An alignment device for a gas rod core chip

Abstract

The utility model provides a kind of alignment device for gas rod core chip, it is related to electron microscope field.It is integrated with limiting component and fine adjustment component by pedestal, the first limiting portion and the second limiting portion formed by limiting component can respectively fix the stem body and cover body of gas rod, the first limiting portion is set in the top of the support portion of fine adjustment component, the second limiting portion is set in the top of the adjusting portion of fine adjustment component;Further, the support portion is rigidly connected with pedestal, adjusting portion is movably connected with pedestal, so by driving mechanism then can drive adjusting portion, second limiting portion and cover body (relative to fixed stem body) synchronous displacement.In addition, the device is also equipped with detection component, it is formed with the detection end corresponding with the chip in gas rod, and the display end capable of displaying the image detected by detection end, to facilitate real-time monitoring whether chip window is aligned.

Description

Technical Field

[0001] This application relates to the field of electron microscopy, and in particular to an alignment device for a gas rod chip. Background Technology

[0002] A gas rod is an accessory installed inside the chamber of an electron microscope. Its head contains a large chip, and a corresponding cover contains a smaller chip. During assembly, the relative positions of the cover and the rod need to be adjusted to align the large and small chips, with an adjustment accuracy of less than 0.2 mm. Currently, the relative positions of the cover and the rod are usually adjusted manually with the aid of a magnifying glass. This results in low alignment accuracy between the two chips and is detrimental to maintaining the cleanliness of the chip's environment. Utility Model Content

[0003] In view of this, the purpose of this application is to provide an alignment device for gas rod chips, so as to solve the problems of low accuracy and inability to maintain the cleanliness of the chip environment in existing manual alignment methods.

[0004] To achieve the above objectives, this utility model provides an alignment device for gas rod chips, wherein the alignment device for gas rod chips comprises: Base; A limiting component is formed having a first limiting part corresponding to the rod body of the gas rod and a second limiting part corresponding to the cover of the gas rod. The rod body is provided with a first chip, and the cover is provided with a second chip. The fine-tuning component includes a support part, an adjustment part, and a drive mechanism. The support part is rigidly connected to the base, and the first limiting part is disposed on the top of the support part. The adjustment part is movably connected to the base, and the second limiting part is disposed on the top of the adjustment part. The drive mechanism can drive the adjustment part, the second limiting part, and the cover to move synchronously relative to the rod. The detection component has a detection end corresponding to the first chip and the second chip, and a display end corresponding to the detection end.

[0005] Preferably, the fine-tuning component includes an adjustment plate, the support portion is formed at the center of the adjustment plate, and the adjustment portion is formed at the outer end of the adjustment plate, so that the support portion and the adjustment portion are distributed in a radiating structure, and the adjustment portion is arranged around the support portion.

[0006] Preferably, along the distribution direction of the support portion and the adjustment portion, a fine-tuning portion is formed near the inner end of the support portion of the adjustment portion; the fine-tuning portion includes a plurality of strip-shaped through holes, and the plurality of through holes form a U-shaped structure.

[0007] Preferably, the adjusting plate is connected to the base via a support block, which is disposed at the bottom of the supporting part, so that the adjusting part is suspended above the base.

[0008] Preferably, the drive mechanism includes a housing disposed on the top of the base and a power unit rotatably connected to the housing. The power unit has multiple power input ends and a power output end, and the power output end is correspondingly connected to the outer end of the adjustment part away from the support part.

[0009] Preferably, the power unit includes a plurality of transmission shafts that are rotatably connected to the housing respectively, and a gear is sleeved on the outer side of each transmission shaft, and the plurality of gears mesh sequentially along the arrangement direction of the transmission shafts; The transmission shafts located at both ends of the transmission shaft arrangement direction are designated as a first transmission shaft and a second transmission shaft, respectively. The end of the first transmission shaft or the second transmission shaft closer to the adjustment part is formed as the power output end, and the end of the first transmission shaft and the second transmission shaft away from the adjustment part is formed as the power input end.

[0010] Preferably, the limiting component includes a support block fixed to the top of the support portion, and the top of the support block is formed with a limiting groove corresponding to the rod body, so as to serve as the first limiting portion; The support block and the support portion are formed with a first light-transmitting hole corresponding to the first chip inside the rod body.

[0011] Preferably, the limiting component includes a pressure plate fixed to the top of the adjusting part, and the bottom of the pressure plate is formed with a limiting post corresponding to the mounting hole of the cover body, so as to serve as the second limiting part; The pressure plate has a second light-transmitting hole corresponding to the second chip inside the cover body.

