A micropore measuring device

Abstract

The application discloses a micropore measuring device, which comprises an optical measuring assembly, a fixing assembly and an upper computer. The optical measuring assembly comprises a laser part, a light splitting part, an objective part and a measuring part. The laser part is integrally provided with a collimating mirror. The light splitting part is arranged in the outgoing direction of the laser part and connected with the laser part. The objective part is arranged in the transmission direction of the light splitting part and connected with the light splitting part. The measuring part comprises a lens, a pinhole plate and a detector which are sequentially arranged in the reflection direction of the light splitting part. The lens is connected with the light splitting part. The pinhole plate is connected with an adjusting mechanism. The adjusting mechanism comprises a first adjusting plate and a second adjusting plate. The second adjusting plate is provided with a mounting cavity. The pinhole plate is arranged in the mounting cavity. The second adjusting plate is provided with a first adjusting part and a second adjusting part. The first adjusting part is used for adjusting the distance and angle of the pinhole plate relative to the first adjusting plate. The second adjusting part is used for adjusting the position of the pinhole plate in the mounting cavity. The fixing assembly comprises a sample table which is arranged in the outgoing direction of the objective part. The upper computer is connected with the laser part and the measuring part respectively.

Description

Technical Field

[0001] This application relates to the field of micropore measurement technology, and in particular to a micropore measurement device. Background Technology

[0002] With the advancement of manufacturing technology, applications in fields such as aerospace and defense are increasing, leading to a growing demand for precision machinery. Therefore, measurement technology for precision machinery has become crucial for improving accuracy. Currently, confocal microscopy is commonly used to measure micro-holes in precision machinery.

[0003] Confocal microscopes, with their tomographic scanning capabilities, can be used for three-dimensional object inspection and are commonly used in the semiconductor inspection industry. They consist of a laser unit, collimating lens, beam splitter, objective lens, stage, and detector. During operation, the laser beam, after collimation, is guided by the beam splitter to the objective lens and focused onto the surface of the sample. The reflected light returns along its original path, passing through a pinhole plate to form a pinhole image, which is then received by the detector to obtain sample size information, thus enabling measurement. However, current confocal microscopes have limitations in pinhole adjustment, resulting in suboptimal image quality and resolution. Summary of the Invention

[0004] This application aims to address at least one of the technical problems existing in the prior art. To this end, this application proposes a micro-hole measuring device that can adjust a pinhole plate through a first adjusting member and a second adjusting member, thereby adapting to objective lenses of different specifications, ensuring the quality of pinhole imaging, and improving the accuracy of measurement.

[0005] The micropore measuring device according to the embodiments of this application includes: an optical measuring assembly, comprising a laser unit, a beam splitter, an objective lens unit, and a measuring unit. The laser unit is integrated with a collimating lens. The beam splitter is located in the emission direction of the laser unit and connected to the laser unit. The objective lens is located in the transmission direction of the beam splitter and connected to the beam splitter. The measuring unit includes a lens, a pinhole plate, and a detector arranged sequentially along the reflection direction of the beam splitter. The lens is connected to the beam splitter. The pinhole plate is connected to an adjustment mechanism. The adjustment mechanism includes a first adjustment plate and a second adjustment plate. The second adjustment plate has a mounting cavity. The pinhole plate is disposed in the mounting cavity. The second adjustment plate has a first adjustment member and a second adjustment member. The first adjustment member is used to adjust the distance and angle of the pinhole plate relative to the first adjustment plate. The second adjustment member is used to adjust the position of the pinhole plate in the mounting cavity. A fixing assembly includes a sample stage, which is located in the emission direction of the objective lens unit and is used to place a sample. A host computer is electrically connected to the laser unit and the measuring unit, respectively.

[0006] The micropore measuring device according to the embodiments of this application has at least the following beneficial effects: During measurement, the laser unit emits a light beam, which is reflected by the beam splitter and focused onto the sample on the sample stage by the objective lens unit. The reflected light then passes through the objective lens unit and the beam splitter unit again, is focused by the lens, and forms a pinhole image through the pinhole plate, thus forming a clear image on the detector. The detector transmits the image information to the host computer, thereby realizing the measurement of the micropore. During the measurement process, the distance and angle between the pinhole plate and the first adjustment plate can be adjusted by the first adjustment component, and the position of the pinhole plate in the mounting cavity can also be adjusted by the second adjustment component, thereby adapting to objective lenses of different specifications, ensuring the quality of pinhole imaging, and improving the accuracy of measurement.

