Silicon rod size detection device

Abstract

The utility model provides a kind of silicon rod size detection device, silicon rod size detection device includes: base;Detection part, movably set on base, detection part has the first detection end and the second detection end spaced apart along the direction of movement, first detection end and second detection end respectively extend base, and be located the same side of base, the orientation of first detection end and the orientation of second detection end have included angle;Drive assembly, set on base, drive assembly is driven connection with detection part, to drive detection part relative base moves. Through the technical scheme provided by the utility model, the problem that the silicon rod size detection device in the prior art generally adopts single-point contact type probe, needs to turn over silicon rod detection multiple times when detecting different surfaces, and the detection efficiency is lower can be solved.

Description

Technical Field

[0001] This utility model relates to the field of silicon rod processing technology, and more specifically, to a silicon rod size detection device. Background Technology

[0002] Before entering the slitting equipment, silicon rods have dimensional errors due to the growth of raw materials and the grinding of their outer diameter. The flatness and straightness of different silicon rods deviate from the nominal values, causing their actual centerline to not coincide with the design coordinate system. If they are directly clamped and cut using mechanical references, the blade is very likely to deviate from the theoretical trajectory, resulting in uneven wafer thickness, edge chipping, or even blade breakage. Therefore, it is necessary to perform dimensional inspection on each silicon rod before slitting to ensure the accuracy and yield of subsequent slicing.

[0003] Existing silicon rod size inspection devices generally use single-point contact probes to slowly scan unidirectionally along the outer periphery of the silicon rod, collecting contour data point by point before offline center fitting. This method requires multiple back-and-forth movements for each rod, and multiple flipping of the silicon rod is required to inspect different surfaces, resulting in low inspection efficiency and difficulty in meeting the needs of large-scale continuous production. Utility Model Content

[0004] This invention provides a silicon rod size detection device to solve the problem that existing silicon rod size detection devices generally use single-point contact probes, which require flipping the silicon rod multiple times to detect different surfaces, resulting in low detection efficiency.

[0005] This utility model provides a silicon rod size detection device, which includes: a base; a detection part movably disposed on the base, the detection part having a first detection end and a second detection end spaced apart along the moving direction, the first detection end and the second detection end respectively extending out of the base and located on the same side of the base, the orientation of the first detection end and the orientation of the second detection end forming an angle; and a driving assembly disposed on the base, the driving assembly being drivenly connected to the detection part to drive the detection part to move relative to the base.

[0006] Furthermore, the detection unit includes: a mounting base movably disposed on a base, and a drive assembly drivingly connected to the mounting base; a first detection element and a second detection element, respectively disposed on the mounting base, the first detection element having a first detection end and the second detection element having a second detection end.

[0007] Furthermore, the first detection element extends horizontally, the second detection element extends vertically, and the second detection element is located above the first detection element; the mounting base includes a first mounting plate, a second mounting plate, and a connecting plate. The first mounting plate extends horizontally, and the first detection element is fixed on the first mounting plate. The second mounting plate extends vertically, and the second detection element is fixed on the second mounting plate. One end of the connecting plate is connected to the first mounting plate, and the other end of the connecting plate is connected to the second mounting plate.

[0008] Furthermore, the drive assembly includes: a drive unit disposed on the base, the drive unit having an output end; and a transmission structure disposed between the output end and the mounting base, one end of the transmission structure being rotatably connected to the output end, and the other end of the transmission structure being drively connected to the mounting base to drive the mounting base to move relative to the base.

[0009] Furthermore, the transmission structure includes: a lead screw, rotatably mounted on the base, the lead screw extending in a horizontal direction, and the output end connected to the lead screw drive; a sliding sleeve, passing through the outer periphery of the lead screw, the sliding sleeve being threadedly connected to the lead screw, and the sliding sleeve being located at the bottom of the mounting base; and an anti-rotation part, located between the mounting base and the base, the anti-rotation part being used to restrict the sliding sleeve from rotating relative to the lead screw.

