Detection device for vacuum coating apparatus

Abstract

The utility model belongs to vacuum coating equipment technical field especially, a kind of detection device of vacuum coating equipment, in the use process of existing detection device, it is not convenient to carry out the quick detection of the air tightness of vacuum coating equipment, the function is relatively single, the following scheme is presented, it includes base, threaded sleeve and detection shell, mounting hole is set up on base, threaded sleeve is fixedly installed at the top of base, the outside of detection shell is equipped with thread, and thread is connected with threaded sleeve threadedly;Detection shell adopts transparent material;Further include: air cylinder, air cylinder is fixedly installed at the outside of detection shell, and the outside of air cylinder is equipped with inlet;Opening and closing mechanism, opening and closing mechanism is arranged in air cylinder, the utility model realizes the intuitive display of vacuum degree and the function of automatic triggering auxiliary leak detection by mechanical structure, it is convenient to quickly detect air tightness and locate leakage point, simple structure, reliable operation.

Description

Technical Field

[0001] This application relates to the field of vacuum coating equipment technology, and in particular to a testing device for vacuum coating equipment. Background Technology

[0002] In the field of vacuum coating, environmentally friendly chromium-free processes (such as those using titanium, silicon, or aluminum-based ceramic films) represent a green development direction to replace traditional electroplating of chromium. However, chromium-free coatings, especially high-purity, high-activity functional films, are extremely sensitive to the coating environment. Even minute leaks in the chamber are one of the main causes of process failures and product defects.

[0003] Patent document CN218470071U discloses a device for detecting vacuum pressure in a vacuum coating equipment. The device includes a detection housing and a fixed housing. A disc is movably connected inside the detection housing, and a scale rod is fixedly connected to the top of the disc, passing through the detection housing. A strong spring is fixedly connected to the upper surface of the disc and is fixed to the detection housing. Two slots are formed on the outer side of the detection housing. A vent plate is fixedly connected inside the fixed housing, and a slip ring is movably connected inside the fixed housing. Multiple auxiliary springs are fixedly connected to the bottom of the slip ring, and a fixing ring is fixedly connected to the bottom of the auxiliary springs. This invention not only utilizes the principle of vacuum negative pressure to detect vacuum, avoiding garbled characters in electronic equipment and improving the accuracy of the device's detection, but also avoids air leakage that could lead to detection deviations, improving the sealing effect of the device and enhancing its overall performance.

[0004] However, the aforementioned patent documents are not convenient for rapid testing of the airtightness of vacuum coating equipment during use, and their functions are relatively limited. Therefore, we propose a testing device for vacuum coating equipment to solve the above problems. Utility Model Content

[0005] The purpose of this invention is to address the shortcomings of existing detection devices, such as the inconvenience of quickly detecting the airtightness of vacuum coating equipment during use and the relatively limited functionality, and to propose a detection device for vacuum coating equipment.

[0006] The testing device for the vacuum coating equipment provided in this application adopts the following technical solution:

[0007] The testing device of the vacuum coating equipment includes a base, a threaded sleeve and a testing housing. The base has a mounting hole, the threaded sleeve is fixedly installed on the top of the base, and the outer side of the testing housing has a thread that is threaded to the threaded sleeve.

[0008] The testing housing is made of transparent material;

[0009] Also includes:

[0010] An air cylinder is fixedly installed on the outside of the detection housing, and an air inlet is provided on the outside of the air cylinder;

[0011] The opening and closing mechanism is located inside the gas cylinder and is used to release the tracer gas inside the gas cylinder.

[0012] Furthermore, a fixing block is fixedly installed on the outer side of the guide rod, and a second spring is sleeved on the outer side of the guide rod. The two ends of the second spring are fixedly connected to the outer side of the fixing block and the top inner wall of the air cylinder, respectively.

[0013] Furthermore, the air cylinder and the detection housing are fixedly installed with the same bent pipe. A second sliding hole is opened at the top of the air cylinder, and a guide rod is slidably installed in the second sliding hole. The guide rod cooperates with the pressure rod. When the pressure rod and the guide rod are pressed into contact, the pressure rod drives the guide rod to move vertically.

[0014] Furthermore, the opening and closing mechanism includes a connecting plate, which is fixedly installed at one end of the guide rod. A blocking block is fixedly installed on the top of the connecting plate. The blocking block cooperates with the bend pipe. When the blocking block is separated from the bend pipe, the bend pipe can be vented.

[0015] Furthermore, a first spring is sleeved on the outer side of the measuring rod, and the two ends of the first spring are fixedly connected to the top of the piston and the inner wall of the top of the detection housing, respectively. A pressure rod is fixedly installed on the outer side of the measuring rod. When the piston moves vertically, the measuring rod drives the pressure rod to move vertically.

