A differential pressure transmitter embryo detection device
Patent Information
- Application Number
- CN202522625422.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-12-11
- Publication Date
- 2026-10-30
- Estimated Expiration
- 2035-12-11
AI Technical Summary
[0003]上述现有方案存在一些缺陷:首先,人工手动抓取胚体时,由于胚体表面光滑,不易稳固抓持,容易打滑,影响定位精度和操作安全性;其次,使用注射器进行注水测试,需要不断重复吸水、注水动作,不仅费时费力,且注射器产生的水压有限,难以有效冲刷流道内可能存在的微小杂质,冲洗效果不佳;再者,对于具有多个流道的胚体,人工逐个测试流道,操作繁琐,测试周期长,且极易因疲劳或疏忽导致漏测、错测,检测质量一致性难以保证
通过支架与压紧件的配合,实现了胚体的快速定位与稳固装夹,解决了手动抓取易打滑、不易固定的问题;注液机构可替代手动注射器,实现液体的自动供给,自动化注液相比于手动注射器能提供更稳定的压力和流量,确保胚体内第一流道的冲洗与测试效果,大幅提升作业效率。
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Figure CN224921339U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of automated detection technology, and in particular to a differential pressure transmitter blank detection device. Background Technology
[0002] As a precision sensor, single-crystal silicon differential pressure transmitters typically require testing and verification of the unobstructed flow channels and the independence of each channel during the production process. In existing production processes, the rinsing and water flow through the preform channels largely rely on manual operation. Specifically, operators must manually grasp the preform, repeatedly draw water using a syringe, and inject water into the preform channels. They then observe whether a water column sprays out from each channel to determine whether the channels are unobstructed and whether the channels are sealed and isolated from each other.
[0003] The existing solutions have several drawbacks: First, when manually grasping the embryo, the smooth surface of the embryo makes it difficult to hold firmly and it is easy to slip, affecting positioning accuracy and operational safety. Second, using a syringe for water injection testing requires repeated water intake and injection, which is not only time-consuming and labor-intensive, but also the water pressure generated by the syringe is limited, making it difficult to effectively flush out any tiny impurities that may exist in the flow channels, resulting in poor rinsing effect. Third, for embryos with multiple flow channels, manually testing each flow channel is cumbersome, has a long testing cycle, and is prone to missed or incorrect tests due to fatigue or negligence, making it difficult to guarantee the consistency of test quality.
[0004] Therefore, it is necessary to develop a differential pressure transmitter embryo detection device that can realize embryo positioning, automatic clamping, and flushing detection. Utility Model Content
[0005] This utility model provides a differential pressure transmitter blank detection device to solve the problems in the prior art.
[0006] This utility model embodiment adopts the following technical solution: a differential pressure transmitter blank detection device, wherein the blank has at least one first flow channel penetrating its body; the detection device includes: a support having second flow channels corresponding one-to-one with the first flow channels; when the blank is positioned on the support, the first flow channel communicates with the corresponding second flow channel; a clamping member that can move relative to the support between a first position and a second position; when the blank is placed on the support and the clamping member is in the first position, the clamping member separates from the blank to allow the blank to be placed and removed; when the blank is placed on the support and the clamping member is in the second position, the clamping member abuts against the blank to achieve axial fixation of the blank; and a liquid injection mechanism for selectively supplying liquid into a plurality of second flow channels.
[0007] Preferably, the support has a positioning groove for accommodating the preform and an annular groove located at the connection end of a plurality of second flow channels and the first flow channel, and a sealing ring is installed in each of the annular grooves; when the preform is placed on the support and the clamping member is in the second position, at least part of the preform is embedded in the positioning groove and the sealing ring is pressed into the annular groove, so as to achieve a sealed connection between the first flow channel and the corresponding second flow channel.
[0008] Preferably, the embryo has four first flow channels; the support has a positioning groove for accommodating the embryo and three annular grooves, each annular groove having a sealing ring installed therein; wherein, the first flow channel located at the farthest end in the radial direction of the embryo is directly connected to the corresponding second flow channel; the three annular grooves are respectively located at the connection ends of the other three first flow channels and the corresponding second flow channels on the embryo; when the embryo is placed on the support and the clamping member is in the second position, at least a portion of the embryo is embedded in the positioning groove and the sealing ring is pressed into the annular groove, and the bottom edge of the embryo abuts against the positioning groove.
