A differential pressure flow meter

Abstract

The utility model discloses a differential pressure flowmeter belongs to flowmeter technical field, including mounting seat, be equipped with two mounting holes on the mounting seat, liquid passage, liquid passage is penetrated in the mounting seat, liquid passage includes the liquid inlet channel and liquid outlet channel in same straight line, the aperture of liquid inlet channel with liquid outlet channel is equal, variable diameter channel, variable diameter channel is located between liquid inlet channel with liquid outlet channel, the aperture of variable diameter channel is less than the aperture of liquid inlet channel, pressure part, pressure part number is two groups and installs respectively in the mounting hole, a pressure part determines the liquid pressure in liquid inlet channel, another pressure part determines the liquid pressure in liquid outlet channel. The utility model discloses differential pressure flowmeter integration degree is higher, carries out integration configuration to pressure part, effectively reduces the volume of differential pressure flowmeter, and the differential pressure flowmeter is convenient for installation and uses in the narrow space.

Description

Technical Field

[0001] This utility model belongs to the field of flow meter technology, and in particular relates to a differential pressure flow meter. Background Technology

[0002] In cleaning liquid delivery systems in the semiconductor industry, flow meters are required to measure the fluid flow rate. Currently, differential pressure flow meters are commonly used for this purpose. However, existing differential pressure flow meters have the following problems in their application in cleaning liquid delivery systems:

[0003] 1. The integration level is low. In actual use, the pressure sensor needs to be configured externally. It is impossible to integrate the configuration of the pressure sensor, which will increase the installation workload and installation cost.

[0004] 2. Large size: Existing differential pressure flow meters have the problem of large size, which makes them unsuitable for installation and use in confined spaces, resulting in inconvenience.

[0005] 3. Existing differential pressure flow meters are usually only equipped with one pressure sensor, which cannot achieve multi-channel synchronous control and the overall system integration is insufficient. Utility Model Content

[0006] This invention overcomes the shortcomings of the prior art and provides a differential pressure flow meter to solve the problems existing in the prior art.

[0007] To achieve the above objectives, the technical solution adopted by this utility model is: a differential pressure flow meter, comprising...

[0008] Mounting base, wherein the mounting base is provided with two mounting holes;

[0009] A liquid channel extends through the mounting base. The liquid channel includes an inlet channel and an outlet channel located on the same straight line. The inlet channel communicates with one of the mounting holes, and the outlet channel communicates with another mounting hole. The diameters of the inlet channel and the outlet channel are equal.

[0010] A variable diameter channel is located between the inlet channel and the outlet channel, connecting the inlet channel and the outlet channel. The diameter of the variable diameter channel is smaller than the diameter of the inlet channel.

[0011] The pressure section comprises two sets, each installed in the mounting hole. One pressure section determines the liquid pressure in the inlet channel, and the other pressure section determines the liquid pressure in the outlet channel.

[0012] In a preferred embodiment of this utility model, the mounting hole includes a threaded hole and a connecting hole that are arranged in a continuous manner. The threaded hole is used to install the pressure part, and the connecting hole is connected to the liquid inlet channel or the liquid outlet channel.

[0013] In a preferred embodiment of this utility model, the pressure unit includes a mounting nut, a piezoresistive core, a contact diaphragm, and a circuit control board. The mounting nut is threadedly installed in the threaded hole. The piezoresistive core is located at one end of the mounting nut near the communicating hole. The contact diaphragm is installed on the piezoresistive core to contact the liquid. The circuit control board is connected to the piezoresistive core to receive and process signals.

[0014] In a preferred embodiment of this utility model, the piezoresistive core is fixedly installed on the end of the mounting nut near the communicating hole, and the circuit control board is fixedly installed on the end of the mounting nut away from the piezoresistive core.

[0015] In a preferred embodiment of this utility model, the inlet end of the liquid inlet channel protrudes from the mounting base, and the outlet end of the liquid outlet channel protrudes from the mounting base.

[0016] In a preferred embodiment of this utility model, both the inlet end of the liquid inlet channel and the outlet end of the liquid outlet channel are provided with threaded protrusions.

[0017] In a preferred embodiment of this invention, the piezoresistive core is a ceramic structural component, and the contact diaphragm is coated with a PFA coating.