[0007] According to the micropore measuring device described in the embodiments of this application, four first adjusting members are provided and located in the first direction of the second adjusting plate, the four first adjusting members are respectively provided around the second adjusting plate, and two second adjusting members are provided and respectively provided in the second direction and the third direction of the second adjusting plate.

[0008] According to the micropore measuring device described in the embodiments of this application, the first adjusting plate is provided with a first light shield, and the end of the lens extends into the first light shield.

[0009] According to the micro-hole measuring device described in the embodiments of this application, the laser unit includes a laser fixture and a laser, the laser is disposed on the laser fixture, the beam splitter is connected to the laser fixture, and the collimating lens is integrated on the laser.

[0010] According to the micro-aperture measuring device described in the embodiments of this application, the beam splitting part includes a beam splitting clamp and a beam splitter. The beam splitting clamp includes a first clamping unit, a second clamping unit, and a third clamping unit. The first clamping unit, the second clamping unit, and the third clamping unit cooperate to clamp and fix the beam splitter. The laser part, the objective lens part, and the measuring part are respectively connected to the first clamping unit, the second clamping unit, and the third clamping unit.

[0011] According to the micropore measuring device described in the embodiments of this application, the objective lens section includes a base and an objective lens, the base is connected to the beam splitter section, and the objective lens is disposed on the base.

[0012] According to the micropore measuring device described in the embodiments of this application, the fixed base is provided with a second light shield, the second light shield is connected to the beam splitter, and the objective lens passes through the second light shield.

[0013] According to the micropore measuring device described in the embodiments of this application, the fixing component further includes a driving unit, which is connected to the sample stage and can drive the sample stage to move.

[0014] According to the micropore measuring device described in the embodiments of this application, the driving unit includes a base, a first moving stage, a second moving stage, and a third moving stage. The first moving stage is slidably disposed on the base and moves along a first direction. The second moving stage is slidably disposed on the first moving stage and can move along a second direction. The third moving stage is vertically disposed on the second moving stage and can move along a third direction. The sample stage is disposed on the third moving stage.

[0015] According to the micropore measuring device described in the embodiments of this application, the second movable stage is provided with a mounting base, the mounting base is rotatably provided with a rotating block, the rotating block is provided with a protruding block, the third movable stage is provided with an abutting block, and the rotating block rotates, causing the protruding block to lift the third movable stage through the abutting block.

[0016] Additional aspects and advantages of this application will be set forth in the description which follows, and will become apparent from the description or may be learned by practice of this application. Attached Figure Description

[0017] The present application will be further described below with reference to the accompanying drawings and embodiments, wherein: Figure 1 This is a schematic diagram of the structure of the micropore measuring device according to an embodiment of this application; Figure 2 This is a schematic diagram of the optical measurement component in the micro-aperture measurement device according to an embodiment of this application; Figure 3 This is an exploded view of the optical measurement component in the micropore measurement device according to an embodiment of this application; Figure 4 This is a schematic diagram of the fixing component in the micropore measuring device according to an embodiment of this application.

[0018] Figure label: Laser unit 100; laser mounting base 110; laser 120; beam splitter 200; beam splitter holder 210; first holding unit 211; second holding unit 212; third holding unit 213; beam splitter 220; objective lens unit 300; mounting base 310; objective lens 320; second light shield 330; device holder 340; measuring unit 400; lens 410; pinhole plate 420; detector 430; first adjusting plate 440; second adjusting plate 450; first adjusting component 460; second adjusting component 470; first light shield 480; sample stage 510; drive unit 520; base 521; first moving stage 522; second moving stage 523; third moving stage 524; mounting base 525; rotating block 526; first drive component 527; second drive component 528; third drive component 529; host computer 600. Detailed Implementation

[0019] The embodiments of this application are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this application, and should not be construed as limiting this application.

[0020] In the description of this application, it should be understood that the orientation descriptions, such as up, down, front, back, left, right, etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0021] In the description of this application, "several" means one or more, "more than" means two or more, "greater than," "less than," and "exceeding" are understood to exclude the stated number, while "above," "below," and "within" are understood to include the stated number. The use of "first" and "second" in the description is merely for distinguishing technical features and should not be construed as indicating or implying relative importance, or implicitly indicating the number of indicated technical features, or implicitly indicating the order of the indicated technical features.