[0010] Furthermore, the anti-rotation part includes: two guide rails, which are spaced apart on the base along the moving direction perpendicular to the mounting seat, and the guide rails extend along the moving direction of the mounting seat; two grooves, which are spaced apart on the bottom of the mounting seat, and the two grooves are corresponding to the two guide rails one by one. The grooves engage with the guide rails, and the mounting seat moves along the guide rails through the grooves. The grooves engage with the guide rails to limit the rotation of the mounting seat relative to the base.

[0011] Furthermore, a protective cover is provided at the end of the base, covering the side of the base facing the mounting seat. The protective cover has an opening and a cavity that communicate with each other, with the opening facing the mounting seat and the drive unit located inside the cavity.

[0012] Furthermore, the first detection element includes a first driving element and a first probe. The first driving element is disposed on the first mounting plate and is drivenly connected to the first probe to drive the first probe to move horizontally relative to the base. The second detection element includes a second driving element and a second probe. The second driving element is disposed on the second mounting plate and is drivenly connected to the second probe to drive the second probe to move vertically relative to the base.

[0013] Furthermore, the silicon rod size detection device also includes a first protective shell and a second protective shell. The first protective shell is fastened to a first mounting plate, at least a portion of the first detection element is located inside the first protective shell, and the end of the first probe away from the first driving element passes through the end of the first protective shell. The first driving element drives the first probe to extend or retract from the first protective shell. The second protective shell is fastened to a second mounting plate, at least a portion of the second detection element is located inside the second protective shell, and the end of the second probe away from the second driving element passes through the end of the second protective shell. The second driving element drives the second probe to extend or retract from the second protective shell.

[0014] Furthermore, the silicon rod size detection device also includes a control system, which is connected to the detection unit and the drive assembly respectively to control the operation of the detection unit and the drive assembly.

[0015] By applying the technical solution of this utility model, the detection unit is movably mounted on the base. The detection unit has a first detection end and a second detection end spaced apart along the moving direction of the detection unit. The first and second detection ends extend out of the base and are located on the same side of the base. The orientation of the first detection end and the orientation of the second detection end form an angle. Compared with the single probe in the prior art, this application, through the above-mentioned arrangement, provides a detection unit with two detection ends. Thus, during silicon rod detection, there is no need for multiple flipping or repeated detection. The driving component drives the detection unit to move, and the first and second detection ends can simultaneously detect different surfaces of the silicon rod. This improves detection efficiency and production efficiency while acquiring detection parameters, providing a reference benchmark for subsequent silicon rod dicing, positioning, and tool setting processes. Furthermore, it avoids excessive wear of a single detection element, extending the service life of the detection unit. Attached Figure Description

[0016] The accompanying drawings, which form part of this application, are used to provide a further understanding of the present invention. The illustrative embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an undue limitation of the present invention. In the drawings:

[0017] Figure 1 A schematic diagram of the silicon rod size detection device provided by this utility model is shown.

[0018] Figure 2 This diagram illustrates a silicon rod size detection device from one perspective, as provided by the present invention.

[0019] Figure 3 This invention provides a partial structural schematic diagram of the silicon rod size detection device.

[0020] Figure 4 A schematic diagram of the silicon rod size detection device from another perspective provided by this utility model is shown;

[0021] Figure 5 A schematic diagram of the silicon rod size detection device from a side view provided by this utility model is shown.

[0022] The above figures include the following reference numerals:

[0023] 10. Base; 11. Protective cover;

[0024] 20. Detection section; 201. First detection end; 202. Second detection end; 21. Mounting base; 211. First mounting plate; 212. Second mounting plate; 213. Connecting plate; 22. First detection component; 221. First driving component; 222. First probe; 23. Second detection component; 231. Second driving component; 232. Second probe;

[0025] 31. First protective shell; 32. Second protective shell;

[0026] 100. Silicon rods. Detailed Implementation

[0027] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. The following description of at least one exemplary embodiment is merely illustrative and is in no way intended to limit the present utility model or its application or use. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model without creative effort are within the scope of protection of the present utility model.