[0009] Preferably, the bottom of the embryo has an annular flange and a stepped wall located outside the annular flange; when the embryo is placed on the support and the clamping member is in the second position, the annular flange is embedded in the positioning groove and the stepped wall abuts against the working surface of the support.
[0010] Preferably, the support is further provided with a positioning element, and the embryo has a positioning part; when the embryo is placed on the support and rotated until the positioning part abuts against the positioning element, the connecting ends of the plurality of first flow channels are directly connected to the connecting ends of the plurality of second flow channels.
[0011] Preferably, the support and / or clamping member are provided with pressure sensors corresponding one-to-one with a plurality of first flow channels; when the preform is placed on the support and the clamping member is in the second position, the outlet end of each first flow channel is directly opposite the detection end of the corresponding pressure sensor.
[0012] Preferably, the liquid injection mechanism includes a plurality of water pipes and a plurality of water pumps; one end of each water pipe is connected to a liquid source and the other end is connected to the corresponding second flow channel, and each water pipe is equipped with a corresponding water pump, the water pump being used to drive the liquid to flow along the water pipe to the second flow channel.
[0013] Preferably, the detection device further includes a linear drive source mounted on the bracket, the output shaft of which is connected to the clamping member to drive the clamping member to move relative to the bracket between a first position and a second position.
[0014] Preferably, the output shaft of the linear drive source and the clamping member are connected by an elastic component.
[0015] Preferably, the elastic component includes: a guide rod, one end of which is configured as a threaded section, and the other end of which forms a limiting flange; the guide rod is coaxially threaded to the output shaft of the linear drive source through the threaded section; a nut, threadedly connected to the threaded section; a connecting block, fixedly connected to the clamping member, the connecting block having a stepped hole with a first wall inside, the guide rod being slidably connected within the stepped hole; and a spring, sleeved on the guide rod, with both ends of the spring elastically abutting against the nut and the connecting block respectively; the first wall on the connecting block abutting against the limiting flange under the action of the spring.
[0016] The above-mentioned technical solutions adopted in the embodiments of this utility model can achieve the following beneficial effects: The combination of the bracket and the clamping component enables rapid positioning and stable clamping of the preform, solving the problems of slippage and difficulty in fixing when manually gripped. The liquid injection mechanism can replace the manual syringe to achieve automatic liquid supply. Compared with the manual syringe, the automated liquid injection can provide more stable pressure and flow rate, ensuring the rinsing and testing effect of the first flow channel in the preform and greatly improving the efficiency of operation. Attached Figure Description
[0017] The accompanying drawings, which are included to provide a further understanding of the present invention and constitute a part of this invention, illustrate exemplary embodiments of the present invention and, together with the description thereof, serve to explain the present invention and do not constitute an undue limitation thereof. In the drawings: Figure 1 This is a three-dimensional structural diagram of the present invention; Figure 2 This is an assembly diagram of the blank, support and clamping parts of this utility model; Figure 3 This is a schematic diagram showing the connection between the water pipe and the second flow channel of this utility model; Figure 4 This is a three-dimensional sectional view of the overall structure of this utility model; Figure 5 This is an exploded view of the nut, guide rod, and connecting block of this utility model; Figure 6 This is a schematic diagram of the assembly of the sealing ring of this utility model; Figure 7 This is a three-dimensional structural diagram of the embryo of this utility model.