[0022] In the description of this application, unless otherwise expressly defined, terms such as "setting," "installation," and "connection" should be interpreted broadly. Those skilled in the art can reasonably determine the specific meaning of these terms in this application based on the specific content of the technical solution. In the description of this application, the terms "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described can be combined in any suitable manner in one or more embodiments or examples. In the description of this specification, the terms "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0023] Reference Figures 1 to 4 This application provides a micro-hole measurement device, including: an optical measurement assembly comprising a laser unit 100, a beam splitter 200, an objective lens 300, and a measurement unit 400. The laser unit 100 is integrated with a collimating lens. The beam splitter 200 is disposed in the emission direction of the laser unit 100 and connected to the laser unit 100. The objective lens 300 is disposed in the transmission direction of the beam splitter 200 and connected to the beam splitter 200. The measurement unit 400 includes a lens 410, a pinhole plate 420, and a detector 430 arranged sequentially along the reflection direction of the beam splitter 200. The lens 410 is connected to the beam splitter 200. The pinhole plate 420 is connected to an adjustment mechanism, which includes... The system includes a first adjusting plate 440 and a second adjusting plate 450. The second adjusting plate 450 has a mounting cavity, and a pinhole plate 420 is disposed in the mounting cavity. The second adjusting plate 450 is provided with a first adjusting member 460 and a second adjusting member 470. The first adjusting member 460 is used to adjust the distance and angle between the pinhole plate 420 and the first adjusting plate 440, and the second adjusting member 470 is used to adjust the position of the pinhole plate 420 in the mounting cavity. The system also includes a fixing assembly, including a sample stage 510, which is disposed in the emission direction of the objective lens section 300 and is used to place the sample. The system also includes a host computer 600, which is electrically connected to the laser section 100 and the measuring section 400, respectively.

[0024] During measurement, the laser unit 100 emits a light beam, which is reflected by the beam splitter 200 and focused onto the sample on the sample stage 510 by the objective lens unit 300. The reflected light then passes through the objective lens unit 300 and the beam splitter 220 again, is focused by the lens 410, and forms a pinhole image through the pinhole plate 420, creating a clear image on the detector 430. The detector 430 transmits the image information to the host computer 600, thereby realizing the measurement of the microhole. During the measurement process, the distance and angle between the pinhole plate 420 and the first adjustment plate 440 can be adjusted by the first adjustment component 460, and the position of the pinhole plate 420 within the mounting cavity can be adjusted by the second adjustment component 470, thus adapting to different specifications of the objective lens 320, ensuring the quality of the pinhole image, and improving the accuracy of the measurement.

[0025] The host computer 600 is controlled only by a simple trigger control. Therefore, the control method of the host computer 600 is not within the scope of protection of this application and belongs to the prior art. This application mainly protects the connection relationship between various components. Reference Figures 1 to 3Furthermore, four first adjusting members 460 are provided and located in the first direction of the second adjusting plate 450, with the four first adjusting members 460 respectively arranged around the second adjusting plate 450. Two second adjusting members 470 are provided and respectively arranged in the second and third directions of the second adjusting plate 450. Both the first adjusting members 460 and the second adjusting members 470 are micrometers, thereby improving measurement accuracy. By providing four first adjusting members 460 arranged around the second adjusting plate 450 and two second adjusting members 470 respectively located in the second and third directions of the second adjusting plate 450, during the measurement process, not only can any one or more of the first adjusting members 460 be adjusted to achieve adjustment of the angle and / or distance between the pinhole plate 420 and the first adjusting plate 440, but also the position of the pinhole plate 420 within the mounting cavity can be adjusted, thereby adapting to objective lenses 320 of different specifications, ensuring the quality of pinhole imaging, and improving measurement accuracy.

[0026] It is conceivable that the first adjustment plate 440 is provided with a first light shield 480, and the end of the lens 410 extends into the first light shield 480, thereby blocking external light, improving the focusing efficiency of the lens 410, and making the pinhole imaging clearer.

[0027] Reference Figures 1 to 3 The laser unit 100 includes a laser mounting base 310110 and a laser 120. The laser 120 is mounted on the laser mounting base 310110, and the beam splitter 200 is connected to the laser mounting base 310110. A collimating lens is integrated into the laser 120. The laser mounting base 310110 has a first light-transmitting hole. The laser 120 emits a beam, which is collimated into a parallel beam by the collimating lens and then exits through the first light-transmitting hole. It is conceivable that the laser mounting base 310110 has a groove into which the laser 120 is embedded, facilitating quick installation and positioning, resulting in a simple structure and easy operation.