[0028] like Figures 1 to 5 As shown, this embodiment of the invention provides a silicon rod size detection device, which includes a base 10, a detection unit 20, and a driving assembly. The detection unit 20 is movably mounted on the base 10 and has a first detection end 201 and a second detection end 202 spaced apart along the moving direction. The first detection end 201 and the second detection end 202 extend out of the base 10 and are located on the same side of the base 10. The orientation of the first detection end 201 and the orientation of the second detection end 202 form an angle to detect different surfaces of the silicon rod 100. The driving assembly is mounted on the base 10 and is drivenly connected to the detection unit 20 to drive the detection unit 20 to move relative to the base 10. The silicon rod 100 is moved, rotated, or its position adjusted via a clamping structure.

[0029] The angle between the orientation of the first detection end 201 and the orientation of the second detection end 202 is not limited, and can be selected and set according to the angle between different surfaces to be detected on the outer periphery of the silicon rod.

[0030] In this application, the detection unit 20 can be configured as an infrared detector, a photoelectric detector, or a contact detector, etc., and different detectors are used according to different detection requirements.

[0031] By applying the technical solution of this utility model, the detection unit is movably mounted on the base. The detection unit has a first detection end 201 and a second detection end 202 spaced apart along the moving direction of the detection unit. The first detection end 201 and the second detection end 202 extend out of the base 10 and are located on the same side of the base 10. The orientation of the first detection end 201 and the orientation of the second detection end 202 form an angle. Compared with the single probe in the prior art, this application, through the above-mentioned arrangement, provides a detection unit with two detection ends. Thus, the silicon rod 100 does not need to be flipped or repeatedly inspected during inspection. The driving component drives the detection unit 20 to move, and the first detection end 201 and the second detection end 202 can simultaneously inspect different surfaces of the silicon rod 100. This improves inspection efficiency and production efficiency, while also acquiring its inspection parameters for multi-dimensional fitting calculations, providing a benchmark for subsequent processes such as wafering, positioning, and tool setting of the silicon rod 100. Furthermore, it eliminates the need for a single detection end to repeatedly inspect multiple surfaces, avoiding excessive wear on a single inspection piece and extending the service life of the detection unit 20.

[0032] like Figure 2 and Figure 3 As shown, the detection unit 20 includes a mounting base 21, a first detection element 22, and a second detection element 23. The mounting base 21 is movably mounted on the base 10, and a drive assembly is driven to move the mounting base 21 on the base 10. The first detection element 22 and the second detection element 23 are respectively mounted on the mounting base 21. The first detection element 22 has a first detection end 201, and the second detection element 23 has a second detection end 202. Both detection elements are mounted on the same mounting base 21, thus using the same reference for installation, facilitating installation and accuracy calibration. Furthermore, during movement, the first detection element 22 and the second detection element 23 move synchronously, avoiding the detection errors caused by relative displacement that can occur when the first detection element 22 and the second detection element 23 move independently. Simultaneously, by using two detection elements, disassembly is convenient, and the relative positions of the first detection end 201 and the second detection end 202 can be designed and adjusted more easily, improving design convenience and detection flexibility.

[0033] In this embodiment, the silicon rod 100 to be tested is a square rod with an included angle of 90° between two adjacent faces. The included angle between the orientation of the first detection end 201 and the orientation of the second detection end 202 is 90°. The first detection element 22 extends horizontally, and the second detection element 23 extends vertically. The second detection element 23 is located above the first detection element 22 to detect the top surface of the silicon rod 100. The first detection element 22 is used to detect the side surface of the silicon rod 100. The mounting base 21 includes a first mounting plate 211, a second mounting plate 212, and a connecting plate 213. The first mounting plate 211 extends horizontally, and the first detection element 22 is fixed to the first mounting plate 211 by fasteners. The second mounting plate 212 extends vertically, and the second detection element 23 is fixed to the second mounting plate 212 by fasteners. One end of the connecting plate 213 is connected to the first mounting plate 211, and the other end of the connecting plate 213 is connected to the second mounting plate 212. Thus, the first mounting plate 211 can provide guidance for the installation of the first detection component 22, and the second mounting plate 212 can provide guidance for the installation of the second detection component 23, which facilitates the correction and adjustment of the relative positions between the detection components and ensures the detection accuracy of the detection unit 20.