[0018] This utility model solves the defects existing in the background technology, and has the following beneficial effects:

[0019] The differential pressure flow meter of this invention has a high degree of integration. By integrating the pressure unit, the volume of the differential pressure flow meter is effectively reduced, making it easier to install and use in confined spaces. This makes the differential pressure flow meter more convenient to use. Furthermore, the differential pressure flow meter can be equipped with multiple pressure units to achieve multi-channel synchronous control, further improving the integration level of the differential pressure flow meter. Attached Figure Description

[0020] The present invention will be further described below with reference to the accompanying drawings and embodiments;

[0021] Figure 1 This is a schematic diagram of the overall structure of a preferred embodiment of the present invention;

[0022] Figure 2 This is a cross-sectional view of a preferred embodiment of the present invention;

[0023] Figure 3This is a schematic diagram of the structure of the mounting base according to a preferred embodiment of the present invention;

[0024] Figure 4 This is a schematic diagram of the pressure section in a preferred embodiment of the present invention;

[0025] In the diagram: 10, mounting base; 11, mounting hole; 111, threaded hole; 112, connecting hole; 20, liquid inlet channel; 30, liquid outlet channel; 40, variable diameter channel; 50, pressure section; 51, mounting nut; 52, piezoresistive core; 53, contact diaphragm; 54, circuit control board; 60, threaded protrusion. Detailed Implementation

[0026] The present invention will be further described below with reference to the accompanying drawings and specific embodiments, so that those skilled in the art can better understand and implement the present invention. However, the embodiments are not intended to limit the present invention.

[0027] This embodiment provides a differential pressure flow meter with a high degree of integration. The pressure unit 50 is integrated, which effectively reduces the size of the differential pressure flow meter and facilitates its installation and use in confined spaces, making it more convenient to use. Furthermore, the differential pressure flow meter can be configured with multiple pressure units 50 to achieve multi-channel synchronous control, further improving the integration level of the differential pressure flow meter.

[0028] Combination Figures 1 to 4 As shown, the device includes a mounting base 10, a liquid channel, a variable diameter channel 40, and a pressure unit 50. The liquid channel passes through the mounting base 10 and includes an inlet channel 20 and an outlet channel 30 located on the same straight line. Liquid enters through the inlet channel 20, passes through the variable diameter channel 40, and then enters the outlet channel 30 before being discharged. The pressure unit 50 can monitor the hydraulic pressure in the inlet channel 20 and the outlet channel 30, and determine the liquid flow rate based on the hydraulic pressure difference.

[0029] In this embodiment, the mounting base 10 is provided with two mounting holes 11. The liquid inlet channel 20 is connected to one mounting hole 11, and the liquid outlet channel 30 is connected to the other mounting hole 11. In this embodiment, both the liquid inlet channel 20 and the liquid outlet channel 30 are channel holes with the same diameter. There are two sets of pressure units 50, which are installed in the mounting holes 11 respectively. One pressure unit 50 determines the liquid pressure in the liquid inlet channel 20, and the other pressure unit 50 determines the liquid pressure in the liquid outlet channel 30. The liquid flow rate is determined based on the pressure difference between the liquids before and after.

[0030] like Figure 2As shown, in this embodiment, the variable diameter channel 40 is located between the inlet channel 20 and the outlet channel 30, connecting the inlet channel 20 and the outlet channel 30. The diameter of the variable diameter channel 40 is smaller than the diameter of the inlet channel 20. Under the action of the variable diameter channel 40, the liquid in the inlet channel 20 slowly flows into the outlet channel 30, thereby creating a pressure difference between the hydraulic pressure in the inlet channel 20 and the hydraulic pressure in the outlet channel 30, so that the flow rate of the liquid can be determined by the pressure difference.

[0031] Combination Figure 1 , Figure 3 as well as Figure 4 As shown, the mounting hole 11 in this embodiment includes a threaded hole 111 and a connecting hole 112 that are arranged in a continuous manner. The threaded hole 111 is used to install the pressure unit 50, and the connecting hole 112 is connected to the liquid inlet channel 20 or the liquid outlet channel 30. The pressure unit 50 includes a mounting nut 51, a piezoresistive core 52, a contact diaphragm 53, and a circuit control board 54. The mounting nut 51 is threadedly installed in the threaded hole 111. The piezoresistive core 52 is located at the end of the mounting nut 51 near the connecting hole 112, and the contact diaphragm 53 is installed on the piezoresistive core. On 52, in contact with the liquid, the circuit control board 54 is connected to the piezoresistive core 52 to receive and process the signal. In this embodiment, the threaded hole 111 can cooperate with the mounting nut 51 to fix the mounting nut 51. After the mounting nut 51 is installed, when the liquid comes into contact with the contact diaphragm 53, the contact diaphragm 53 transmits the signal to the circuit control board 54 through the piezoresistive core 52. The circuit control board 54 receives and processes the signal and outputs it to the external control system. After obtaining the pressure value, the liquid flow rate is determined according to the pressure difference.