[0012] Preferably, the detection component includes a microscope, which is connected to the base via a moving mechanism; the lens end of the microscope is formed as the detection end.

[0013] Preferably, the detection component further includes a display screen that is electrically or communicatively connected to the microscope, serving as the display end.

[0014] According to the present invention, an alignment device for a gas rod chip integrates a limiting component and a fine-tuning component via a base. The first limiting part and the second limiting part formed by the limiting component respectively fix the rod body and the cover of the gas rod. The first limiting part is located at the top of the support part of the fine-tuning component, and the second limiting part is located at the top of the adjustment part of the fine-tuning component. Furthermore, the support part is rigidly connected to the base, and the adjustment part is movably connected to the base. Thus, a driving mechanism can synchronously displace the adjustment part, the second limiting part, and the cover (relative to the fixed rod body). In addition, the device is equipped with a detection component, which has a detection end corresponding to the chip inside the gas rod and a display end capable of displaying the image detected by the detection end, facilitating real-time monitoring of chip alignment.

[0015] In this way, the gas rod chip can be precisely aligned by using the limiting component, the fine-tuning component, and the detection component. Compared with the manual alignment method, this device has higher adjustment accuracy, and since the operator does not come into contact with the gas rod, it can effectively maintain the cleanliness of the environment in which the chip is located.

[0016] To make the above-mentioned objectives, features and advantages of this application more apparent and understandable, preferred embodiments are described below in detail with reference to the accompanying drawings. Attached Figure Description

[0017] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 This is a partial schematic diagram of a gas rod according to an embodiment of the present invention; Figure 2 This is a schematic diagram of an alignment device for a gas rod chip according to an embodiment of the present invention; Figure 3 This is a partial schematic diagram of an alignment device for a gas rod chip according to an embodiment of the present invention; Figure 4 This is another schematic diagram of an alignment device for a gas rod chip according to an embodiment of the present invention; Figure 5 This is a schematic diagram of the adjustment plate according to an embodiment of the present utility model; Figure 6 This is a schematic diagram of the drive mechanism according to an embodiment of the present utility model; Figure 7 This is a schematic diagram of a support block according to an embodiment of the present invention.

[0019] Icons: 11-rod; 12-cover; 21-base; 22-base plate; 31-adjusting plate; 311-support part; 3111-first light-transmitting hole; 312-adjusting part; 3121-through hole; 32-drive mechanism; 321-housing shell; 322-drive shaft; 323-gear; 324-power input end; 325-power output end; 41-support block; 411-first limiting part; 42-locking part; 43-first pressure plate; 431-guide post; 432-reset spring; 44-second pressure plate; 441-second limiting part; 442-second light-transmitting hole; 51-microscope; 52-display screen. Detailed Implementation

[0020] The following detailed embodiments are provided to help the reader gain a comprehensive understanding of the methods, apparatus, and / or systems described herein. However, various changes, modifications, and equivalents of the methods, apparatus, and / or systems described herein will be apparent after understanding the disclosure of this application. For example, the order of operations described herein is merely illustrative and is not limited to the order set forth herein; changes that will be apparent after understanding the disclosure of this application are possible, except for operations that must occur in a specific order. Furthermore, for clarity and brevity, descriptions of features known in the art may be omitted.

[0021] The features described herein may be implemented in different forms and should not be construed as being limited to the examples described herein. Rather, the examples described herein have been provided merely to illustrate some of the many feasible ways of implementing the methods, apparatus, and / or systems described herein that will be apparent upon understanding the disclosure of this application.

[0022] Throughout the specification, when an element (such as a layer, region, or substrate) is described as being "on" another element, "connected to" another element, "bonded to" another element, "on" another element, or "covering" another element, it may be directly "on" another element, "connected to" another element, "bonded to" another element, "on" another element, or "covering" another element, or there may be one or more other elements in between. In contrast, when an element is described as being "directly on" another element, "directly connected to" another element, "directly bonded to" another element, "directly on" another element, or "directly covering" another element, there may be no other elements in between.

[0023] As used herein, the term “and / or” includes any one of the relevant items listed and any combination of any two or more items.

[0024] Although terms such as “first,” “second,” and “third” may be used herein to describe individual components, assemblies, regions, layers, or parts, these components, assemblies, regions, layers, or parts are not limited by these terms. Rather, these terms are used only to distinguish one component, assembly, region, layer, or part from another. Therefore, without departing from the teachings of the examples described herein, the first component, assembly, region, layer, or part referred to as the second component, assembly, region, layer, or part may also be referred to as the second component, assembly, region, layer, or part.