[0028] Reference Figures 1 to 3The beam splitter 200 includes a beam splitter holder 210 and a beam splitter 220. The beam splitter holder 210 includes a first clamping unit 211, a second clamping unit 212, and a third clamping unit 213. The first clamping unit 211, the second clamping unit 212, and the third clamping unit 213 cooperate to clamp and fix the beam splitter 220. The laser unit 100, the objective lens unit 300, and the measuring unit 400 are respectively connected to the first clamping unit 211, the second clamping unit 212, and the third clamping unit 213. Among them, the first clamping unit 211 is threadedly connected to the laser mounting base 310110, making disassembly and assembly easier. Specifically, the first clamping unit 211, the second clamping unit 212, and the third clamping unit 213 cooperate to form an inclined receiving cavity. Each of the first clamping unit 211, the second clamping unit 212, and the third clamping unit 213 is provided with a second light-transmitting hole. The beam splitter 220 is disposed within the receiving cavity, thereby realizing the installation of the beam splitter 220. Specifically, the light beam emitted by the laser unit 100 is directed onto the beam splitter 220 via the first clamping unit 211. The light beam transmitted through the beam splitter 220 exits from the second clamping unit 212 to act on the sample. The sample reflects the light beam back to the beam splitter 220, and after reflection by the beam splitter 220, it exits from the third clamping unit 213 for pinhole imaging.

[0029] It is easy to understand that the first clamping unit 211, the second clamping unit 212, and the third clamping unit 213 are fixedly installed with screws, which is simple in structure and stable in connection. It also facilitates the disassembly and assembly of the beam splitter 220, improving the efficiency of subsequent maintenance. Of course, the first clamping unit 211, the second clamping unit 212, and the third clamping unit 213 can also be connected by clips or adhesive, etc., and this application does not limit this.

[0030] Reference Figures 1 to 3 The objective lens section 300 includes a mounting base 310 and an objective lens 320. The mounting base 310 is connected to the beam splitter 200, and the objective lens 320 is disposed on the mounting base 310. The mounting base 310 is provided with a second light shield 330, which is connected to the beam splitter 200, and the objective lens 320 passes through the second light shield 330. By providing the second light shield 330, external light can be blocked, improving the focusing efficiency of the objective lens 320 and increasing the accuracy of the measurement. Furthermore, the top of the second light shield 330 is threadedly connected to the beam splitter 200, and the bottom of the second light shield 330 is threadedly connected to the mounting base 310, resulting in a simple structure and stable connection. It is understood that the second light shield 330 is provided with a device holder 340, which is used to mount the entire structure onto a support, resulting in a simple structure and convenient operation.

[0031] It should be noted that the second light shield 330 and the beam splitter 200 and / or the mounting base 310 can also be connected by screws, snap-fit ​​connections or integral molding, and the objective lens 320 and the mounting base 310 can be connected by snap-fit ​​or adhesive, etc. This application does not limit this.

[0032] Reference Figure 1 and Figure 4 In some embodiments of this application, the fixing component further includes a drive unit 520, which is connected to the sample stage 510 and can drive the sample stage 510 to move. Specifically, the drive unit 520 includes a base 521, a first moving stage 522, a second moving stage 523, and a third moving stage 524. The first moving stage 522 is slidably disposed on the base 521 and can move along a first direction. The second moving stage 523 is slidably disposed on the first moving stage 522 and can move along a second direction. The third moving stage 524 is vertically disposed on the second moving stage 523 and can move along a third direction. The sample stage 510 is disposed on the third moving stage 524. Furthermore, the base 521 is provided with a first driving member 527, which is connected to the first movable stage 522, causing the first driving member 527 to drive the first movable stage 522 to move along a first direction; the first movable stage 522 is provided with a second driving member 528, which is connected to the second movable stage 523, causing the second driving member 528 to drive the second movable stage 523 to move along a second direction; the second movable stage 523 is provided with a mounting base 525, and the mounting base 525 is provided with a third driving member. The third moving stage 524 is located above the mounting plate, and the mounting base 525 is rotatably equipped with a rotating block 526. The rotating block 526 is equipped with a protruding block. The telescopic end of the third driving member 529 is connected to the rotating block 526. The third moving stage 524 is equipped with an abutment block, and the protruding block and the abutment block are connected in a cooperative manner. When the third driving member 529 drives the rotating block 526 to rotate, the protruding block will lift the third moving stage 524 through the abutment block, thereby realizing the movement of the third moving stage 524 in a third direction. Among them, the first driving member 527, the second driving member 528, and the third driving member 529 are all set as micrometers, which can achieve micron-level displacement. At this time, the operator can view the optical power in real time. Compared with related technologies, it can reduce the delay of mechanical inertia driven by the motor and improve the speed of trial and error and dynamic alignment.