[0032] In this embodiment, the piezoresistive core 52 is a ceramic structural component, and the contact diaphragm 53 is coated with a PFA coating, so that the piezoresistive core 52 and the contact diaphragm 53 have good acid and corrosion resistance, thereby meeting the application requirements.

[0033] Specifically, in this embodiment, the piezoresistive core 52 is fixedly installed on the mounting nut 51 near the connecting hole 112, the circuit control board 54 is fixedly installed on the mounting nut 51 away from the piezoresistive core 52, the liquid inlet end of the liquid inlet channel 20 protrudes from the mounting base 10, and the liquid outlet end of the liquid outlet channel 30 protrudes from the mounting base 10 so that the flow meter can be used.

[0034] Furthermore, both the inlet end of the liquid inlet channel 20 and the outlet end of the liquid outlet channel 30 are provided with threaded protrusions 60. The presence of the threaded protrusions 60 facilitates the installation of the liquid inlet channel 20 and the liquid outlet channel 30, so that the flow meter can be better installed and used.

[0035] In practical use, the differential pressure flow meter of this embodiment allows liquid to enter through the inlet channel 20, flow through the variable diameter channel 40, and then into the outlet channel 30. The two pressure units 50 can monitor and determine the hydraulic pressure in the inlet channel 20 and the outlet channel 30 respectively. The flow rate of the liquid can be determined by the hydraulic pressure difference formed by the hydraulic pressure in the inlet channel 20 and the outlet channel 30.

[0036] Obviously, the above embodiments are merely illustrative examples for clear explanation and are not intended to limit the implementation. Those skilled in the art will recognize that other variations or modifications can be made based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. However, obvious variations or modifications derived therefrom are still within the protection scope of this invention.

Claims

1. A differential pressure flow meter, characterized in that, include Mounting base (10), the mounting base (10) is provided with two mounting holes (11); A liquid channel extends through the mounting base (10). The liquid channel includes an inlet channel (20) and an outlet channel (30) located on the same straight line. The inlet channel (20) communicates with one of the mounting holes (11), and the outlet channel (30) communicates with another mounting hole (11). The diameters of the inlet channel (20) and the outlet channel (30) are equal. A variable diameter channel (40) is located between the liquid inlet channel (20) and the liquid outlet channel (30), connecting the liquid inlet channel (20) and the liquid outlet channel (30). The diameter of the variable diameter channel (40) is smaller than the diameter of the liquid inlet channel (20). Pressure section (50), there are two sets of pressure sections (50) and they are respectively installed in the mounting hole (11). One pressure section (50) determines the liquid pressure in the liquid inlet channel (20) and the other pressure section (50) determines the liquid pressure in the liquid outlet channel (30).

2. The differential pressure flow meter according to claim 1, characterized in that, The mounting hole (11) includes a threaded hole (111) and a connecting hole (112) that are connected in a continuous manner. The threaded hole (111) is used to install the pressure part (50), and the connecting hole (112) is connected to the liquid inlet channel (20) or the liquid outlet channel (30).

3. A differential pressure flow meter according to claim 2, characterized in that, The pressure unit (50) includes a mounting nut (51), a piezoresistive core (52), a contact diaphragm (53), and a circuit control board (54). The mounting nut (51) is threaded into the threaded hole (111). The piezoresistive core (52) is located at the end of the mounting nut (51) near the connecting hole (112). The contact diaphragm (53) is mounted on the piezoresistive core (52) to contact the liquid. The circuit control board (54) is connected to the piezoresistive core (52) to receive and process signals.

4. A differential pressure flow meter according to claim 3, characterized in that, The piezoresistive core (52) is fixedly installed on the mounting nut (51) at the end near the connecting hole (112), and the circuit control board (54) is fixedly installed on the mounting nut (51) at the end away from the piezoresistive core (52).

5. A differential pressure flow meter according to claim 1, characterized in that, The inlet end of the liquid inlet channel (20) protrudes from the mounting base (10), and the outlet end of the liquid outlet channel (30) protrudes from the mounting base (10).

6. A differential pressure flow meter according to claim 5, characterized in that, The inlet end of the liquid inlet channel (20) and the outlet end of the liquid outlet channel (30) are both provided with threaded protrusions (60).

7. A differential pressure flow meter according to claim 3, characterized in that, The piezoresistive core (52) is a ceramic structural component, and the contact diaphragm (53) is coated with a PFA coating.

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