[0025] For ease of description, spatial relation terms such as “above,” “upper,” “below,” and “lower” are used herein to describe the relationship between one element and another, as shown in the accompanying drawings. Such spatial relation terms are intended to include not only the orientation depicted in the drawings but also different orientations of the device during use or operation. For example, if the device in the drawings is flipped, an element described as being “above” or “upper” relative to another element will subsequently be “below” or “lower” relative to that other element. Therefore, the term “above” includes both “above” and “below” orientations depending on the spatial orientation of the device. The device may also be positioned in other ways (e.g., rotated 90 degrees or in other orientations), and the spatial relation terms used herein will be interpreted accordingly.

[0026] The terminology used herein is for the purpose of describing various examples only and is not intended to limit this disclosure. Unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. The terms “comprising,” “including,” and “having” enumerate the stated features, quantities, operations, components, elements, and / or combinations thereof, but do not exclude the presence or addition of one or more other features, quantities, operations, components, elements, and / or combinations thereof.

[0027] Variations in the shapes shown in the accompanying drawings may occur due to manufacturing techniques and / or tolerances. Therefore, the examples described herein are not limited to the specific shapes shown in the accompanying drawings, but include changes in shape that may occur during manufacturing.

[0028] The features of the examples described herein can be combined in various ways that will be apparent upon understanding the disclosure of this application. Furthermore, although the examples described herein have a wide variety of constructions, other constructions are possible, as will be apparent upon understanding the disclosure of this application.

[0029] This invention provides an alignment device for a gas rod chip, comprising a base, a limiting component, a fine-tuning component, and a detection component. The limiting component can respectively limit and fix the rod body 11 and the cover 12 of the gas rod. The fine-tuning component can adjust the relative position of the cover 12 and the rod body 11, so that the chip in the rod body 11 is aligned with or forms a preset deviation from the cover 12. During the adjustment of the cover 12 position, the detection component can monitor the relative position of the cover 12 and the rod 11 in real time. The specific structure of the alignment device for a gas rod chip according to this invention will be described in detail below. It should be noted that the gas rod is an existing component, such as... Figure 1 As shown, its specific structure will not be described in detail.

[0030] In this embodiment, as Figures 2 to 4 As shown, the base includes a base 21 and a base plate 22 fixed to the top of the base 21. A limiting component and a fine-tuning component are both disposed on the top of the base plate 22, while a detection component is connected to the top of the base 21. Specifically, the fine-tuning component includes an adjustment plate 31, such as... Figure 5 As shown, the center of the adjusting plate 31 forms a support portion 311, and the outer end of the adjusting plate 31 forms an adjusting portion 312. That is, the support portion 311 and the adjusting portion 312 are actually distributed in a radiating structure, with the adjusting portion 312 surrounding the support portion 311. Further, along the distribution direction of the support portion 311 and the adjusting portion 312, a fine-tuning portion is formed near the inner end of the adjusting portion 312 close to the support portion 311. The fine-tuning portion specifically includes multiple strip-shaped through holes 3121, and the multiple strip-shaped through holes 3121 form a U-shaped structure (in this embodiment, the through holes 3121 are formed into a U-shaped bent structure, and two through holes 3121 are grouped together to form a U-shaped structure).

[0031] It should be noted that the strip-shaped through hole 3121 breaks the rigid connection between the support part 311 and the adjusting part 312, which can, to a certain extent, disrupt the overall rigidity of the support plate. Therefore, when the adjusting part 312 is subjected to external force, it can deform, meaning it can displace relative to the support part 311. Furthermore, in this embodiment, the bent through hole 3121 does not completely disconnect the support part 311 and the adjusting part 312, thus maintaining the integral structure of the adjusting plate 31. However, the specific shape, number, and specifications of the through hole 3121 are not limited, as long as the aforementioned technical effects are achieved.

[0032] To further enhance the adjustment effect of the adjustment part 312, a corresponding support block is provided at the bottom of the support part 311, and the support part 311, the support block and the base plate 22 are connected accordingly (by bolts or other connectors or welding). This can further improve the stability of the support part 311 and make the adjustment part 312 suspended above the base plate 22, thereby improving the adjustability of the adjustment part 312.

