temperature zone W. Different temperature zones W are equipped with independent atmosphere channels s2, which can synchronously and uniformly deliver atmosphere to each temperature zone W, so that the reaction process in all parts of the workpiece is basically consistent, thereby improving the quality of the workpiece.

[0070] Specifically, each splicing layer P corresponds to an independent splicing block P1 for each temperature zone W. Multiple different splicing blocks P1 are arranged for different temperature zones W, and these multiple different splicing blocks P1 are arranged around the center line to enclose the furnace cavity R of that temperature zone W. Each splicing block P1 in each temperature zone W has a cooling channel s1 and an atmosphere channel s2. The cooling channels s1 of all splicing blocks P1 in each temperature zone W are connected to form the cooling channel s1 of that temperature zone W, and the atmosphere channels s2 of all splicing blocks P1 in each temperature zone W are connected to form the atmosphere channel s2 of that temperature zone W. Thermal insulation seals (such as graphite seals, metal seals, etc.) can be installed at the joints of the cold flow channels of each splicing block P1 and the joints of the atmosphere channels s2 to ensure airtightness.

[0071] In addition, this application also proposes a high-temperature diffusion furnace, including the furnace body 100 in the above embodiments. Furthermore, the high-temperature diffusion furnace typically also includes a frame, a liquid supply system, and an atmosphere supply system, with the furnace body 100 mounted on the frame. The liquid supply system is used to provide a cooling medium to the cooling channel s1, and the atmosphere supply system is used to provide a reaction atmosphere to the atmosphere channel s2.

[0072] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0073] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are specific and detailed, they should not be construed as limiting the scope of this patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A furnace body (100), characterized in that, include: The furnace chamber (10) is enclosed to form a furnace cavity (R) with one end open. The furnace chamber (10) includes a first heat insulation layer (11), a first heat reflection layer (12) and a first nano heat insulation layer (13) disposed on opposite sides of the first heat insulation layer (11). The first heat reflection layer (12) is located in the furnace cavity (R). A heating element (20) is installed inside the furnace cavity (R); The first insulation layer (11) includes a plurality of insulation sub-layers (11a) stacked along its wall thickness direction. The strength of each insulation sub-layer (11a) decreases in the direction away from the first heat reflective layer (12), and the heat insulation of each insulation sub-layer (11a) increases in the direction away from the first heat reflective layer (12).

2. The furnace body (100) according to claim 1, characterized in that, The density of each of the heat-insulating sub-layers (11a) is arranged in a decreasing manner along the direction away from the first heat-reflective layer (12).

3. The furnace body (100) according to claim 1, characterized in that, The first nano-insulation layer (13) and the insulation sub-layer (11a) are both used as splicing layers (P). Each splicing layer (P) is formed by splicing multiple splicing blocks (P1) with concave and convex shapes, and the splicing blocks (P1) of two adjacent splicing layers (P) are spliced ​​with concave and convex shapes.

4. The furnace body (100) according to claim 3, characterized in that, A heat-insulating adhesive is applied to the joint between the two splicing blocks (P1) that are to be joined; and / or, The joint between the splicing blocks (P1) of the same splicing layer (P) is a first joint (f1), and the first joints (f1) of two adjacent splicing layers (P) are staggered; and / or, The furnace body (100) further includes a cover (30), which is disposed on the outer surface of the first nano-insulation layer (13) and covers the first joint seam (f1) of the first nano-insulation layer (13); and / or, The first heat-reflective layer (12) has multiple protrusions.

5. The furnace body (100) according to claim 1, characterized in that, The thickness of the first insulation layer (11) is greater than the thickness of the first nano-insulation layer (13) and the thickness of the first heat reflection layer (12); The thickness of the first nano heat insulation layer (13) and the thickness of the first heat reflection layer (12) are 5 mm to 50 mm.

6. The furnace body (100) according to claim 1, characterized in that, The furnace body (100) includes a furnace cover (40), the furnace cover (40) includes a second heat insulation layer (41), a second heat reflective layer (42) disposed on both sides of the second heat insulation layer (41), and a second nano heat insulation layer (43). The furnace cover (40) has a covering surface (m) for covering the furnace cavity (R), and the second heat reflective layer (42) is located on the covering surface (m). The cover surface (m) is in concave-convex contact with the furnace chamber (10).

7. The furnace body (100) according to claim 1, characterized in that, The furnace (10) is divided into multiple temperature zones (W) along its depth direction (F). In each temperature zone (W), multiple heating elements (20) are arranged at intervals around a center line parallel to the depth direction (F). The heating elements (20) in each temperature zone (W) are independently controlled. A temperature sensor (50) is provided in the furnace chamber (10) for each temperature zone (W), and the temperature sensor (50) extends into the furnace chamber (R).

8. The furnace body (100) according to claim 7, characterized in that, The first insulation layer (11) is provided with a cooling channel (s1) and an atmosphere channel (s2). The cooling channel (s1) and the atmosphere channel (s2) are independent of each other, and an atmosphere hole (h) connected to the atmosphere channel (s2) is opened on the inner wall of the furnace cavity (R). Each temperature zone (W) is independently provided with a cooling channel (s1), an atmosphere channel (s2), and an atmosphere hole (h).

9. The furnace body (100) according to claim 1, characterized in that, The thickness of the first insulation layer (11) is 400mm to 550mm.

10. A high-temperature diffusion furnace, characterized in that, Includes the furnace body (100) as described in any one of claims 1 to 9.

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