[0018] Figure Labels 1-Embryonic body, 11-First flow channel, 12-Annular flange, 13-Stepped wall, 14-Positioning part; 2-Bracket, 21-Second flow channel, 22-Positioning groove, 23-Annular groove, 231-Sealing ring, 24-Positioning component; 3-Clamping parts; 4-Injection mechanism, 41-Water pipe; 5-Pressure sensor; 6-Linear drive source; 71-Guide rod, 711-Threaded section, 712-Limiting flange; 72-Nut; 73-Connecting block, 731-Stepped hole, 7311-First wall; 74-Spring. Detailed Implementation
[0019] To make the objectives, technical solutions, and advantages of this utility model clearer, the technical solutions of this utility model will be clearly and completely described below in conjunction with specific embodiments and corresponding drawings. Obviously, the described embodiments are only a part of the embodiments of this utility model, and not all of them. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.
[0020] The technical solutions provided by the various embodiments of this utility model are described in detail below with reference to the accompanying drawings.
[0021] Reference Figures 1 to 7 As shown, this utility model embodiment provides a differential pressure transmitter embryo detection device for detecting the unobstructedness and independence of multiple first flow channels 11 on the embryo 1. The detection device includes a support 2, a clamping member 3, and a liquid injection mechanism 4. The support 2 has second flow channels 21 that correspond one-to-one with the first flow channels 11 on the embryo 1. When the embryo 1 is positioned on the support 2, the first flow channels 11 are connected to the corresponding second flow channels 21.
[0022] The clamping member 3 is movable relative to the support 2 between a first position and a second position. When the embryo 1 is placed on the support 2 and the clamping member 3 is in the first position, the clamping member 3 separates from the embryo 1 to allow the embryo to be placed and removed. When the embryo 1 is placed on the support 2 and the clamping member 3 is in the second position, the clamping member abuts against the embryo to achieve axial fixation of the embryo. The liquid injection mechanism 4 is used to selectively supply liquid to a plurality of second channels 21. When the liquid injection mechanism supplies liquid to one of the second channels 21, the liquid sequentially passes through the corresponding second channel 21 and the first channel 11. If the first channel 11 is not blocked, the liquid is ejected from the first channel 11. If the first channel 11 is blocked, the liquid cannot be ejected from the first channel 11 or only a small amount is ejected. If the first channel 11 is connected to other first channels, that is, at least two first channels 11 are simultaneously discharging liquid, it proves that there is communication between the independent first channels 11 of the embryo 1, that is, the product is unqualified.
[0023] The cooperation between the bracket 2 and the clamping component 3 enables rapid positioning and stable clamping of the preform 1, solving the problems of slippage and difficulty in fixation during manual gripping. The liquid injection mechanism 4 can replace the manual syringe to achieve automatic liquid supply. Compared with the manual syringe, automated liquid injection can provide more stable pressure and flow, ensuring the rinsing and testing effect of the first flow channel 11 inside the preform 1, and greatly improving work efficiency. Therefore, the entire device realizes full automation of the differential pressure transmitter preform 1 clamping, sealing of the first flow channel 11 and the second flow channel 21, rinsing of the preform 1 to performance testing, solving the problems of low efficiency, unstable quality and high labor intensity of manual testing.
[0024] In some practical applications, the positioning and installation between the embryo and the support can be achieved using the following structure: (Refer to...) Figure 4 and Figure 6 As shown, the upper surface of the support 2 is provided with a positioning groove 22 and annular grooves 23 located at the connection ends of several second flow channels 21 and first flow channels 11. Each annular groove 23 is fitted with a sealing ring 231. When the blank 1 is placed on the support 2 and the clamping member 3 is in the second position, at least a portion of the blank 1 is embedded in the positioning groove 22 and the sealing ring 231 is pressed into the annular groove 23 to achieve a sealed connection between the first flow channel and the corresponding second flow channel. In actual production applications, since there are four first flow channels 11 on the preform 1, the support 2 is provided with a positioning groove 22 for accommodating the preform and three annular grooves 23, and a sealing ring 231 is installed in each annular groove 23. The first flow channel 11 located at the farthest end in the radial direction of the preform 1 is directly connected to the corresponding second flow channel 21. The three annular grooves 23 are respectively located at the connection ends of the other three first flow channels 11 and the corresponding second flow channels 21 on the preform 1. When the preform 1 is placed on the support 2 and the clamping member 3 is in the second position, at least a part of the preform 1 is embedded in the positioning groove 22 and the sealing ring 231 is pressed into the annular groove 23, and the bottom edge of the preform 1 abuts against the positioning groove 22.