[0016] Furthermore, a sealing gasket is fixedly installed at the bottom of the detection housing. The sealing gasket cooperates with the base and is used to improve the sealing performance of the connection between the detection housing and the threaded sleeve.

[0017] Furthermore, a piston is slidably installed inside the detection housing, a first sliding hole is provided on the top of the detection housing, a measuring rod is slidably installed inside the first sliding hole, one end of the measuring rod is fixedly connected to the top of the piston, and a scale line is provided on the outer side of the measuring rod.

[0018] In summary, this application includes at least one of the following beneficial technical effects:

[0019] 1. This solution, by setting up a mechanical vacuum degree indication mechanism consisting of a piston, measuring rod, first spring and scale line, can intuitively and reliably display the vacuum pressure status inside the vacuum coating equipment cavity, avoiding the interference or garbled code problems that may occur in electronic sensors in complex coating environments, and improving the stability and anti-interference ability of the detection.

[0020] 2. This solution integrates a tracer gas storage and release device (gas cylinder, bend, and opening / closing mechanism). The movement of the piston will automatically trigger the opening / closing mechanism through the pressure rod to release the tracer gas. Operators can use a leak detector to detect suspected leaks outside the cavity (such as flange connections, observation windows, etc.), thereby achieving rapid location and accurate detection of leaks. By combining macroscopic changes in vacuum with microscopic leak location functions, the detection efficiency and accuracy are greatly improved.

[0021] This invention achieves intuitive display of vacuum level and automatic triggering of auxiliary leak detection through mechanical structure, which facilitates rapid detection of airtightness and location of leak points. It has a simple structure and reliable operation. Attached Figure Description

[0022] Figure 1 This is a front view structural schematic diagram of the detection device of the vacuum coating equipment proposed in this utility model;

[0023] Figure 2 This is a schematic diagram of the mounting base of the detection device for the vacuum coating equipment proposed in this utility model;

[0024] Figure 3 This is a schematic diagram of the structure of the detection housing of the detection device for the vacuum coating equipment proposed in this utility model;

[0025] Figure 4 This is a schematic diagram of the air cylinder of the detection device for the vacuum coating equipment proposed in this utility model.

[0026] Reference numerals: 1. Base; 2. Threaded sleeve; 3. Detection housing; 4. Thread; 5. Mounting hole; 6. Measuring rod; 7. Scale line; 8. Piston; 9. First spring; 10. Pressure rod; 11. Air cylinder; 12. Air inlet; 13. Bend; 14. Fixing block; 15. Guide rod; 16. Second spring; 17. Connecting plate; 18. Block; 19. Sealing gasket. Detailed Implementation

[0027] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0028] Example 1

[0029] Reference Figures 1-4 The testing device of the vacuum coating equipment includes a base 1, a threaded sleeve 2 and a testing housing 3. The base 1 has a mounting hole 5. The threaded sleeve 2 is fixedly installed on the top of the base 1. The outer side of the testing housing 3 has a thread 4, which is threadedly connected to the threaded sleeve 2.

[0030] The detection housing 3 is made of transparent material;

[0031] Also includes:

[0032] Air cylinder 11 is fixedly installed on the outside of the detection housing 3, and an air inlet 12 is provided on the outside of the air cylinder 11;

[0033] An opening and closing mechanism is installed inside the gas cylinder 11 and is used to release the tracer gas inside the gas cylinder 11.

[0034] In this embodiment, the same bent pipe 13 is fixedly installed on the air cylinder 11 and the detection housing 3. A second sliding hole is opened at the top of the air cylinder 11, and a guide rod 15 is slidably installed in the second sliding hole. The guide rod 15 cooperates with the pressure rod 10. When the pressure rod 10 and the guide rod 15 are pressed into contact, the pressure rod 10 drives the guide rod 15 to move vertically. A first spring 9 is sleeved on the outside of the measuring rod 6. The two ends of the first spring 9 are fixedly connected to the top of the piston 8 and the top inner wall of the detection housing 3, respectively. A pressure rod 10 is fixedly installed on the outside of the measuring rod 6. When the piston 8 moves vertically, the measuring rod 6 drives the pressure rod 10 to move vertically. A piston 8 is slidably installed in the detection housing 3. A first sliding hole is opened at the top of the detection housing 3, and a measuring rod 6 is slidably installed in the first sliding hole. One end of the measuring rod 6 is fixedly connected to the top of the piston 8. A scale line 7 is provided on the outside of the measuring rod 6.