[0034] In other embodiments, the silicon rod 100 to be tested has other shapes, the included angle between adjacent surfaces is other angles, and the included angle between the orientation of the first detection end 201 and the orientation of the second detection end 202 can follow the included angle between the adjacent surfaces of the silicon rod 100, which can be achieved by adjusting their respective installation positions on the mounting base 21.

[0035] Specifically, the connecting plate 213 is a bent plate with a 90° bend. The bend of the connecting plate 213 is located in the middle of the connecting plate 213 and is recessed on the side facing the silicon rod 100 to avoid the silicon rod 100. This arrangement avoids interference between the connecting plate 213 and the silicon rod 100 and ensures the normal operation of the measurement work.

[0036] Fasteners can include fixing screws, clips, etc.

[0037] In this application, the drive assembly includes a drive unit and a transmission structure. The drive unit is mounted on the base 10 and has an output end that is rotatable relative to the base 10. The transmission structure is disposed between the output end and the mounting base 21. One end of the transmission structure is rotatably connected to the output end, and the other end is drivenly connected to the mounting base 21 to drive the mounting base 21 to move relative to the base 10. The transmission structure can change the direction of force transmission, converting the rotational output of the drive unit into linear movement of the mounting base 21. Furthermore, the transmission structure allows for adjustment of the positional distribution of each component, improving the flexibility of the component layout and optimizing the space utilization and design rationality of the device.

[0038] Specifically, the drive unit is a motor, which is fixed to the end of the base 10 by fasteners.

[0039] The transmission structure can be a combination of transmission structures such as a conveyor belt, threaded rod, nut, gear and rack.

[0040] In this embodiment, the transmission structure includes a lead screw, a sliding sleeve, and an anti-rotation part. The lead screw is rotatably mounted on the base 10, extending horizontally in the same direction as the base 10. The output end is connected to the lead screw drive. The sliding sleeve passes through the outer circumference of the lead screw and is threadedly connected to it. The sliding sleeve is located at the bottom of the mounting base 21. The anti-rotation part is located between the mounting base 21 and the base 10. This part restricts the sliding sleeve from rotating relative to the lead screw. Thus, when the drive unit drives the lead screw to rotate, the sliding sleeve, due to the anti-rotation part, cannot rotate synchronously with the lead screw and can only move horizontally along the lead screw, thereby achieving linear motion of the mounting base 21 relative to the base 10 in the horizontal direction. The threaded connection between the sliding sleeve and the lead screw provides high transmission accuracy, improving the movement accuracy of the base 10.

[0041] In some embodiments, the anti-rotation part includes two guide rails and two grooves. The two guide rails are spaced apart on the base 10 along a direction perpendicular to the movement direction of the mounting base 21. The base 10 extends horizontally, and the guide rails extend along the movement direction of the mounting base 21, i.e., horizontally. The two grooves are spaced apart at the bottom of the mounting base 21, and a threaded sleeve is located at the middle of the bottom of the mounting base 21. The two grooves correspond one-to-one with the two guide rails, and the grooves engage with the outer periphery of the guide rails. The mounting base 21 moves along the guide rails via the grooves, and the engagement of the grooves with the guide rails restricts the rotation of the mounting base 21 relative to the base 10. Simultaneously, the above arrangement also guides the movement of the mounting base 21, ensuring the movement accuracy of the first detection end 201 and the second detection end 202, thereby ensuring the detection accuracy of the detection unit 20.