[0025] Specifically, the bottom of the embryo 1 has an annular flange 12 and a stepped wall 13 located outside the annular flange 12 (e.g., Figure 7 When the embryo 1 is placed on the support 2 and the clamping member is in the second position, the annular flange 12 is embedded in the positioning groove 22, and the stepped wall 13 abuts against the working surface of the support 2.
[0026] Specifically, refer to Figure 2 As shown, the support 2 is also provided with a positioning element 24, and the embryo 1 has a positioning part 14; when the embryo 1 is placed on the support 2 and rotated until the positioning part 14 abuts against the positioning element 24, the connecting ends of several first flow channels 11 are directly connected to the connecting ends of several second flow channels 21.
[0027] In this embodiment, when the operator places the blank 1 on the support 2, aligns the annular flange 12 with the positioning groove 22, and rotates the blank 1 until the positioning part 14 abuts against the positioning member 24, the blank 1 completes the initial positioning. At this time, the first flow channel 11 at the farthest radial end of the blank 1 is directly aligned with the corresponding second flow channel 21; the ports of the other three first flow channels 11 are respectively aligned with the three annular groove 23 areas equipped with sealing rings 231 (e.g., Figure 4 Therefore, radial initial positioning is achieved through the cooperation of the positioning groove 22 and the annular flange 12, and the circumferential rotation of the preform 1 is restricted through the cooperation of the positioning part 14 and the positioning element 24. At the same time, it also ensures the precise alignment of the ports of all first flow channels and the corresponding ports of second flow channels. Since the bottom edge of the preform 1 abuts against the positioning groove 22, only a small amount of liquid will overflow from the farthest first flow channel 11 and the corresponding second flow channel 21, or no liquid will overflow at all (this liquid is generally water). At the same time, the contact between the stepped wall 13 and the working surface of the support 2 provides an axial installation reference for the preform 1.
[0028] In some practical applications, such as Figure 1 and Figure 4 As shown, the detection device also includes a linear drive source 6 mounted on the bracket 2.
[0029] Specifically, refer to Figures 4 to 5 As shown, the output shaft of the linear drive source 6 is connected to the clamping member 3 via an elastic component. The elastic component includes a guide rod 71, a nut 72, a connecting block 73, and a spring 74. One end of the guide rod 71 has a threaded section 711 that screws into the output shaft of the linear drive source 6, and the other end has a radially protruding limiting flange 712. The connecting block 73 is fixed to the clamping member 3 and has a stepped hole 731 on it. The guide rod 71 passes through the stepped hole 731 and can slide relative to it. The spring 74 is sleeved on the guide rod 71, with one end abutting against the nut 72 screwed on the threaded section 711 and the other end abutting against the connecting block 73. Under the preload of the spring 74, the first wall 7311 inside the stepped hole 731 of the connecting block 73 is pressed against the limiting flange 712 of the guide rod 71.
[0030] When the linear drive source 6 (such as a cylinder) is activated and the drive output shaft moves downward, the elastic component drives the clamping member 3 from the first position (such as...). Figure 4 The high point in the indicated direction is moved to the second position (e.g., the high point in the indicated direction). Figure 4(The low point in the indicated direction). The clamping member 3 finally presses against the top of the blank 1. As the linear drive source continues to run, the spring 74 is further compressed, thus providing a relatively flexible and stable axial force to the blank 1. Therefore, the elastic component not only avoids the clamping member rigidly colliding with the blank 1 and damaging the monocrystalline silicon blank, but also ensures that appropriate clamping force can be applied under different blank processing precision and sealing ring wear conditions through the adaptive deformation and compression of the spring 74. This ensures that the sealing ring 231 is reliably compressed, ensuring that the first flow channel 11 and the second flow channel 21 form a seal. The pre-compression of the spring 74 can be adjusted by rotating the nut 72, thereby fine-tuning the clamping force of the clamping member on the blank 1 to adapt to different blank models.