[0033] In this embodiment, the relative displacement between the adjustment part 312 and the support part 311 is adjusted by the drive mechanism 32. For example... Figures 2 to 5 As shown, the adjustment plate 31 in this embodiment has four edges. Correspondingly, four drive mechanisms 32 are provided to correspond to the adjustment plate 31. This ensures the stability of the adjustment part 312 when it is driven to move, and also allows the adjustment part 312 to have multiple movable directions, thereby improving the alignment accuracy of the device. Specifically, the drive mechanism 32 includes a housing 321 disposed on the top of the base plate 22 and a power part rotatably connected to the housing 321. The power part has multiple power input ends 324 and one power output end 325. The power output end 325 is correspondingly connected to the outer end of the adjustment part 312 away from the support part 311.

[0034] More specifically, such as Figure 6 As shown, the power unit includes multiple drive shafts 322 rotatably connected to the housing 321, each extending toward a corresponding side of the adjustment plate 31. Furthermore, a gear 323 is fitted onto the outer side of each drive shaft 322, and the multiple gears 323 mesh sequentially along the arrangement direction of the drive shafts 322. The drive shafts 322 located at opposite ends of the arrangement direction are designated as a first drive shaft 322 and a second drive shaft 322. The end of the first drive shaft 322 or the second drive shaft 322 closest to the adjustment unit 312 is formed as a power output end 325, and the end of the first drive shaft 322 or the second drive shaft 322 furthest from the adjustment unit 312 is formed as a power input end 324. Further, the multiple gears 323 can be configured with different specifications, thereby changing the adjustment precision of the drive mechanism 32 by rotating different power input ends 324.

[0035] When necessary, such as Figure 2 As shown, in this embodiment, based on the installation position of each component, the two drive mechanisms 32 are connected to the adjustment plate 31 via rotating shafts and connecting rods, which facilitates the operator's turning.

[0036] In this embodiment, as Figures 3 to 4 and Figure 7As shown, the limiting assembly includes a support block 41 fixed to the top of the support portion 311. The top of the support block 41 has a limiting groove corresponding to the rod 11, serving as a first limiting portion 411. Furthermore, an opening is formed on the side of the limiting groove, allowing for further fixation of the rod 11 via an L-shaped locking member 42, thus fixing the rod 11 to the support portion 311. As shown, the top of the base 21 also has a third limiting portion detachably connected to the tail end of the rod 11. The support block 41, the support portion 311, and the base form a first light-transmitting hole 3111 corresponding to the first chip inside the rod 11.

[0037] In addition, such as Figures 3 to 4 As shown, the limiting assembly includes a pressure plate fixed to the top of the adjusting part 312. This pressure plate has a split structure, comprising a C-shaped first pressure plate 43 and a long strip-shaped second pressure plate 44. The first pressure plate 43 is rotatably connected to the adjusting plate 31 to facilitate the placement and removal of the gas rod. Furthermore, the first pressure plate 43 is provided with a guide post 431 for easy mounting of the second pressure plate 44 and a return spring 432 for easy disassembly of the second pressure plate 44. The second pressure plate 44 has a limiting post corresponding to the mounting hole of the cover 12. When the second pressure plate 44 is assembled with the first pressure plate 43, the limiting post can be inserted into the cover 12 to serve as a second limiting part 441, thereby allowing the adjusting part 312 to drive the pressure plate and the cover 12 to move synchronously. Additionally, the second pressure plate 44 has a second light-transmitting hole 442 corresponding to the second chip inside the cover 12.

[0038] In this embodiment, as Figure 2 As shown, the detection assembly includes a microscope 51, with its lens end forming the detection end. The microscope 51 is connected to the base via a moving mechanism. This moving mechanism can be a multi-axis robotic arm, enabling the adjustment of the microscope 51's lens position so that the microscope 51 can clearly and accurately capture the state of the gas rod chip. Furthermore, the detection assembly also includes a display screen 52 and a camera, which are electrically or communicatively connected to the microscope 51. The display screen 52 serves as the display end of the detection assembly, allowing the operator to monitor the chip's position in real time during adjustment, ensuring the accuracy of the adjustment.

[0039] According to the present invention, the alignment device for gas rod chips as described above integrates a limiting component and a fine-tuning component via a base. The first limiting part 411 and the second limiting part 441 formed by the limiting component can respectively fix the rod body 11 and the cover 12 of the gas rod. The first limiting part 411 is disposed on the top of the support part 311 of the fine-tuning component, and the second limiting part 441 is disposed on the top of the adjustment part 312 of the fine-tuning component. Furthermore, the support part 311 is rigidly connected to the base, and the adjustment part 312 is movably connected to the base. Thus, the driving mechanism 32 can synchronously displace the adjustment part 312, the second limiting part 441, and the cover 12 (relative to the fixed rod body 11). In addition, the device is also equipped with a detection component, which forms a detection end corresponding to the chip inside the gas rod and a display end capable of displaying the image detected by the detection end, so as to monitor the chip alignment in real time.