[0042] like Figure 4 As shown, a protective cover 11 is provided at the end of the base 10. The protective cover 11 covers the side of the base 10 facing the mounting base 21. The protective cover 11 has an opening and a cavity that communicate with each other. The opening faces the mounting base 21, and the drive unit is located in the cavity. In this way, the protective cover 11 covers the outside of the drive unit, which can protect the drive unit and prevent impurities such as cutting fluid and cutting chips from the external environment from entering the drive unit and causing damage to the drive unit, ensuring the normal operation of the drive unit and extending the service life of the drive unit.

[0043] In this embodiment, the protective cover 11 is a cube cover. In other embodiments, the protective cover 11 can be a cylindrical cover, a spherical cover, etc.

[0044] like Figure 3As shown, the first detection element 22 includes a first driving element 221 and a first probe 222. The first driving element 221 is mounted on the first mounting plate 211 by fasteners. The first driving element 221 is driven to the first probe 222 to drive the first probe 222 to move horizontally relative to the base 10, thereby moving closer to or away from the silicon rod 100. The second detection element 23 includes a second driving element 231 and a second probe 232. The second driving element 231 is mounted on the second mounting plate 212 by fasteners. The second driving element 231 is driven to the second probe 232 to drive the second probe 232 to move vertically relative to the base 10, thereby moving closer to or away from the silicon rod 100. By driving the probe to move with the driving element, the movement accuracy of the probe can be improved, avoiding excessive wear caused by excessive contact between the probe and the silicon rod 100 or failure to measure due to lack of contact with the silicon rod 100, thus ensuring the normal operation of the first detection element 22 and the second detection element 23.

[0045] In this embodiment, the first driving member 221 and the second driving member 231 are cylinders. The end of the piston rod of the cylinder is connected to the probe drive to drive the probe to approach or move away from the silicon rod 100. This is prior art and will not be described in detail here.

[0046] In other embodiments, the first driving member 221 and the second driving member 231 are structures that can extend and retract, such as hydraulic cylinders or oil cylinders.

[0047] like Figure 2 As shown, the silicon rod size detection device also includes a first protective shell 31 and a second protective shell 32. The first protective shell 31 is fastened to the first mounting plate 211 by fasteners. At least a portion of the first detection element 22 is located inside the first protective shell 31. The end of the first probe 222 away from the first driving element 221 passes through the end of the first protective shell 31. The first driving element 221 drives the first probe 222 to extend or retract from the first protective shell 31. The second protective shell 32 is fastened to the second mounting plate 212 by fasteners. At least a portion of the second detection element 23 is located inside the second protective shell 32. The end of the second probe 232 away from the second driving element 231 passes through the end of the second protective shell 32. The second driving element 231 drives the second probe 232 to extend or retract from the second protective shell 32. The first protective shell 31 and the second protective shell 32 are respectively installed around the outer periphery of the first detection element 22 and the second detection element 23 to protect the first detection element 22 and the second detection element 23. This can prevent external impurities from entering the first detection element 22 and the second detection element 23 or damage to the detection elements caused by collisions with external components, ensure the normal operation of the first detection element 22 and the second detection element 23, and extend the service life of the first detection element 22 and the second detection element 23.

[0048] In this embodiment, the first driving component 221 is entirely located inside the first protective shell 31, and the second driving component 231 is entirely located inside the second protective shell 32.

[0049] In this application, the silicon rod size detection device also includes a control system, which is connected to both the detection unit 20 and the drive assembly to control their operation. The control system improves operational convenience and flexibility. Furthermore, the control logic can be adjusted by modifying the program, facilitating remote monitoring and debugging, reducing manual intervention, and enhancing the accuracy of component control.

[0050] It is understandable that the control system, including the controller and host computer, can control the operation of the drive unit and perform functions such as detecting, reading the size data of the silicon rod 100 and analyzing the data through probes. This is existing technology and will not be elaborated on here.