[0031] In some practical applications, such as Figure 3 As shown, the injection mechanism 4 includes multiple water pipes 41 and multiple water pumps (not shown in the figure). One end of each water pipe 41 is connected to a liquid source (such as a water tank), and the other end is connected to the inlet of a corresponding second flow channel 21. Each water pipe is equipped with a corresponding water pump, which drives the liquid to flow along the water pipe 41 to the second flow channel 21. Each first flow channel is equipped with an independent water pump drive system, which can individually control the injection of liquid into any second flow channel 21, and can provide stable liquid pressure and flow rate higher than that of a manual syringe. This allows for the detection of blockages in the first flow channel 11 of the embryo while also ensuring effective flushing of the first flow channel 11.
[0032] In some practical applications, pressure sensors 5 are installed on the bracket 2 and / or clamping member 3 at the outlet position corresponding to each first flow channel 11 (e.g., Figure 4 ),like Figure 4 As shown, in actual production, the openings of two of the first flow channels 11 on the blank body point upwards, and the corresponding two pressure sensors 5 are located on the clamping parts; the openings of the other two first flow channels 11 on the blank body 1 point to the right side (with...). Figure 4 (As shown in the direction), the two corresponding pressure sensors 5 are fixedly mounted on the bracket. When the preform 1 is compressed, the outlet of each first flow channel 11 is directly opposite the detection end of its respective pressure sensor 5.
[0033] In this embodiment, the pressure sensor 5 eliminates the need for manual observation during the detection process. When liquid is injected into a second flow channel 21, if the corresponding first flow channel 11 is unobstructed, the liquid will spray out from the outlet of the first flow channel 11 and be detected by the pressure sensor 5 with a pressure signal. If the first flow channel 11 is blocked or partially blocked, the water flow cannot effectively impact the pressure sensor 5, and the pressure sensor 5 will not react. If the pressure sensors 5 of other first flow channels 11 also have signals when one of the first flow channels 11 is tested, it indicates that there is a problem of series connection between several first flow channels 11, which also indicates that the embryo is unqualified.
[0034] In summary, the specific working principle of this application is as follows: The operator places the blank 1 into the positioning groove 22 of the bracket 2 and rotates it until it touches the positioning member 24 to achieve positioning. The linear drive source 6 is activated, and the clamping member 3 moves down under the action of the elastic component and clamps the blank 1, while compressing the sealing ring 231 to achieve sealing between the interfaces of each first flow channel 11 and the corresponding second flow channel 21. If a certain first flow channel 11 is selected for testing as needed, the corresponding water pump is turned on to inject liquid (such as water) into the connected second flow channel 21. The liquid flows through the second flow channel 21 and the first flow channel 11 in sequence. If the first flow channel 11 is unobstructed and isolated from other first flow channels 11, the pressure at its outlet increases, and the corresponding pressure sensor 5 generates a signal; the pressure sensor 5 at the outlet of other first flow channels 11 does not generate a signal. Repeating this process can complete the testing of all first flow channels. For defective products, an alarm is triggered to remind the staff (an alarm light can be installed).
[0035] The above description is merely an embodiment of this utility model and is not intended to limit the scope of this utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principle of this utility model should be included within the scope of the claims of this utility model.
Claims
1. A differential pressure transmitter blank detection device, wherein the blank (1) has at least one first flow channel (11) penetrating its body; characterized in that, The detection device includes: The support (2) has a second channel (21) that corresponds one-to-one with the first channel (11); when the embryo (1) is positioned on the support (2), the first channel (11) is connected to the corresponding second channel (21); The clamping member (3) is movable relative to the support (2) between a first position and a second position; when the embryo (1) is placed on the support (2) and the clamping member (3) is in the first position, the clamping member (3) separates from the embryo (1) to allow the embryo (1) to be picked up and put down; when the embryo (1) is placed on the support (2) and the clamping member (3) is in the second position, the clamping member (3) abuts against the embryo (1) to achieve axial fixation of the embryo (1); The liquid injection mechanism (4) is used to selectively supply liquid into several second channels (21).