[0035] In this embodiment, a fixing block 14 is fixedly installed on the outer side of the guide rod 15, and a second spring 16 is sleeved on the outer side of the guide rod 15. The two ends of the second spring 16 are fixedly connected to the outer side of the fixing block 14 and the top inner wall of the air cylinder 11, respectively. The opening and closing mechanism includes a connecting plate 17, which is fixedly installed on one end of the guide rod 15. A blocking block 18 is fixedly installed on the top of the connecting plate 17. The blocking block 18 cooperates with the bend pipe 13. When the blocking block 18 is separated from the bend pipe 13, the bend pipe 13 can be vented. A sealing gasket 19 is fixedly installed on the bottom of the detection housing 3. The sealing gasket 19 cooperates with the base 1. The sealing gasket 19 is used to improve the sealing performance of the connection between the detection housing 3 and the threaded sleeve 2.

[0036] The implementation principle of the detection device for the vacuum coating equipment in this embodiment is as follows: During use, the base 1 is connected to the air pressure port of the vacuum coating equipment. When the vacuum coating equipment is working normally, the chamber maintains a high vacuum. The piston 8 moves vertically downward under negative pressure, and the piston 8 drives the measuring rod 6 to move vertically downward. The scale line 7 on the measuring rod 6 can intuitively and reliably display the vacuum pressure state inside the vacuum coating equipment chamber. At the same time, the measuring rod 6 drives the pressure rod 10 to move vertically downward. When the pressure rod 10 moves vertically downward to a certain position, the pressure rod 10 squeezes the guide rod 15 and moves it vertically downward. The guide rod 15 overcomes... The elastic force of the second spring 16 pushes the connecting plate 17 and the plug 18 downward, causing the plug 18 to disengage from the interface of the bend 13. At this time, the tracer gas (such as helium) stored in the gas cylinder 11 will enter the detection housing 3 through the bend 13. Since the chamber is under negative pressure, if there is a leak, the tracer gas will flow back into the equipment through the leak point. The operator can immediately determine whether the equipment is leaking and immediately use the corresponding leak detector (such as a helium mass spectrometer leak detector) to scan the outside of the equipment to track the escape point of the tracer gas, thereby quickly and accurately locating the leak source and improving the leak detection efficiency and success rate.

[0037] Example 2

[0038] The difference between this embodiment and Embodiment 1 is that the gas cylinder 11 is replaced with a replaceable capsule type, which allows for the convenient use of different tracer gases (such as helium and hydrogen) to adapt to different leak detectors.

[0039] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. A testing device for a vacuum coating equipment, comprising a base (1), a threaded sleeve (2), and a testing housing (3), characterized in that: The base (1) has a mounting hole (5), and the threaded sleeve (2) is fixedly installed on the top of the base (1). The outer side of the detection housing (3) has a thread (4), and the thread (4) is threadedly connected to the threaded sleeve (2); it also includes: Air cylinder (11) is fixedly installed on the outside of the detection housing (3), and an air inlet (12) is provided on the outside of the air cylinder (11). An opening and closing mechanism is installed inside the gas cylinder (11) and is used to release the tracer gas inside the gas cylinder (11).

2. The detection device for the vacuum coating equipment according to claim 1, characterized in that: A piston (8) is slidably installed inside the detection housing (3). A first sliding hole is provided on the top of the detection housing (3). A measuring rod (6) is slidably installed inside the first sliding hole. One end of the measuring rod (6) is fixedly connected to the top of the piston (8). A scale line (7) is provided on the outside of the measuring rod (6).

3. The detection device for the vacuum coating equipment according to claim 2, characterized in that: The measuring rod (6) is fitted with a first spring (9) on its outer side. The two ends of the first spring (9) are fixedly connected to the top of the piston (8) and the top inner wall of the detection housing (3), respectively. A pressure rod (10) is fixedly installed on the outer side of the measuring rod (6).

4. The detection device for the vacuum coating equipment according to claim 3, characterized in that: The air cylinder (11) and the detection housing (3) are fixedly installed with the same bent pipe (13). The top of the air cylinder (11) is provided with a second sliding hole, and a guide rod (15) is slidably installed in the second sliding hole. The guide rod (15) cooperates with the pressure rod (10).

5. The detection device for the vacuum coating equipment according to claim 4, characterized in that: The opening and closing mechanism includes a connecting plate (17), which is fixedly installed at one end of the guide rod (15). A blocking block (18) is fixedly installed on the top of the connecting plate (17), and the blocking block (18) cooperates with the bend (13).

6. The detection device for the vacuum coating equipment according to claim 5, characterized in that: A fixing block (14) is fixedly installed on the outside of the guide rod (15), and a second spring (16) is sleeved on the outside of the guide rod (15). The two ends of the second spring (16) are fixedly connected to the outside of the fixing block (14) and the top inner wall of the air cylinder (11), respectively.

7. The detection device for the vacuum coating equipment according to claim 6, characterized in that: A sealing gasket (19) is fixedly installed at the bottom of the detection housing (3), and the sealing gasket (19) cooperates with the base (1).

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