[0033] The embodiments of this application have been described in detail above with reference to the accompanying drawings. However, this application is not limited to the above embodiments. Within the scope of knowledge possessed by those skilled in the art, various changes can be made without departing from the spirit of this application.

Claims

1. A micropore measuring device, characterized in that, include: An optical measurement assembly includes a laser unit, a beam splitter, an objective lens unit, and a measurement unit. The laser unit integrates a collimating lens. The beam splitter is positioned in the emission direction of the laser unit and connected to it. The objective lens is positioned in the transmission direction of the beam splitter and is detachably connected to it. The measurement unit includes a lens, a pinhole plate, and a detector arranged sequentially along the reflection direction of the beam splitter. The lens is connected to the beam splitter. The pinhole plate is connected to an adjustment mechanism. The adjustment mechanism includes a first adjustment plate and a second adjustment plate. The second adjustment plate has a mounting cavity. The pinhole plate is disposed within the mounting cavity. The second adjustment plate has a first adjustment member and a second adjustment member. The first adjustment member is used to adjust the distance and angle of the pinhole plate relative to the first adjustment plate. The second adjustment member is used to adjust the position of the pinhole plate within the mounting cavity. A fixing assembly includes a sample stage, which is disposed in the exit direction of the objective lens and is used to place a sample. The host computer is electrically connected to the laser unit and the measurement unit, respectively.

2. The micropore measuring device according to claim 1, characterized in that, The first adjusting member is provided in four parts and is located in the first direction of the second adjusting plate. The four first adjusting members are respectively provided around the second adjusting plate. The second adjusting member is provided in two parts and is respectively provided in the second direction and the third direction of the second adjusting plate.

3. The micropore measuring device according to claim 2, characterized in that, The first adjustment plate is provided with a first light shield, and the end of the lens extends into the first light shield.

4. The micropore measuring device according to claim 1, characterized in that, The laser unit includes a laser mounting base and a laser. The laser is mounted on the laser mounting base, the beam splitter is connected to the laser mounting base, and the collimating lens is integrated into the laser.

5. The micropore measuring device according to claim 1, characterized in that, The beam splitting section includes a beam splitter holder and a beam splitter. The beam splitter holder includes a first clamping unit, a second clamping unit, and a third clamping unit. The first clamping unit, the second clamping unit, and the third clamping unit cooperate to clamp and fix the beam splitter. The laser section, the objective lens section, and the measurement section are respectively connected to the first clamping unit, the second clamping unit, and the third clamping unit.

6. The micropore measuring device according to claim 1, characterized in that, The objective lens section includes a mounting base and an objective lens. The mounting base is connected to the beam splitter, and the objective lens is disposed on the mounting base.

7. The micropore measuring device according to claim 6, characterized in that, The mounting base is provided with a second light shield, which is connected to the beam splitter, and the objective lens passes through the second light shield.

8. The micropore measuring device according to claim 1, characterized in that, The fixing component also includes a driving unit, which is connected to the sample stage and can drive the sample stage to move.

9. The micropore measuring device according to claim 8, characterized in that, The driving unit includes a base, a first movable stage, a second movable stage, and a third movable stage. The first movable stage is slidably disposed on the base and moves along a first direction. The second movable stage is slidably disposed on the first movable stage and can move along a second direction. The third movable stage is lifted and lowered on the second movable stage and can move along a third direction. The sample stage is disposed on the third movable stage.

10. The micropore measuring device according to claim 9, characterized in that, The second movable platform is provided with a mounting base, the mounting base is rotatably provided with a rotating block, the rotating block is provided with a protruding block, the third movable platform is provided with an abutting block, and the rotating block rotates so that the protruding block lifts the third movable platform through the abutting block.

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