2. The differential pressure transmitter blank detection device according to claim 1, characterized in that, The bracket (2) has a positioning groove (22) for accommodating the embryo (1) and an annular groove (23) located at the connection end of several second channels (21) and the first channel (11). Each annular groove (23) is equipped with a sealing ring (231). When the embryo (1) is placed on the support (2) and the clamping member (3) is in the second position, at least a portion of the embryo (1) is embedded in the positioning groove (22) and the sealing ring (231) is pressed into the annular groove (23) to achieve a sealed connection between the first flow channel (11) and the corresponding second flow channel (21).
3. The differential pressure transmitter blank detection device according to claim 1, characterized in that, The embryo (1) has four first flow channels (11); the support (2) has a positioning groove (22) for accommodating the embryo (1) and three annular grooves (23), each annular groove (23) is equipped with a sealing ring (231); wherein, the first flow channel (11) located at the farthest end in the radial direction of the embryo (1) is directly connected to the corresponding second flow channel (21); the three annular grooves (23) are respectively located at the connection ends of the other three first flow channels (11) and the corresponding second flow channels (21) on the embryo (1); When the embryo (1) is placed on the support (2) and the clamping member (3) is in the second position, at least a portion of the embryo (1) is embedded in the positioning groove (22) and the sealing ring (231) is pressed into the annular groove (23), and the bottom edge of the embryo (1) abuts against the positioning groove (22).
4. The differential pressure transmitter blank detection device according to claim 2, characterized in that, The embryo (1) has an annular flange (12) at its bottom and a stepped wall (13) located outside the annular flange (12); when the embryo (1) is placed on the support (2) and the clamping member (3) is in the second position, the annular flange (12) is embedded in the positioning groove (22) and the stepped wall (13) abuts against the working surface of the support (2).
5. A differential pressure transmitter blank detection device according to claim 4, characterized in that, The support (2) is also provided with a positioning element (24), and the embryo (1) has a positioning part (14); when the embryo (1) is placed on the support (2) and rotated until the positioning part (14) abuts against the positioning element (24), the connecting ends of several first flow channels (11) are directly connected to the connecting ends of several second flow channels (21).
6. The differential pressure transmitter blank detection device according to claim 1, characterized in that, The bracket (2) and / or the clamping member (3) are provided with pressure sensors (5) corresponding to a plurality of first flow channels (11); when the embryo (1) is placed on the bracket (2) and the clamping member (3) is in the second position, the outlet end of each first flow channel (11) is directly opposite the detection end of the corresponding pressure sensor (5).
7. The differential pressure transmitter blank detection device according to claim 1, characterized in that, The liquid injection mechanism (4) includes several water pipes (41) and several water pumps; one end of each water pipe (41) is connected to a liquid source and the other end is connected to the corresponding second flow channel (21), and each water pipe (41) is equipped with a corresponding water pump, which is used to drive the liquid to flow along the water pipe (41) to the second flow channel (21).
8. The differential pressure transmitter blank detection device according to claim 1, characterized in that, The detection device also includes a linear drive source (6) mounted on the bracket (2), the output shaft of which is connected to the clamping member (3) to drive the clamping member (3) to move relative to the bracket (2) between a first position and a second position.
9. A differential pressure transmitter blank detection device according to claim 8, characterized in that, The output shaft of the linear drive source (6) and the clamping member (3) are connected by an elastic component.
10. A differential pressure transmitter blank detection device according to claim 9, characterized in that, The elastic component includes: A guide rod (71) has a threaded section (711) at one end and a limiting flange (712) at the other end. The guide rod (71) is coaxially threaded to the output shaft of the linear drive source (6) through the threaded section (711). Nut (72), threaded connection to the threaded section (711); The connecting block (73) is fixedly connected to the clamping member (3). The connecting block (73) has a stepped hole (731) with a first wall (7311) inside. The guide rod (71) is slidably connected inside the stepped hole (731). A spring (74) is sleeved on the guide rod (71), and the two ends of the spring (74) elastically abut against the nut (72) and the connecting block (73) respectively; the first wall (7311) on the connecting block (73) abuts against the limiting flange (712) under the action of the spring (74).