[0040] In this way, the gas rod chip can be precisely aligned by using the limiting component, the fine-tuning component, and the detection component. Compared with the manual alignment method, this device has higher adjustment accuracy, and since the operator does not come into contact with the gas rod, it can effectively maintain the cleanliness of the environment in which the chip is located.

[0041] Finally, it should be noted that the above-described embodiments are merely specific implementations of this application, used to illustrate the technical solutions of this application, and not to limit them. The protection scope of this application is not limited thereto. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that any person skilled in the art can still modify or easily conceive of changes to the technical solutions described in the foregoing embodiments, or make equivalent substitutions for some of the technical features, within the technical scope disclosed in this application. Such modifications, changes, or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this application, and should all be covered within the protection scope of this application. Therefore, the protection scope of this application should be defined by the protection scope of the claims.

Claims

1. An alignment device for gas rod chips, characterized in that, The alignment device for the gas rod chip includes: Base; A limiting component is formed having a first limiting part corresponding to the rod body of the gas rod and a second limiting part corresponding to the cover of the gas rod. The rod body is provided with a first chip, and the cover is provided with a second chip. The fine-tuning component includes a support part, an adjustment part, and a drive mechanism. The support part is rigidly connected to the base, and the first limiting part is disposed on the top of the support part. The adjustment part is movably connected to the base, and the second limiting part is disposed on the top of the adjustment part. The drive mechanism can drive the adjustment part, the second limiting part, and the cover to move synchronously relative to the rod. The detection component has a detection end corresponding to the first chip and the second chip, and a display end corresponding to the detection end.

2. The alignment device for gas rod chips according to claim 1, characterized in that, The fine-tuning component includes an adjustment plate, with the support portion formed at the center of the adjustment plate and the adjustment portion formed at the outer end of the adjustment plate, such that the support portion and the adjustment portion are distributed in a radiating structure, and the adjustment portion is arranged around the support portion.

3. The alignment device for gas rod chips according to claim 2, characterized in that, Along the distribution direction of the support portion and the adjustment portion, a fine-tuning portion is formed near the inner end of the support portion of the adjustment portion; the fine-tuning portion includes a plurality of strip-shaped through holes, and the plurality of through holes form a U-shaped structure.

4. The alignment device for gas rod chips according to claim 2, characterized in that, The adjustment plate is connected to the base via a support block, which is located at the bottom of the support portion, so that the adjustment portion is suspended above the base.

5. The alignment device for gas rod chips according to claim 2, characterized in that, The drive mechanism includes a housing disposed on the top of the base and a power unit rotatably connected to the housing. The power unit has multiple power input ends and one power output end, and the power output end is connected to the outer end of the adjustment part away from the support part.

6. The alignment device for gas rod chips according to claim 5, characterized in that, The power unit includes a plurality of transmission shafts that are rotatably connected to the housing respectively. Each transmission shaft has a gear sleeved on its outer side, and the plurality of gears mesh sequentially along the arrangement direction of the transmission shafts. The transmission shafts located at both ends of the transmission shaft arrangement direction are designated as a first transmission shaft and a second transmission shaft, respectively. The end of the first transmission shaft or the second transmission shaft closer to the adjustment part is formed as the power output end, and the end of the first transmission shaft and the second transmission shaft away from the adjustment part is formed as the power input end.

7. The alignment device for gas rod chips according to claim 2, characterized in that, The limiting component includes a support block fixed to the top of the support portion, and the top of the support block has a limiting groove corresponding to the rod body, which serves as the first limiting portion. The support block and the support portion are formed with a first light-transmitting hole corresponding to the first chip inside the rod body.

8. The alignment device for gas rod chips according to claim 2, characterized in that, The limiting component includes a pressure plate fixed to the top of the adjusting part, and the bottom of the pressure plate is formed with a limiting post corresponding to the mounting hole of the cover body, so as to serve as the second limiting part; The pressure plate has a second light-transmitting hole corresponding to the second chip inside the cover body.

9. The alignment device for gas rod chips according to claim 1, characterized in that, The detection component includes a microscope, which is connected to the base via a moving mechanism; the lens end of the microscope is formed as the detection end.

10. The alignment device for gas rod chips according to claim 9, characterized in that, The detection component also includes a display screen that is electrically or communicatively connected to the microscope, serving as the display terminal.

Images