[0051] When the silicon rod 100 is inspected using the silicon rod size inspection device provided in this application, the silicon rod 100 is first moved to the vicinity of the silicon rod size inspection device by the clamping assembly. After adjusting the inspection position, the drive unit is controlled by the control system to move the mounting base 21 to the edge near the end of the silicon rod 100, so that the first inspection element 22 and the second inspection element 23 are respectively aligned with different surfaces of the silicon rod 100. After adjusting the position, the first probe 222 and the second probe 232 are controlled by the control system to approach the silicon rod 100 and abut against its outer surface. After abutting, the mounting base 21 is controlled by the control system to move horizontally and stop after moving to a preset position, so as to realize the measurement and inspection of different surfaces of the silicon rod 100. The preset positions for starting and ending the inspection are not limited and can be selected according to the working conditions. In this way, the first probe 222 and the second probe 232 can simultaneously obtain the size data of different surfaces and feed the detected data back to the control system. The control system can fit the shape and position dimensions based on the collected data and provide a basis for judgment in subsequent processes.

[0052] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this application. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0053] Unless otherwise specifically stated, the relative arrangement, numerical expressions, and values ​​of the components and steps described in these embodiments do not limit the scope of this invention. It should also be understood that, for ease of description, the dimensions of the various parts shown in the drawings are not drawn to actual scale. Techniques, methods, and devices known to those skilled in the art may not be discussed in detail, but where appropriate, such techniques, methods, and devices should be considered part of the specification. In all examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not as limitations. Therefore, other examples of exemplary embodiments may have different values. It should be noted that similar reference numerals and letters in the following drawings denote similar items; therefore, once an item is defined in one drawing, it need not be further discussed in subsequent drawings.

[0054] In the description of this utility model, it should be understood that the directional terms such as "front, back, up, down, left, right", "horizontal, vertical, horizontal" and "top, bottom" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description. Unless otherwise stated, these directional terms do not indicate or imply that the device or element referred to must have a specific orientation or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on the scope of protection of this utility model. The directional terms "inner" and "outer" refer to the inner and outer contours of each component itself.

[0055] For ease of description, spatial relative terms such as "above," "on top of," "on the upper surface of," "above," etc., are used herein to describe the spatial positional relationship of a device or feature as shown in the figures to other devices or features. It should be understood that spatial relative terms are intended to encompass different orientations in use or operation beyond the orientation of the device as described in the figures. For example, if the device in the figures were inverted, a device described as "above" or "on top of" other devices or structures would subsequently be positioned as "below" or "under" other devices or structures. Thus, the exemplary term "above" can include both "above" and "below." The device may also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatial relative descriptions used herein will be interpreted accordingly.

[0056] Furthermore, it should be noted that the use of terms such as "first" and "second" to define components is merely for the purpose of distinguishing the corresponding components. Unless otherwise stated, the above terms have no special meaning and therefore cannot be construed as limiting the scope of protection of this utility model.

[0057] The above description is merely a preferred embodiment of this utility model and is not intended to limit the scope of this utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A silicon rod size detection device, characterized in that, The silicon rod size detection device includes: Base (10); The detection unit (20) is movably disposed on the base (10). The detection unit (20) has a first detection end (201) and a second detection end (202) spaced apart along the moving direction. The first detection end (201) and the second detection end (202) extend out of the base (10) and are located on the same side of the base (10). The orientation of the first detection end (201) and the orientation of the second detection end (202) form an angle. A drive assembly is disposed on the base (10) and is driven to the detection unit (20) to drive the detection unit (20) to move relative to the base (10).

2. The silicon rod size detection device according to claim 1, characterized in that, The detection unit (20) includes: Mounting base (21) is movably mounted on the base (10), and the driving assembly is drivenly connected to the mounting base (21); The first detection element (22) and the second detection element (23) are respectively disposed on the mounting base (21). The first detection element (22) has the first detection end (201), and the second detection element (23) has the second detection end (202).

3. The silicon rod size detection device according to claim 2, characterized in that, The first detection element (22) extends horizontally, and the second detection element (23) extends vertically, with the second detection element (23) located above the first detection element (22). The mounting base (21) includes a first mounting plate (211), a second mounting plate (212), and a connecting plate (213). The first mounting plate (211) extends horizontally, and the first detection element (22) is fixed on the first mounting plate (211). The second mounting plate (212) extends vertically, and the second detection element (23) is fixed on the second mounting plate (212). One end of the connecting plate (213) is connected to the first mounting plate (211), and the other end of the connecting plate (213) is connected to the second mounting plate (212).

4. The silicon rod size detection device according to claim 2, characterized in that, The driving component includes: A drive unit is disposed on the base (10), and the drive unit has an output end; A transmission structure is disposed between the output end and the mounting base (21). One end of the transmission structure is rotatably connected to the output end, and the other end of the transmission structure is drivenly connected to the mounting base (21) to drive the mounting base (21) to move relative to the base (10).

5. The silicon rod size detection device according to claim 4, characterized in that, The transmission structure includes: A lead screw is rotatably mounted on the base (10), the lead screw extends in the horizontal direction, and the output end is driven connected to the lead screw; A sliding sleeve is inserted through the outer periphery of the lead screw, the sliding sleeve is threadedly connected to the lead screw, and the sliding sleeve is disposed at the bottom of the mounting base (21); An anti-rotation part is disposed between the mounting base (21) and the base (10), and the anti-rotation part is used to restrict the sliding sleeve from rotating relative to the lead screw.

6. The silicon rod size detection device according to claim 5, characterized in that, The anti-rotation part includes: Two guide rails are spaced apart on the base (10) along the moving direction perpendicular to the mounting base (21), and the guide rails extend along the moving direction of the mounting base (21); Two grooves are spaced apart at the bottom of the mounting base (21). The two grooves correspond one-to-one with the two guide rails. The grooves engage with the guide rails. The mounting base (21) moves along the guide rails through the grooves. The grooves engage with the guide rails to restrict the rotation of the mounting base (21) relative to the base (10).

7. The silicon rod size detection device according to claim 4, characterized in that, The base (10) is provided with a protective cover (11) at its end. The protective cover (11) covers the side of the base (10) facing the mounting base (21). The protective cover (11) has an opening and a cavity that are interconnected. The opening faces the mounting base (21), and the drive unit is located in the cavity.

8. The silicon rod size detection device according to claim 3, characterized in that, The first detection element (22) includes a first driving element (221) and a first probe (222). The first driving element (221) is disposed on the first mounting plate (211). The first driving element (221) is driven to be connected to the first probe (222) to drive the first probe (222) to move relative to the base (10) in the horizontal direction. The second detection element (23) includes a second driving element (231) and a second probe (232). The second driving element (231) is disposed on the second mounting plate (212). The second driving element (231) is driven to connect with the second probe (232) to drive the second probe (232) to move relative to the base (10) in the vertical direction.

9. The silicon rod size detection device according to claim 8, characterized in that, The silicon rod size detection device further includes a first protective shell (31) and a second protective shell (32). The first protective shell (31) is fastened to the first mounting plate (211). At least part of the first detection element (22) is located inside the first protective shell (31). The end of the first probe (222) away from the first driving element (221) passes through the end of the first protective shell (31). The first driving element (221) drives the first probe (222) to extend or retract from the first protective shell (31). The second protective shell (32) is fastened to the second mounting plate (212), at least part of the second detection element (23) is located inside the second protective shell (32), the end of the second probe (232) away from the second driving element (231) passes through the end of the second protective shell (32), and the second driving element (231) drives the second probe (232) to extend or retract from the second protective shell (32).

10. The silicon rod size detection device according to claim 1, characterized in that, The silicon rod size detection device also includes a control system, which is connected to the detection unit (20) and the driving component to control the operation of the detection unit (20) and the driving component.

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